JPH03281121A - Method and device for removing micro-burr - Google Patents

Method and device for removing micro-burr

Info

Publication number
JPH03281121A
JPH03281121A JP8070190A JP8070190A JPH03281121A JP H03281121 A JPH03281121 A JP H03281121A JP 8070190 A JP8070190 A JP 8070190A JP 8070190 A JP8070190 A JP 8070190A JP H03281121 A JPH03281121 A JP H03281121A
Authority
JP
Japan
Prior art keywords
workpiece
conductor
burrs
electrolyte solution
microdeburring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8070190A
Other languages
Japanese (ja)
Other versions
JP2997500B2 (en
Inventor
Yuji Ochiai
落合 雄二
Masami Masuda
正美 桝田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2080701A priority Critical patent/JP2997500B2/en
Publication of JPH03281121A publication Critical patent/JPH03281121A/en
Application granted granted Critical
Publication of JP2997500B2 publication Critical patent/JP2997500B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

PURPOSE:To constrain the change in the absolute dimension of a work, by forming a local battery by a work, conductor and an electrolytic solution and simultaneously performing deburring by a mechanical action in the electrolytic solution. CONSTITUTION:A local battery is formed by a work 1, conductor 7 and an electrolytic solution 13 by bringing into contact with or connecting the work 1 and conductor 7 and dipping the work 1 and conductor 7 in the electrolytic solution 13. Then, the deburring of the work 1 is performed by a mechanical action with a mechanical deburring means 3 in this electrolytic solution 13. Thus an electric chemical action is superposed on the mechanical action and the change in the absolute dimension of the work 1 is constrained.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、微小バリ取り方法およびその装置に係り、特
に、例えば磁気ディスク装置部品、磁気ヘッド等の精密
加工品の機械加工にともなう微小なバリを取り除くのに
好適な微小バリ取り方法およびその装置に関するもので
ある。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method and device for removing minute burrs, and in particular, to removing minute burrs during machining of precision products such as magnetic disk drive parts and magnetic heads. The present invention relates to a microburr removal method and device suitable for removing burrs.

〔従来の技術〕[Conventional technology]

従来のバリ取り方法は、例えば「ブレス技術」第25巻
13号(1987年刊)、ページ57〜61に論じられ
ているように、バレル研磨、ブラシ研磨など研削機械加
工によるものをはじめ、超音波バリ取り、電解バリ取り
など化学的作用によるものなど数々の方法が提案されて
いる。
Conventional deburring methods include grinding machining such as barrel polishing and brush polishing, as well as ultrasonic A number of methods have been proposed, including those using chemical effects such as deburring and electrolytic deburring.

しかし、いずれも、数μmからそれ以下の小さなバリに
ついてはn′及されていない。例えば、ナイロンブラシ
による研磨についてみると、機械前」ニで発生するバリ
の多くは取り除くことができるように見えるが、詳しく
調べると数μmから10μm前後のバリが残っている。
However, in none of these studies is there any mention of small burrs of several micrometers or less. For example, when polishing with a nylon brush, it appears that most of the burrs generated at the front of the machine can be removed, but upon closer inspection, burrs of several micrometers to around 10 micrometers remain.

また、化学的バリ取りによれば、バリの存在する被加工
物が全面均一に加]ニさせることになり、バリの幅(ノ
ソみ)が10μm Mf後あれば、全体寸法も大略10
μm近く減少するので、寸法精度が数μm前後と厳しい
部品の加工には適用できないことについて配慮されてい
なかった。
In addition, according to chemical deburring, the entire surface of the workpiece with burrs is uniformly deburred, and if the burr width (notch) is 10 μm after Mf, the overall size is approximately 10 μm.
No consideration was given to the fact that since the reduction is close to .mu.m, it cannot be applied to the processing of parts with severe dimensional accuracy of around several .mu.m.

機械的作用によるバリ取り方法の一例として、特開昭6
3−144943号公報には、研磨用液体を供給しなが
ら、ナイロン不織布に研磨砥粒を付着した研磨部材を、
バリを有する板材成形品に圧接して回転させる方法が開
示されている。
As an example of a deburring method using mechanical action,
No. 3-144943 discloses that a polishing member having polishing abrasive grains attached to a nylon nonwoven fabric while supplying a polishing liquid,
A method of press-contacting and rotating a plate molded product having burrs is disclosed.

また、化学的作用によるバリ取り方法の一例としては、
特開昭63−286587号公報に、プレス加工品に生
じたバリを金属溶解薬品によって溶解させるエツチング
]二程と、その薬品の残りを中和して洗浄する工程とか
らなる方法が開示されている。
In addition, as an example of a deburring method using chemical action,
Japanese Unexamined Patent Publication No. 63-286587 discloses a method comprising two steps of etching in which burrs generated on a pressed product are dissolved using metal-dissolving chemicals, and a step of neutralizing the remaining chemicals and cleaning. There is.

しかし、バリの存在する被加工物に、機械的作用と化学
的作用とを同時に働かせる技術については開発されてい
なかった。
However, no technology has been developed to simultaneously apply mechanical and chemical effects to a workpiece containing burrs.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上記従来技術は、微小なバリを取り除くことやJ′法変
化について配慮がされておらず、数μmから10数μm
程度のバリが残留すること、加工物の絶対寸法が変化す
ることなどの問題があった。
The above-mentioned conventional technology does not take into account the removal of minute burrs or the change in J' method.
There were problems such as a certain degree of burr remaining and changes in the absolute dimensions of the workpiece.

