JPH0332002B2 - - Google Patents
Info
- Publication number
- JPH0332002B2 JPH0332002B2 JP59258828A JP25882884A JPH0332002B2 JP H0332002 B2 JPH0332002 B2 JP H0332002B2 JP 59258828 A JP59258828 A JP 59258828A JP 25882884 A JP25882884 A JP 25882884A JP H0332002 B2 JPH0332002 B2 JP H0332002B2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- polymer film
- roughness
- semi
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B1/00—Measuring instruments characterised by the selection of material therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
【発明の詳細な説明】
<発明の目的>
産業上の利用分野
本発明は表面粗度測定方法に係り、詳しくは、
機械部品、金属製品、半製品に限らず、あらゆる
物体の表面粗度を簡易かつ高能率に測定できる表
面粗度測定方法に係る。[Detailed description of the invention] <Object of the invention> Industrial application field The present invention relates to a method for measuring surface roughness, and in detail,
The present invention relates to a surface roughness measurement method that can easily and efficiently measure the surface roughness of any object, not just mechanical parts, metal products, or semi-finished products.
従来の技術
一般に、ロール、歯車等の機械部品、更に、半
製品等の固体の表面粗度や、粗度プロフイル測定
は、触針式測定器を用い被測定物の測定面を直接
走査して行なつている。この測定方法は被測定物
が大型重量物の場合のように移動できない場合に
は、振動、粉塵など悪条件で測定することにな
り、更に、曲面を有するものや、狭隘部分を有す
るもの等では測定が困難であり、とくに、曲面粗
度の測定には、特殊な治具例えば曲面の曲率に合
つた治具を製作する必要があるなどの欠点があ
る。Conventional technology In general, the surface roughness and roughness profile of mechanical parts such as rolls and gears, as well as solid objects such as semi-finished products, are measured by directly scanning the measurement surface of the object using a stylus-type measuring device. I am doing it. This measurement method requires measurement under adverse conditions such as vibration and dust when the object to be measured cannot be moved, such as when it is a large and heavy object. Measurement is difficult, and in particular, measurement of curved surface roughness has the drawback that it is necessary to manufacture a special jig, for example, a jig that matches the curvature of the curved surface.
発明が解決しようとする問題点
本発明は上記欠点を解決することを目的とし、
具体的には、曲面粗度の測定時には、その曲面の
曲率に合つた測定器を作製する必要がなく、しか
も、大型重量物等であつても、現場できわめて薄
いフイルムに転写し、これを平面に展開して測定
できる表面粗度測定方法を提案する。Problems to be Solved by the Invention The present invention aims to solve the above-mentioned drawbacks,
Specifically, when measuring the roughness of a curved surface, there is no need to create a measuring device that matches the curvature of the curved surface.Moreover, even large and heavy objects can be transferred onto an extremely thin film on-site and then transferred. We propose a surface roughness measurement method that can be expanded and measured on a flat surface.
<発明の構成>
問題点を解決するための手段ならびにその作用
すなわち、本発明方法は、被測定面に、表面が
半溶融状態に処理された高分子フイルムを接触さ
せてこの高分子フイルムに前記被測定面の表面形
状を転写してから、この高分子フイルムの転写面
を触針走査することを特徴とする。<Structure of the Invention> Means for Solving the Problems and Their Effects That is, the method of the present invention involves bringing a polymer film whose surface has been treated to a semi-molten state into contact with a surface to be measured, and applying the above-mentioned effects to the polymer film. The method is characterized in that after the surface shape of the surface to be measured is transferred, the transferred surface of the polymer film is scanned with a stylus.
従つて、本発明方法は、例えば、アセチルセル
ローズフイルム等の高分子フイルムとこのフイル
ムの表面を半溶融状態にするわずかの溶剤とを用
いるだけで、粗度測定用レプリカが作製でき、従
来例の如くレプリカ作製時に液体樹脂が流れるこ
とはなく、簡単にレプリカが作製できる。 Therefore, according to the method of the present invention, a replica for measuring roughness can be prepared by simply using a polymer film such as acetyl cellulose film and a small amount of solvent that makes the surface of the film semi-molten, which is superior to the conventional method. The liquid resin does not flow when making a replica, making it easy to make a replica.
また、高分子フイルム表面の硬化時間は0.5〜
5分の如く短く簡便で能率的安価に測定用レプリ
カが作製できる。 In addition, the curing time of the polymer film surface is 0.5~
A replica for measurement can be produced in a short, simple, efficient and inexpensive manner in as little as 5 minutes.
