JPH03293786A - Hollow cathode type metal vapor laser - Google Patents

Abstract

PURPOSE:To maintain substantially strict positional relation between a hollow cathode and electrodes or the like secured to a main glass tube by disposing a resilient means, closely to the opposite ends of the main glass tube, in resilient contact with the opposite ends of the hollow cathode thereby retaining the hollow cathode in the main glass tube. CONSTITUTION:A hollow cathode 31 is inserted into a main glass tube 4 and a resilient means 50 is disposed, closely to the opposite ends in the main glass tube, in resilient contact with the opposite ends of the cathode electrode 31 thus retaining the hollow cathode in the main glass tube. Since the hollow cathode 31 is not secured to the main glass tube 4 and held resiliently at the opposite ends, elongation due to differential thermal expansion between the main glass tube and the hollow cathode 31 is absorbed approximately equally at the opposite ends thereof. Consequently, positional relation between the hollow cathode and the electrode of the like secured to the main glass tube can strictly be maintained.

Description

DETAILED DESCRIPTION OF THE INVENTION The hollow cathode metal vapor laser of the present invention will be described in detail according to the following items.

A. Industrial field of application B9 Summary of the invention C9 Prior art 1 Problem to be solved by the invention E Means for solving the problem F Example [Figures 1 to 10] a. Crow main pipe a-1 , central pipe part a-1-a, anode a-1-port, cathode bottle a-1-c, metal reservoir a-1-2, connecting flange a-1-e, others a-2, end pipe part b hollow Cathode C, Brewster window protector d, hollow cathode holding e, helium gas supply device f, getter g, operation 1 action i, modification [Fig. 11] G1 Effect of the invention (A, industrial application field ) The present invention relates to a novel hollow cathode metal vapor laser. Specifically, by devising the means for supporting the hollow cathode relative to the glass main tube, the positional relationship between the electrodes fixed to the glass main tube and the hollow cathode is not too disturbed, and the positional relationship between the glass main tube and the hollow cathode is prevented. The object of the present invention is to provide a new hollow cathode type metal vapor laser that absorbs the difference in thermal expansion amount between the two due to the difference in thermal expansion coefficient between the two and prevents the glass main tube from being damaged.

(B. Summary of the Invention) The hollow cathode metal vapor laser of the present invention includes a hollow cathode inserted into a glass main tube, and resilient means disposed near both ends of the glass main tube that are brought into elastic contact with both ends of the hollow cathode. The hollow cathode is held within the glass main tube by holding the hollow cathode within the glass main tube to prevent excessive stress from being applied to the glass main tube due to the difference in thermal expansion between the glass main tube and the hollow cathode. The relative elongation appears approximately equally on both ends, and therefore the positional relationship between the electrodes etc. fixed to the glass main tube and the hollow cathode is hardly disturbed.

(C, Prior Art) A hollow cathode metal vapor laser is known that uses a hollow cathode to generate laser light using negative glow discharge. A hollow cathode is inserted into a glass main tube provided with a main glass tube, the hollow cathode is connected to a cathode pin held in the glass main tube, and a hole is formed at a location corresponding to the anode, etc. of the hollow cathode. .

(D. Problem to be Solved by the Invention) By the way, in the hollow cathode type metal vapor laser as described above, if the position of the hollow cathode with respect to the glass main tube is not properly regulated, the hollow cathode and the glass main tube may be There is a problem in that the positional relationship between the anode and the like is disturbed, making it impossible to obtain normal laser oscillation. However, if the hollow cathode and the glass main tube are kept in a fixed relationship, there will be a large difference in their coefficient of thermal expansion.
The high temperatures during operation create a large difference in the amount of thermal expansion between the hollow cathode and the glass main tube, which places extreme stress on the glass tube, and repeating this process can cause cracks in the glass tube. There is a problem that cracks may occur.

Additionally, if a large gravitational force is applied to the hollow cathode in the axial direction during transportation or other handling, there is a risk that the glass main tube may be damaged due to local stress caused by the hollow cathode attempting to move relative to the glass main tube. There is also.