本発明は、機械的作用で発生した被加工物の微小なバリ
をも除去し、被加工物の絶対寸法の変化を抑制しうる微
小バリ取り方法およびその装置を堤供することを、その
目的とするものである。
An object of the present invention is to provide a method and device for removing minute burrs that can remove minute burrs generated by mechanical action on a workpiece and suppress changes in the absolute dimensions of the workpiece. It is something to do.

〔課題を解決するための手段〕[Means to solve the problem]

」〕記目的を達成するために、本発明の微小バリ取り方
法に係る第1の発明の構成は、機械的作用を受けて発生
したバリを取り除く方法であって、バリの存在する被加
工物に対して、被加工物と異なる導電体を電解質溶液内
で接触あるいは接続させ、被煎」二物、導電体、電解質
溶液間で局部電池を形成せしめ、当該バリ発生部に機械
的作用を加えるとともに、電気化学作用をもたせるよう
にしたものである。
] In order to achieve the above object, the first aspect of the invention relating to the microburr removal method of the present invention is a method for removing burrs generated under mechanical action, which In contrast, a conductor different from the workpiece is contacted or connected in an electrolyte solution, a local battery is formed between the two objects, the conductor, and the electrolyte solution, and a mechanical action is applied to the part where the burr occurs. At the same time, it is designed to have electrochemical action.

また、上記目的を達成するために、本発明の微小バリ取
り方法に係る第2の発明の構成は、機械的あるいは物理
的作用を受けて発生したバリを取り除く方法であって、
バリの存在する被加工物に対して、被加工物と異なる導
電体を電解質溶液内で接触あるいは接続させ、被加工物
、導電体、電解質溶液間で局部電池を形成せしめ、当該
バリ発生部に、当該電解質溶液に微粒子を含有させて加
工液とし、この加工液を、バリ発生部に高圧で供給して
機械的作用を加えるようにしたものである。
Further, in order to achieve the above object, a second aspect of the invention relating to the microburr removal method of the present invention is a method for removing burrs generated due to mechanical or physical action,
A conductor different from the workpiece is contacted or connected in an electrolyte solution to a workpiece where burrs exist, and a local battery is formed between the workpiece, the conductor, and the electrolyte solution, and the burr is , the electrolyte solution contains fine particles to form a machining fluid, and this machining fluid is supplied at high pressure to the burr generating area to apply a mechanical action.

一方、上記目的を達成するために、本発明に係る微小バ
リ取り装置のもっとも基本的な構成は、機械的作用を受
けて発生したバリを取り除く装置であって、被加工物の
バリ発生部に機械的作用を加える手段と、被加工物のバ
リ発生部に電気化学的作用を及ぼす手段とを備えたもの
である。
On the other hand, in order to achieve the above object, the most basic configuration of the microdeburring device according to the present invention is a device that removes burrs generated under mechanical action, and is a device that removes burrs generated by mechanical action. It is equipped with means for applying a mechanical action and means for applying an electrochemical action to the burr-generating portion of the workpiece.

より具体的に、本発明の微小バリ取り装置に係る第1の
発明の構成は、機械的作用を受けて発生したバリを取り
除く装置であって、バリの存在する被加工物を可動自在
に保持する手段と、被加工物のバリ発生部に機械的作用
を加える回転ブラシ手段と、被加工物と異なる導電体を
被加工物と接触あるいは接続できる手段と、被加工物と
導電体間に電流を流す手段と、被加工物のバリ発生部に
電解質溶液を供給する手段とを偏えたものである。
More specifically, the configuration of the first invention related to the microdeburring device of the present invention is a device for removing burrs generated under mechanical action, which movably holds a workpiece having burrs. means for applying a mechanical action to the burr-generating portion of the workpiece; means for contacting or connecting a conductor different from the workpiece to the workpiece; and means for applying an electric current between the workpiece and the conductor. The means for flowing the electrolyte solution and the means for supplying the electrolyte solution to the burr-generating part of the workpiece are biased.

また、本発明の微小バリ取り装置に係る第2の発明の構
成は、機械的作用を受けて発生したバリを取り除く装置
であって、バリの存在する被加工物を可動自在に保持す
る手段と、被加工物のバリ発生部に電解質溶液に微粒子
を含有させた混合液を、前記バリ発生部に高圧で供給す
る手段と、被加工物と異なる導電体を被加工物と接触あ
るいは接続できる手段と、被加工物と導電体間に電流を
流す手段とを備えたものである。
Further, a second aspect of the invention relating to the micro-deburring device of the present invention is a device for removing burrs generated under mechanical action, which includes means for movably holding a workpiece having burrs. , a means for supplying a mixture of electrolyte solution containing fine particles to the burr-generating part of the workpiece at high pressure; and a means for contacting or connecting a conductor different from the workpiece to the workpiece. and means for passing a current between the workpiece and the conductor.

〔作用〕[Effect]

上記の技術的手段による働きは、次のとおりである。 The function of the above technical means is as follows.

被加工物に対し電気化学的に作用する電解質溶液(加工
液)は、単に被加工物を浸した状態では、はとんど化学
的変化(エツチング作用)は生じないがJ被加工物が異
なる導電体と加工液中で接触あるいは電気的に接続され
ると、エツチング作用が生じ、さらに被加工物がより化
学的に活性になれば、いっそうエツチング作用は促進す
る。
The electrolyte solution (processing fluid) that acts electrochemically on the workpiece rarely causes a chemical change (etching action) when the workpiece is simply immersed, but the workpiece is different. When a conductor is brought into contact with or electrically connected to a conductor in a processing fluid, an etching action occurs, and as the workpiece becomes more chemically active, the etching action is further accelerated.

