JPH03283378A - Electrical connecting member and manufacture thereof - Google Patents

Abstract

PURPOSE:To connect conducting members to the connection section of an electric circuit part with a low load by constituting the columnar sections of the conducting members with a conducting material with the hardness higher than that of bump sections. CONSTITUTION:Each conducting member 2 is constituted of the first conducting materials 15 protruded from both faces of a holder 3 and the second conducting material 16 at least partially buried in the holder 3, and the hardness of the second conducting material 16 is higher than that of the first conducting materials 15. A columnar section 2a is made of nickel 16, bump sections 2b, 2b are made of gold 15, and the hardness of the columnar section 2a of each conducting member 2 is higher than that of the bump sections 2b, 2b. The conducting members 2 can be easily connected to an electric circuit part with a low load.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an electrical connection member used for electrically connecting electrical circuit components to each other, and a method for manufacturing the same.

[Conventional technology]

Wire bonding method, TAB (Tape Auto-
BACKGROUND ART Conventionally, methods such as sated bonding (sated bonding) and the like have been known. However, these methods have drawbacks such as being unable to cope with an increase in the number of connection points between both electric circuit components and being costly. In order to solve these difficulties, it is possible to electrically connect electrical circuit components to each other using an electrical connection member that has a structure in which a plurality of conductive members are insulated from each other in an insulating holder. It is publicly known (Japanese Unexamined Patent Publication No. 63-2
22437, JP-A-63-224235, etc.).

FIG. 4 is a schematic diagram showing such an electrical connection member and the electrical connection between electrical circuit components using the same. In the figure, 31 is an electrical connection member, and 32 and 33 are electrical circuits to be connected. Parts shown. The electrical connection member 31 includes a plurality of conductive members 34 made of metal or alloy, each of which is electrically insulated from each other, and provided in a holder 35 made of an electrically insulating material. , one end 38 of the conductive member 34 protrudes toward one electric circuit component 32, and the other end 39 of the conductive member 34 protrudes toward the other electric circuit component 33 (FIG. 4(a)). One end portion 3 of the conductive member 34 protrudes from the connection portion 36 of one electric circuit component 32.
8 is deformed and joined by thermocompression bonding, crimping, etc., and the protruding other end 39 of the conductive member 34 is deformed and joined by thermocompression bonding, crimping, etc. to the connection portion 37 of the other electric circuit component 33 (fourth Figure (b)). In this way, the electric circuit component 3
Connect the corresponding connecting portions 36 and 37 of 2°33.

Such an electrical connection member has the following advantages.

(2) By reducing the size of the conductive member, it is possible to miniaturize the connecting parts of electrical circuit components and increase the number of connection points, thereby enabling higher-density connections between electrical circuit components.

■ Even if electrical circuit components have different thicknesses, by changing the thickness of the electrical connection member, it is possible to always keep the height of the electrical circuit components constant, making multilayer connections easier and creating higher-density connections. Implementation is possible.

■ By increasing the protruding height of the conductive member connected to the connection part of the electric circuit component, it is possible to make a stable connection even if the connection part of the electric circuit component is dropped from the surface, and it is possible to avoid complicated connections. Even electrical circuit components having different shapes can be easily connected to each other.

■ Heat generated from electrical circuit components is radiated through the holder of the electrical connection member, so changes in electrical characteristics due to heat are extremely small. In addition, since it has excellent heat dissipation characteristics, the effect of thermal fatigue is small and reliability is high.

- Since the length of connection between electrical circuit components is shortened, impedance can be reduced and it is possible to increase the speed of electrical circuit components.

A method of manufacturing such an electrical connection member is proposed in Japanese Patent Application No. 133401/1983. Hereinafter, this manufacturing method will be briefly explained based on FIG. 5, which schematically shows the steps.

First, a substrate 51 made of a metal sheet such as a copper plate is prepared (FIG. 5(a)), a negative photosensitive resin 52 is applied onto the substrate 51 using a spin coater, and prebaked at a temperature of about 100° C. Figure 5(b)). After the photosensitive resin 52 is irradiated (exposed) with light through a photomask (not shown) having a predetermined pattern, development is performed. The photosensitive resin 52 remains in the exposed portions, and the photosensitive resin 52 is removed in the unexposed portions by development processing to form a plurality of holes 53 (FIG. 5(C)). 200-40
After curing the photosensitive resin 52 by lowering the temperature to 0° C., the substrate 51 is immersed in an etching solution to perform etching to form a recess 54 in the substrate 51 that communicates with the hole 53 (fifth Figure (d)).

Next, gold plating is applied using the base 51 as a common electrode,
Hole 53. The recess 54 is filled with gold 55, and gold plating is continued until a bump is formed (FIG. 5(e)). Finally, the base 51 is removed by etching, and the electrical connection member 31 is removed.
(Figure 5 (')).

