JPH03280059A - Alkaline development type photosensitive resin composition - Google Patents
Alkaline development type photosensitive resin compositionInfo
- Publication number
- JPH03280059A JPH03280059A JP8191690A JP8191690A JPH03280059A JP H03280059 A JPH03280059 A JP H03280059A JP 8191690 A JP8191690 A JP 8191690A JP 8191690 A JP8191690 A JP 8191690A JP H03280059 A JPH03280059 A JP H03280059A
- Authority
- JP
- Japan
- Prior art keywords
- component
- resistance
- parts
- carboxyl group
- resin composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011342 resin composition Substances 0.000 title claims description 24
- 238000011161 development Methods 0.000 title abstract description 16
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims abstract description 17
- 229920000642 polymer Polymers 0.000 claims abstract description 14
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims abstract description 7
- 239000003999 initiator Substances 0.000 claims abstract description 6
- 239000007864 aqueous solution Substances 0.000 claims description 15
- 150000001875 compounds Chemical class 0.000 claims description 13
- 125000003700 epoxy group Chemical group 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 239000003822 epoxy resin Substances 0.000 abstract description 19
- 229920000647 polyepoxide Polymers 0.000 abstract description 19
- 229910000679 solder Inorganic materials 0.000 abstract description 15
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 12
- 229910052737 gold Inorganic materials 0.000 abstract description 12
- 239000010931 gold Substances 0.000 abstract description 12
- 238000007747 plating Methods 0.000 abstract description 12
- 239000002904 solvent Substances 0.000 abstract description 8
- 239000002253 acid Substances 0.000 abstract description 7
- 230000001681 protective effect Effects 0.000 abstract description 7
- 229920001577 copolymer Polymers 0.000 abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 3
- 230000001070 adhesive effect Effects 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 abstract description 2
- 239000011248 coating agent Substances 0.000 description 19
- 238000000576 coating method Methods 0.000 description 19
- -1 3.3' Chemical class 0.000 description 15
- 238000000034 method Methods 0.000 description 12
- 239000003513 alkali Substances 0.000 description 10
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 8
- 238000011156 evaluation Methods 0.000 description 8
- 239000000976 ink Substances 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 6
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 6
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 6
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 6
- 239000012965 benzophenone Substances 0.000 description 6
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 6
- 238000001723 curing Methods 0.000 description 6
- 238000001035 drying Methods 0.000 description 6
- 229920003986 novolac Polymers 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000000178 monomer Substances 0.000 description 4
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 4