一般に、金属材料等は、例えば、久保輝一部。In general, metal materials and the like include, for example, Teru Kubo.

メカノケミストリー概論、化学同人、1971年刊、ペ
ージ3に記載されているように1分子が整然と並んでい
る場合より、分子の配列が乱れた場合の方が化学的に活
性となる。
As described in Introduction to Mechanochemistry, Kagaku Doujin, 1971, page 3, when the molecules are arranged in a disordered manner, they are more chemically active than when the molecules are arranged in an orderly manner.

このため、材料に塑性変形と、弾性変形を与え分子の配
列を乱しながら加工する機械的加工と、その分子配列の
乱れによる材料の化学的活性を利用する化学的加工とを
同時に行うことにより、機械的作用を受けた部分を選択
的に化学加工を行うことができる。微小なバリは、機械
的作用を受けた部分が変形して残留しているものである
が、前述のように機械的作用を与え、弾性変形と塑性変
形が合わさった状態で分子の乱れが大きい時に電気化学
的作用を同時に加えることにより、目的とする箇所の微
小なバリを取り除くことが再録である。
For this reason, it is possible to simultaneously perform mechanical processing, which applies plastic deformation and elastic deformation to the material and disturbs the arrangement of molecules, and chemical processing, which utilizes the chemical activity of the material due to the disturbance of the molecular arrangement. , it is possible to selectively chemically process parts that have been subjected to mechanical action. Microscopic burrs are the remains of parts that have been deformed by mechanical action, but as mentioned above, the mechanical action results in a combination of elastic and plastic deformation, resulting in large molecular disturbances. Sometimes electrochemical action is applied at the same time to remove minute burrs at the desired location.

〔実施例〕〔Example〕

以下、本発明の各実施例を第1図ないし第7図を参照し
て説明する。
Embodiments of the present invention will be described below with reference to FIGS. 1 to 7.

第1図は、本発明の一実施例に係るバリ取り装置の略示
構成図、第2図は、加工対象の磁気ディスク装置用部品
の斜視図、第3図は、第2図の部品におけるバリ発生部
を示すA部拡大図である。
FIG. 1 is a schematic configuration diagram of a deburring device according to an embodiment of the present invention, FIG. 2 is a perspective view of a magnetic disk device component to be processed, and FIG. It is an enlarged view of part A showing a burr occurrence part.

第1図に示すバリ取り装置は、第1の発明の一実施例を
示すものである。
The deburring device shown in FIG. 1 shows an embodiment of the first invention.

第1図において、1は被加工物、2は、被加工物1を保
持する手段に係る保持部で、この保持部2は実線矢印に
示すように回転、上下往復動ができる機構を有している
が、これらの機構は既知の−ゝ\ 技術的手段によるものであるから、ここでは図示を省略
する。なお、保持部2は、プラスチック等の絶縁物で、
被加工物】と回転、上下往復動する機構とは、電気的に
切りはなしである。
In FIG. 1, 1 is a workpiece, and 2 is a holding part that is a means for holding the workpiece 1. This holding part 2 has a mechanism that can rotate and reciprocate up and down as shown by solid line arrows. However, since these mechanisms are based on known technical means, their illustrations are omitted here. Note that the holding part 2 is made of an insulating material such as plastic.
The workpiece and the mechanism that rotates and reciprocates up and down are electrically connected.

3は、被加工物のバリ発生部に機械的作用を加える手段
に係る加工用回転ブラシであり、4は、回転ブラシのシ
ャフト、5は加工液供給用の穴、6は、加工液噴き出し
穴であり、その回転1石V動機構は既知の技術的手段に
よるものであるから、ここでは図示を省略する。
3 is a rotary brush for machining which is a means for applying mechanical action to the burr-generating part of the workpiece; 4 is the shaft of the rotary brush; 5 is a hole for supplying machining fluid; and 6 is a machining fluid spouting hole. Since the rotating single-stone V-motion mechanism is based on known technical means, illustration thereof is omitted here.

7は導電体、8は電源装置、9.9’は結線にて加工物
1.導電体7を電源装置8を介して接続しである。
7 is a conductor, 8 is a power supply device, and 9.9' is a wire connection to workpiece 1. The conductor 7 is connected via a power supply device 8.

10は、被加工物のバリ発生部に加工液を供給する手段
に係る加工液供給ノズルである。
Reference numeral 10 denotes a machining fluid supply nozzle relating to means for supplying machining fluid to the burr-generating portion of the workpiece.

11は、加工液j3を循環させるための液槽。11 is a liquid tank for circulating the machining liquid j3.

12は液槽11の底部に設けたJJI水「Jで、加工液
1;3を排出し、図示しないが濾過手段を具備した畑土
液供給タンクに戻し、加工液を循環させるように構成さ
Jしている。
Reference numeral 12 denotes a JJI water tank provided at the bottom of the liquid tank 11, which is configured to discharge the machining liquids 1 and 3 and return them to a field soil liquid supply tank equipped with a filtration means (not shown) to circulate the machining liquid. I'm doing J.

1 被加工物1は、保持部2により保持さオシ、加工用回転
ブラシ3に所定量食い込みながら回転あるいは上下動を
加えられてバリ取りが行なわれる。
1 The workpiece 1 is held by the holding part 2 and is rotated or moved up and down while biting into the rotating machining brush 3 by a predetermined amount to remove burrs.

