JPH0333355U - - Google Patents

Info

Publication number
JPH0333355U
JPH0333355U JP9400689U JP9400689U JPH0333355U JP H0333355 U JPH0333355 U JP H0333355U JP 9400689 U JP9400689 U JP 9400689U JP 9400689 U JP9400689 U JP 9400689U JP H0333355 U JPH0333355 U JP H0333355U
Authority
JP
Japan
Prior art keywords
coated
light
inspection device
thin film
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9400689U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0726692Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989094006U priority Critical patent/JPH0726692Y2/ja
Publication of JPH0333355U publication Critical patent/JPH0333355U/ja
Application granted granted Critical
Publication of JPH0726692Y2 publication Critical patent/JPH0726692Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1989094006U 1989-08-09 1989-08-09 薄膜状塗布剤の検査装置 Expired - Lifetime JPH0726692Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989094006U JPH0726692Y2 (ja) 1989-08-09 1989-08-09 薄膜状塗布剤の検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989094006U JPH0726692Y2 (ja) 1989-08-09 1989-08-09 薄膜状塗布剤の検査装置

Publications (2)

Publication Number Publication Date
JPH0333355U true JPH0333355U (OSRAM) 1991-04-02
JPH0726692Y2 JPH0726692Y2 (ja) 1995-06-14

Family

ID=31643349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989094006U Expired - Lifetime JPH0726692Y2 (ja) 1989-08-09 1989-08-09 薄膜状塗布剤の検査装置

Country Status (1)

Country Link
JP (1) JPH0726692Y2 (OSRAM)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630650A (en) * 1979-08-22 1981-03-27 Hitachi Ltd Automatic chemical analyzer
JPS6162844A (ja) * 1984-09-05 1986-03-31 Sumitomo Bakelite Co Ltd 半導体樹脂封止成形品の外観表面検査方法
JPS61242666A (ja) * 1985-04-18 1986-10-28 Sunstar Giken Kk 薄膜状塗布剤検査装置
JPH01110365U (OSRAM) * 1988-01-19 1989-07-25

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630650A (en) * 1979-08-22 1981-03-27 Hitachi Ltd Automatic chemical analyzer
JPS6162844A (ja) * 1984-09-05 1986-03-31 Sumitomo Bakelite Co Ltd 半導体樹脂封止成形品の外観表面検査方法
JPS61242666A (ja) * 1985-04-18 1986-10-28 Sunstar Giken Kk 薄膜状塗布剤検査装置
JPH01110365U (OSRAM) * 1988-01-19 1989-07-25

Also Published As

Publication number Publication date
JPH0726692Y2 (ja) 1995-06-14

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