そこで、この問題点解決のための手段たる構成
ならびにその作用について更に具体的に示すと、
次の通りである。 Therefore, to explain more specifically the configuration and its operation as a means to solve this problem,
It is as follows.
粗度測定用レプリカの作製は樹脂と硬化剤を適
量計り混合した液体樹脂を測定部分に流込んで作
製することもあるが、その際には測定部分を粘土
等で囲う必要があり、その準備に相当の時間がか
かる。この点、本発明法は液体樹脂を用いずに例
えばアセチルセルローズの如き高分子フイルムを
用いる。すなわち、一般に、フイルムはやわらか
いものと考えられ、直接フイルム上を触針して粗
度を測定することはむづかしいと考えられてい
る。しかし、フイルムのうちでも、高分子フイル
ム、とくに、アセチルセルローズ、硬質塩化ビニ
ル、ポリスチロール等はそれ自体が比較的硬く、
これを硬い平面に接着すればむしろ曲面の粗度ま
でも測定できることに着目した。 Replicas for roughness measurements are sometimes made by measuring and mixing appropriate amounts of resin and hardening agent and pouring a liquid resin into the measurement area, but in this case, it is necessary to surround the measurement area with clay, etc., and the preparation is necessary. It takes a considerable amount of time. In this respect, the method of the present invention uses a polymer film such as acetyl cellulose instead of a liquid resin. That is, in general, films are considered to be soft, and it is considered difficult to measure the roughness by directly placing a stylus on the film. However, among films, polymer films, especially acetyl cellulose, hard vinyl chloride, polystyrene, etc., are themselves relatively hard;
We focused on the fact that by gluing this to a hard flat surface, we could even measure the roughness of curved surfaces.
また、これら高分子フイルムは薄くすることに
より平面ばかりでなく曲面の粗度およびプロフイ
ル測定もできる。また、高分子フイルムの表面は
わずかな溶剤を用いれば、容易に半溶融でき、し
かも、この表面の乾燥硬化時間が短く、短時間
(5分以下)で測定できる。その上で、表面を半
溶融状態にしておくと、その高分子フイルムを対
象物に接着する効果があり、高分子フイルムは被
測定面に対して直角方向からはり付けることがで
き、触針測定時には、高分子フイルムをガラス等
の硬い平面に接着すると、カーリング等によつて
高分子フイルムがうねることなく、正確に測定で
きる。 Furthermore, by making these polymer films thin, it is possible to measure the roughness and profile of not only flat surfaces but also curved surfaces. Furthermore, the surface of the polymer film can be easily semi-melted using a small amount of solvent, and the drying and hardening time of this surface is short, allowing measurement to be performed in a short time (5 minutes or less). Then, if the surface is left in a semi-molten state, it has the effect of adhering the polymer film to the target object, and the polymer film can be attached from a direction perpendicular to the surface to be measured, allowing stylus measurement. Sometimes, by adhering a polymer film to a hard flat surface such as glass, accurate measurements can be made without the polymer film becoming undulating due to curling or the like.
以上の通り、本発明法においては、従来例の如
く直接に被測定面の粗度を測定せずに、その表面
粗度は、高分子フイルムによつて再現する。この
高分子フイルムとしてはアセチルセルローズフイ
ルムが最適であるが、これ以外にも適正な硬度を
具え、しかも、薄く、更に、揮発性に優れるもの
であれば何れのフイルムでも良く、例えば、硬質
塩化ビニル、ポリスチロール等が用いることがで
きる。この高分子フイルムはその厚みが被測定面
に適合させて曲げ等がし易ければとくに限定する
必要がないが、表面粗度の再現性、操作の容易性
から0.010mm〜0.200mmが望ましい。 As described above, in the method of the present invention, the roughness of the surface to be measured is not directly measured as in the conventional example, but the surface roughness is reproduced using a polymer film. Acetyl cellulose film is most suitable as this polymer film, but any other film may be used as long as it has appropriate hardness, is thin, and has excellent volatility; for example, hard vinyl chloride film may be used. , polystyrene, etc. can be used. The thickness of this polymer film does not need to be particularly limited as long as it is adapted to the surface to be measured and can be easily bent, but it is preferably 0.010 mm to 0.200 mm from the viewpoint of reproducibility of surface roughness and ease of operation.
