JPH03287770A - Single wafer processing atmospheric cvd device - Google Patents

Single wafer processing atmospheric cvd device

Info

Publication number
JPH03287770A
JPH03287770A JP9059690A JP9059690A JPH03287770A JP H03287770 A JPH03287770 A JP H03287770A JP 9059690 A JP9059690 A JP 9059690A JP 9059690 A JP9059690 A JP 9059690A JP H03287770 A JPH03287770 A JP H03287770A
Authority
JP
Japan
Prior art keywords
substrate
wafer processing
single wafer
cvd device
atmospheric cvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9059690A
Inventor
Nobuhisa Komatsu
Toshio Saito
Original Assignee
Hitachi Electron Eng Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electron Eng Co Ltd filed Critical Hitachi Electron Eng Co Ltd
Priority to JP9059690A priority Critical patent/JPH03287770A/en
Publication of JPH03287770A publication Critical patent/JPH03287770A/en
Application status is Pending legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563Gas nozzles
    • C23C16/45565Shower nozzles

Abstract

PURPOSE: To form a thin film on the entire surface of a substrate in uniform thickness in the single wafer processing atmospheric CVD device by providing a raw gas flow straightening plate pierced with many through-holes at a specified inclination on the substrate.
CONSTITUTION: A susceptor 14 carrying a substrate 18 is fixed to a rotary plate 64 by plural legs 62 in the single wafer processing atmospheric CVD device consisting of an upper chamber 10 and a lower chamber 12 and made rotatable and vertically movable. The substrate 18 is heated by a heater 68, and SiH4 and O2 as the raw gas are supplied from a gaseous reactant supply means 16 into the upper chamber 10 respectively with gaseous N2 as the carrier gas. A flow straightening plate 30 pierced with many throughholes 40 at an inclination of 20-45° is placed above the substrate, the raw gas is passed through the holes 40 to form a uniform film on the substrate 18, and the film of SiO2 formed by the reaction of SiH4 with O2 is deposited on the entire surface in uniform thickness.
COPYRIGHT: (C)1991,JPO&Japio
JP9059690A 1990-04-05 1990-04-05 Single wafer processing atmospheric cvd device Pending JPH03287770A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9059690A JPH03287770A (en) 1990-04-05 1990-04-05 Single wafer processing atmospheric cvd device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9059690A JPH03287770A (en) 1990-04-05 1990-04-05 Single wafer processing atmospheric cvd device

Publications (1)

Publication Number Publication Date
JPH03287770A true JPH03287770A (en) 1991-12-18

Family

ID=14002852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9059690A Pending JPH03287770A (en) 1990-04-05 1990-04-05 Single wafer processing atmospheric cvd device

Country Status (1)

Country Link
JP (1) JPH03287770A (en)

