JPH0332985U - - Google Patents

Info

Publication number
JPH0332985U
JPH0332985U JP8915389U JP8915389U JPH0332985U JP H0332985 U JPH0332985 U JP H0332985U JP 8915389 U JP8915389 U JP 8915389U JP 8915389 U JP8915389 U JP 8915389U JP H0332985 U JPH0332985 U JP H0332985U
Authority
JP
Japan
Prior art keywords
cleaning
chamber
cleaning liquid
liquid supply
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8915389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8915389U priority Critical patent/JPH0332985U/ja
Publication of JPH0332985U publication Critical patent/JPH0332985U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP8915389U 1989-07-31 1989-07-31 Pending JPH0332985U (US20030220297A1-20031127-C00074.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8915389U JPH0332985U (US20030220297A1-20031127-C00074.png) 1989-07-31 1989-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8915389U JPH0332985U (US20030220297A1-20031127-C00074.png) 1989-07-31 1989-07-31

Publications (1)

Publication Number Publication Date
JPH0332985U true JPH0332985U (US20030220297A1-20031127-C00074.png) 1991-03-29

Family

ID=31638748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8915389U Pending JPH0332985U (US20030220297A1-20031127-C00074.png) 1989-07-31 1989-07-31

Country Status (1)

Country Link
JP (1) JPH0332985U (US20030220297A1-20031127-C00074.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010094639A (ja) * 2008-10-20 2010-04-30 Various Co Ltd 被洗浄物の洗浄方法およびその洗浄装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63110731A (ja) * 1986-10-29 1988-05-16 Nec Kyushu Ltd 半導体基板処理装置
JPS6463086A (en) * 1987-09-02 1989-03-09 Yoshimi Oshitari Ultrasonic cleaner

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63110731A (ja) * 1986-10-29 1988-05-16 Nec Kyushu Ltd 半導体基板処理装置
JPS6463086A (en) * 1987-09-02 1989-03-09 Yoshimi Oshitari Ultrasonic cleaner

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010094639A (ja) * 2008-10-20 2010-04-30 Various Co Ltd 被洗浄物の洗浄方法およびその洗浄装置

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