JPH0328735U - - Google Patents
Info
- Publication number
- JPH0328735U JPH0328735U JP8967689U JP8967689U JPH0328735U JP H0328735 U JPH0328735 U JP H0328735U JP 8967689 U JP8967689 U JP 8967689U JP 8967689 U JP8967689 U JP 8967689U JP H0328735 U JPH0328735 U JP H0328735U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- heat treatment
- treatment jig
- width
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 210000000078 claw Anatomy 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 8
- 239000010453 quartz Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000008844 regulatory mechanism Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8967689U JP2503301Y2 (ja) | 1989-07-28 | 1989-07-28 | ウェ―ハ立替装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8967689U JP2503301Y2 (ja) | 1989-07-28 | 1989-07-28 | ウェ―ハ立替装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0328735U true JPH0328735U (ko) | 1991-03-22 |
| JP2503301Y2 JP2503301Y2 (ja) | 1996-06-26 |
Family
ID=31639247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8967689U Expired - Lifetime JP2503301Y2 (ja) | 1989-07-28 | 1989-07-28 | ウェ―ハ立替装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2503301Y2 (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014509082A (ja) * | 2011-03-11 | 2014-04-10 | バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド | 位置合わせ装置、ワークピースローディング装置および位置合わせ方法 |
-
1989
- 1989-07-28 JP JP8967689U patent/JP2503301Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014509082A (ja) * | 2011-03-11 | 2014-04-10 | バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド | 位置合わせ装置、ワークピースローディング装置および位置合わせ方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2503301Y2 (ja) | 1996-06-26 |