JPH0329756B2 - - Google Patents
Info
- Publication number
- JPH0329756B2 JPH0329756B2 JP56034483A JP3448381A JPH0329756B2 JP H0329756 B2 JPH0329756 B2 JP H0329756B2 JP 56034483 A JP56034483 A JP 56034483A JP 3448381 A JP3448381 A JP 3448381A JP H0329756 B2 JPH0329756 B2 JP H0329756B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- carbon
- growth
- die
- growth zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12907580A | 1980-03-10 | 1980-03-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57111299A JPS57111299A (en) | 1982-07-10 |
JPH0329756B2 true JPH0329756B2 (enrdf_load_stackoverflow) | 1991-04-25 |
Family
ID=22438347
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3448381A Granted JPS57111299A (en) | 1980-03-10 | 1981-03-10 | Method of growing silicon crystal body |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS57111299A (enrdf_load_stackoverflow) |
IN (1) | IN154501B (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2152942A1 (en) * | 2007-06-14 | 2010-02-17 | Evergreen Solar, Inc. | Removable thermal control for ribbon crystal pulling furnaces |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4158038A (en) * | 1977-01-24 | 1979-06-12 | Mobil Tyco Solar Energy Corporation | Method and apparatus for reducing residual stresses in crystals |
JPS5815477B2 (ja) * | 1977-08-31 | 1983-03-25 | 大阪チタニウム製造株式会社 | 半導体シリコンの引上法 |
-
1980
- 1980-05-22 IN IN379/DEL/80A patent/IN154501B/en unknown
-
1981
- 1981-03-10 JP JP3448381A patent/JPS57111299A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
IN154501B (enrdf_load_stackoverflow) | 1984-11-03 |
JPS57111299A (en) | 1982-07-10 |
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