JPH0330834U - - Google Patents

Info

Publication number
JPH0330834U
JPH0330834U JP9176489U JP9176489U JPH0330834U JP H0330834 U JPH0330834 U JP H0330834U JP 9176489 U JP9176489 U JP 9176489U JP 9176489 U JP9176489 U JP 9176489U JP H0330834 U JPH0330834 U JP H0330834U
Authority
JP
Japan
Prior art keywords
substrate
recess
sensing element
element layer
temperature sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9176489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9176489U priority Critical patent/JPH0330834U/ja
Publication of JPH0330834U publication Critical patent/JPH0330834U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
JP9176489U 1989-08-03 1989-08-03 Pending JPH0330834U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9176489U JPH0330834U (de) 1989-08-03 1989-08-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9176489U JPH0330834U (de) 1989-08-03 1989-08-03

Publications (1)

Publication Number Publication Date
JPH0330834U true JPH0330834U (de) 1991-03-26

Family

ID=31641230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9176489U Pending JPH0330834U (de) 1989-08-03 1989-08-03

Country Status (1)

Country Link
JP (1) JPH0330834U (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4769956B2 (ja) * 2005-01-13 2011-09-07 ラス アイティーエス コーポレーション ズボン

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56106159A (en) * 1980-01-28 1981-08-24 Hitachi Ltd Production of sensor for detecting flow speed and flow rate
JPS56114732A (en) * 1980-02-15 1981-09-09 Hitachi Ltd Temperature measuring instrument for sucked air of internal combustion engine
JPS5851238B2 (ja) * 1976-10-28 1983-11-15 トヨタ自動車株式会社 デジタルカ−クロツク
JPS63263702A (ja) * 1987-04-22 1988-10-31 松下電器産業株式会社 白金薄膜温度センサの製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5851238B2 (ja) * 1976-10-28 1983-11-15 トヨタ自動車株式会社 デジタルカ−クロツク
JPS56106159A (en) * 1980-01-28 1981-08-24 Hitachi Ltd Production of sensor for detecting flow speed and flow rate
JPS56114732A (en) * 1980-02-15 1981-09-09 Hitachi Ltd Temperature measuring instrument for sucked air of internal combustion engine
JPS63263702A (ja) * 1987-04-22 1988-10-31 松下電器産業株式会社 白金薄膜温度センサの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4769956B2 (ja) * 2005-01-13 2011-09-07 ラス アイティーエス コーポレーション ズボン

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