(E. Means for Solving the Problems) In order to solve the above-mentioned problems, the hollow cathode metal vapor laser of the present invention has hollow cathodes inserted into the glass main tube and placed at positions near both ends of the glass main tube. The hollow cathode is held within the glass main tube by bringing elastic means into contact with both ends of the hollow cathode.

Therefore, in the hollow cathode metal vapor laser of the present invention, since there is no fixed part between the glass main tube and the hollow cathode, the difference in the amount of thermal expansion between the two is due to the relative movement of the two. Therefore, excessive stress is not applied to the glass main tube, and therefore, breakage of the glass main tube due to the difference in thermal expansion coefficient between the glass main tube and the hollow cathode is avoided. Further, since the relative elongation of the hollow cathode to the glass main tube appears approximately equally on both ends thereof, the positional relationship between the hollow cathode and the electrodes fixed to the glass main tube is hardly disturbed. Furthermore, if a large gravitational force is applied in the axial direction of the hollow cathode during transportation or other handling, the hollow cathode will be subjected to aS by the repelling means on the side that is about to move, causing excessive force on the glass main tube. There is no added stress.

(F, Example) [Figures 1 to 'TS10] Details of the hollow cathode metal vapor laser of the present invention are described below.
A description will be given according to an illustrated embodiment applied to an e-Cd ion laser.

1 in the figure is a He-Cd ion laser, and a laser tube 2 and resonance means (reflection*
') 3.3'. It should be noted that supporting members, casings, etc. that support these laser tubes and resonance means are required, but illustration thereof is omitted.

The laser tube 2 consists of a glass main tube, a hollow cathode, an anode supported by the glass main tube, and the like.

(a, glass main tube) 4 is a glass main tube, which includes a central tube portion 5 having a substantially elongated circular tube shape in the front-rear direction and end tube portions connected to both front and rear ends of the central tube portion 5 and having an elongated circular tube shape in the front-rear direction. 6.6'.

(a-1, Central Tube Section) The central tube section 5 is made of glass, and is provided with an anode, a cathode pin, a metal reservoir, and the like.

(a-1-a, Anode) 7.7, . . . are main anode mounting portions provided at approximately equal intervals on the central tube portion 5 excluding both ends and portions adjacent to both ends.

Each main anode mounting portion 7 consists of a short circular tube-shaped intermediate member 8 made of glass and a substantially bowl-shaped closing member 9 made of glass,
One end of the intermediate member 8 is welded to the opening edge of a hole 10 formed in the central tube portion 5, and the open end of the closing member 9 is welded to the other end of the intermediate member 8.

11.11,... is the upper g2 main anode mounting part 7.7,...
・The main anode is attached separately to the main anode, and is formed into a pin shape from tungsten.

Each main anode 11 is sealed to the center of the closing member 9 with a tungsten sealing glass 12 interposed therebetween.

The main anodes 11, 11, . . . are connected to a power supply circuit of a control circuit (not shown).

13.13 is located near both ends of the central tube portion 5, and
The main anode mounting portions 7.7, . . . are auxiliary anode mounting portions provided at positions separated from each other in the front and back from both ends of the row, and these auxiliary anode mounting portions 13.13 are also connected to the intermediate member 8.8 and the closing member. 9.9, an auxiliary anode 14.14 made of tungsten and formed into a pin shape passes through the tungsten sealing glass 12 to the center of the closing member 9.9 of each auxiliary anode mounting portion 13.13. It is sealed in a sealed state.

(a-1-port, cathode pin) 15 is a cathode pin attachment part, and the anode 1 of the central tube part 5
On the opposite side to the part where 1.11, ... and 13.13 are provided, and - auxiliary @ electrode 13 and main anode 11.11,
... between an intermediate member 8 that is provided at a corresponding location between one end of the row and welded to one end of the central tube 5, and a closing member 9 that is welded to the other end of the intermediate member 8. A cathode pin 16 made of tungsten is sealed to the center of the closing member 9 through a tungsten sealing glass 12, passing through the cathode pin 16.