Cited By (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5712001A (en) * 1995-03-20 1998-01-27 Matsushita Electric Industrial Co., Ltd. Chemical vapor deposition process for producing oxide thin films
US20110247556A1 (en) * 2010-03-31 2011-10-13 Soraa, Inc. Tapered Horizontal Growth Chamber
CN102851648A (en) * 2011-06-30 2013-01-02 三星显示有限公司 Apparatus for atomic layer deposition, sealing method and nozzle set for deposition
US8422525B1 (en) 2009-03-28 2013-04-16 Soraa, Inc. Optical device structure using miscut GaN substrates for laser applications
US8837545B2 (en) 2009-04-13 2014-09-16 Soraa Laser Diode, Inc. Optical device structure using GaN substrates and growth structures for laser applications
US8837546B1 (en) 2009-05-29 2014-09-16 Soraa Laser Diode, Inc. Gallium nitride based laser dazzling device and method
US8847249B2 (en) 2008-06-16 2014-09-30 Soraa, Inc. Solid-state optical device having enhanced indium content in active regions
US8848755B1 (en) 2010-05-17 2014-09-30 Soraa Laser Diode, Inc. Method and system for providing directional light sources with broad spectrum
US8905588B2 (en) 2010-02-03 2014-12-09 Sorra, Inc. System and method for providing color light sources in proximity to predetermined wavelength conversion structures
US8956894B2 (en) 2008-08-04 2015-02-17 Soraa, Inc. White light devices using non-polar or semipolar gallium containing materials and phosphors
US8971370B1 (en) 2011-10-13 2015-03-03 Soraa Laser Diode, Inc. Laser devices using a semipolar plane
US9013638B2 (en) 2009-05-29 2015-04-21 Soraa Laser Diode, Inc. Laser based display method and system
US9020003B1 (en) 2012-03-14 2015-04-28 Soraa Laser Diode, Inc. Group III-nitride laser diode grown on a semi-polar orientation of gallium and nitrogen containing substrates
US9048170B2 (en) 2010-11-09 2015-06-02 Soraa Laser Diode, Inc. Method of fabricating optical devices using laser treatment
US9071039B2 (en) 2009-04-13 2015-06-30 Soraa Laser Diode, Inc. Optical device structure using GaN substrates for laser applications
US9088135B1 (en) 2012-06-29 2015-07-21 Soraa Laser Diode, Inc. Narrow sized laser diode
US9093820B1 (en) 2011-01-25 2015-07-28 Soraa Laser Diode, Inc. Method and structure for laser devices using optical blocking regions
US9142935B2 (en) 2009-09-17 2015-09-22 Soraa Laser Diode, Inc. Laser diodes with scribe structures
US9184563B1 (en) 2012-08-30 2015-11-10 Soraa Laser Diode, Inc. Laser diodes with an etched facet and surface treatment
US9236530B2 (en) 2011-04-01 2016-01-12 Soraa, Inc. Miscut bulk substrates
US9239427B1 (en) 2008-07-14 2016-01-19 Soraa Laser Diode, Inc. Methods and apparatus for photonic integration in non-polar and semi-polar oriented wave-guided optical devices
US9250044B1 (en) 2009-05-29 2016-02-02 Soraa Laser Diode, Inc. Gallium and nitrogen containing laser diode dazzling devices and methods of use
US9287684B2 (en) 2011-04-04 2016-03-15 Soraa Laser Diode, Inc. Laser package having multiple emitters with color wheel
US9343871B1 (en) 2012-04-05 2016-05-17 Soraa Laser Diode, Inc. Facet on a gallium and nitrogen containing laser diode
US9379522B1 (en) 2010-11-05 2016-06-28 Soraa Laser Diode, Inc. Method of strain engineering and related optical device using a gallium and nitrogen containing active region
US9531164B2 (en) 2009-04-13 2016-12-27 Soraa Laser Diode, Inc. Optical device structure using GaN substrates for laser applications
US9646827B1 (en) 2011-08-23 2017-05-09 Soraa, Inc. Method for smoothing surface of a substrate containing gallium and nitrogen
US9787963B2 (en) 2015-10-08 2017-10-10 Soraa Laser Diode, Inc. Laser lighting having selective resolution
US9800017B1 (en) 2009-05-29 2017-10-24 Soraa Laser Diode, Inc. Laser device and method for a vehicle
US9800016B1 (en) 2012-04-05 2017-10-24 Soraa Laser Diode, Inc. Facet on a gallium and nitrogen containing laser diode
US9810383B2 (en) 2011-01-24 2017-11-07 Soraa Laser Diode, Inc. Laser package having multiple emitters configured on a support member
US9829780B2 (en) 2009-05-29 2017-11-28 Soraa Laser Diode, Inc. Laser light source for a vehicle
US10108079B2 (en) 2009-05-29 2018-10-23 Soraa Laser Diode, Inc. Laser light source for a vehicle
US10147850B1 (en) 2010-02-03 2018-12-04 Soraa, Inc. System and method for providing color light sources in proximity to predetermined wavelength conversion structures
US10222474B1 (en) 2017-12-13 2019-03-05 Soraa Laser Diode, Inc. Lidar systems including a gallium and nitrogen containing laser light source

