JPH03286581A - X-ray preionized laser device - Google Patents

Abstract

PURPOSE:To minimize the consumption of energy and extent the lifetime of an electron beam circuit component by allowing electron beams to enter a first cylinder-shaped electrode outside a target and carrying out discharge between the electrode and a second cylinder-shaped electrode outside, energizing laser gas and perform laser oscillation. CONSTITUTION:A cathode 2 is installed to the center of a cylinder-shaped laser tube 20 while a cylinder-shaped target 3 is installed so that it may surround the cathode, thereby forming an X-ray generation section 1. The electron beams generated in the cathode 2 in the center of the X-ray generation sectional collides with the target 3 where X-rays are generated on the rear of the target by braking radiation. There is a laser discharge space 4 which is coaxially cylinder-shaped outside the target. The X-rays diverged to the rear of the target penetrates the first electrode 5 provided coaxially and cylinder-shaped and they are introduced into the laser discharge space where a laser medium in the laser discharge span is preionized. It is possible to energize the laser medium in the discharge span and obtain laser oscillation by discharging between the first electrode 5 and the second electrode 6 laid out around the inner periphery and the outer periphery of the laser discharge space.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an X-ray preionization gas laser device used for processing and the like.

[Conventional technology]

Regarding the conventional X-ray pre-ionization gas laser device, please refer to the document “
Department Op Energy/Advanced Laser Development, Bument for Isotope Separation/Final Revo-) (DUE/ADVAN)
CED-LA8ERDEVELOPMENT FOR
15OTOPE 8EPARATION/FINAL
REPORT) 1, 1983.

Since it is described in detail in Document No. DOE/ET/33067--TI, the details will be omitted. FIG. 7 is a cross-sectional view of the conventional X-ray preionization gas laser device described in the above-mentioned document, in which only the electrodes and the X-ray generating section are shown, and other parts are omitted. The electron beam generated by the hot cathode 2 collides with the target 3 and generates XM due to bremsstrahlung radiation. The generated X-rays emanate approximately isotropically from the target surface. Some of these X-rays are introduced into the laser discharge space 4 to pre-ionize the laser gas in the discharge space, and the button is pressed in the pre-ionized space to discharge the laser gas between the first electrode 5 and the second electrode 60. Excite and obtain laser oscillation.

[Problem to be solved by the invention]

In conventional X-ray pre-ionization gas laser equipment, only a part of the X-rays radiating from the target are guided into the discharge space.
It was used for preliminary ionization. Therefore, the utilization efficiency of X-rays for pre-ionization is low, and it is necessary to inject a large amount of electrical energy to perform sufficient pre-ionization. As a result, circuit components used to generate the electron beam are easily damaged and have a shortened lifespan.

Conventional X-ray preionization gas laser using #cathode
At t, a large amount of X-ray radiation is required for pre-ionization of the gas laser, so the electron beam that generates the X-rays requires a large current. The ability to extract an electron beam per unit area by pressing the hot cathode (hereinafter referred to as the emission current density) is determined by the cathode material and its temperature, and in the case of the commonly used tungsten cathode, it is 1 ampere per square centimeter. The extent is the limit. Therefore, in order to obtain an electron beam with a large current of about several hundred amperes, a large area of about several hundred square centimeters is required, resulting in a large device. On the other hand, as described in the above-mentioned literature, it is possible to use a special cathode material with a high emission current density, but there are problems in that the cathode material is expensive and has a short lifespan.

The object of the present invention is to solve the above-mentioned conventional problems and to provide an X-ray preionization gas laser device button that consumes less energy and has a long lifespan of circuit components used for generating an electron beam, the device is small, and the cathode material is inexpensive. An object of the present invention is to provide an X-ray pre-ionization gas laser device that has a long life and consumes little energy.

[Failure to solve the problem]

The present invention is an X The target is cylindrical, a cathode is disposed coaxially at the center of the cylindrical target, and the target is surrounded by an outer periphery of the target. An X-ray pre-ionization gas laser device characterized in that a discharge space having a donut-shaped cross section perpendicular to the central axis is coaxially formed;
A laser tube having two electrodes arranged opposite to each other inside and filled with laser gas, and an X-ray generating section having a cathode and a target and irradiating the space between the electrodes (discharge space) with X-rays. In the X-ray pre-ionization gas laser device, the target is cylindrical, a cylindrical cathode is arranged coaxially around the outer periphery of the cylindrical target, and a columnar space surrounded by the cylindrical target is provided. This is an X-ray preionization gas laser device characterized by having a discharge space inside.