(a-1-c, metal reservoir) 17. 17, ... are metal ion generating materials, that is, metal reservoirs for storing Cd, which is a generating material of Cd (cadmium) ions in this example. Each metal reservoir 17 is formed by welding a short glass tube with one end closed to the opening edge of a hole 18 formed in the central tube portion 5, and the insides of these metal reservoirs 17, 17, . . . There is a CD block 19.19,...
・Each item is included separately.

Incidentally, these metal reservoirs 17, 17, . . . are connected to the anode 11.
11,... 13. At the position opposite to the 13th group, and excluding the central part of the central tube section 5, the main anodes 11.11,...
They are formed at a formation pitch that is approximately equal to the formation pitch of . . . and shifted by half a pitch. Note that a metal reservoir may be provided in the center.

(a-1-2, connecting flange) 20.20 is a connecting flange welded to both the front and rear ends of the central tube portion 5, and is made of a non-magnetic metal, such as stainless steel. Both ends are separately welded through some intermediate glass to match the coefficient of thermal expansion.

Through holes 21.21, . . . are formed at equal intervals on the peripheral edge of the connecting flange 20.20, and an annularly extending notch 22.22 is formed on the inner peripheral edge of the outer end surface.

(a-1-e, others) 23.23, . . . are wrapped around the outer peripheral surfaces of the main anode mounting portion 7.7, . . . , the metal reservoir 17.17, . This heater wire is connected to a control circuit (not shown).

In addition, the central tube portion 5 is provided with an LE (helium) gas supply device, a getter device, etc., which will be described later.

(a-2, End tube portion) The front and rear end tube portions 6.6' have the same front-back and symmetrical structure, so one of them 6 will be explained in detail, and the other 6' will be explained in detail using a similar portion in one side. The reference sign attached to r
Reference numerals with ``'' are attached to the drawings, and detailed explanations are omitted.

The end tube part 6 is made of glass and is formed into a long and narrow tube shape, and one end thereof is buttoned along the axis and beveled at the Brewster's angle.
The beveled end is closed by a blini star window 24 welded thereto.

Further, a connecting flange 25 is welded to the other end of the end tube portion 6.

The connecting flange 25 includes a cylindrical portion 26 and a connecting portion 27 connected to one end of the cylindrical portion 26 and having a smaller diameter than the cylindrical portion 26.
and a flange portion 28 projecting outward from the other end of the cylindrical portion 26.
It consists of The cylindrical portion 26 and the flange portion 28 are made of a non-magnetic material, such as stainless steel, and the connecting portion 27
is made of a metal that is non-magnetic and whose thermal expansion coefficient is close to that of the glass material of the end tube portion 6, such as Kovar, and the cylindrical portion 26 and the connecting portion 27 are connected by welding or the like. .

Further, on the peripheral edge of the flange portion 28, there are threaded holes 2 at equal intervals.
9.29, . . . are formed.

The other end of the end tube part 6 and the connecting part 27 of the connecting flange 25 are welded together through several types of intermediate glass in order to match their coefficients of thermal expansion.

Therefore, the flange portion 2 of the connecting flange 25 of the end pipe portion 6
8 and the connecting flange 20 of the central pipe portion 5 are butted against each other, and the connecting screws 30.30, .
, . . . , thereby connecting the end tube portion 6 to one end of the central tube portion 5, and similarly connecting the other end tube portion 6' to the other end of the central tube portion 5. The glass main tube 4 is thus formed.

(b, hollow cathode) 31 is a hollow cathode. The hollow cathode 31 is made of a conductive material and is formed into a substantially circular tube shape, and the cathode pore 32 is the central hole.

The outer diameter of the hollow cathode 31 is formed to be slightly smaller than the inner diameter of the central tube section 5 of the glass main tube 4, and is slidably inserted into the central tube section 5.