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 238000005476 soldering Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 229920001187 thermosetting polymer Polymers 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000000975 dye Substances 0.000 description 3
- 239000000945 filler Substances 0.000 description 3
- 239000003063 flame retardant Substances 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
- 239000003112 inhibitor Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 229910000029 sodium carbonate Inorganic materials 0.000 description 3
- OUPZKGBUJRBPGC-UHFFFAOYSA-N 1,3,5-tris(oxiran-2-ylmethyl)-1,3,5-triazinane-2,4,6-trione Chemical compound O=C1N(CC2OC2)C(=O)N(CC2OC2)C(=O)N1CC1CO1 OUPZKGBUJRBPGC-UHFFFAOYSA-N 0.000 description 2
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- LEJBBGNFPAFPKQ-UHFFFAOYSA-N 2-(2-prop-2-enoyloxyethoxy)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOC(=O)C=C LEJBBGNFPAFPKQ-UHFFFAOYSA-N 0.000 description 2
- XFCMNSHQOZQILR-UHFFFAOYSA-N 2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOC(=O)C(C)=C XFCMNSHQOZQILR-UHFFFAOYSA-N 0.000 description 2
- INQDDHNZXOAFFD-UHFFFAOYSA-N 2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOC(=O)C=C INQDDHNZXOAFFD-UHFFFAOYSA-N 0.000 description 2
- HCLJOFJIQIJXHS-UHFFFAOYSA-N 2-[2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOCCOC(=O)C=C HCLJOFJIQIJXHS-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 2
- KUDUQBURMYMBIJ-UHFFFAOYSA-N 2-prop-2-enoyloxyethyl prop-2-enoate Chemical compound C=CC(=O)OCCOC(=O)C=C KUDUQBURMYMBIJ-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 2
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 2
- 150000008065 acid anhydrides Chemical class 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 2
- 125000002723 alicyclic group Chemical group 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- 150000001735 carboxylic acids Chemical class 0.000 description 2
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 2
- QGBSISYHAICWAH-UHFFFAOYSA-N dicyandiamide Chemical compound NC(N)=NC#N QGBSISYHAICWAH-UHFFFAOYSA-N 0.000 description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- AYYISYPLHCSQGL-UHFFFAOYSA-N (2,3,4,5,6-pentachlorophenyl) 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1=C(Cl)C(Cl)=C(Cl)C(Cl)=C1Cl AYYISYPLHCSQGL-UHFFFAOYSA-N 0.000 description 1
- VMHYWKBKHMYRNF-UHFFFAOYSA-N (2-chlorophenyl)-phenylmethanone Chemical compound ClC1=CC=CC=C1C(=O)C1=CC=CC=C1 VMHYWKBKHMYRNF-UHFFFAOYSA-N 0.000 description 1
- XHXSXTIIDBZEKB-UHFFFAOYSA-N 1,2,3,4,5,6,7,8-octamethylanthracene-9,10-dione Chemical compound CC1=C(C)C(C)=C2C(=O)C3=C(C)C(C)=C(C)C(C)=C3C(=O)C2=C1C XHXSXTIIDBZEKB-UHFFFAOYSA-N 0.000 description 1
- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 description 1
- GJZFGDYLJLCGHT-UHFFFAOYSA-N 1,2-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=C(CC)C(CC)=CC=C3SC2=C1 GJZFGDYLJLCGHT-UHFFFAOYSA-N 0.000 description 1
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 1
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 1
- XLTMWFMRJZDFFD-UHFFFAOYSA-N 1-[(2-chloro-4-nitrophenyl)diazenyl]naphthalen-2-ol Chemical compound OC1=CC=C2C=CC=CC2=C1N=NC1=CC=C([N+]([O-])=O)C=C1Cl XLTMWFMRJZDFFD-UHFFFAOYSA-N 0.000 description 1
- ONCICIKBSHQJTB-UHFFFAOYSA-N 1-[4-(dimethylamino)phenyl]propan-1-one Chemical compound CCC(=O)C1=CC=C(N(C)C)C=C1 ONCICIKBSHQJTB-UHFFFAOYSA-N 0.000 description 1
