JPH0329696Y2 - - Google Patents
Info
- Publication number
- JPH0329696Y2 JPH0329696Y2 JP1984065060U JP6506084U JPH0329696Y2 JP H0329696 Y2 JPH0329696 Y2 JP H0329696Y2 JP 1984065060 U JP1984065060 U JP 1984065060U JP 6506084 U JP6506084 U JP 6506084U JP H0329696 Y2 JPH0329696 Y2 JP H0329696Y2
- Authority
- JP
- Japan
- Prior art keywords
- stylus
- roughness
- standard
- calibration
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003746 surface roughness Effects 0.000 claims description 21
- 241001422033 Thestylus Species 0.000 description 18
- 235000019592 roughness Nutrition 0.000 description 12
- 238000005259 measurement Methods 0.000 description 6
- 238000005323 electroforming Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
【考案の詳細な説明】
［技術分野］
本考案は触針式表面粗さ測定機の校正に用いる
校正用粗さ標準器に関する。[Detailed Description of the Invention] [Technical Field] The present invention relates to a calibration roughness standard used for calibrating a stylus type surface roughness measuring device.
［背景技術］
触針を被測定物の表面に沿つて当接移動させた
ときの触針の上下動の大きさを電気的に拡大して
被測定物の表面粗さを測定する、触針式表面粗さ
測定機が従来より知られている。第６図にはこの
ような触針式表面粗さ測定機の一例が示されてい
る。図中、測定機本体１には可動軸２を介して支
持体３が回転方向および上下方向調整可能に取付
けられ、この支持体３はケース体で覆われ、ケー
ス体４内の支持体３の下方側には棒状の揺動体５
が十字ばね６を介して揺動自在に取付けられ、揺
動体５の先端側には揺動アーム７を介して触針８
が鉛直下方側に向つて突設されるとともに揺動体
５の基端側には前記支持体３に取付けられた板ば
ね９が当接され、この板ばね９により前記触針８
は下方側に常時付勢されている。[Background technology] A stylus that measures the surface roughness of the object to be measured by electrically magnifying the vertical movement of the stylus when the stylus is moved along the surface of the object to be measured. BACKGROUND ART Type surface roughness measuring machines have been known for some time. FIG. 6 shows an example of such a stylus type surface roughness measuring device. In the figure, a support 3 is attached to the measuring instrument main body 1 via a movable shaft 2 so as to be adjustable in the rotational direction and vertical direction. A rod-shaped rocking body 5 is provided on the lower side.
is swingably attached via a cross spring 6, and a stylus 8 is attached to the tip side of the swing body 5 via a swing arm 7.
is provided to protrude vertically downward, and a plate spring 9 attached to the support body 3 is brought into contact with the base end side of the rocking body 5, and the plate spring 9 causes the stylus 8 to
is always biased downward.
揺動体５の上端面の十字ばね６の長手方向両側
には誘電体１０，１１が設けられ、一方、これら
誘電体１０，１１に対向する位置の支持体３の下
端面には検出コイル１２，１３が夫々備えられ、
前記触針８が被測定物の表面に当接しながら移動
した際の触針８の上下移動量が前記誘導体１０，
１１および検出コイル１２，１３により電気信号
に変換され、これら電気信号はリード線１４，１
５を介して前記測定機本体１内の図示しない電気
的処理機能に入力され、更に例えば図示しないＸ
−Ｙレコーダ等により測定結果が表示されるよう
になつている。また、前記揺動アーム７はケース
体４の先端側に突設された保護ケース１６内に遊
挿通されるとともに、保護ケース１６先端の開口
部からは触針８が突出可能とされ、更に必要によ
り、例えば丸軸材の表面に軸方向に沿つて触針８
を当接移動させるとき等のために開口部１７の両
側部に設けられたガイド１８により触針８を案内
することができるようになつている。 Dielectrics 10 and 11 are provided on both longitudinal sides of the cross spring 6 on the upper end surface of the oscillator 5, while a detection coil 12 and 13 are provided respectively,
The amount of vertical movement of the stylus 8 when the stylus 8 moves while contacting the surface of the object to be measured is the amount of vertical movement of the stylus 10,
11 and detection coils 12, 13, these electrical signals are converted into electrical signals by lead wires 14, 1.