The hollow cathode 31 is positioned within the central tube portion 5, and the main anodes 11.11, . . . and the metal reservoirs 17.
17, . . , holes 33.
33, . . . are formed.

Both front and rear ends of the hollow cathode 31 are large-diameter parts 34.34 whose inner diameters are slightly larger than other parts, and a stepped surface 35.35 is formed at the inner end of the large-diameter parts 34.34. Further, one large diameter portion 34 is formed with a notch 36 extending over its entire length at one location in the same direction. When the hollow cathode 31 is positioned within the central tube portion 5, the rear end of the notch 36 is positioned approximately in correspondence with the center line of the cathode pin attachment portion 15.

(C, Brewster window protection part) 37.37' is a Brewster window protection part, which is provided in the cylindrical part 26.26' of the connection flange 25.25'. Two Pliny Star window protectors 37.37
′ has a similar structure except that it is front-back symmetrical, so
The one 37 will be described in detail, and the detailed explanation of the other 37' will be omitted since the same parts as in the one 37 will be given reference numerals with a ``' added to the reference numerals given in the one 37.

Reference numeral 38 denotes a partition plate of 341, which has a disk shape with an outer diameter approximately equal to the inner diameter of the cylindrical portion 26, and has an annular protrusion 3 on its periphery.
9 is formed, and a through hole 40 is formed in the center,
The inner surface of the through hole 40 is tapered.

Such a first partition plate 38 is fitted inside the cylindrical portion 26 . At this time, the small diameter side of the through hole 40 is oriented toward the Brewster window 24 side.

Reference numeral 41 denotes a spacer having a substantially cylindrical shape, the outer diameter of which is approximately equal to the inner diameter of the cylindrical portion 26, and a notch 41a extending over the entire length formed on the lower side.

Such a spacer 41 is fitted inside the cylindrical portion 26.

42 is a second partition plate. The second partition plate 42 has a disk shape with an outer diameter approximately equal to the inner diameter of the cylindrical portion 26, and has an annular protrusion 43 formed on its periphery and a through hole 44 formed in its center. The inner surface of the through hole 44 is tapered.

Such a second partition plate 42 is fitted inside the cylindrical portion 26 next to the spacer 41. At this time, the large diameter side of the through hole 44 is oriented toward the first partition plate 38 side.

As a result, a space 45 is formed in which the partition plates 38.42 are located at both ends, the interval between the partition plates 38.42 is defined by the spacer 41, and a notch 41a is located at the lower end of the space 45.

And the above 1. The second partition plates 38, 42 and the spacer 41 are both made of non-magnetic metal.

Reference numeral 46 denotes a stopper bulb, which is formed into a spherical shape from a magnetic metal. The diameter of the plug bulb 46 is larger than the diameter of the small diameter side of the through hole 40.44 provided in the partition plate 38.42.

Then, the plug bulb 46 is placed in the space 45,
Usually, it is located at the lower side of the space 45, that is, within the notch 41a, so that it does not block the area connecting the through hole 40 and the through hole 44.

Note that 47 is a metal gasket, which is formed into an annular shape from a metal material with relatively high availability, such as oxygen-free copper, for example.

Then, with the metal gasket 47 positioned between the notch 22 of the connecting flange 20 and the second partition plate 42, the connecting flanges 20 and 25 are connected to the connecting screws 30, 30, .
At this time, the metal casket 47 is plastically deformed to maintain airtightness between the central tube portion 5 and the end tube portions 6.

(d Holding the hollow cathode) 48.48' is a spacer tube made of glass, and its outer diameter is slightly smaller than the inner diameter of the central tube section 5, and one end is connected to the small diameter section 49. It is said to be .49'. Such spacer tubes 48, 48' are inserted into both front and rear ends of the central tube section 5, and their small diameter sections 49, 49' are fitted inside the large diameter section 34, 34 of the hollow cathode 31, and their end faces are inserted into the hollow cathode 31. It comes into contact with the stepped surface 35 of the VJ31.

