JPH0330426U - - Google Patents
Info
- Publication number
- JPH0330426U JPH0330426U JP8995089U JP8995089U JPH0330426U JP H0330426 U JPH0330426 U JP H0330426U JP 8995089 U JP8995089 U JP 8995089U JP 8995089 U JP8995089 U JP 8995089U JP H0330426 U JPH0330426 U JP H0330426U
- Authority
- JP
- Japan
- Prior art keywords
- treatment apparatus
- heat treatment
- refrigerant
- combustion section
- vertical heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000002485 combustion reaction Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- 238000002791 soaking Methods 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 2
- 239000012495 reaction gas Substances 0.000 claims description 2
- 239000003507 refrigerant Substances 0.000 claims 3
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Spray-Type Burners (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8995089U JPH0330426U (nl) | 1989-07-31 | 1989-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8995089U JPH0330426U (nl) | 1989-07-31 | 1989-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0330426U true JPH0330426U (nl) | 1991-03-26 |
Family
ID=31639499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8995089U Pending JPH0330426U (nl) | 1989-07-31 | 1989-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0330426U (nl) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6191933A (ja) * | 1984-10-12 | 1986-05-10 | Nec Corp | 半導体装置の製造装置 |
| JPS63166218A (ja) * | 1986-12-27 | 1988-07-09 | Deisuko Haitetsuku:Kk | 半導体熱処理装置のウエ−ハ冷却方法 |
-
1989
- 1989-07-31 JP JP8995089U patent/JPH0330426U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6191933A (ja) * | 1984-10-12 | 1986-05-10 | Nec Corp | 半導体装置の製造装置 |
| JPS63166218A (ja) * | 1986-12-27 | 1988-07-09 | Deisuko Haitetsuku:Kk | 半導体熱処理装置のウエ−ハ冷却方法 |