そこで、このような高分子フイルムを用いて実
際に表面粗度を再現するには、まず、被測定面を
脱脂洗浄し、一方において、高分子フイルムの表
面は半溶融状態に処理する。この処理は高分子フ
イルムをこれに適した溶剤中に表面が半溶融状態
になるまでひたすことで行なわれ、溶剤は高分子
フイルムの表面が溶解できるものであると、いか
なる有機溶剤であつても用いることができる。例
えば、アセチルセルローズフイルムのときは、通
常、酢酸メチル、酢酸エチル、酢酸ブチル等の酢
酸エステルや、ジメチルホルムアミドなどが用い
られ、とくに、被測定面温度が40℃以下のときは
酢酸メチル、ロール表面等の如く被測定面温度が
40℃以上のときは、硬質塩化ビニルのときは例え
ばジメチルホルム、ポリスチロールのときはジメ
チルホルムアミド、ベンゼン、トルエン、酢酸エ
ステルが用いられる。 Therefore, in order to actually reproduce the surface roughness using such a polymer film, the surface to be measured is first degreased and cleaned, while the surface of the polymer film is treated to a semi-molten state. This treatment is carried out by dipping the polymer film in a suitable solvent until the surface becomes semi-molten.The solvent may be any organic solvent that can dissolve the surface of the polymer film. Can be used. For example, in the case of acetyl cellulose film, acetate esters such as methyl acetate, ethyl acetate, butyl acetate, dimethyl formamide, etc. are usually used, and in particular, when the surface temperature to be measured is 40°C or less, methyl acetate, roll surface If the temperature of the surface to be measured is
When the temperature is 40°C or higher, for example, dimethylform is used for hard vinyl chloride, and dimethylformamide, benzene, toluene, or acetate is used for polystyrene.
次に、表面を半溶融状に処理した高分子フイル
ムを脱脂洗浄した被測定面にはり付ける。 Next, a polymer film whose surface has been treated to have a semi-molten state is attached to the degreased and cleaned surface to be measured.
この状態で、溶剤が完全に揮発したのち、通
常、0.5〜5分おき、被測定面から高分子フイル
ムを剥離する。なお、高分子フイルムに付着物が
ある場合は、その付着物がなくなるまで高分子フ
イルムのはり付け、剥離等の処理をくり返して行
なう。 In this state, after the solvent has completely volatilized, the polymer film is peeled off from the surface to be measured, usually every 0.5 to 5 minutes. In addition, if there is any adhesion on the polymer film, the processes such as gluing and peeling of the polymer film are repeated until the adhesion is removed.
続いて、剥離した高分子フイルムの表面粗度転
写面を表とし、裏面を例えば両面接着テープ等に
よつて平滑なガラス板にはり付け、この試料を粗
度計で触針走査することにより測定し、この際、
1段レプリカである故に、得られる粗度プロフイ
ルの凹凸を逆転して粗度を測定する。 Next, the surface roughness transfer surface of the peeled polymer film is placed on the front side, the back side is attached to a smooth glass plate using double-sided adhesive tape, etc., and the sample is measured by scanning with a stylus using a roughness meter. However, at this time,
Since it is a one-stage replica, the roughness is measured by reversing the unevenness of the obtained roughness profile.
実施例 次に、実施例について説明する。Example Next, examples will be described.
実施例 1
粗さの異なつた試料を10個用意して、各試料に
ついて同じ被測定面を従来例の如く、直接粗度計
で測定した場合と本発明法により測定した場合と
を対比して示すと、第1図に示す通りの結果が得
られた(なお、第1図で実線が回帰直線、点線が
完全に一致した場合を示す。)。なお、本発明法で
は、フイルムとしてアセチルセルローズフイルム
(厚さ0.034mm)を用い、これを酢酸メチル中に2
〜3秒浸漬して表面を予め溶融させ、これを被測
定面に2分間はり付けて剥離してレプリカを作製
し、これを従来例と同じ粗度計でその粗度プロフ
イルを逆転して測定したものである。Example 1 We prepared 10 samples with different roughness, and compared the case where the same surface to be measured was directly measured with a roughness meter as in the conventional example, and the case where it was measured using the method of the present invention. The results shown in FIG. 1 were obtained (in FIG. 1, the solid line represents the regression line, and the dotted line represents the case where they completely matched). In addition, in the method of the present invention, an acetyl cellulose film (thickness 0.034 mm) is used as the film, and this is diluted in methyl acetate.
The surface is immersed for ~3 seconds to pre-melt it, then pasted on the surface to be measured for 2 minutes and peeled off to create a replica, which is then measured with the same roughness meter as the conventional example by reversing its roughness profile. This is what I did.