〔実施例1〕 第1図に示すバリ取り装置を用い、第2,3図に示す磁
気ディスク装置用部品のノ<り取り作業を行う例につい
て説明する。
[Embodiment 1] An example will be described in which the deburring apparatus shown in FIG. 1 is used to perform deburring work on parts for a magnetic disk drive shown in FIGS. 2 and 3.

第2図に示す磁気ディスク装置用部品IAは、アルミニ
ウム合金製のもので、矢印a、b、 C等の方向から機
械加工し、幅Wの直方体状突起を形成し、−E面、側面
等も機械加−[して製作する。この機械加工の際に、第
3図に示すようなバリが発生するが、バリの大きさl]
は約100μm〜数100μmていどである。
The magnetic disk device component IA shown in Fig. 2 is made of aluminum alloy, and is machined from the directions of arrows a, b, and C to form a rectangular parallelepiped protrusion with a width W. It is also manufactured by machining. During this machining, burrs are generated as shown in Figure 3, but the size of the burrs is l]
is about 100 μm to several 100 μm.

このバリ取りについては、従来からバレル研磨。Traditionally, barrel polishing is used to remove burrs.

ベル1−研磨など種々の方法で行われているが、バリ取
り加工後、数μm〜数1071171前後のバリが残留
していた。10 /l m以下の微小なバリに対しては
、従来技術では、塑性変形領域の研削となり、バリを取
り除くことは難しかった。
Although various methods such as Bell 1-polishing were carried out, burrs of several μm to several 10,711,71 mm in size remained after the deburring process. In the case of minute burrs of 10 /l m or less, the conventional technique involves grinding in the plastic deformation region, making it difficult to remove the burrs.

° 12゜ この残留バリは、素材に比べ、機械的変形を受は残留歪
を有している。特に機械的加工中においては、塑性変形
と弾性変形とが合わさった状態であるため、・層残留バ
リは化学的活性となっており、この素材とこAしと異な
る導電体である銅を結線し、電解質溶液、たとえば0.
3%塩化第2鉄溶液を加えながら加工することによりバ
リを小さくできるものである。測定したところ、バリ以
外の部分の減少は0.01μm以下であった。
12° This residual burr has a residual strain due to mechanical deformation compared to the raw material. In particular, during mechanical processing, plastic deformation and elastic deformation are combined, so the residual burr in the layer becomes chemically active, and when this material is connected to copper, which is a different conductor, , an electrolyte solution, e.g.
By processing while adding a 3% ferric chloride solution, burrs can be reduced. When measured, the reduction in areas other than burrs was 0.01 μm or less.

すなわち、本実施例では、第1図に示すバリ取り装置を
用い、被加工物1としてアルミニウム合金の磁気ディス
ク装置用部品1− Aに対して、加工用回転ブラシz3
として、酸化アルミナ#600粒度の砥粒を含有した外
径φ700 rn rnのナイロンブラシを用い、導電
体7に純銅を用い、加工液13に0.3%塩化第2鉄溶
液を用い、加工用回転ブラシ3を毎分900回転で回転
させ・つつ、被加工物1を加工用回転ブラシ3に約5m
m食い込むように設定し、毎分10往復上下に動かして
加工した結果、前加工のバリの大きさか数1. O0μ
mあったものを残留バリを1−μ■1以内にすることが
できた。このとき、加工用回転ブラシ3は、被加工物1
の端部に強く作用するため、バリが残留している端部が
多く加工されることになり、平らな部分はほとんど加工
されないので、被加工物の絶対寸法の変化は1μm以内
であった。なお、本実施例においては、被加工物を含め
て2種の電極を用いているが、電極は2種に限定される
ものではない。
That is, in this embodiment, using the deburring apparatus shown in FIG.
For machining, a nylon brush with an outer diameter of φ700 rn containing abrasive grains of alumina oxide #600 was used, pure copper was used for the conductor 7, and a 0.3% ferric chloride solution was used for the machining fluid 13. While rotating the rotating brush 3 at 900 revolutions per minute, the workpiece 1 is placed on the processing rotating brush 3 for about 5 m.
As a result of machining by moving up and down 10 times per minute, the size of the burr from the previous machining was determined to be several 1. O0μ
It was possible to reduce the residual burr to within 1-μ■1. At this time, the rotating brush 3 for processing works on the workpiece 1.
Because it acts strongly on the edges of the workpiece, many of the edges with residual burrs are machined, and the flat parts are hardly machined, so the change in the absolute dimensions of the workpiece was within 1 μm. In this example, two types of electrodes are used including the workpiece, but the number of electrodes is not limited to two types.

〔実施例2〕 実施例]−において、電源装置8に直流電源を使い、加
工液13に0.1%塩化第2鉄溶液を用い、電圧5vを
印加しつつ回転ブラシ3により加工した結果、電圧を印
加しないで、0.3%塩化第2鉄溶液を用いた場合と同
程度の時間で残留バリを1μm以内にすることができた
[Example 2] In Example]-, a DC power source was used for the power supply 8, a 0.1% ferric chloride solution was used for the machining fluid 13, and the result of machining with the rotating brush 3 while applying a voltage of 5 V was obtained. Without applying a voltage, the residual burr could be reduced to within 1 μm in about the same time as when using a 0.3% ferric chloride solution.