Cited By (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5876504A (en) * 1995-03-20 1999-03-02 Matsushita Electric Industrial Co., Ltd Process for producing oxide thin films and chemical vapor deposition apparatus used therefor
US5712001A (en) * 1995-03-20 1998-01-27 Matsushita Electric Industrial Co., Ltd. Chemical vapor deposition process for producing oxide thin films
US8847249B2 (en) 2008-06-16 2014-09-30 Soraa, Inc. Solid-state optical device having enhanced indium content in active regions
US9239427B1 (en) 2008-07-14 2016-01-19 Soraa Laser Diode, Inc. Methods and apparatus for photonic integration in non-polar and semi-polar oriented wave-guided optical devices
US9711941B1 (en) 2008-07-14 2017-07-18 Soraa Laser Diode, Inc. Methods and apparatus for photonic integration in non-polar and semi-polar oriented wave-guided optical devices
US8956894B2 (en) 2008-08-04 2015-02-17 Soraa, Inc. White light devices using non-polar or semipolar gallium containing materials and phosphors
US8422525B1 (en) 2009-03-28 2013-04-16 Soraa, Inc. Optical device structure using miscut GaN substrates for laser applications
US9099844B2 (en) 2009-04-13 2015-08-04 Soraa Laser Diode, Inc. Optical device structure using GaN substrates and growth structures for laser applications
US9722398B2 (en) 2009-04-13 2017-08-01 Soraa Laser Diode, Inc. Optical device structure using GaN substrates for laser applications
US8837545B2 (en) 2009-04-13 2014-09-16 Soraa Laser Diode, Inc. Optical device structure using GaN substrates and growth structures for laser applications
US9941665B1 (en) 2009-04-13 2018-04-10 Soraa Laser Diode, Inc. Optical device structure using GaN substrates and growth structures for laser applications
US8969113B2 (en) 2009-04-13 2015-03-03 Soraa Laser Diode, Inc. Optical device structure using GaN substrates and growth structures for laser applications
US9735547B1 (en) 2009-04-13 2017-08-15 Soraa Laser Diode, Inc. Optical device structure using GaN substrates and growth structures for laser applications
US9531164B2 (en) 2009-04-13 2016-12-27 Soraa Laser Diode, Inc. Optical device structure using GaN substrates for laser applications
US9356430B2 (en) 2009-04-13 2016-05-31 Soraa Laser Diode, Inc. Optical device structure using GaN substrates and growth structures for laser applications
US10374392B1 (en) 2009-04-13 2019-08-06 Soraa Laser Diode, Inc. Optical device structure using GaN substrates and growth structures for laser applications
US9553426B1 (en) 2009-04-13 2017-01-24 Soraa Laser Diode, Inc. Optical device structure using GaN substrates and growth structures for laser applications
US9071039B2 (en) 2009-04-13 2015-06-30 Soraa Laser Diode, Inc. Optical device structure using GaN substrates for laser applications
US9829778B2 (en) 2009-05-29 2017-11-28 Soraa Laser Diode, Inc. Laser light source
US9071772B2 (en) 2009-05-29 2015-06-30 Soraa Laser Diode, Inc. Laser based display method and system
US10297977B1 (en) 2009-05-29 2019-05-21 Soraa Laser Diode, Inc. Laser device and method for a vehicle
US10205300B1 (en) 2009-05-29 2019-02-12 Soraa Laser Diode, Inc. Gallium and nitrogen containing laser diode dazzling devices and methods of use
US9100590B2 (en) 2009-05-29 2015-08-04 Soraa Laser Diode, Inc. Laser based display method and system
US8837546B1 (en) 2009-05-29 2014-09-16 Soraa Laser Diode, Inc. Gallium nitride based laser dazzling device and method
US9014229B1 (en) 2009-05-29 2015-04-21 Soraa Laser Diode, Inc. Gallium nitride based laser dazzling method
US9800017B1 (en) 2009-05-29 2017-10-24 Soraa Laser Diode, Inc. Laser device and method for a vehicle
US9013638B2 (en) 2009-05-29 2015-04-21 Soraa Laser Diode, Inc. Laser based display method and system
US10108079B2 (en) 2009-05-29 2018-10-23 Soraa Laser Diode, Inc. Laser light source for a vehicle
US10084281B1 (en) 2009-05-29 2018-09-25 Soraa Laser Diode, Inc. Laser device and method for a vehicle
US9019437B2 (en) 2009-05-29 2015-04-28 Soraa Laser Diode, Inc. Laser based display method and system
US9250044B1 (en) 2009-05-29 2016-02-02 Soraa Laser Diode, Inc. Gallium and nitrogen containing laser diode dazzling devices and methods of use
US9829780B2 (en) 2009-05-29 2017-11-28 Soraa Laser Diode, Inc. Laser light source for a vehicle
US9142935B2 (en) 2009-09-17 2015-09-22 Soraa Laser Diode, Inc. Laser diodes with scribe structures
US10147850B1 (en) 2010-02-03 2018-12-04 Soraa, Inc. System and method for providing color light sources in proximity to predetermined wavelength conversion structures
US8905588B2 (en) 2010-02-03 2014-12-09 Sorra, Inc. System and method for providing color light sources in proximity to predetermined wavelength conversion structures
US20110247556A1 (en) * 2010-03-31 2011-10-13 Soraa, Inc. Tapered Horizontal Growth Chamber