In the electrical connection member 31 manufactured in this way, the gold 55 constitutes the conductive member 34 and the photosensitive resin 52 constitutes the holder 35. The conductive member 34 includes a portion 34a buried in the holder 35 (hereinafter referred to as columnar portion 34a) and a portion 34b protruding from both sides of the holder 35 (end portions 3B and 39 in FIG. 4, hereinafter referred to as bump portion 34b). ). Note that the electrical connection member 31
The dimensions of each part in the holder 35 (photosensitive resin 52
) has a thickness of approximately 10 μm, and the conductive member 34 (column portion 34a)
The diameter of the conductive member 34 is approximately 15 μm, the pitch is approximately 40 μm, and the amount of protrusion of the conductive member 34 is approximately several μm on both the front and back sides.

[Problem to be solved by the invention]

By the way, when the conductive member of such an electrical connection member is joined to the connection part of the electric circuit component by thermocompression bonding or pressure bonding, both the columnar part 34a and the bump part 34b are deformed, so there is an extra charge to deform the bump part 34b. A great deal of force is required. Therefore, in order to deform the bump part 34b and join the conductive member to the connection part of the electric circuit component as shown in FIG. It is. As described above, the conventional electrical connection members still have the disadvantage that they must be joined by applying a high load, and there is still room for further improvement.

The present invention has been made in view of the above circumstances, and the conductive materials used in the columnar part and the bump part of the conductive member are different, and the conductive material making up the columnar part has a harder hardness than the conductive material making up the bump part. By keeping the columnar parts as high as possible during thermocompression bonding and crimping, electrical An object of the present invention is to provide a connecting member and a method for manufacturing the same.

[Means to solve the problem]

An electrical connection member according to the present invention includes a holder made of an electrically insulating material, and a plurality of conductive members provided in the holder in an insulated state, wherein both ends of each of the conductive members are In the electrical connection member protruding from both sides of the holder, each of the conductive members includes one or more first conductive materials protruding from both sides of the holder;
Unlike the conductive material, the holding body is composed of one or more second conductive materials embedded in at least a portion of the holding body, and the second conductive material has a harder hardness than the first conductive material. characterized by high

A method for manufacturing an electrical connection member according to the present invention includes a holder made of an electrically insulating material, and a plurality of conductive members provided in the holder in an insulated state, each of the conductive members A method for manufacturing an electrical connection member in which both ends protrude from both sides of the holder, including the steps of providing an insulating layer that becomes the holder on a base, and removing a pattern from the insulating layer to form a plurality of holes. and exposing the substrate;
a step of etching away a portion of the exposed base; a step of filling the formed hole with a conductive material by plating so as to protrude from both sides of the insulating layer to form the conductive member; and a step of removing the remaining base. The step of filling the conductive material to form the conductive member includes the step of filling the first conductive material, and the step of filling the conductive material with the conductive material, and filling the conductive material with the conductive material. and a step of filling the first conductive material to form the conductive member.

[Effect]

In the electrical connection member of the present invention, in each conductive member, the columnar portion has higher hardness than the bump portion. When such a conductive member is bonded to a connecting portion of an electric circuit component by thermocompression bonding or pressure bonding, the deformation of the bump portion is greater than the deformation of the columnar portion. Therefore, a low load may be applied in this case.

Furthermore, less force is applied to the holder, reducing damage to the holder.

In the method for manufacturing an electrical connection member of the present invention, when filling a conductive material to become a conductive member by plating, a second conductive material having higher hardness is filled to form a columnar part, and A bump portion is formed by filling a first conductive material with low hardness. In this way, an electrical connection member including a conductive member in which the columnar portion is harder than the bump portion is manufactured.

〔Example〕

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be specifically described below based on drawings showing embodiments thereof.

FIG. 1 is a sectional view of an electrical connection member I according to the present invention. The electrical connection member 1 is composed of a plurality of conductive members 2 made of a conductive material and a holder 3 made of polyimide resin, for example, and provided with the conductive members 2 so that the respective conductive members 2 are electrically insulated from each other. has been done. Each conductive member 2 has both ends protruding from both sides of the holder 30.
A columnar portion 2a buried therein and a columnar portion 2a protruding from the holding body 3.
It consists of two bump parts 2b, 2b. The conductive materials used in the columnar part 2a and the bump part 2b constituting the conductive member 2 are different, and the columnar part 2a is made of nickel (nickel).
The bump portions 2b and 2b are made of gold (Au), which has a lower hardness than Ni. Note that the dimensions of each part of the electrical connection member 1 are approximately the same as those of the conventional one,
The thickness of the holder 3 is approximately 10 μm, and the conductive member 2 (column portion 2a
) is approximately 15 μm in diameter, and the formation pitch of the conductive members 2 is approximately 4
0ttm, the amount of protrusion of the conductive member 2 (each bump portion 2b, 2
The protrusion height of b) is approximately 5 μm.