Reference numeral 50, 50' designates a coil spring, one end of which is in elastic contact with the opposite end of the spacer tube 48, 48' on the side opposite to the small diameter portion 49, 49', and the other end is elastically contacted with the metal gasket 47, 47'.

Therefore, the hollow cathode 31 is elastically supported at both ends within the glass main tube 4, and thereby the glass main tube 4
Its position within is defined.

Reference numeral 51 designates a connection piece made of a flexible conductive metal thin plate, for example, a thin nickel plate, one end of which is welded to the cathode pin 16, and the other end of which is connected to the notch 36 formed at one end of the hollow cathode 31. It is fixed to the rear end surface by a conductive bottle 52.

(e. Helium gas supply device) 53 is a buffer gas, and in the case of a He-Cd laser, a helium (He) gas supply device.

Reference numeral 54 denotes an outer tube made of a material that hardly allows He gas to pass through, such as borosilicate glass. The outer tube 54 is sealed except for the opening 55.

Reference numeral 56 denotes a partition wall that partitions the inside of the outer tube 54, and the partition wall 56 partitions the inside of the outer tube 54 into a He gas reservoir 57 and a supply section 58 communicating with the opening 55.

59 is a ceramic heater inserted into a heater holding portion 60 formed by making a part of the partition wall 56 into a tubular shape;
1.61 is a ceramic heater led out of the outer tube 54
59 connection lead wires. And the heater holding part 6
0 is made of a material that increases the transmittance of He gas when heated, such as quartz glass, and the He gas reservoir 57 is filled with He gas at several hundred Torr.

62 is a connecting vibrator made of glass, one end of which is connected to a hole 6 formed near the rear end of the central tube portion 5 of the glass main tube 4.
It is welded to the opening edge of No.3.

Note that a hole 64 is formed in a portion of the spacer tube 48' that corresponds to the hole 63.

Connecting portions 62a and 62b are provided at the other end of the connecting vibro 2.
is installed protrudingly.

Reference numeral 65 denotes a metal connecting pipe having a bellows shape except for both ends, one end 65a of which is welded to the opening 55 of the helium gas supply device 53, and the other end 65b of the connecting vibro 2. It is welded to the connecting part 62a, and thereby,
The supply section 58 of the helium gas supply device 53 is connected to the glass main pipe 4
communicated with the inside of the

Reference numeral 66 denotes a pressure sensor, for example, a semiconductor pressure sensor using a piezoresistive element is used, and the test gas probe section 66a is connected to the connection section 62b of the connected vibro 2.
is welded to.

In a hollow cathode metal ion laser, the negative i part and the active metal (for example, Cd) reservoir are heated to a high temperature of several hundred degrees Celsius. In a metal ion laser that uses He gas as a buffer gas, this He gas passes through the glass main tube 4 and is emitted into the atmosphere. This is because the size of He atoms is small and they pass through glass. In particular, in the case of quartz glass, He gas easily passes through it. Furthermore, the higher the temperature, the greater the amount of He gas permeation. Therefore, as mentioned above, since the glass main tube 4, especially the central tube portion 5, is heated to the same extent as the hollow cathode 31, the amount of He gas transmitted increases, and as the usage time of the laser tube 2 increases, This results in a decrease in the amount of sealed He gas. In addition, some He gas may be absorbed by the cathode material and other materials during the use of the laser tube 2, and when vaporized Cd solidifies in the cooled part of the laser tube 2, it may be stored therein. , the He gas pressure inside the racer tube 2 decreases,
The output of laser oscillation decreases, and the laser oscillation may eventually stop.

Therefore, in order to replenish the decrease in He gas due to the above-mentioned causes, the pressure sensor 66 detects the He gas pressure inside the laser tube 2, and the He gas pressure is kept at a constant pressure (inside the laser tube 2). Normal number Torr to number + Tor
Contains He gas at a pressure of r. ), the ceramic heater 59 is energized through a He gas pressure control device (not shown). Since quartz glass suddenly becomes permeable to He gas when the temperature rises, the heater holding part 60 made of quartz glass is heated by the ceramic heater 59, and the H in the He gas reservoir 57 is heated.
The e-gas passes through the heater holding part 60 to the supply part 58 side,
Opening 55, connecting pipe 65, connecting vibro 2, holes 63 and 64
It is supplied into the laser tube 2 through.