第1図において縦軸で示される本発明法による
粗度Raと横軸で示される従来例による粗度Ra′を
比較すると、両者がよく一致かつ整合しているこ
とがわかる。 Comparing the roughness Ra according to the present invention method shown on the vertical axis in FIG. 1 and the roughness Ra' according to the conventional method shown on the horizontal axis, it can be seen that the two agree and match well.
実施例 2
680φ×2000の熱間圧延仕上前後ワークロール
の粗度プロフイルの圧延進行に伴う変化を本発明
法によつて測定したところ、第2図に示す通りの
結果が得られた。第2図において縦の0、1、
5、10、25、40、71、100は圧延進行度合を示す
本数であり、横の符号イはロール軸方向の表面粗
度、ロはロール周方向の表面粗度を示す。なお、
この場合も、実施例1に示すところと同様に測定
したが、使用したアセチルセルローズフイルムの
厚みは0.08mmであり、酢酸メチルへの浸漬時間は
2〜3秒であり、更に、第2図で目盛W1は5μm、
W2は5μmである。Example 2 Changes in the roughness profile of a 680φ x 2000 work roll before and after finishing hot rolling with the progress of rolling were measured by the method of the present invention, and the results shown in FIG. 2 were obtained. In Figure 2, vertical 0, 1,
5, 10, 25, 40, 71, and 100 are numbers indicating the degree of rolling progress, the horizontal symbol A indicates the surface roughness in the roll axis direction, and B indicates the surface roughness in the roll circumferential direction. In addition,
In this case as well, measurements were made in the same manner as shown in Example 1, but the thickness of the acetyl cellulose film used was 0.08 mm, the immersion time in methyl acetate was 2 to 3 seconds, and Scale W 1 is 5μm,
W2 is 5 μm.
第2図から明らかな如く、従来例ではロール周
方向の表面粗度が得られないが、本発明法による
と、転写したレプリカからロール周方向の表面粗
度も得られる。 As is clear from FIG. 2, in the conventional example, surface roughness in the circumferential direction of the roll cannot be obtained, but according to the method of the present invention, surface roughness in the circumferential direction of the roll can also be obtained from the transferred replica.
<発明の効果>
以上詳しく説明した通り、本発明法は、被測定
面に表面が半溶融された高分子フイルムをはり付
けて被測定面の表面性状を高分子フイルム上に転
写し、この高分子フイルム転写面を触針して表面
粗度を測定する方法である。<Effects of the Invention> As explained in detail above, the method of the present invention involves attaching a polymer film whose surface is semi-molten to a surface to be measured, transferring the surface texture of the surface to be measured onto the polymer film, and transferring the surface texture of the surface to be measured onto the polymer film. This method measures the surface roughness by using a stylus on the molecular film transfer surface.
従つて、従来例の如く、被測定面の表面粗度を
直接触針して測定するものでなく、しかも、フイ
ルム転写によるレプリカの作製がきわめて簡便で
かつ短時間であるため、きわめて苛酷な条件下で
も測定でき、わずかの隙間しかなく直接測定が困
難なところでも粗度測定ができる。高分子フイル
ムとしてはきわめて薄いものを用いてレプリカが
作製できるので、例えば、曲面の如く被測定面が
いかなる形状であつても、これは転写でき、とく
に、測定時には平面に展開できるため、通常、用
いられている平面用の粗度計で曲面粗度を測定で
きる。 Therefore, unlike conventional methods, the surface roughness of the surface to be measured is not measured directly by using a stylus, and since it is extremely simple and quick to create a replica by film transfer, it can be used under extremely harsh conditions. It is possible to measure roughness even in places where there is only a small gap and it is difficult to measure directly. Since a replica can be made using an extremely thin polymer film, it is possible to transfer any shape of the surface to be measured, such as a curved surface.In particular, since it can be developed into a flat surface during measurement, Curved surface roughness can be measured with the flat surface roughness meter used.
また、高分子フイルムとしては安価なアセチル
セルローズフイルム等で十分であり、溶剤の必要
量も少なく、このため、非常に安価に粗度測定用
レプリカを作製できる。更に、表面を半溶融する
ために用いた溶剤は高分子フイルムを被測定面に
接着する働きをし、液体樹脂のように流れること
はないため、被測定面が鉛直方向に指向していて
も、被測定面の角度を問わず測定できる。 In addition, an inexpensive acetyl cellulose film or the like is sufficient as the polymer film, and the amount of solvent required is small, so a replica for roughness measurement can be produced at a very low cost. Furthermore, the solvent used to semi-melt the surface acts to bond the polymer film to the surface to be measured, and does not flow like liquid resin, so even if the surface to be measured is oriented vertically. , measurement can be performed regardless of the angle of the surface to be measured.