A more specific example of these X-ray pre-ionization gas laser devices is that the former gas laser device is provided with a first cylindrical electrode coaxially surrounding the outer periphery of the cylindrical target; A second cylindrical electrode coaxially extends outside the first cylindrical electrode.
A structure including a cylindrical electrode, or a structure including a first cylindrical pressure wall coaxially surrounding the outer periphery of the cylindrical target, and further comprising a second cylindrical pressure wall coaxially outside the first cylindrical pressure wall. a cylindrical pressure wall; A structure in which electrodes are provided at both ends of a space surrounded by a second cylindrical pressure wall, and the space is filled with laser gas to generate discharge in a direction parallel to the central axis, or the latter X-ray The pre-ionized gas laser device has a structure in which two cylindrical electrodes are arranged coaxially in a columnar space surrounded by a cylindrical target, or a cylindrical target in a space surrounded by a cylindrical target. A cylindrical pressure wall is provided in the cylindrical pressure wall, and electricity is connected to both ends of the cylindrical pressure wall in the space surrounded by the cylindrical pressure wall. M, the space surrounded by a cylindrical pressure wall is filled with laser gas, and has a structure in which discharge occurs in a direction parallel to the central axis.

[Effect]

The X-ray pre-ionized gas laser device according to the present invention includes a cylindrical thin film target (hereinafter referred to as target), a first cylindrical electrode, and a second cylindrical electrode arranged so that the cross sections thereof are concentric circles around the cathode. There is. In this case, the electron beam generated from the central cathode collides with the target, and due to bremsstrahlung
The line also appears on the back side of the target,
That is, the light enters the first cylindrical electrode located outside the target. A discharge is generated between the first cylindrical electrode and the second cylindrical electrode located outside the first cylindrical electrode to excite the laser gas and obtain laser oscillation. Here, the X-rays generated by the target diverge in directions other than the direction of the overlapped edges of the target surface, so unlike conventional Xi pre-ionized gas laser devices, the discharge space contains radiation not only from the radial direction of the cylinder but also from the oblique direction. X
A line is also incident.

Therefore, the utilization efficiency of X@ into the reserve tS is high, and sufficient preliminary ionization can be performed, so that only a small amount of electrical energy is required. Furthermore, since the electrical input energy is low, the circuit components used to generate the electron beam are less susceptible to damage and have a longer lifespan. As a result, X
I! A pre-ionized gas laser device can be provided.

An X-ray pre-ionization gas laser device with another configuration has a target and a cathode arranged coaxially outward from a discharge space surrounded by two cylindrical electrodes. By arranging the cylindrical cathode so as to surround the discharge space, the cathode can be made thicker than the discharge space.

Therefore, even if an inexpensive and long-life hot cathode material such as a tungsten cathode is used, the area of the electron emitting surface of the hot cathode can be increased. Furthermore, since the cathode is cylindrical, the volume of the entire cathode can be reduced, and the device can be made smaller. Furthermore, since the discharge space is arranged so as to be surrounded by the target, X-rays enter the discharge space not only from the radial direction of the target cylinder but also from the oblique direction, similar to the device with the previous configuration. The efficiency of use for pre-ionization is high. Therefore,
The electrical energy consumed to achieve sufficient pre-ionization is reduced.

The X-ray pre-ionization gas laser device according to the third configuration includes the first
4F [Similar to the device, the first cylindrical pressure wall located on the back surface of the target is irradiated with X-rays.

The laser gas located between the first cylindrical pressure wall and the second cylindrical pressure wall is excited by laser discharge in a direction parallel to the central axis of the cylinder to obtain laser oscillation. Therefore, like the device of the first configuration, the efficiency of using X-rays for pre-ionization is high, only a small amount of electrical energy is required, the circuit components used to generate the electron beam are not easily damaged, and the lifespan is long. Become.

The X-ray preionization gas laser device according to the fourth configuration includes a second
Similar to the device with the above configuration, the target and cathode are arranged on a coaxial cylinder facing outward from a discharge space surrounded by a cylindrical pressure wall. Therefore, similar to the device of the second configuration,
An inexpensive and long-life hot cathode material can be used, the volume of the entire cathode can be reduced, the device can be downsized, the efficiency of use of XH for pre-ionization is high, and electrical energy is small.

As a result of the above, it is possible to provide an X-ray pre-ionization gas laser device that solves the conventional problems.

〔Example〕

Next, the present invention will be explained using the drawings.

