JPH0331146U - - Google Patents

Info

Publication number
JPH0331146U
JPH0331146U JP1989092324U JP9232489U JPH0331146U JP H0331146 U JPH0331146 U JP H0331146U JP 1989092324 U JP1989092324 U JP 1989092324U JP 9232489 U JP9232489 U JP 9232489U JP H0331146 U JPH0331146 U JP H0331146U
Authority
JP
Japan
Prior art keywords
traveling rack
substrate
conveyance path
support means
transmission means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1989092324U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0724337Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989092324U priority Critical patent/JPH0724337Y2/ja
Publication of JPH0331146U publication Critical patent/JPH0331146U/ja
Application granted granted Critical
Publication of JPH0724337Y2 publication Critical patent/JPH0724337Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Reciprocating Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)
JP1989092324U 1989-08-04 1989-08-04 基板搬送装置 Expired - Lifetime JPH0724337Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989092324U JPH0724337Y2 (ja) 1989-08-04 1989-08-04 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989092324U JPH0724337Y2 (ja) 1989-08-04 1989-08-04 基板搬送装置

Publications (2)

Publication Number Publication Date
JPH0331146U true JPH0331146U (cg-RX-API-DMAC7.html) 1991-03-26
JPH0724337Y2 JPH0724337Y2 (ja) 1995-06-05

Family

ID=31641761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989092324U Expired - Lifetime JPH0724337Y2 (ja) 1989-08-04 1989-08-04 基板搬送装置

Country Status (1)

Country Link
JP (1) JPH0724337Y2 (cg-RX-API-DMAC7.html)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5944576U (ja) * 1982-09-10 1984-03-24 日産自動車株式会社 コンベア装置
JPS6232051U (cg-RX-API-DMAC7.html) * 1985-08-10 1987-02-25
JPS6293112A (ja) * 1985-10-18 1987-04-28 Kazuo Kimata 搬送装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5944576U (ja) * 1982-09-10 1984-03-24 日産自動車株式会社 コンベア装置
JPS6232051U (cg-RX-API-DMAC7.html) * 1985-08-10 1987-02-25
JPS6293112A (ja) * 1985-10-18 1987-04-28 Kazuo Kimata 搬送装置

Also Published As

Publication number Publication date
JPH0724337Y2 (ja) 1995-06-05

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