(f, getter) 67 is a getter device, which is connected to the glass main pipe 4 via the connecting vibro 8. In addition, a hole 6 is provided in the central tube portion 5 and the spacer tube 48 at the location where the connecting vibro 8 is connected.
9. F0 is formed.

Note that 71.71' is a getter formed in an annular shape and sandwiched between the coil spring 50.50' and the spacer tube 48.48'.

(g, Operation) Therefore, the main anodes 11.11, . . . and the auxiliary anodes 14.
14 and the hollow cathode 31, a negative glow discharge is generated between the main anodes 11, 11, . . . and the hollow cathode 31. Cd vapor is generated by the heat loss of this negative glow discharge and heating of the heater wires 23, 23, etc., which is transferred to a higher energy level by excited particles such as He ions, and laser oscillation occurs. Start.

Note that the Brewster window 24 exits from both ends of the cathode bore 32.
．． The Cd vapor heading toward the auxiliary anode 14
．． 14 and returned into the cathode bore 32.

Then, as described above, when the He gas pressure within the laser tube 2 decreases, He gas is supplied from the helium gas supply device 53 into the laser tube 2.

The Brewster window protector 37, 37' is formed during the manufacturing process of the laser tube 2 by replacing the Brewster window 24, 24.
4' from dirt.

In other words, is it necessary to create a predetermined atmosphere inside the glass main tube 4?
If the inside of the glass main tube 4 is exhausted from the end of the glass tube 8, the gas inside the glass main tube 4 is initially accelerated and moves toward the Brewster window 24 and/or 24', so that fine particles of Cd are removed. and other dirt and dust rush toward the Brewster window 24 and/or 24', and those that cannot be bent toward the connected vibro 2 and/or 68 due to their inertia rush toward the Brewster window 24 and/or 24'. Or, there is a habit of colliding with 24' and staining it.

Therefore, when performing processes such as evacuation, gas cleaning, and gas replacement inside the glass main pipe 4, the Brewster window 24.
The magnets 72, 72 are brought close to the first partition plate 38, 38' from the ' side. Then, a plug bulb 46 made of magnetic material
．． 46' is attracted to the magnet 72.72, so the 10th
As shown, the through holes 40, 40 in the partition plate 38, 38'
′ will be occluded. Therefore, the passage of the above-mentioned Cd dust, etc. to the Brewster window 24, 24' is blocked by the first partition plate 38, 38'. These do not cause the briny star windows 24, 24' to become soiled.

After the above work is completed, the magnet 72
．． By removing 72, the plug bulbs 46, 46' return to the notches 41a, 41'a and are positioned where they do not interfere with laser oscillation.

(H, Effect) In the hollow cathode type metal vapor laser 1, since the hollow cathode 31 is not fixed to the glass main tube 4, the amount of thermal expansion between the glass main tube 4 and the hollow cathode 31 is Even if a difference occurs, no excessive force is applied to the glass main tube 4, and breakage of the glass main tube 4 can be avoided.

In addition, since the hollow negative gi 31 is elastically held at both ends, elongation due to thermal expansion is absorbed approximately equally at both ends, so that the main anode 1 provided in the glass main tube 4
Positional deviations between holes 33, 33, . . . of the hollow cathode 31 and metal reservoirs 17, 17, . .

Further, since the connection between the hollow cathode 31 and the cathode bottle 16 is made through the flexible connecting piece 51, the movement of the hollow cathode 31 relative to the glass main tube 4 is not hindered.

Furthermore, the hollow cathode 31 is
Even if a force is applied to move the hollow cathode 31 relative to the glass main tube 4, the hollow cathode 31 will move relative to the glass main tube 4, and this will be absorbed by the coil springs 50, 50'. No unreasonable stress is applied to the main pipe 4.