US9362720B1 (en) 2010-05-17 2016-06-07 Soraa Laser Diode, Inc. Method and system for providing directional light sources with broad spectrum
US9106049B1 (en) 2010-05-17 2015-08-11 Soraa Laser Diode, Inc. Method and system for providing directional light sources with broad spectrum
US9837790B1 (en) 2010-05-17 2017-12-05 Soraa Laser Diode, Inc. Method and system for providing directional light sources with broad spectrum
US8848755B1 (en) 2010-05-17 2014-09-30 Soraa Laser Diode, Inc. Method and system for providing directional light sources with broad spectrum
US10122148B1 (en) 2010-05-17 2018-11-06 Soraa Laser Diodide, Inc. Method and system for providing directional light sources with broad spectrum
US10283938B1 (en) 2010-11-05 2019-05-07 Soraa Laser Diode, Inc. Method of strain engineering and related optical device using a gallium and nitrogen containing active region
US9379522B1 (en) 2010-11-05 2016-06-28 Soraa Laser Diode, Inc. Method of strain engineering and related optical device using a gallium and nitrogen containing active region
US9570888B1 (en) 2010-11-05 2017-02-14 Soraa Laser Diode, Inc. Method of strain engineering and related optical device using a gallium and nitrogen containing active region
US9786810B2 (en) 2010-11-09 2017-10-10 Soraa Laser Diode, Inc. Method of fabricating optical devices using laser treatment
US9048170B2 (en) 2010-11-09 2015-06-02 Soraa Laser Diode, Inc. Method of fabricating optical devices using laser treatment
US9810383B2 (en) 2011-01-24 2017-11-07 Soraa Laser Diode, Inc. Laser package having multiple emitters configured on a support member
US10247366B2 (en) 2011-01-24 2019-04-02 Soraa Laser Diode, Inc. Laser package having multiple emitters configured on a support member
US9835296B2 (en) 2011-01-24 2017-12-05 Soraa Laser Diode, Inc. Laser package having multiple emitters configured on a support member
US9093820B1 (en) 2011-01-25 2015-07-28 Soraa Laser Diode, Inc. Method and structure for laser devices using optical blocking regions
US9236530B2 (en) 2011-04-01 2016-01-12 Soraa, Inc. Miscut bulk substrates
US10050415B1 (en) 2011-04-04 2018-08-14 Soraa Laser Diode, Inc. Laser device having multiple emitters
US9716369B1 (en) 2011-04-04 2017-07-25 Soraa Laser Diode, Inc. Laser package having multiple emitters with color wheel
US9287684B2 (en) 2011-04-04 2016-03-15 Soraa Laser Diode, Inc. Laser package having multiple emitters with color wheel
CN102851648A (en) * 2011-06-30 2013-01-02 三星显示有限公司 Apparatus for atomic layer deposition, sealing method and nozzle set for deposition
US9646827B1 (en) 2011-08-23 2017-05-09 Soraa, Inc. Method for smoothing surface of a substrate containing gallium and nitrogen
US10069282B1 (en) 2011-10-13 2018-09-04 Soraa Laser Diode, Inc. Laser devices using a semipolar plane
US8971370B1 (en) 2011-10-13 2015-03-03 Soraa Laser Diode, Inc. Laser devices using a semipolar plane
US9590392B1 (en) 2011-10-13 2017-03-07 Soraa Laser Diode, Inc. Laser devices using a semipolar plane
US9166374B1 (en) 2011-10-13 2015-10-20 Soraa Laser Diode, Inc. Laser devices using a semipolar plane
US10090638B1 (en) 2012-02-17 2018-10-02 Soraa Laser Diode, Inc. Methods and apparatus for photonic integration in non-polar and semi-polar oriented wave-guided optical devices
US9020003B1 (en) 2012-03-14 2015-04-28 Soraa Laser Diode, Inc. Group III-nitride laser diode grown on a semi-polar orientation of gallium and nitrogen containing substrates
US9343871B1 (en) 2012-04-05 2016-05-17 Soraa Laser Diode, Inc. Facet on a gallium and nitrogen containing laser diode
US9800016B1 (en) 2012-04-05 2017-10-24 Soraa Laser Diode, Inc. Facet on a gallium and nitrogen containing laser diode
US9088135B1 (en) 2012-06-29 2015-07-21 Soraa Laser Diode, Inc. Narrow sized laser diode
US9985417B1 (en) 2012-06-29 2018-05-29 Soraa Laser Diode, Inc. Narrow sized laser diode
US9640949B1 (en) 2012-06-29 2017-05-02 Soraa Laser Diode, Inc. Narrow sized laser diode
US9184563B1 (en) 2012-08-30 2015-11-10 Soraa Laser Diode, Inc. Laser diodes with an etched facet and surface treatment
US10096973B1 (en) 2012-08-30 2018-10-09 Soraa Laser Diode, Inc. Laser diodes with an etched facet and surface treatment
US9608407B1 (en) 2012-08-30 2017-03-28 Soraa Laser Diode, Inc. Laser diodes with an etched facet and surface treatment
US9787963B2 (en) 2015-10-08 2017-10-10 Soraa Laser Diode, Inc. Laser lighting having selective resolution
US10338220B1 (en) 2017-12-13 2019-07-02 Soraa Laser Diode, Inc. Integrated lighting and LIDAR system
US10345446B2 (en) 2017-12-13 2019-07-09 Soraa Laser Diode, Inc. Integrated laser lighting and LIDAR system
US10222474B1 (en) 2017-12-13 2019-03-05 Soraa Laser Diode, Inc. Lidar systems including a gallium and nitrogen containing laser light source

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