JPH0333651A - Automatic inspection apparatus - Google Patents

Abstract

PURPOSE:To make inspection efficient and stable by automating the inspection of the heat transfer pipe of a condenser by correcting the positional shift of a probe and aligning the axial core of the probe with that of the heat transfer pipe to send the probe into the heat transfer pipe. CONSTITUTION:A probe 9 for inspecting a flaw is held by a probe gun 10 while the probe gun 10 is held by a probe inserting apparatus 11. The apparatus 11 holds the probe gun 10 so as to make said gun 10 freely movable in the radius direction but not to move the same in the axial direction by a pin 12. This mechanism 24 is made movable in a tube plate surface direction by a linear bearing 14, a guide 15 and a cylinder 16. Further, the apparatus 11 is mounted to a movable apparatus 18 by an arm 17 and the apparatus 18 is mounted to a tube plate 21 in parallel to the surface thereof through a guide 19 and clamps 20. The positional shift of the probe 9 is corrected by moving the mechanism 24 by the cylinder 16 and the axial core of the probe is aligned with that of a heat transfer pipe to be inspected to send the probe 9 into the heat transfer pipe 6 to be inspected. Further, compressed air is sent into the probe gun 10 and the probe 9 is allowed to advance through the heat transfer pipe 6 to perform inspection.

Description

[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention relates to heat transfer in a heat exchanger having a large number of heat transfer tubes, such as a turbine main condenser of a nuclear power plant or a thermal power plant. The present invention relates to an automatic inspection device used for automatic inspection of scratches occurring on the inner and outer surfaces of tubes.

(Prior art) In general, during periodic inspections to confirm the integrity of the heat transfer tubes of turbine main condensers operating in nuclear power plants and thermal power plants, cooling tubes containing thousands of water are inspected. Each piece is subjected to inspections such as eddy current testing. This work is monotonous work in a poor environment with high humidity and bad odor, and requires a lot of manpower and work time. Regarding this work, a semi-automated inspection device is proposed in Japanese Patent Application Laid-Open No. 62-106364.

In addition, for the narrow tube inspection of steam generators of pressurized water nuclear power plants,
As seen in Publication No. 1, an automatic inspection device has been proposed in which a heat exchanger tube inspection probe is mounted on a part of a linear movement mechanism or a turning movement mechanism, and the mounted flaw detection inspection probe is positioned on the heat exchanger tube to be inspected. ing.

(Problem to be Solved by the Invention) However, such an automatic inspection device has problems such as backlash in the fixing device fixed to the tube sheet, backlash and deflection in structures such as guides, backlash in moving mechanisms such as movable devices, etc. Due to the influence of misalignment during machining of the opening of the heat exchanger tube provided in the tube sheet, a positional shift occurs between the positioned probe and the heat exchanger tube to be inspected, and the probe cannot be inserted properly into the heat exchanger tube. A problem is occurring. As a countermeasure for these problems, an idea as seen in Japanese Utility Model Application Publication No. 56-1143 has been devised. As shown in Fig. 14, a fixing pin 1 with a tapered tip is inserted into a heat exchanger tube 2, and the reaction force generated when the pin is inserted moves an alignment shaft 3 through rollers 4 in the front, back, left, and right directions. Then, the arm 5 protruding laterally is attached to the centering shaft 3, and the heat exchanger tube 2 into which the fixing pin 1 is inserted is opposed to the heat exchanger tube 6 which is spaced apart by a certain distance. This is about a probe self-aligning guide device 8 that positions the probe 7 at a certain position. However, if such a device is used to install a probe in an automatic inspection device, the problem of increasing the size and weight of the device arises, and the process of inserting the fixing pin 1 into the heat transfer tube is required, making it difficult to install in thermal power plants or Heat exchangers having thousands of heat transfer tubes, such as condensers used in nuclear power plants, have the drawback of requiring a huge amount of work time. The present invention has been made in view of the above circumstances, and provides a probe insertion device which can easily correct the positional deviation between the inspection probe and the heat exchanger tube to be inspected, and which is small in size and lightweight, and which also makes it possible to shorten the working time. The purpose is to provide automatic inspection equipment.