Next, an example of a method for manufacturing an electrical connection member having such a configuration (a method for manufacturing an electrical connection member according to the present invention) will be described based on FIG. 2, which schematically shows the process.

First, prepare a copper plate 11 as a base (FIG. 2(a)), apply a negative photosensitive polyimide resin 12 to one side of the copper plate 11, and pre-bake it at a temperature of around 100°C (Fig. 2(a)). Figure 2(b)). Note that the thickness of the polyimide resin 12 to be applied is set to be thicker than the desired thickness of the holder in the electrical connection member to be manufactured, taking into account reduction due to curing shrinkage. Note that a spin coater, a roll coater, or the like may be used as the coating method, and any method may be used as long as it provides a uniform film thickness.

Next, a photomask with a predetermined pattern (not shown)
After the polyimide resin 12 is irradiated (exposed) with light through the polyimide resin 12, development is performed. In this example, the polyimide resin 12 remains in the exposed areas, and the polyimide resin 12 is removed in the unexposed areas by development processing, forming a plurality of holes 13.
is formed on the polyimide resin 12 (FIG. 2(C)).

Thereafter, the temperature is raised to 200 to 400°C to cure the polyimide resin 12.

Next, the copper plate 11 that has been treated in this manner is immersed in an etching solution to perform etching. A portion of the copper plate 11 near the hole 13 is removed by etching to form a recess 14 in the copper plate 11 that communicates with the hole 13 (FIG. 2(d)). At this time, the diameter of the recess 14 to be formed is larger than the diameter of the hole 13 and smaller than half the distance to the outer periphery of the adjacent hole 13. In this way, the size of the recess 14 is controlled (
By doing so, it is possible to manufacture an electrical connection member in which adjacent conductive members are not electrically connected to each other, and there is no disconnection of conductive members.

Next, holes 13. The recess 14 is filled with a conductive material. Fill the recess 14 with gold 15 using a gold plating solution, then fill the hole 13 with nickel 16 using a nickel plating solution, and fill the hole 16 with nickel 16.
When the polyimide resin 12 is filled in the hole 13 and the deposited surface becomes the surface of the polyimide resin 12 and the road surface, gold plating is again performed using a gold plating solution so that it protrudes from the polyimide resin 12 to a predetermined height. is made of nickel 16, and the bump portions 2b and 2b form the conductive member 2 made of gold 15 (
Figure 2(e)). Finally, copper is etched, but gold 15
．． The copper plate 11 is removed by metal etching using an etching solution that does not etch the nickel 16 and the polyimide resin 12, thereby producing the electrical connection member 1 as shown in FIG. 1 (FIG. 2(f)).

In this example, in the manufactured electrical connection member l,
Nickel 16 constitutes the columnar part 2a of the conductive member 2, and gold 1
5 constitutes the bump portions 2b, 2b of the conductive member 2, and the polyimide resin 12 constitutes the holder 3. The columnar portion 2a is made of nickel 16. Since the bump portions 2b and 2h are made of gold 15, the columnar portion 2a of each conductive member 2 has a higher hardness than the bump portions 2b and 2b.

FIGS. 1(b), (c), and (d) show other embodiments. FIG. 1(b) shows a case where the conductive material of the columnar part 2a exists up to a part of the bump part 2b, and FIG.
) and (d) show the case where the conductive material of the bump portion 2b is present even in the columnar portion 2a.

In the above-described embodiment, nickel and gold were used as the material for the columnar portion 2a + bump portions 2b, 2b of the conductive member 2, but the material for the columnar portion 2a may be as long as it is harder than the bump portions 2b, 2b. , the columnar portion 2a is made of gold (Au
) in addition to Ag, solder, etc., and in addition to nickel (Ni), Cr+ Fe, Co,
Cu etc. can be used. The cross-sectional shape of the conductive member 2 is as follows:
It can be circular, square, or other shapes, but a shape without corners is preferred to avoid excessive concentration of stress. Further, the conductive member 2 does not need to be disposed vertically in the holder 3, and may be inclined from one side of the holder 3 to the other side of the holder 3.

FIG. 3 is a sectional view showing another embodiment of the electrical connection member of the present invention. In this embodiment, the columnar portion 2a of the conductive member 2
is made of two types of conductive materials.

The central portion 20a of the columnar portion 2a is made of nickel (Ni), and the peripheral portions 21a, 21a are made of copper (Cu). Note that the bump portion 2h of the conductive member 2,
2b is made of gold (Au) as in the previous embodiment. In this embodiment, each conductive member 2 has three levels of hardness change from the center to the edge.