FIG. 1 is a cross-sectional view of an X-ray pre-ionization gas laser device which is an embodiment of the present invention. As shown in the figure, a cathode 2 is provided at the center of a cylindrical laser tube 20, and a cylindrical target 3 is provided surrounding the cathode 2 to form an X-ray generating section l. The electron beam generated by the cathode 2 at the center of the X-ray generating section 1 collides with the target 3 and generates X-rays toward the back surface of the target by bremsstrahlung radiation. There is a coaxial cylindrical laser discharge space 4 on the outside of the target, and X is emitted to the back surface of the target.
A line is introduced into the laser discharge space through a first electrode 5 arranged in the form of a coaxial cylinder outside the target, and the laser medium in the discharge space is preionized.

By causing a discharge between the first electrode 5 and the second electrode 6, which are arranged in a coaxial cylindrical shape on the inner and outer peripheries of the laser discharge space, the laser medium in the discharge space is excited and the laser oscillation occurs. get.

Since a diverging X-ray metal is introduced into the discharge space and used for pre-ionization, the efficiency of using X-rays for pre-ionization is proportional to the solid angle compared to when only a part of the X-rays are used. It consumes only a small amount of electrical energy to achieve a high and sufficient pre-ionization. Furthermore, since the electrical input energy is small, the circuit components used to generate the electron beam are less likely to be damaged and have a long life.

In the figure, the cathode is drawn as a rod-shaped cathode, but the cathode is not limited to this, and may be a cylindrical cathode.

FIG. 2 is a cross-sectional original diagram of an X-ray preionization gas laser device according to a second embodiment. In this embodiment, contrary to the previous embodiment, an X-ray emitting part l is provided in a coaxial cylindrical shape around a cylindrical discharge space 4 surrounded by two cylindrical electrodes 5.6. be. The electron beam generated by the large-area cylindrical cathode 2 (thermal cathode) on the outer periphery of the X-ray generating part 1 collides with the cylindrical target 3 made of a thin film, and bremsstrahlung radiation strikes the back side of the target. Generates X-rays inward.

A tungsten cathode, which is inexpensive and has a long life, was used as the hot cathode. The tungsten shape has an inner diameter of 7cm.

If it is made into a cylindrical shape with a length of 30 cIn, the area of the electron beam emitting surface will be approximately 660 cm. Therefore, even with a tungsten cathode, an electron beam with a peak current of several hundred amperes can be obtained, and an X-ray dose sufficient for pre-ionization of a gas laser can be obtained.

There is a discharge space 4 arranged in a coaxial cylindrical shape inside the target. be separated. By causing a discharge between the first cylindrical electrode 5 and the second cylindrical electrode 6 arranged at the center and outer periphery of the discharge space, the laser medium in the discharge space is excited and laser oscillation is obtained. Here, since the diverging X-ray metal is introduced into the discharge space and used for pre-ionization, the utilization efficiency of XWj for pre-ionization is proportional to the solid angle compared to when only a part of the X-rays are used. It is highly efficient and consumes little electrical energy to provide sufficient pre-ionization.

In this embodiment, the electrode (second electrode 6 in FIG. 2) provided at the center of the cylindrical laser tube 2 is not limited to a cylindrical shape, but may be rod-shaped or knitted.

FIG. 3 is a cross-sectional view of the X-ray pre-ionization gas laser device according to the third embodiment, and FIG. 4 is a longitudinal cross-sectional view of the X-ray pre-ionization gas laser device according to the third embodiment. In this embodiment, the X-ray generating section l is the same as the embodiment shown in FIG.
The laser tube is bent by a first cylindrical pressure wall 7 button and a second cylindrical pressure wall 8 provided in a coaxial cylindrical shape on the outside of the X-ray generating section, and donut-shaped 2 buttons are attached at both ends of the laser tube. two electrodes 9,1
By causing a discharge between the first electrode 9 and the second electrode 1O, which are arranged to face each other, the laser medium in the discharge space 4 formed between the electrodes is excited, and laser oscillation is obtained. Therefore, like the embodiment shown in FIG. 1, the efficiency of using X-rays for pre-ionization is high, only a small amount of electrical energy is required, and the circuit components used to generate the electron beam are not easily damaged and have a long lifespan. become longer.

In the figure, the cathode is drawn as a rod-shaped cathode, but the cathode is not limited to this, and may be a cylindrical cathode. Housing, electrode 9.10
The shape is not limited to a donut shape, but may be other shapes such as a ring shape. In short, any shape of the electrode may be used as long as discharge can occur in a direction parallel to the central axis.