5 to an electrical processing function (not shown) in the measuring device main body 1, and further, for example,
-Measurement results are displayed using a Y recorder or the like. Further, the swing arm 7 is loosely inserted into a protective case 16 protruding from the distal end of the case body 4, and the stylus 8 can protrude from the opening at the distal end of the protective case 16. For example, the stylus 8 is inserted along the axial direction on the surface of the round shaft material.
The stylus 8 can be guided by guides 18 provided on both sides of the opening 17 when the stylus 8 is brought into contact with the stylus 8.
ところで、このような触針式表面粗さ測定機で
は、被測定物の表面粗さを揺動アーム７の傾斜角
度として誘電体１０，１１および検出コイル１
２，１３にて電気信号に変換させ、この電気信号
を測定機本体１にて処理しているところから、触
針８の上下動（すなわち表面粗さ）と電気信号と
対比整合作業、すなわち校正作業が高精度な測定
を確保するうえで重要となる。この校正作業に
は、校正用粗さ標準器が用いられる、この標準器
の粗さ既知の表面を仮測定して測定機本体１側で
出力信号を調整するというものである。 By the way, in such a stylus type surface roughness measuring machine, the surface roughness of the object to be measured is determined by the inclination angle of the swinging arm 7 and the dielectrics 10 and 11 and the detection coil 1.
Steps 2 and 13 convert it into an electrical signal, and this electrical signal is processed in the measuring device main body 1.The vertical movement of the stylus 8 (i.e. surface roughness) and the electrical signal are compared and matched, that is, calibration is performed. This work is important to ensure highly accurate measurements. In this calibration work, a roughness standard for calibration is used, a surface of which the roughness is known is temporarily measured, and the output signal is adjusted on the measuring instrument main body 1 side.
第７図にはこのような目的で用いられる校正用
粗さ標準器の一従来例が示されているが、従来の
校正用粗さ標準器は同図に示されるように平板状
の基体１９の表面に電鋳法等で製作された粗さ既
知の標準片２０であつた。そのため、前記表面粗
さ測定機のようにガイド１８が触針８の両側に備
えられている構造では、検査すべき形状によつて
は、ガイド１８が触針８の標準片２０への当接を
不可能にしてしまうこととなりやすく、校正作業
が極めて因難であつた。そこで、被測定物の表面
の形状毎に施盤加工等によつて基体１９の形状を
仕上げることが考えられるが、これでは、被測定
物の表面は形状も表面粗さも共に種々のものがあ
り、それに応じた標準器をその度毎に製作してい
たのでは極めて測定作業の能率が低く、その結
果、触針式表面粗さ測定機の機能が制限されてし
まう事態を紹来させてしまう等、精度的にも経済
的にも不利である。このような事態は、被測定物
と同一形状で所定の表面粗さとされた基準体を用
意してこの基準体と被測定物との比較により表面
粗さの合否判定を行なう、いわゆる比較測定の場
合における前記基準体の作成についても同様であ
る。 FIG. 7 shows a conventional example of a calibration roughness standard used for such a purpose.The conventional calibration roughness standard has a flat base 19 as shown in the figure. A standard piece 20 of known roughness was manufactured by electroforming or the like on the surface of the sample. Therefore, in a structure in which the guides 18 are provided on both sides of the stylus 8 as in the surface roughness measuring machine, the guides 18 may cause the stylus 8 to come into contact with the standard piece 20 depending on the shape to be inspected. This made the calibration process extremely difficult. Therefore, it is conceivable to finish the shape of the base 19 by lathe machining or the like depending on the shape of the surface of the object to be measured, but in this case, the surface of the object to be measured has various shapes and surface roughnesses, If standard equipment was manufactured each time, the efficiency of the measurement work would be extremely low, and as a result, the functionality of the stylus type surface roughness measuring machine would be limited. , which is disadvantageous in terms of accuracy and economy. This situation can be solved by so-called comparative measurement, in which a reference body with the same shape as the object to be measured and a predetermined surface roughness is prepared, and the pass/fail judgment of the surface roughness is made by comparing this reference object with the object to be measured. The same applies to the creation of the reference body in the case of the above.
