JPH0333059Y2 - - Google Patents
Info
- Publication number
- JPH0333059Y2 JPH0333059Y2 JP1985057516U JP5751685U JPH0333059Y2 JP H0333059 Y2 JPH0333059 Y2 JP H0333059Y2 JP 1985057516 U JP1985057516 U JP 1985057516U JP 5751685 U JP5751685 U JP 5751685U JP H0333059 Y2 JPH0333059 Y2 JP H0333059Y2
- Authority
- JP
- Japan
- Prior art keywords
- support
- crucible
- thermocouple
- heater
- molecular beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012212 insulator Substances 0.000 claims description 11
- 239000002994 raw material Substances 0.000 claims 2
- 238000001514 detection method Methods 0.000 description 7
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985057516U JPH0333059Y2 (US20110009641A1-20110113-C00116.png) | 1985-04-19 | 1985-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985057516U JPH0333059Y2 (US20110009641A1-20110113-C00116.png) | 1985-04-19 | 1985-04-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61174740U JPS61174740U (US20110009641A1-20110113-C00116.png) | 1986-10-30 |
| JPH0333059Y2 true JPH0333059Y2 (US20110009641A1-20110113-C00116.png) | 1991-07-12 |
Family
ID=30582120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985057516U Expired JPH0333059Y2 (US20110009641A1-20110113-C00116.png) | 1985-04-19 | 1985-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0333059Y2 (US20110009641A1-20110113-C00116.png) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5725733B2 (US20110009641A1-20110113-C00116.png) * | 1979-02-09 | 1982-05-31 | ||
| JPS5842224A (ja) * | 1981-09-07 | 1983-03-11 | Mitsubishi Electric Corp | 真空蒸着用セル |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5725733U (US20110009641A1-20110113-C00116.png) * | 1980-07-18 | 1982-02-10 |
-
1985
- 1985-04-19 JP JP1985057516U patent/JPH0333059Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5725733B2 (US20110009641A1-20110113-C00116.png) * | 1979-02-09 | 1982-05-31 | ||
| JPS5842224A (ja) * | 1981-09-07 | 1983-03-11 | Mitsubishi Electric Corp | 真空蒸着用セル |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61174740U (US20110009641A1-20110113-C00116.png) | 1986-10-30 |