[Structure of the Invention] (Means for Solving the Problems) As shown in FIG. The probe gun 10 is held by a probe insertion device 11. The probe insertion device 11 holds the probe gun 10 so as to be movable in the radial direction, and at the same time inserts the pin 12 and the guide 13.
This holds the probe gun 10 so that it does not move in the axial direction, and also restrains the probe gun 10 from rotating about each axis in the axial direction and the direction perpendicular to the axis. Then, such a mechanism 24 is connected to a linear bearing 14. Guide 15. A cylinder 16 allows movement in the direction of the tube plate surface.

Further, the probe insertion device 11 is attached to a movable device 18 by an arm 17, and the movable device 18 is connected to a guide 19. It is attached parallel to the surface of the tube sheet 21 via a clamp 20.

(Function) In the present invention, the following two steps are required to insert the probe into the tube plate.
I am trying to take two steps.

Stepped: The process of correcting the misalignment of the probe and aligning the axis of the probe with the axis of the heat transfer tube.

Step 2...Process of sending the probe into the heat transfer tube.

First, the movable device 18 moves the guide 19'', which is installed parallel to the tube plate 21, by a predetermined amount of movement by the clamp 20, and positions the probe insertion device 11 with respect to the heat exchanger tube 6 to be inspected.

Here, a misalignment (lateral displacement and inclination) occurs between the axes of the probe 9 located at the center of the probe insertion device 11 and the heat exchanger tube 6 to be inspected. Here, when compressed air is supplied to the cylinder 6 provided in the probe insertion device 11 and the probe 9 is pressed against the tube plate 21, the tapered portion at the tip of the probe 9 is brought into contact with the end of the opening of the heat exchanger tube 6 to be inspected. The probe 9 moves toward the axial center of the heat exchanger tube 6 to be inspected due to the wedge effect of the tapered portion. That is, the positional deviation Δy between the tip of the probe 9 and the heat exchanger tube 6 to be inspected in FIG. 1 is absorbed by the expansion and contraction of the spring 22 when the probe 9 is pushed into the tube plate crest.

Distance y between the probe gun 10 and the holding plate 23 shown in FIG.
l and y2 become (yl-Δy) and (y2+Δy) in FIG. 2 after the tip of the probe 9 is inserted.

In this way, when the alignment of the probe 9 is completed, compressed air is supplied into the probe gun 10, the probe gun 10 and the probe 9 act as a cylinder and a piston, respectively, and the probe 9 is placed inside the heat exchanger tube 6 to be inspected. being sent. After the probe 9 is sent out from inside the probe gun 10, the sealing material (
To prevent leakage of compressed air between the tube plate 2 (not shown) and the probe gun 10, the probe gun 1
0 will continue to be pressed against the tube plate 21.

(Example) An embodiment of the present invention will be described below with reference to the drawings.

FIGS. 3 and 4 show configuration diagrams of the automatic inspection apparatus of the same embodiment. In the figure, 21 indicates a tube plate that vertically partitions the inside of the condenser into a heat exchange chamber 51 and a water chamber 52. A plurality of heat exchanger tubes 2 extending inside a heat exchange chamber 51 are fixed to the tube plate 21 so as to be open, so that seawater within a water chamber 52 flows into the heat exchanger tubes 2 . Further, on the tube plate 21 of the water distribution chamber 52, an automatic inspection device, generally designated by the symbol M, is fixed at a predetermined distance. As shown in FIG. 4, this automatic inspection device M is formed into a substantially cross shape and is roughly divided into a lifting unit MV extending vertically along the tube sheet 21 and a working unit extending horizontally along the tube sheet 21. It is composed of MH.

The lifting unit MV of the automatic inspection device M is constructed by fixing an upper base plate 54 and a lower base plate 55 extending horizontally to both ends of a column 53 extending vertically along the tube plate 21. On the 21 side, two guide rails 56 are provided between the base plates 54 and 55 at a predetermined distance apart from and parallel to the support column 53, forming a frame-shaped guide as a whole. The guide rail 56 is provided with an elevating table 57 as a movable device that moves up and down to face the tube plate 21, and this elevating table 57 is connected to a ball screw installed between the guide rails 56 along the guide rail (
(not shown). Thus, the elevating table 57 is driven by a device including a servo motor, an encoder, etc. provided on the upper surface of the upper base plate 54. Further, on the side edges of the upper base plate 54 and the lower base plate 55, there are two upper slide base plates 59 and a lower slide base plate 60, respectively, which extend toward the tube plate 21.
These slide base plates 59 are provided one by one.

