JPH0328U - - Google Patents
Info
- Publication number
- JPH0328U JPH0328U JP5764489U JP5764489U JPH0328U JP H0328 U JPH0328 U JP H0328U JP 5764489 U JP5764489 U JP 5764489U JP 5764489 U JP5764489 U JP 5764489U JP H0328 U JPH0328 U JP H0328U
- Authority
- JP
- Japan
- Prior art keywords
- support
- support rods
- semiconductor
- semiconductor wafers
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5764489U JPH0328U (hu) | 1989-05-18 | 1989-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5764489U JPH0328U (hu) | 1989-05-18 | 1989-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0328U true JPH0328U (hu) | 1991-01-07 |
Family
ID=31582540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5764489U Pending JPH0328U (hu) | 1989-05-18 | 1989-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0328U (hu) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS485913U (hu) * | 1971-05-31 | 1973-01-23 | ||
| JPS5631514U (hu) * | 1979-08-20 | 1981-03-27 |
-
1989
- 1989-05-18 JP JP5764489U patent/JPH0328U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS485913U (hu) * | 1971-05-31 | 1973-01-23 | ||
| JPS5631514U (hu) * | 1979-08-20 | 1981-03-27 | ||
| JPS6145122Y2 (hu) * | 1979-08-20 | 1986-12-19 |