〔実施例3〕 実施例2において、加工用回転ブラシーp−として、銅
ワイヤを用い、加工液13にOl;3%塩化第2鉄溶液
で、被加工物1と、加工用回転ブラシ3との間に電圧5
■を印加しつつ加工することにより、残留バリ1μm前
後が得られた。本実施例の如く加」二相回転ブラシ3に
、導電体を使用することにより、実施例2に示した導電
体7は特に用いずども良く、また、加工用回転ブラシ3
に心電体を用いて、被加工物]−を加」ニすることによ
り、導電体表面は、単に電極として用いる場合に比べ、
被加工物と接触し、削られるため表面の活性化は増すた
め、−摺電気化学的作用は増し、効率良く微小バリ取り
加工が可能となる。
[Example 3] In Example 2, a copper wire was used as the rotating machining brush p-, and the workpiece 1 and the machining rotary brush 3 were treated with a 3% ferric chloride solution in the machining liquid 13. voltage between 5
By processing while applying (2), a residual burr of approximately 1 μm was obtained. By using a conductor for the two-phase rotary brush 3 as in this embodiment, the conductor 7 shown in the second embodiment can be omitted, and the machining rotary brush 3
By applying electrocardiograms to the workpiece, the surface of the conductor can be
Since the surface becomes more active as it comes into contact with the workpiece and is scraped, the -sliding electrochemical action increases, making it possible to efficiently remove minute burrs.

本実施例においては、銅ワイヤを用いる場合について述
べたが、ニッケル、錫、鉄製等、他の材質についても同
様の効果があることは、言うまでもない。
In this embodiment, the case where copper wire is used has been described, but it goes without saying that similar effects can be obtained using other materials such as nickel, tin, iron, etc.

〔実施例4〕 第1図に示すバリ取り装置を用い、第4,5図に示す磁
気ディスク装置用部品のバリ取り作業を行う例について
説明する。
[Embodiment 4] An example in which the deburring apparatus shown in FIG. 1 is used to deburr parts for a magnetic disk drive shown in FIGS. 4 and 5 will be described.

第4図は、加1対象の磁気ディスク装置用部品の斜視図
、第5図は、第4図の部品におけるバリ発生部を示すB
部拡大断面図である。
FIG. 4 is a perspective view of a part for a magnetic disk drive to be applied, and FIG.
FIG.

第4図に示すステンレス銅製リング状部品IBの内周面
取り加工において、」法h1の2吹バリが発生する。
In chamfering the inner periphery of the stainless steel ring-shaped part IB shown in FIG. 4, two-blow burrs of method h1 occur.

本実施例では、この2次バリに対して、第1図に示すバ
リ取り装置を用い、導電体7に純銅を用い、加工液13
に3%塩化第2鉄を用い、外周面から供給すると回転力
により液が飛散し供給効率が低下するため、供給効率を
高めるために加工液供給穴5から供給しつつ、加工用回
転ブラシ3として、酸化アルミナ31500粒度の砥粒
を含有した外径50mmのナイロンブラシを毎分900
回転・の条件で、かつ、保持部2が、被加工物IBの内
周面に加工用回転ブラシ3の外周面が作用するように回
転運動させることにより、加工前のバリが数10pmで
あったものを残留バリを1μm以内にできた。
In this embodiment, the secondary burr is removed by using the deburring device shown in FIG.
If 3% ferric chloride is used, and the liquid is supplied from the outer peripheral surface, the liquid will scatter due to the rotational force and the supply efficiency will decrease.In order to increase the supply efficiency, the machining liquid is supplied from the machining liquid supply hole 5 and the rotary brush 3 for machining is used. A nylon brush with an outer diameter of 50 mm containing abrasive grains of alumina oxide with a grain size of 31,500 was
By rotationally moving the holding part 2 under the conditions of rotation and so that the outer circumferential surface of the rotary machining brush 3 acts on the inner circumferential surface of the workpiece IB, the burr before machining can be reduced to several tens of pm. The residual burr could be kept within 1 μm.

〔実施例5〕 バリ取り装置は、先の第1図のバリ取り装置における加
工用回転ブラシ3を止め、加工液供給ノズルを高圧発生
手段に接続させたもの、すなわち第8図に示した装置を
用いる。ここで、14は高圧発生手段に接続した加工液
供給ノズル、15は砥粒供給ノズル、16は添加加工液
供給ノズルを示し、導電体7には、ニッケルを用いた。
[Example 5] The deburring device is the deburring device shown in FIG. 1, in which the rotary machining brush 3 is stopped and the machining fluid supply nozzle is connected to high pressure generation means, that is, the device shown in FIG. 8. Use. Here, 14 is a machining fluid supply nozzle connected to high pressure generating means, 15 is an abrasive grain supply nozzle, 16 is an additive machining fluid supply nozzle, and the conductor 7 is made of nickel.

被加工物は、実施例1の例と同様のアルミニウム合金製
磁気ディスク装置用部品IAとする。
The workpiece is an aluminum alloy magnetic disk drive component IA similar to the example of Example 1.

すなわち、実施例5では、加工液供給ノズル14より、
15の砥粒供給ノズルより供給した炭化けい素#120
0粒度の砥粒と、16の添加加工液としての水酸化ナト
リウムを混合し、水酸化ナトリウムは0.2%濃度とし
た混合液を、被加工物に対し直接に50X10’paの
圧力で噴射してバリ取り加工を行った結果、残留バリを
1μm以内にすることができた。
That is, in Example 5, from the machining fluid supply nozzle 14,
Silicon carbide #120 supplied from No. 15 abrasive grain supply nozzle
A mixture of 0 grain size abrasive grains and 16 added sodium hydroxide with a concentration of 0.2% is sprayed directly onto the workpiece at a pressure of 50 x 10'pa. As a result of deburring, the remaining burr could be reduced to within 1 μm.