Reference numeral 60 is formed to be slidable and rigid with respect to the base plates 54 and 55 using linear cross roller bearings (not shown) or the like. Fixing devices 63 each include an air cylinder 61 and a clamp mechanism 62 connected to the air cylinder 61 and extending toward the tube plate 21 at the ends of the slide base plates 59 and 60 on the tube plate 21 side.
is provided. This fixing device 63 inserts the claws (not shown) of the clamp mechanism 62 into the heat exchanger tube 2 that opens in the tube plate 21, pulls the air cylinder 61 with air pressure, expands the claws, and then opens the tip of the clamp mechanism 62. The elevating unit l'Mv has four fixing devices 6.
3, it is fixed on the tube sheet 21 and its position on the tube sheet 21 is determined. Further, each of the fixing devices 63 can be slid vertically and horizontally, and the distance between the fixing devices 63 can be adjusted according to the distance between the heat transfer tubes 2 into which the claw portions are inserted. Further, in consideration of the safety and stability of the automatic inspection device M during operation, the lower base plate 55 is provided with support legs 64 that extend and contract in the vertical direction and prevent expansion and contraction after touching the floor. is provided facing downward.

On the other hand, the work unit M of the automatic inspection device M. A running rail 65 is provided on the side surface of the lifting platform 57 on the tube plate 21 side, and extends horizontally along the tube plate 21. This traveling rail 65 is composed of a channel (not shown) having a substantially C-shaped cross section through which a spline (not shown) serving as a guide is inserted, and a drive rack (not shown) is provided on the lower surface of the channel in the longitudinal direction. ) is provided. Furthermore, two workbenches 66 are suspended on the traveling rail 65 and engage with channels of the traveling rail, and the workbenches 66 are connected to a drive device 67 comprising a servo motor, an encoder, a speed reducer, a pinion gear, etc. The engagement between the pinion gear (not shown) and the drive rack enables movement in the left-right direction in FIG. In addition, on the side surface of each workbench 66 on the tube plate 21 side,
A swash arm 69 is provided on a workbench 66 and rotates while maintaining a predetermined distance from a device consisting of a servo motor, an encoder, a speed reducer 0, etc. Therefore, the ski arm 69 is connected to the running rail 65.
and a work platform 66 are connected to the lifting platform 57 through means. skasi arm 69
A probe insertion device 11 is provided at the tip of the heat exchanger tube 6 for inserting a probe 9 into the heat exchanger tube 6 for inspection.

Furthermore, the two workbenches 66 are arranged such that the inspection range of each workbench is on the left and right sides, for example, as shown in FIG. 4, so that they do not interfere with each other during the inspection work.

Next, FIG. 5 shows details of the probe insertion device 11. A probe 9 having a tapered tip is inserted into a cylindrical probe gun 10 having an inner diameter slightly larger than its diameter. This probe gun 10 is sealed with a plate 71 having a hole through which a cable 70 passes through at its rear end, making it almost airtight, and is also provided with a pipe 72 for supplying compressed air. A seal rubber 731 is attached to the tip of the gun 10. The cable 70 is
After passing through the cable, it is connected to a cable winding device (not shown) via a pulley 74. The probe gun 10 is attached to the floating frame 75 via the floating mechanism 24.

FIG. 6 is a diagram of the probe insertion device 11 viewed from the tube plate side. The above-mentioned floating mechanism 24 will be explained using this figure. The probe gun 10 is fixed to an upper fixing plate 76. The upper fixing 76 is connected to the lower fixing plate 78 via a shaft 77. The shaft 77 is attached to the floating block 79 so as to be slidable in the vertical direction via an oilless pusher (not shown). On the other hand, the floating blocks 7 are in a state in which springs 22a and 22b are sandwiched between an upper fixed plate 76 and a lower fixed plate 78, respectively. That is, the seven floating blocks and the nine probes IO are held in a floating state in the downward direction.

In addition, the floating block 79 pushes (not shown) between the floating frame 75 and the shirt l-80.
It is slidably attached via the 2 . Further, the springs 22a and 22b are attached to the left and right sides of the floating block, so that the springs 22a and 22b are attached so as to be movable in the left-right direction inside the floating frame 75. That is, the above mechanism allows the probe gun 10 to
is held with respect to the floating frame 75 so as to be movable in the horizontal and vertical directions.