(i, modified example) [Figure 11] FIG. 11 shows a modification.

In this modification, the other end of the coil spring 50 (50' is similar but not shown) is inserted through the connecting flange 20.25 and comes into elastic contact with the peripheral edge of the second partition plate 42. .

Further, the metal gasket 47 is inserted between the abutting surfaces of the flange portion 28 of the connection flange 25 and the connection flange 20.

(G. Effect of the invention) As is clear from the above description, the hollow cathode metal vapor laser of the present invention is a hollow cathode metal vapor laser that uses a hollow cathode and uses negative glow discharge to generate laser light. , a hollow cathode is inserted into the glass main tube, and resilient means placed near both ends of the glass main tube are brought into elastic contact with both ends of the hollow cathode to hold the hollow cathode within the glass main tube. .

Therefore, in the hollow cathode type metal vapor laser of the present invention, since there is no fixed part between the glass main tube and the hollow cathode, the difference in the amount of thermal expansion between the two is caused by the relative movement of the two. Therefore, excessive stress is not applied to the glass main tube, and therefore, breakage of the glass main tube due to the difference in thermal expansion coefficient between the glass main tube and the hollow cathode is avoided. Further, since the relative elongation of the hollow cathode to the glass main tube appears approximately equally on both ends thereof, the positional relationship between the hollow cathode and the electrodes fixed to the glass main tube will not be greatly disturbed. Furthermore, if a large gravitational force is applied in the axial direction of the hollow cathode during handling such as transportation, the hollow cathode will be buffered by the elastic means on the side from which it is about to move, which will cause excessive stress on the glass main tube. is never added.

In the above embodiment, the present invention was applied to a He-Cd ion laser, but the present invention is not limited to this.
Can be applied to other hollow cathode metal vapor lasers.

In addition, the shapes and structures shown in other examples are merely examples of embodiments of the present invention, and the technical scope of the present invention should not be construed as limited by these. It's not a thing. For example, the number and position of the anodes and metal reservoirs may be determined as appropriate, and it goes without saying that the explosive means and their support are not limited to those shown in the embodiments.

[Brief explanation of drawings]

The drawings show an example of the implementation of the hollow cathode metal vapor laser of the present invention, in which Fig. 1 is a partially cutaway side view, Fig. 2 is a plan view, and Fig. 3 is taken along line III-III in Fig. 2. 4 is an enlarged sectional view along line rV-rV in FIG. 3, FIG. 5 is an enlarged sectional view along V-Vpp in FIG. 1, and FIG. 6 is an enlarged sectional view along line Vl-Vl in FIG. 3. 7 is an enlarged sectional view taken along the line ■-■ in FIG. 2, FIG. 8 is an enlarged exploded perspective view of the hollow cathode holder, and FIG. 9 is an enlarged exploded view of the Brewster window protector. A perspective view, FIG. 10 is a sectional view of a main part explaining the function of the Brewster window protector, and FIG. 11 is a sectional view of a main part showing a modification. Explanation of symbols 1 ・ ・ 4 ・ ・ 31 ・ 50. 51 Hollow cathode metal vapor laser glass main tube, 16 Cathode pin, Hollow cathode, 50' Repulsion means, Connecting piece Applicant Koito Manufacturing Co., Ltd. Enlarged sectional view Figure 5 ('TI-TIWk') Force main control figure 51... Enlarged disassembled leftover view figure 8

Claims (2)

[Claims] (1) In a hollow cathode metal vapor laser that uses a hollow cathode to generate laser light using negative glow discharge, a hollow cathode is inserted into the glass main tube, and bullets are placed near both ends of the glass main tube. A hollow cathode metal vapor laser characterized in that the hollow cathode is held within a glass main tube by bringing the generating means into elastic contact with both ends of the hollow cathode. (2) A hollow cathode according to claim 1, characterized in that the cathode pin held through the side wall of the glass main tube and the hollow cathode are connected by a connecting piece made of a flexible conductive metal thin plate. cathode metal vapor laser