なお、このバリ取り装置における加工液供給ノズルは、
混合液供給用角度を揺動可能として、混合液の高圧噴射
による機械的作用をより効果的にすることができる。ま
た、電圧を印加しながら加工することにより、加工能率
が向上し、電圧を印加しない場合に比べより低濃度の電
解質溶液を用いても同程度の効果がでるのは、実施例2
に述べたと同じである。
The machining fluid supply nozzle in this deburring device is
By making the angle for supplying the mixed liquid swingable, the mechanical action of the high-pressure injection of the mixed liquid can be made more effective. In addition, the machining efficiency is improved by machining while applying a voltage, and the same effect can be obtained even when using a lower concentration electrolyte solution than when no voltage is applied, as shown in Example 2.
This is the same as described in .

〔実施例6〕 ここでは、第2の発明の他の実施例を、第6゜7図に示
すフェライト部品のバリ取り作業を行う例について説明
する。
[Embodiment 6] Here, another embodiment of the second invention will be described with reference to an example in which a ferrite component is deburred as shown in FIG. 6-7.

第6図は、加工対象のフェライト部品の斜視図、第7図
は、第6図の部品におけるバリ発生部を示すXl−X2
線拡大断面図である。
Fig. 6 is a perspective view of the ferrite part to be machined, and Fig. 7 is Xl-X2 showing the burr generation part in the part of Fig. 6.
It is a line enlarged sectional view.

第6図に示すフェライト部品ICは、M、−Z、。The ferrite component IC shown in FIG. 6 is M, -Z,.

合金製のもので、矢印d方向から研削溝加工するもので
あり、第7図に示す寸法h2. h、のように、0.0
5〜1μm程度のバリが発生する。
It is made of alloy, and the grooves are ground from the direction of arrow d, and the dimensions h2. h, like 0.0
Burrs of about 5 to 1 μm are generated.

この程度の小さいバリも、このフェライト部品の用途で
あるVTRヘッドを製作する上では問題となるので、こ
のバリを取り除き、残留バリとしては0.05μm以内
に納める必要がある。また、このバリは、硬いが脆いも
のであるため、通常の機械的方法では欠は落ちてチッピ
ングを生ぜしめ、製品不良の原因を作ることになる。
Even small burrs of this order pose a problem when manufacturing VTR heads, which are the applications of this ferrite component, so it is necessary to remove these burrs and keep the remaining burrs within 0.05 μm. Moreover, since this burr is hard but brittle, it will fall off and cause chipping when using normal mechanical methods, resulting in product defects.

そこで、本実施例では、化学的には加工歪による活性化
を図り、ナイロンブラシ等、軟らかい工具により機械的
に力を加えつつあるいは電気化学的に加工して微小なバ
リを取り除こうとするものである。
Therefore, in this example, we aim to chemically activate the burr by processing strain, and remove minute burrs by applying mechanical force using a soft tool such as a nylon brush, or by electrochemical processing. be.

すなわち、加−[用回転ブラシ3として、線径0.2m
mのナイロンブラシ、導電体7にはすずを用い、被煎二
に物Jと結線した状態で、加工液13としての5%塩酸
中に浸すことにより、局部電池を形成するため、電気化
学的加工が促進し、残留バリを0.05μm以内にでき
た。さらに、電源装置8により、局部電池に直列になる
よう直流電源を用いて電圧を印加すると、加工能率はさ
らに増進する。すなわち、5%塩酸を加工液1.3とし
て用い、導電体7としてのすすと被加工物]を結線し、
そこに外部電圧5Vを加えナイロン製の加工用回転ブラ
シ3で加工すると、外部電圧を加えない場合に比ノ\1
0倍以1−向上できた。
In other words, as the rotating brush 3 for addition, the wire diameter is 0.2 m.
The nylon brush M and the conductor 7 are made of tin, and by immersing them in 5% hydrochloric acid as the processing liquid 13 while connected to the object J, electrochemical Processing was accelerated and residual burrs were kept within 0.05 μm. Furthermore, if a voltage is applied by the power supply device 8 using a DC power supply in series with the local battery, the processing efficiency is further improved. That is, using 5% hydrochloric acid as the machining fluid 1.3, the soot as the conductor 7 and the workpiece were connected,
If an external voltage of 5V is applied and the processing is performed using the nylon rotating brush 3, it will be compared to the case where no external voltage is applied.
I was able to improve by 1-0 times or more.

また、−1−記構酸において、加工液として1%塩酸液
を用い、この液に粉末砥粒として酸化アルミニウム1μ
rnを混合し、この混合液を20XI O”IPaの圧
力で加工面に噴きつけることにより、チッピングの発生
がなくエツチングされて、残留バリを0.05μn1以
内にすることができた。
In addition, in the -1- structure acid, a 1% hydrochloric acid solution was used as the processing solution, and 1μ of aluminum oxide was added to this solution as powdered abrasive grains.
By mixing rn and spraying this mixed solution onto the processed surface at a pressure of 20XI O''IPa, etching was performed without chipping, and residual burrs could be reduced to within 0.05 μn1.

さらに、上記実施例において、比抵抗が10゛Ω・mと
高いN i −Z 11系フエライ1〜材についても、
同様の効果が得られた。
Furthermore, in the above example, regarding the N i -Z 11-based ferrite 1~ material with a high specific resistance of 10゛Ω・m,
A similar effect was obtained.