第1図は従来例により表面粗度を直接測定した
場合と、本発明法によつて表面粗度を測定した場
合とを比較して示すグラフ、第2図は熱間圧延仕
上げ前段ワークロールの粗さプロフイルの圧延進
行にともなつての変化を本発明法によつて測定し
たグラフである。
符号W1,W2……縦横の目盛。
Figure 1 is a graph comparing the surface roughness measured directly by the conventional method and the method of the present invention. 3 is a graph showing changes in roughness profile as rolling progresses, measured by the method of the present invention. Symbols W 1 , W 2 ... Vertical and horizontal scales.
Claims (1)
ポリスチロールの高分子フイルムを、その表面が
半溶融状態になるよう、処理してから、この半溶
融表面を被測定面に接触させ、その後、半溶融表
面を硬化させ高分子フイルムを被測定面から剥離
して被測定面の表面形状を高分子フイルム上に転
写し、この転写面を触針走査することを特徴とす
る表面粗度測定方法。1. Treat a polymer film of cellulose acetate, hard vinyl chloride, or polystyrene so that its surface becomes semi-molten, then bring this semi-molten surface into contact with the surface to be measured, and then harden the semi-molten surface. A surface roughness measuring method characterized by peeling off a polymer film from a surface to be measured, transferring the surface shape of the surface to be measured onto the polymer film, and scanning the transferred surface with a stylus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25882884A JPS61137005A (en) | 1984-12-06 | 1984-12-06 | Method for measuring relative roughness of surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25882884A JPS61137005A (en) | 1984-12-06 | 1984-12-06 | Method for measuring relative roughness of surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61137005A JPS61137005A (en) | 1986-06-24 |
| JPH0332002B2 true JPH0332002B2 (en) | 1991-05-09 |
Family
ID=17325591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25882884A Granted JPS61137005A (en) | 1984-12-06 | 1984-12-06 | Method for measuring relative roughness of surface |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61137005A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009174950A (en) * | 2008-01-23 | 2009-08-06 | Chugoku Electric Power Co Inc:The | Crack-measuring apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5442634A (en) * | 1977-09-09 | 1979-04-04 | Hitachi Ltd | Protective relay inspection circuit |
-
1984
- 1984-12-06 JP JP25882884A patent/JPS61137005A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61137005A (en) | 1986-06-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPWO2003010529A1 (en) | Enzyme electrode and method for producing the same | |
| NO893864D0 (en) | SURFACE COVER FOR FLUORED POLYMERS, ITS MANUFACTURING AND USE. | |
| JPH0332002B2 (en) | ||
| US4043187A (en) | Method of measuring surface roughness | |
| AU1602097A (en) | Method and device for assessing painted surfaces | |
| SU1265471A1 (en) | Method of determining plastic deformations in workpieces | |
| Mittal et al. | Vapor deposited silanes and other coupling agents | |
| JPS5349955A (en) | Spin coating method | |
| JPS5229792A (en) | Method of determining adhesion of films | |
| CN115096750A (en) | Method for accurately measuring coating gram weight of thin film product | |
| Roget | The Use of Acoustic Emission to Measure the Ductility of Hardened Surface Layers | |
| SU389444A1 (en) | METHOD FOR DETERMINING THE STRENGTH OF THE COUPLING OF NON-HARD COATINGS | |
| JPS58196439A (en) | Measurement of thin film strength | |
| JPS5939808B2 (en) | Magnetic memory and its manufacturing method | |
| JPS589708B2 (en) | Method for lining compound containing glass flakes and corrosion-resistant resin | |
| JPS52126431A (en) | Coating composition and method of coating the same | |
| JPS63143978A (en) | Film forming method | |
| CN205202502U (en) | Dry -type is polyester film base for medical film | |
| Unvala | Adhesion studies on aqueous film-coated tablets. | |
| JPS52101243A (en) | Process for forming coated film | |
| JPH05180752A (en) | Evaluation method of paint film | |
| Babadzhanov et al. | Substrate Surface Effects in Reference Standards for Coating Thickness Gauges | |
| SU990707A1 (en) | Method for detecting structure of material | |
| JPS5965953A (en) | Manufacture of optical disk recording medium | |
| JPH0351358U (en) |