［考案の目的］
本考案の目的は、種々の形状の被測定物に適用
でき、また、絶対測定にも比較測定にも適用でき
る校正用粗さ標準器を提供することにある。[Purpose of the invention] The purpose of the invention is to provide a roughness standard for calibration that can be applied to objects of various shapes and can be applied to both absolute and comparative measurements.
［考案の構成］
そのため本考案は予め所定の表面粗さに仕上ら
れかつ前記測定機の触針が当接される薄膜状の標
準片を用意し、この標準片を、被測定対象の形状
に相応した形状とされた柱状の基体の表面に沿つ
て貼設することにより前記目的を達成しようとす
るものである。ここで、前記柱状の基体とは円柱
または角柱の基体であることを意味する。[Structure of the device] Therefore, in the present invention, a thin film-like standard piece that has been finished to a predetermined surface roughness and that the stylus of the measuring device comes into contact with is prepared, and this standard piece is shaped into the shape of the object to be measured. The above objective is achieved by pasting along the surface of a columnar base having a corresponding shape. Here, the columnar base means a cylindrical or prismatic base.
［実施例の説明］
以下、本考案の実施例を図面に基づいて説明す
る。[Description of Embodiments] Hereinafter, embodiments of the present invention will be described based on the drawings.
第１図は本考案に係る校正用粗さ標準器の一実
施例が示され、この図において、基体２１の表面
には標準片２２が全周にわたつて貼設されてい
る。基体２１は第２図にも示されるように所定の
長さの丸軸材状に形成され、一方、標準片２２は
第３図に示されるように例えば厚さ0.04〜0.05mm
程度の薄膜状に形成され、基体２１の表面全体に
接着剤等の化学的手段によりあるいはビス等の機
械的手段により貼設されるようになつている。こ
の標準片２２は電鋳法等により所定の表面粗さに
予め仕上られており、この仕上面に触針式表面粗
さ測定機の触針が当接されるようになつている。 FIG. 1 shows an embodiment of the roughness standard for calibration according to the present invention, and in this figure, a standard piece 22 is attached to the surface of a base 21 over the entire circumference. The base body 21 is formed in the shape of a round shaft with a predetermined length as shown in FIG. 2, while the standard piece 22 has a thickness of 0.04 to 0.05 mm, for example, as shown in FIG.
It is formed in the form of a thin film, and is attached to the entire surface of the base 21 by chemical means such as adhesive or mechanical means such as screws. This standard piece 22 has been previously finished to a predetermined surface roughness by electroforming or the like, and a stylus of a stylus type surface roughness measuring device is brought into contact with this finished surface.
このように互いに別途製造された基体２１の表
面に標準片２２が貼設された後、基体２１はその
両端にて図示しない取付軸により例えばコ字型形
状に形成された取付台２３に取付られている。取
付台２３の一端側には摘み２４が取付られ、この
摘み２４を操作することにより基体２１が取付台
２３に対して姿勢調整され得るようになつてい
る。 After the standard piece 22 is attached to the surface of the base body 21 which is manufactured separately from each other in this way, the base body 21 is attached at both ends to a mounting base 23 formed in a U-shape, for example, by a mounting shaft (not shown). ing. A knob 24 is attached to one end of the mount 23, and by operating the knob 24, the attitude of the base body 21 relative to the mount 23 can be adjusted.