Returning to FIG. 5, the floating frame 75 is fixed to the bearing frame 81, and the love frame 81 is fixed to the linear bearings 82a, 82b.
The cylinder 16 is attached to the cylinder frame 83 via the cylinder frame 83, and the cylinder 16 is provided inside the cylinder frame 83. The rod 84 of the cylinder 16 is fixed to the bearing frame 8l via a bar 85, and as the rod 84 of the cylinder 16 expands and contracts, the bearing frame 81 moves to the linear bearing 8l.
2a, 82bJ: can be moved back and forth.

Next, the operation of the embodiment configured as described below will be explained.

Installed at the tip of the swash arm 69 of the automatic inspection device M 3 The cut probe insertion device 11 moves the lifting unit Mv, the work unit MH, and the swash arm 6 to the heat exchanger tube 6 to be inspected.
When the cylinder 9 is positioned by moving a predetermined amount of movement, compressed air is supplied to the cylinder 16,
By contracting the lot 84 into the cylinder 16,
Probe gun 10 is pressed against tube plate 21. At this time, since the automatic inspection device M is installed horizontally in advance with respect to the tube plate 21, the axis tilt between the center axis of the probe gun 10 and the center axis of the cooling pipe 6 to be inspected is extremely small. However, since the device can be disassembled and reassembled, and some rigidity is sacrificed for the purpose of measurement, there is a certain position between the center axis of the probe gun 10 and the center axis of the cooling pipe 6 to be inspected. A misalignment will occur. This lateral shift is absorbed by the floating mechanism 24 described above. That is, the tip of the probe 9 is tapered, and this taper touches the corner of the opening of the heat exchanger tube 6 to be inspected, and due to the wedge effect of the tapered part, part of the force of the pressing by the cylinder 16 is absorbed. , acts in the direction of eliminating the positional deviation between the central axis of the probe gun 10 and the central axis of the cold fallopian tube 6 to be examined. At this time, since the probe 9 is restrained in the direction perpendicular to the axis by the probe gun 10, the probe 9 moves at the same time, that is, the probe 9 is inserted into the heat exchanger tube 6 to be inspected into the tapered part at its tip and the cylinder connected to the tapered part. It will be in a state where up to the end is inserted.

When the alignment of the probe 9 is completed in this way, compressed air is supplied into the probe gun 10, the probe gun 10 takes on the role of a cylinder, and the probe 9 slides inside the probe gun 10 as a piston. It is fed into the heat exchanger tube 6 for inspection. At this time, the shield rubber 73 provided at the tip of the probe gun 10 allows
Compressed air leakage is prevented.

The probe 9 is sent through the heat exchanger tube 6 to be inspected by compressed air while dragging the cable 70, and when it reaches the tube outlet, it is detected by the absolute value method and differential method output signals of the eddy current flaw detection device (not shown). This is detected and the supply of compressed air is stopped. At this time, the length of the cable 70 fed into the heat exchanger tube 6 to be tested is also measured at the same time, and used together with the output signal from the eddy current flaw detector described above as a signal for stopping the supply of compressed air. Thereafter, the cable 70 is pulled back by a drive motor (not shown), so that the probe 9 is connected to the heat exchanger tube 6 to be inspected.
The inside was pulled back, and the probe gun 1 came out of the tube.
Returned to within 0.

At this time, the cable 70 and the connecting portion of the probe 9 are tapered similarly to the tip side of the probe 9. This is because after the probe 9 is sent into the heat exchanger tube 6 to be inspected,
This is provided as a countermeasure in case the probe gun 10 is displaced, and the probe 9 can be returned into the probe gun 10 using the same mechanism as the taper at the tip of the probe 9.

When the probe 9 returns to the probe gun 10, it is decelerated and stopped by the following procedure.

(1) The length of the cable 70 that is pulled back is subtracted from the length that the cable 70 is sent in to detect that the probe 9 is close to the pipe entrance, that is, the probe gun 10, and deceleration is applied.

(2) The fact that the probe 9 is drawn into the probe gun 10 from the inside of the test heat exchanger tube 6 is detected by the output signals of the absolute value method and the differential method in the eddy current flaw detection device, and further deceleration is applied.

(3) The probe 9 hits the plate 71 provided on the probe gun 10 and stops upon detecting that the cable 70 is no longer pulled back.

For this reason, the probe gun 10 must be identified as different from the heat exchanger tube by the eddy current flaw detection device being used. Therefore, it is necessary to pay attention to the structure such as steel and plate thickness, and to take measures such as using stainless steel for the probe gun when the heat exchanger tube is made of copper alloy.

