JPH0328403U - - Google Patents

Info

Publication number

JPH0328403U

JPH0328403U JP8986889U JP8986889U JPH0328403U JP H0328403 U JPH0328403 U JP H0328403U JP 8986889 U JP8986889 U JP 8986889U JP 8986889 U JP8986889 U JP 8986889U JP H0328403 U JPH0328403 U JP H0328403U

Authority

JP

Japan

Prior art keywords

electrodes

pair

film thickness

measurement sensor

micro

Prior art date

1989-07-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005259 measurement Methods 0.000 claims 3
• 238000000034 method Methods 0.000 description 4
• 238000010586 diagram Methods 0.000 description 2
• 238000006243 chemical reaction Methods 0.000 description 1
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1

Cited By (1)