JPH0334058U - - Google Patents
Info
- Publication number
- JPH0334058U JPH0334058U JP9370189U JP9370189U JPH0334058U JP H0334058 U JPH0334058 U JP H0334058U JP 9370189 U JP9370189 U JP 9370189U JP 9370189 U JP9370189 U JP 9370189U JP H0334058 U JPH0334058 U JP H0334058U
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- anode
- ion plating
- arc ion
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007733 ion plating Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
- 230000005288 electromagnetic effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案のアークイオンプレーテイング
装置の電極構造の第１実施例の平面図、第２図は
その側面図、第３図はその第２実施例の平面図、
第４図はその第３実施例の平面図、第５図は従来
技術のアークイオンプレーテイング装置の１代表
例の断面配置図、第６図はその電極構造の縦断側
面図、第７図は従来技術のアークイオンプレーテ
イング装置の他の代表例の縦断側面図、第８図は
従来技術の電極構造における電磁気作用を模型的
に示す側面視図、第９図はその正面視図である。
１……カソード、２，２Ａ……アノード、３…
…電気接続部、４……真空チヤンバー壁、ｘ……
中心軸線、ａ……真空チヤンバー、ｂ……アーク
電源、ｃ……カソード、ｄ……アノード、ｅ……
火花供給装置、ｆ……基材、ｇ……接続端子部、
ｈ……方向矢印、ｉ……磁界。
FIG. 1 is a plan view of the first embodiment of the electrode structure of the arc ion plating apparatus of the present invention, FIG. 2 is a side view thereof, and FIG. 3 is a plan view of the second embodiment.
FIG. 4 is a plan view of the third embodiment, FIG. 5 is a cross-sectional layout diagram of one typical example of the prior art arc ion plating apparatus, FIG. 6 is a longitudinal cross-sectional side view of the electrode structure, and FIG. FIG. 8 is a side view schematically showing the electromagnetic effect in the electrode structure of the prior art, and FIG. 9 is a front view thereof. 1...Cathode, 2,2A...Anode, 3...
...electrical connections, 4...vacuum chamber wall, x...
Central axis, a... vacuum chamber, b... arc power supply, c... cathode, d... anode, e...
Spark supply device, f...base material, g...connection terminal section,
h...direction arrow, i...magnetic field.
Claims (1)
つのカソードに対してアノード面形が平面形また
は単純曲面形の互い均等な形状に形成された２以
上のアノードをカソードの中心軸線に関して対称
的に配置するとともに、アノードへの電流供給手
段がアノード面の中央部付近で接続されかつこの
電気接続がカソード中心からみて対称的になるよ
う配置されていることを特徴とするアークイオン
プレーテイング装置の電極構造。 In the arc ion plating device, 1
Two or more anodes each having an anode surface shape of a planar or simple curved surface are arranged symmetrically with respect to the central axis of the cathode, and a means for supplying current to the anode is connected to the anode surface. An electrode structure for an arc ion plating apparatus, characterized in that the electrical connections are connected near the center of the cathode and arranged symmetrically with respect to the center of the cathode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9370189U JPH0619565Y2 (en) | 1989-08-08 | 1989-08-08 | Electrode structure of arc ion plating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9370189U JPH0619565Y2 (en) | 1989-08-08 | 1989-08-08 | Electrode structure of arc ion plating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0334058U true JPH0334058U (en) | 1991-04-03 |
| JPH0619565Y2 JPH0619565Y2 (en) | 1994-05-25 |
Family
ID=31643069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9370189U Expired - Lifetime JPH0619565Y2 (en) | 1989-08-08 | 1989-08-08 | Electrode structure of arc ion plating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0619565Y2 (en) |
-
1989
- 1989-08-08 JP JP9370189U patent/JPH0619565Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0619565Y2 (en) | 1994-05-25 |