Note that the above-mentioned embodiment is an example, and the conductive member 2 is made of a composite structure of different metals, and the columnar part 2a is the bump part 2.
If the hardness is relatively higher than that of b and 2b, any configuration may be used.

Further, in this embodiment, polyimide resin 12 is used as the holder 3, but there is no particular limitation. When the holes 13 are formed by exposure and development, it is necessary to use a photosensitive resin, but if the holes 13 are formed by, for example, irradiation with a high-energy beam instead of exposure and development, the resin must be photosensitive. It does not need to be a synthetic resin. In addition, powder, fiber,
An inorganic material in a desired shape such as a plate, a rod, a sphere, etc.

One or more types of metal materials 9 alloy materials may be contained in a dispersed manner. Contained metal materials.

Specifically, the alloy materials include sieve, 8g+CJ^I,
Re+Ca, Mg, Mo, Fe, Ni+ Co
, Mn, W, Cr, Nb, Zr.

Examples include Ti, Ta + Zn, sn, Ph-5n, etc., and the contained inorganic materials include 5jOz + BzO
++ 8IJ:+, NazO+ KzO+Cab,
ZnO, Bad, PbO, sb, o3. 85
20ff+ Lawn, Zr0z+P2O5
I Ti0z+ MgO+ StC+ Bed
, BP+ BN+ 8 IN, B, C.

TaC, TiBz, CrRz+ TiN+ 5t3Nn
+ Ceramics such as Ta1ls, diamond, glass, carbon, boron, etc.

Further, in this embodiment, the copper plate 11 was used as the substrate, but the substrate is not limited to this, and ^u, Ag+ Fle, Ca, Mg+
Mo, Ni, W.

Fe, Ti+ In, Ta+ Zn+ AI+ S
A thin plate of metal or alloy such as Pb-5n or Pb-5n can be used. However, since only the base is selectively etched away in the final step, the material of the conductive member 2 and the material used for the base must be different.

〔Effect of the invention〕

As detailed above, in the electrical connection member of the present invention, the columnar portion of the conductive member is made of a conductive material having higher hardness than the bump portion, so that such a conductive member can be used to connect electrical circuit components. When the conductive member is thermally compressed and crimped to the columnar part, the bump part deforms in a good manner compared to the columnar part, and it is possible to join the conductive member to the connection part of the electric circuit component with a low load. Additionally, in the past, when there were a large number of conductive members, it was necessary to apply an extremely large load when joining them all at once, but with the electrical connection member of the present invention, the deformed portion is concentrated on the bump portion, so a large load is applied. It is possible to connect a large number of conductive members to the connection portion of an electric circuit component at once without applying any pressure. Furthermore, the applied load becomes a load that deforms the bump portion, and the amount of deformation of the bump portion can be easily controlled, allowing high-density bonding.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view of an electrical connection member according to the present invention, FIG. 2 is a schematic cross-sectional view showing steps of an embodiment of a manufacturing method according to the present invention, and FIG. 3 is a cross-sectional view of an electrical connection member according to the present invention. FIG. 4 is a schematic diagram showing an example of the use of the electrical connection member, and FIG. 5 is a schematic cross-sectional diagram showing steps of a conventional manufacturing method. 1... Electrical connection member 2... Conductive member 2a...
・Column part 2h...Bump part 3...Holding body 11
...Copper plate 12...Polyimide resin 13...Hole
14... Concavity 15... Gold 16... Nickel

Claims (1)

[Claims] 1. A holding body made of an electrically insulating material, and a plurality of conductive members provided in the holding body insulated from each other, wherein both ends of each of the conductive members are connected to the holding body. In an electrical connection member protruding from both sides of the body, each of the conductive members includes one or more types of first conductive material protruding from both sides of the holder;
Unlike the first conductive material, it is composed of one or more types of second conductive material buried in at least a portion of the holding body, and the second conductive material is stronger than the first conductive material. An electrical connection member characterized by high hardness. 2. It has a holder made of an electrically insulating material, and a plurality of conductive members provided in the holder insulated from each other, and both ends of each of the conductive members protrude from both sides of the holder. A method for manufacturing an electrical connection member, comprising: providing an insulating layer to serve as the holder on a base; removing a pattern of the insulating layer to form a plurality of holes to expose the base; a step of etching away a portion of the base that has been removed; a step of filling the formed hole with a conductive material by plating so as to protrude from both sides of the insulating layer to form the conductive member; and removing the remaining base. The step of filling the conductive material to form the conductive member includes the step of filling the first conductive material, and the step of filling the conductive material with the first conductive material, and the step of filling the conductive material with the conductive material. A method for manufacturing an electrical connection member, comprising the steps of: filling a conductive material; and filling the first conductive material to form the conductive member.