上記の各実施例によれば、機械加工により発生した数1
0μm以下の微小バリを取り除く際に、被加工物に対し
て化学的作用が極めて少ない濃度、あるいは液の種類と
するため、回転ブラシにより、強く作用し、変形を受け
やすい微小バリの存在する端部はど化学的に活性をイI
Fび、化学的あるいは電気化学的に加工(エツチング)
されやすいため、加工ロ的とする端部のバリ以外の・」
゛法度化を生ずることなく、微小バリ取り加工ができる
という効果がある。
According to each of the above embodiments, the number 1 generated by machining
When removing minute burrs of 0 μm or less, a rotating brush is used to remove the edge where minute burrs are easily deformed, in order to use a concentration or type of liquid that has extremely little chemical effect on the workpiece. The part is chemically active.
Processing (etching) chemically or electrochemically
Other than the burrs on the edges, which are easily processed,
゛It has the effect of allowing microscopic deburring to be performed without legalization.

なお、上記の実施例において、加工用回転ブラシの回転
方向は一方向でも良いが、効率よく加」ニするためには
、一定時間間隔で反転させた方が良いことはj゛うまで
もない。
In the above embodiment, the rotating direction of the processing rotary brush may be in one direction, but it goes without saying that it is better to reverse the rotation direction at regular time intervals in order to perform the processing efficiently.

また、砥粒と化学液との混合液を被加工物に作用させる
方法も、上記実施例では高圧噴射の例を説明したが、本
発明はこれに限るものではない。
Further, as for the method of applying a mixed liquid of abrasive grains and a chemical liquid to a workpiece, an example of high-pressure injection was explained in the above embodiment, but the present invention is not limited to this.

特に図示して説明しないが、前記混合液を高速でdε動
循環させる液槽内に被加工物を設置するようにして差支
えない。
Although not particularly illustrated or explained, the workpiece may be placed in a liquid tank in which the mixed liquid is circulated at high speed.

〔発明の効果〕〔Effect of the invention〕

以上詳細に説明したように、本発明によりば、機械的作
用で発生した被加工物の微小なバリを除去し、被加工物
の絶対]“法の変化を抑制しうる微小バリ取り方法およ
びその装置を提供することができる。
As described above in detail, the present invention provides a microburr removal method that can remove minute burrs generated by mechanical action from a workpiece and suppress changes in the absolute thickness of the workpiece. equipment can be provided.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の一実施例に係るバリ取り装置の略示
構成図、第2図は、加工対象の磁気ディスク装置用部品
の斜視図、第3図は、第2図の部品におけるバリ発生部
を示すA部拡大図、第4図は、加[二対gその磁気ディ
スク装置用部品の斜視図、第5図は、第4図の部品にお
けるバリ発生部を示すB部拡大断面図、第6図は、加工
対象のフェラ(符号の説明) 1・・被加工物、 3・加工用回転ブラシ、 6・加工液噴き出し穴、 8・・電源装置、 1o・・・加工液供給ノズル、 13・・・加]:液。 2・保持部、 5・・加工液供給用穴、 7・・・導電体、 11・・液槽、
FIG. 1 is a schematic configuration diagram of a deburring device according to an embodiment of the present invention, FIG. 2 is a perspective view of a magnetic disk device component to be processed, and FIG. FIG. 4 is an enlarged view of part A showing the part where burrs occur, FIG. 4 is a perspective view of the part for a magnetic disk drive, and FIG. Fig. 6 shows a blowjob to be processed (explanation of symbols) 1. Workpiece, 3. Rotating brush for processing, 6. Machining fluid spouting hole, 8. Power supply, 1o. Machining fluid supply. Nozzle, 13... addition]: Liquid. 2. Holding part, 5. Machining fluid supply hole, 7. Conductor, 11. Liquid tank,

Claims (1)