第４図には本実施例の使用状態が示されてい
る。この図に示されるように、触針８の両側にガ
イド１８が設けられていても、このガイド１８を
標準片２２に当接させて案内させた状態で基体２
１の軸方向に沿つて基体２１（標準片２２）に対
して触針８を移動させて必要な校正を行なうこと
ができる。 FIG. 4 shows the state of use of this embodiment. As shown in this figure, even if guides 18 are provided on both sides of the stylus 8, the guides 18 are brought into contact with the standard piece 22 and guided by the base plate 22.
Necessary calibration can be performed by moving the stylus 8 with respect to the base body 21 (standard piece 22) along the axial direction of the base 21 (standard piece 22).
また、このような実施例によれば、標準片２２
が薄膜状であるため、被測定物に相応する形状に
あらかじめ形成した基体２１の表面形状どうりの
形状とすることが容易である。すなわち、基体２
１の表面自体を所定の表面粗さに仕上げることは
因難であるが、本実施例のように別途製作した標
準片２２を用意して、これを基体２１の表面に貼
設することは容易であるため、所定の表面粗さを
有する種々の形状の校正用粗さ標準器を容易に製
造することができる。 Further, according to such an embodiment, the standard piece 22
Since it is in the form of a thin film, it is easy to make it into a shape that matches the surface shape of the base body 21, which has been previously formed into a shape suitable for the object to be measured. That is, the base 2
Although it is difficult to finish the surface of the substrate 1 itself to a predetermined surface roughness, it is easy to prepare a separately manufactured standard piece 22 and attach it to the surface of the base 21 as in this embodiment. Therefore, calibration roughness standards of various shapes having predetermined surface roughness can be easily manufactured.
また、標準片２２を電鋳法により製作すること
とすれば、その厚さをμｍオーダで容易に仕上げ
ることができる。また、基体２１の形状が異なる
毎に電鋳法の原版を新たに作成する必要がなく、
更には、従来の平板状の標準片２０の場合に供し
た原版を共通して用いることもできる。 Moreover, if the standard piece 22 is manufactured by electroforming, its thickness can be easily finished on the μm order. In addition, there is no need to create a new original plate for electroforming each time the shape of the base body 21 is different.
Furthermore, the original plate used in the case of the conventional flat standard piece 20 can also be used in common.
また、基体２１が例えば丸軸材である場合には
その径のみを管理して作れば良いから、同時に表
面粗さまでも高精度に加工しなければならない場
合と比較して製作が容易であるだけでなく極めて
歩溜りが良い。 Furthermore, if the base body 21 is made of a round shaft material, for example, it is only necessary to control its diameter, which makes manufacturing easier compared to cases where the surface roughness also has to be processed with high precision. However, the yield is extremely good.
更に、摘み２４を操作して取付台２３に対して
基体２１を所定角度回転させることができるた
め、校正のため標準片２２の一部が摩耗したとき
には他の摩耗していない部分を用いて校正するこ
とができる。 Furthermore, since the base body 21 can be rotated by a predetermined angle with respect to the mounting base 23 by operating the knob 24, when a part of the standard piece 22 is worn out for calibration, another unworn part can be used for calibration. can do.
なお、実施に当り、基体２１は丸軸材状ものに
限らず、例えば第５図に示される前記以外の実施
例の基体３１のように多角柱状に形成され、この
多角柱状の表面の一部に標準片３２が貼設されて
いるものであつてもよい。また、第５図に示され
る実施例では基体２１の姿勢変更は特に行なわれ
ないようになつているが、前記第１図に示される
実施例のように、基体３１が姿勢調整可能なもの
であつてもよい。 In addition, in carrying out the implementation, the base body 21 is not limited to the shape of a round shaft material, but may be formed into a polygonal column shape, for example, like the base body 31 of an embodiment other than the above shown in FIG. 5, and a part of the surface of this polygonal column shape The standard piece 32 may be attached to the. Further, in the embodiment shown in FIG. 5, the attitude of the base body 21 is not particularly changed, but as in the embodiment shown in FIG. 1, the attitude of the base body 31 is adjustable. It may be hot.