In this way, after completing the eddy current inspection of the heat exchanger tube 6 to be inspected, compressed air is supplied to the cylinder 16, and the rod 84 is supplied with compressed air.
As the probe gun 10 expands, the tube plate 21
be separated from The probe gun 10 is then returned to its original position 7 by the floating mechanism.

Therefore, by doing this, (1) By easily eliminating the positional deviation between the probe 9 and the heat exchanger tube when inserting the probe 9, the rigidity can be improved in order to improve the positioning accuracy, which would lead to an increase in the size and weight of the device. This makes it possible to provide a small and lightweight device.

(2) Since the probe gun 10 having a certain degree of airtightness is used to feed the probe 9 into the heat exchanger tube, it is possible to adopt the simplest method of feeding the probe using compressed air, making the device smaller and simpler. can be achieved.

(3) Probe 9 is inserted into probe gun 1 from inside the heat transfer tube.
Since the eddy current flaw detection device can detect that the probe 9 has returned to zero, the pullback speed of the probe 9 is reduced in two steps. The deceleration control for preventing damage to the connection parts can be finely tuned, and a great effect can be expected on improving the efficiency of inspection and preventing damage to the equipment.

Next, other embodiments of the present invention will be described.

When installing the automatic inspection device M in parallel to the tube plate 21, a very small installation error may occur, and furthermore, due to assembly errors or looseness within the automatic inspection device M, the probe 9 described above may In addition to a lateral positional shift between the central axis and the heat exchanger tube 6 to be inspected, that is, a lateral shift, an axis tilt may occur.

Some degree of axial tilt is absorbed by the difference between the diameter of the probe 9 and the diameter between the heat exchanger tubes 6 to be tested. The side of the probe 9 hits the inlet of the tube, and the tip of the probe hits the side wall of the heat transfer tube, making it impossible to feed the probe even if compressed air is supplied to the probe gun 10 for feeding into the heat transfer tube. It may disappear.

In the embodiment shown in FIG. 7, if the SCARA arm 95 is flexible, when the probe 9 is inserted into the test heat exchanger tube 6 by the cylinder 16, the side surface of the probe 9 is at the corner of the opening of the heat exchanger tube. When the probe 9 is hit, the SCARA arm 95 is deflected by the reaction force generated thereby, and it can be expected that the probe 9 will be in a position where it can be easily inserted into the heat exchanger tube 6 to be tested. However, even this method had its limitations.

FIG. 8 shows a flexible SCARA arm 95 and a probe gun 9, which was created to solve this problem.
6. It is characterized by having a guide plate 97 at the tip. The guide plate 97 has a rigid structure and is provided parallel to the SCARA arm 95.

Next, its operation will be explained using FIGS. 9 and 10. FIG. 9 shows an example in which the automatic inspection device M is not attached parallel to the tube plate 21, and the clamp 20 is not properly inserted into the heat exchanger tube 2.

This is what was shown. When compressed air is supplied to the cylinder 16 in this state, the rod 84 contracts and the probe gun 96 is pressed against the tube plate 21.

In this case, the tapered portion of the tip of the probe 9 is first inserted into the heat exchanger tube 6 to be inspected, and then the lower end A portion of the guide plate 970 hits the tube plate 21. Furthermore, when the guide plate 97 is pressed against the tube plate 21 by the cylinder 16, A
A moment about the point is generated on the guide plate 97. Since the guide plate 97 is made rigid, the SCARA arm 95 is bent by the moment, and eventually the guide plate 97 comes into contact with the tube plate 21 over its entire surface. FIG. 10 shows this state.

As shown in FIG. 10, lateral displacement is absorbed by the floating mechanism 24, and axial tilt is absorbed by the SCARA arm 95, so that the probe 9 can be smoothly inserted and sent into the heat exchanger tube 6 for inspection. becomes possible.

In this embodiment, the guide plate 97 has been described as being integrated with the probe gun 96, but as long as it is a part that moves back and forth by the cylinder 16, the function is the same even if it is integrated with the floating mechanism 24, for example.

Next, another different embodiment of the present invention will be described.

