JPH0330696U - - Google Patents

Info

Publication number
JPH0330696U
JPH0330696U JP9198289U JP9198289U JPH0330696U JP H0330696 U JPH0330696 U JP H0330696U JP 9198289 U JP9198289 U JP 9198289U JP 9198289 U JP9198289 U JP 9198289U JP H0330696 U JPH0330696 U JP H0330696U
Authority
JP
Japan
Prior art keywords
partition member
base plate
peripheral surface
attached
shielding container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9198289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9198289U priority Critical patent/JPH0330696U/ja
Publication of JPH0330696U publication Critical patent/JPH0330696U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9198289U 1989-08-04 1989-08-04 Pending JPH0330696U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9198289U JPH0330696U (enrdf_load_stackoverflow) 1989-08-04 1989-08-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9198289U JPH0330696U (enrdf_load_stackoverflow) 1989-08-04 1989-08-04

Publications (1)

Publication Number Publication Date
JPH0330696U true JPH0330696U (enrdf_load_stackoverflow) 1991-03-26

Family

ID=31641435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9198289U Pending JPH0330696U (enrdf_load_stackoverflow) 1989-08-04 1989-08-04

Country Status (1)

Country Link
JP (1) JPH0330696U (enrdf_load_stackoverflow)

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