FIG. 5 is a cross-sectional view of the X-ray pre-ionization gas laser device according to the fourth embodiment, and FIG. 6 is a longitudinal cross-sectional view of the X-ray pre-ionization gas laser device according to the fourth embodiment. In this embodiment, the X-ray generating section l is the same as in FIG. 2, with a laser tube consisting of a closed tubular pressure wall 11 located centrally inside the X-ray generating section. Donut-shaped electrodes 9 and 10 are arranged at both inner ends of this cylindrical pressure wall so as to face each other, and the discharge space 4*atmosphere zero tension # between these electrodes is similar to that shown in Fig. 3 and Fig. 4. Excite the discharge to obtain laser oscillation. Therefore, as shown in Fig. 2, it is possible to use inexpensive and long-life cathode materials, the volume of the entire cathode can be reduced, the equipment can be downsized, the utilization rate of X-rays for pre-ionization is high, and the target energy is low.

In this embodiment, the donut-shaped electrode 9. Although lO was used,
The electrode may have any other shape, such as a filament shape. In short, any shape of the electrode may be used as long as the ice can be generated in a direction parallel to the central axis.

In the embodiments shown in FIGS. 3 to 6, electrodes were used to excite the discharge, but a microwave generator such as a magnetron may be used to excite the discharge.

〔Effect of the invention〕

From the above, the X-ray preionization gas laser device according to the present invention consumes less energy and has a longer lifespan for the circuit components used to generate the electron beam.

The casing and device are small, the cathode material is inexpensive and has a long life, and energy consumption is low.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view of an X-ray pre-ionization gas laser device according to a first embodiment, FIG. 2 is a cross-sectional view of an X-ray pre-ionization gas laser device according to a second embodiment, and FIG. , FIG. 4 is a longitudinal cross-sectional view of the X-ray pre-ionization gas laser device according to the third embodiment, and FIG. 5 is a cross-sectional view of the X-ray pre-ionization gas laser device according to the third embodiment. FIG. 6 is a cross-sectional view of the X-ray pre-ionization gas laser device according to the fourth embodiment, and FIG. 7 is a longitudinal cross-sectional view of the X-ray pre-ionization gas laser device according to the fourth embodiment.
The figure is a cross-sectional view of a conventional X-ray preionization gas laser device. In the figure, 1...X-ray generation part, 2...
- Cathode, 3...Target, 4...Discharge space, 5...First cylindrical electrode, 6...
...Second cylindrical electrode, 7...First cylindrical pressure wall, 8...-Second cylindrical pressure wall, 9...
...First electrode, 10...Second electrode, 11.
...It is a cylindrical pressure wall. Figure 1

Claims (6)

[Claims] (1) An X-ray generating unit that includes a laser tube that has two electrodes arranged facing each other inside and is filled with laser gas, a cathode, and a target, and irradiates the space between the electrodes (discharge space) with X-rays. In an X-ray pre-ionized gas laser apparatus, the target is cylindrical, and a cathode is disposed coaxially at the center of the cylindrical target, surrounding the outer periphery of the target, and perpendicular to the central axis of the target. An X-ray pre-ionization gas laser device characterized in that a discharge space having a doughnut-shaped cross section is formed coaxially. (2) The X-ray pre-ionized gas laser device according to claim 1, further comprising a first cylindrical electrode coaxially surrounding the outer periphery of the cylindrical target, and further provided coaxially on the outside of the first cylindrical electrode. An X-ray preionization gas laser device comprising a second cylindrical electrode. (3) The X-ray pre-ionized gas laser apparatus according to claim 1, further comprising a first cylindrical pressure wall coaxially surrounding the outer periphery of the cylindrical target, and further provided on the outside of the first cylindrical pressure wall. A second cylindrical pressure wall is provided coaxially, electrodes are provided at both ends of a space surrounded by the first and second cylindrical pressure walls, and the space is filled with laser gas. Features: X-ray pre-ionization gas laser device. (4) X-ray generation that includes a laser tube that has two electrodes arranged facing each other inside and is filled with laser gas, a cathode and a target, and irradiates the space between the electrodes (discharge space) with X-rays. In the X-ray pre-ionization gas laser device, the target is cylindrical;
An X-ray preionized gas laser device, characterized in that a cylindrical cathode is coaxially arranged surrounding the outer periphery of a cylindrical target, and a discharge space is provided in a columnar space surrounded by the cylindrical target. (5) The X-ray preionization gas laser device according to claim 4, characterized in that two cylindrical electrodes are disposed coaxially within a columnar space surrounded by a cylindrical target. Device. (6) The X-ray pre-ionized gas laser device according to claim 4, further comprising a cylindrical pressure wall in a space surrounded by the cylindrical target, and both ends of the cylindrical pressure wall in the space surrounded by the cylindrical pressure wall. 1. An X-ray preionization gas laser device, characterized in that each part is provided with an electrode, and a space surrounded by a cylindrical pressure wall is filled with laser gas.