【特許請求の範囲】 1、バリを有する被加工物と該被加工物と異なる導電性
を有する導電体を接触あるいは接続し、電解質溶液内に
該被加工物と該導電体を浸し、該被加工物と該導電体と
該電解質溶液とで局部電池を形成し、同時に該電解質溶
液中で機械的バリ取り手段で機械的作用によりバリ取り
を行い、機械的作用に電気的化学作用を重畳させてバリ
取りを行うことを特徴とする微小バリ取り方法。 2、該局部電池に外部電池より電圧を印加することを特
徴とする請求項1記載の微小バリ取り方法。 3、バリを有する被加工物と該被加工物と異なる導電性
を有する導電体を接触あるいは接続し、電解質溶液内に
該被加工物と該導電体を浸し、該被加工物と該導電体と
該電解質溶液とで局部電池を形成し、同時に高圧供給手
段により微粒子を含有した電解質溶液を該被加工物に高
圧供給し機械的作用を加えバリ取りを行い、機械的作用
に電気的化学作用を重畳させてバリ取りを行うことを特
徴とする微小バリ取り方法。 4、バリを有する被加工物と該被加工物と異なる導電性
を有する導電体を接触あるいは接続し、電解質溶液内に
該被加工物と該導電体を浸し、該被加工物と該導電体と
該電解質溶液とで局部電池を形成し、該局部電池に外部
電池より電圧を印加し、同時に高圧供給手段により微粒
子を含有した電解質溶液を該被加工物に高圧供給し機械
的作用を加えバリ取りを行い、機械的作用に電気的化学
作用を重畳させてバリ取りを行うことを特徴とする微小
バリ取り方法。 5、バリを有する被加工物と、該被加工物と異なる導電
性を有し該被加工物と接触あるいは接続されている導電
体と、該被加工物と該導電体が浸され該被加工物と該導
電体とで局部電極を形成する電解質溶液と、該電解質溶
液中で機械的作用によりバリ取りを行う機械的バリ取り
手段とを有することを特徴とする微小バリ取り装置。 6、該局部電極に電圧を印加させる外部電池を有するこ
とを特徴とする請求項5記載の微小バリ取り装置。 7、該機械的バリ取り手段が微粒子を含有した電解質溶
液を該被加工物に高圧供給する高圧供給手段であること
を特徴とする請求項5記載の微小バリ取り装置。 8、バリを有する被加工物と、該被加工物と異なる導電
性を有し該被加工物と接触あるいは接続されている導電
体と、該被加工物と該導電体が浸され該被加工物と該導
電体とで局部電極を形成する電解質溶液と、該電解質溶
液中で工具を回転させ摩擦によりバリ取りを行い、工具
中央の加工液を遠心力により該被加工物に供給する回転
バリ取り工具とを有することを特徴とする微小バリ取り
装置。 9、バリを有する被加工物と、該被加工物と異なる導電
性を有する機械的作用により該被加工物のバリ取りを行
う金属ブラシと、該被加工物と該金属ブラシが浸され該
被加工物と該金属ブラシとで局部電極を形成する電解質
溶液とを有することを特徴とする微小バリ取り装置。 10、該局部電極に電圧を印加させる外部電池を有する
ことを特徴とする請求項9記載の微小バリ取り装置。
[Claims] 1. A workpiece having burrs and a conductor having a conductivity different from that of the workpiece are brought into contact or connected, and the workpiece and the conductor are immersed in an electrolyte solution. A local battery is formed by the workpiece, the conductor, and the electrolyte solution, and at the same time deburring is performed in the electrolyte solution by a mechanical action using a mechanical deburring means, and an electrochemical action is superimposed on the mechanical action. A method for removing minute burrs, which is characterized by removing burrs using a burr. 2. The microdeburring method according to claim 1, wherein a voltage is applied to the local battery from an external battery. 3. Contact or connect a workpiece with burrs and a conductor having a different conductivity from that of the workpiece, immerse the workpiece and the conductor in an electrolyte solution, and remove the workpiece and the conductor. A local battery is formed with the electrolyte solution, and at the same time, an electrolyte solution containing fine particles is supplied to the workpiece at high pressure by a high-pressure supply means to apply a mechanical action to deburr the workpiece, and to apply an electrochemical action to the mechanical action. A microdeburring method characterized by deburring by superimposing . 4. Contact or connect a workpiece with burrs and a conductor having a conductivity different from that of the workpiece, immerse the workpiece and the conductor in an electrolyte solution, and remove the workpiece and the conductor. A local battery is formed with the electrolyte solution, a voltage is applied to the local battery from an external battery, and at the same time, an electrolyte solution containing fine particles is supplied at high pressure to the workpiece by a high-pressure supply means to apply mechanical action and burr. A microdeburring method characterized by deburring by superimposing electrochemical action on mechanical action. 5. A workpiece having burrs, a conductor having a conductivity different from that of the workpiece and contacting or connected to the workpiece, and a workpiece in which the workpiece and the conductor are immersed. A microdeburring device comprising: an electrolyte solution that forms a local electrode with an object and the conductor; and a mechanical deburring means that removes burrs by mechanical action in the electrolyte solution. 6. The microdeburring device according to claim 5, further comprising an external battery for applying voltage to the local electrode. 7. The microdeburring device according to claim 5, wherein the mechanical deburring means is a high pressure supply means for supplying an electrolyte solution containing fine particles to the workpiece at high pressure. 8. A workpiece having burrs, a conductor having a conductivity different from that of the workpiece and being in contact with or connected to the workpiece, and a workpiece in which the workpiece and the conductor are immersed. An electrolyte solution that forms a local electrode between an object and the conductor, and a rotating burr that removes burrs by rotating the tool in the electrolyte solution and using centrifugal force to supply machining fluid in the center of the tool to the workpiece. A microdeburring device characterized by having a removal tool. 9. A workpiece having burrs, a metal brush that deburrs the workpiece by a mechanical action having a conductivity different from that of the workpiece, and a metal brush in which the workpiece and the metal brush are immersed and the workpiece is immersed. A microdeburring device comprising an electrolyte solution forming a local electrode between the workpiece and the metal brush. 10. The microdeburring device according to claim 9, further comprising an external battery for applying voltage to the local electrode.
JP2080701A 1990-03-30 1990-03-30 Fine deburring method and apparatus Expired - Fee Related JP2997500B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2080701A JP2997500B2 (en) 1990-03-30 1990-03-30 Fine deburring method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2080701A JP2997500B2 (en) 1990-03-30 1990-03-30 Fine deburring method and apparatus

Publications (2)

Publication Number Publication Date
JPH03281121A true JPH03281121A (en) 1991-12-11
JP2997500B2 JP2997500B2 (en) 2000-01-11

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015194353A1 (en) * 2014-06-18 2015-12-23 株式会社村田製作所 Ceramic core burr removing method, burr removing device, and ceramic core manufacturing method
CN106825806A (en) * 2017-03-29 2017-06-13 江苏大学 A kind of device and method in the curved hole of introduction by magnetic field electrolysis electric spark Compound Machining

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015194353A1 (en) * 2014-06-18 2015-12-23 株式会社村田製作所 Ceramic core burr removing method, burr removing device, and ceramic core manufacturing method
JPWO2015194353A1 (en) * 2014-06-18 2017-04-20 株式会社村田製作所 Ceramic core deburring method, deburring apparatus, and ceramic core manufacturing method
CN106825806A (en) * 2017-03-29 2017-06-13 江苏大学 A kind of device and method in the curved hole of introduction by magnetic field electrolysis electric spark Compound Machining

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