As a method to eliminate the influence of shaft tilt, the floating a-lateral shown in Fig. 11 can be considered. In this device, a yoke 98 and a pin 99 are attached between the floating mechanism 24 and the probe gun 10 described in FIG. In this case, the positional relationship between the probe gun 10 and the yoke 98 is shown in FIG. By manufacturing the yoke 98 so that the pin 99 is located at a position perpendicular to the axial direction at the center of the axial length of the probe gun 10, the probe gun 10 can freely rotate around the pin 99. The spring 22C is attached between the probe gun 10 and the yoke 98 at symmetrical positions about the pin 99 in the axial direction of the probe gun 10. Due to this spring 22C, when no external force is applied to the probe gun 10, the probe gun assumes a position perpendicular to the SCARA arm 69.

In this way, as shown in Figure 13, the probe gun 1
When compressed air is supplied to the cylinder 16 with both the heat exchanger tube 6 and the heat exchanger tube 6 to be inspected laterally displaced and axially tilted, the rod 8
4 contracts, and the probe gun 10 is pressed against the tube plate 21. In this case, first, the tapered portion of the tip of the probe 9 is pushed into the heat exchanger tube 6 to be inspected. At this time, the probe gun 10 rotates about the pin 99 in a direction that increases the axis tilt due to the reaction force generated by the contact between the tapered part of the tip of the probe 9 and the corner of the opening of the heat exchanger tube. Then, the B part of the seal rubber 73 hits the tube plate 21, and a moment is applied to the probe gun 10 in a direction to prevent the shaft from tilting. At this time, since the probe 9 is inserted into the heat exchanger tube 6 to be inspected, the probe gun 10 rotates around the seal rubber 73 portion, so force is transmitted to the nine pins, and the floating mechanism 24 operates.
Horizontal misalignment is eliminated. In this way, the probe guns 10 of the series are pressed against the tube plate 21 by the operation.
Both lateral displacement and axial tilt of the heat exchanger tube 6 to be inspected can be eliminated.

It should be noted that the present invention is not limited to the above-mentioned embodiments, and can be implemented with appropriate modifications without changing the gist.

For example, a cable 70 for transmitting eddy current flaw detection signals is attached to the probe 9, and as shown in FIG.
The cape 3 is connected to a winding device (not shown) via a reel or the like.

This cable is fed and rewound at a speed of about 1m per second, and the route of the cable changes as the SCARA arm rotates, so it is important to protect the cable and ensure safety for workers. Measures are needed to ensure this. For this purpose, the cable may be housed within the guide hose. In this way, the cable will be fed into the guide hose and run for rewinding.
No contact with other equipment.

[Effects of the Invention] As is clear from the following explanation, according to the present invention, it is possible to provide a new automatic inspection device that automates the inspection of heat transfer tubes of a condenser, which was conventionally performed manually. , it is possible to free workers from a poor working environment and to inspect heat exchanger tubes efficiently and stably.

[Brief explanation of drawings]

1 and 2 are block diagrams for explaining the basic structure of an automatic inspection device according to the present invention, FIGS. 34 and 4 are block diagrams showing one embodiment of the present invention, and FIG.
6 and 6 are configuration diagrams for explaining the probe insertion device used in the same embodiment, FIG. 7 is a rough surface diagram of the above embodiment, and FIG. 9 and 10 are block diagrams for explaining the same embodiment, and FIGS. 11 to 13 are block diagrams showing different embodiments of the present invention. FIG. 14 is a configuration diagram showing an example of a conventional automatic inspection device. 2... Heat exchanger tube, 6... Heat exchanger tube to be inspected, 9... Probe, lO... Probe gun, 11... Probe insertion device, 12... Pin, 13... Guide, 15・・・
・Guide, 16... Schilling, 17... Arm, 1
8... Movable device, 1... Guide, 20... Clamp, 21... Tube plate, 22... Spring, 23...
...Retaining plate, 24...Idling mechanism.

Claims (1)

[Claims] A movable means provided movably along the surface on which the tubes to be inspected of a device having a plurality of tubes to be inspected are disposed, a probe insertion device provided on the movable means, and a radius A cylindrical probe gun is held so as to be freely movable in the direction and linearly movable in the direction of the surface on which the tube to be inspected is disposed, and a cylindrical probe gun is provided in the hollow part of the probe gun so as to be movable in the axial direction and at the tip thereof. An automatic inspection device comprising: an inspection probe having a tapered portion; and probe feeding means for feeding the probe in the probe gun into a corresponding tube to be inspected.