［考案の効果］
上述のように本考案によれば、種々の形状の被
測定物に適用でき、また、絶対測定にも比較測定
にも適用できる校正用粗さ標準器を提供すること
ができる。[Effects of the invention] As described above, according to the invention, it is possible to provide a roughness standard for calibration that can be applied to objects to be measured of various shapes and can be applied to both absolute and comparative measurements. .
第１図は本考案に係る校正用粗さ標準器の一実
施例の全体構成を示す斜視図、第２図は前記実施
例における基体を示す斜視図、第３図は前記実施
例における標準片を示す斜視図、第４図は前記実
施例の使用状態を示す拡大斜視図、第５図は前記
以外の実施例を示す斜視図、第６図は触針式表面
粗さ測定機の一例を示す断面図、第７図は従来の
校正用粗さ標準器の一例を示す斜視図である。
２１，３１……基体、２２，３２……標準片、
２３……取付台、２４……摘み。
Fig. 1 is a perspective view showing the overall structure of an embodiment of the calibration roughness standard according to the present invention, Fig. 2 is a perspective view showing the base body in the embodiment, and Fig. 3 is a standard piece in the embodiment. FIG. 4 is an enlarged perspective view showing the usage state of the above embodiment, FIG. 5 is a perspective view showing an embodiment other than the above, and FIG. 6 is an example of a stylus type surface roughness measuring machine. The sectional view shown in FIG. 7 is a perspective view showing an example of a conventional roughness standard for calibration. 21, 31... Base body, 22, 32... Standard piece,
23...Mounting stand, 24...Knob.
Claims (1)
用粗さ標準器において、予め所定の表面粗さに
仕上げられ且つ前記測定機の触針が当接される
薄膜状の標準片が、被測定対象の形状に相応し
た形状とされた柱状の基体の表面に沿つて貼設
されていることを特徴とする校正用粗さ標準
器。 (2) 実用新案登録請求の範囲第１項において、前
記基体は取付台に姿勢調整可能に取付けられて
いることを特徴とする校正用粗さ標準器。[Claims for Utility Model Registration] (1) A calibration roughness standard used for calibrating a stylus-type surface roughness measuring device, which is finished to a predetermined surface roughness in advance and whose stylus of the measuring device is A roughness standard for calibration, characterized in that a thin film-like standard piece to be brought into contact is pasted along the surface of a columnar base whose shape corresponds to the shape of the object to be measured. (2) Utility Model Registration The roughness standard for calibration according to claim 1, characterized in that the base body is attached to a mounting base so that its posture can be adjusted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6506084U JPS60176115U (en) | 1984-05-02 | 1984-05-02 | Roughness standard for calibration |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6506084U JPS60176115U (en) | 1984-05-02 | 1984-05-02 | Roughness standard for calibration |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60176115U JPS60176115U (en) | 1985-11-21 |
| JPH0329696Y2 true JPH0329696Y2 (en) | 1991-06-25 |
Family
ID=30596708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6506084U Granted JPS60176115U (en) | 1984-05-02 | 1984-05-02 | Roughness standard for calibration |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60176115U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5118591A (en) * | 1974-08-07 | 1976-02-14 | Sumitomo Metal Ind | YOSHAYOSHITAJIMENNOTEKIHIO TEIRYOTEKINISOKUTEISURUHOHO |
| JPS5910009B2 (en) * | 1974-10-28 | 1984-03-06 | ダンフオス エ− エス | Denki Tekinasu Snap Switch |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5910009U (en) * | 1982-07-13 | 1984-01-21 | 三菱重工業株式会社 | Fire wrinkle evaluation device |
-
1984
- 1984-05-02 JP JP6506084U patent/JPS60176115U/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5118591A (en) * | 1974-08-07 | 1976-02-14 | Sumitomo Metal Ind | YOSHAYOSHITAJIMENNOTEKIHIO TEIRYOTEKINISOKUTEISURUHOHO |
| JPS5910009B2 (en) * | 1974-10-28 | 1984-03-06 | ダンフオス エ− エス | Denki Tekinasu Snap Switch |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60176115U (en) | 1985-11-21 |
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