JPH0333U - - Google Patents
Info
- Publication number
- JPH0333U JPH0333U JP5795489U JP5795489U JPH0333U JP H0333 U JPH0333 U JP H0333U JP 5795489 U JP5795489 U JP 5795489U JP 5795489 U JP5795489 U JP 5795489U JP H0333 U JPH0333 U JP H0333U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- chamber
- electrodes
- semiconductor
- concentrically
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000005530 etching Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5795489U JPH0333U (en18) | 1989-05-18 | 1989-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5795489U JPH0333U (en18) | 1989-05-18 | 1989-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0333U true JPH0333U (en18) | 1991-01-07 |
Family
ID=31583132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5795489U Pending JPH0333U (en18) | 1989-05-18 | 1989-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0333U (en18) |
-
1989
- 1989-05-18 JP JP5795489U patent/JPH0333U/ja active Pending