- OSNILPMOSNGHLC-UHFFFAOYSA-N 1-[4-methoxy-3-(piperidin-1-ylmethyl)phenyl]ethanone Chemical compound COC1=CC=C(C(C)=O)C=C1CN1CCCCC1 OSNILPMOSNGHLC-UHFFFAOYSA-N 0.000 description 1
- WJFKNYWRSNBZNX-UHFFFAOYSA-N 10H-phenothiazine Chemical compound C1=CC=C2NC3=CC=CC=C3SC2=C1 WJFKNYWRSNBZNX-UHFFFAOYSA-N 0.000 description 1
- OAMHTTBNEJBIKA-UHFFFAOYSA-N 2,2,2-trichloro-1-phenylethanone Chemical compound ClC(Cl)(Cl)C(=O)C1=CC=CC=C1 OAMHTTBNEJBIKA-UHFFFAOYSA-N 0.000 description 1
- CERJZAHSUZVMCH-UHFFFAOYSA-N 2,2-dichloro-1-phenylethanone Chemical compound ClC(Cl)C(=O)C1=CC=CC=C1 CERJZAHSUZVMCH-UHFFFAOYSA-N 0.000 description 1
- QRIMLDXJAPZHJE-UHFFFAOYSA-N 2,3-dihydroxypropyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(O)CO QRIMLDXJAPZHJE-UHFFFAOYSA-N 0.000 description 1
- OWPUOLBODXJOKH-UHFFFAOYSA-N 2,3-dihydroxypropyl prop-2-enoate Chemical compound OCC(O)COC(=O)C=C OWPUOLBODXJOKH-UHFFFAOYSA-N 0.000 description 1
- LZWVPGJPVCYAOC-UHFFFAOYSA-N 2,3-diphenylanthracene-9,10-dione Chemical compound C=1C=CC=CC=1C=1C=C2C(=O)C3=CC=CC=C3C(=O)C2=CC=1C1=CC=CC=C1 LZWVPGJPVCYAOC-UHFFFAOYSA-N 0.000 description 1
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 1
- STMDPCBYJCIZOD-UHFFFAOYSA-N 2-(2,4-dinitroanilino)-4-methylpentanoic acid Chemical compound CC(C)CC(C(O)=O)NC1=CC=C([N+]([O-])=O)C=C1[N+]([O-])=O STMDPCBYJCIZOD-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- XMNIXWIUMCBBBL-UHFFFAOYSA-N 2-(2-phenylpropan-2-ylperoxy)propan-2-ylbenzene Chemical compound C=1C=CC=CC=1C(C)(C)OOC(C)(C)C1=CC=CC=C1 XMNIXWIUMCBBBL-UHFFFAOYSA-N 0.000 description 1
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 1
- RGADKZXRWFOTFV-UHFFFAOYSA-N 2-(hydroxymethyl)-2-methylpropane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OCC(C)(CO)CO RGADKZXRWFOTFV-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- DXEHULHXWHEJJD-UHFFFAOYSA-N 2-[(4-butylphenoxy)methyl]oxirane Chemical compound C1=CC(CCCC)=CC=C1OCC1OC1 DXEHULHXWHEJJD-UHFFFAOYSA-N 0.000 description 1
- CUFXMPWHOWYNSO-UHFFFAOYSA-N 2-[(4-methylphenoxy)methyl]oxirane Chemical compound C1=CC(C)=CC=C1OCC1OC1 CUFXMPWHOWYNSO-UHFFFAOYSA-N 0.000 description 1
- HWSSEYVMGDIFMH-UHFFFAOYSA-N 2-[2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOCCOC(=O)C(C)=C HWSSEYVMGDIFMH-UHFFFAOYSA-N 0.000 description 1
- LTHJXDSHSVNJKG-UHFFFAOYSA-N 2-[2-[2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOCCOCCOC(=O)C(C)=C LTHJXDSHSVNJKG-UHFFFAOYSA-N 0.000 description 1
- DZZAHLOABNWIFA-UHFFFAOYSA-N 2-butoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCCCC)C(=O)C1=CC=CC=C1 DZZAHLOABNWIFA-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 1
- FLFWJIBUZQARMD-UHFFFAOYSA-N 2-mercapto-1,3-benzoxazole Chemical compound C1=CC=C2OC(S)=NC2=C1 FLFWJIBUZQARMD-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- MYISVPVWAQRUTL-UHFFFAOYSA-N 2-methylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3SC2=C1 MYISVPVWAQRUTL-UHFFFAOYSA-N 0.000 description 1
- KTALPKYXQZGAEG-UHFFFAOYSA-N 2-propan-2-ylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C(C)C)=CC=C3SC2=C1 KTALPKYXQZGAEG-UHFFFAOYSA-N 0.000 description 1
- YTPSFXZMJKMUJE-UHFFFAOYSA-N 2-tert-butylanthracene-9,10-dione Chemical compound C1=CC=C2C(=O)C3=CC(C(C)(C)C)=CC=C3C(=O)C2=C1 YTPSFXZMJKMUJE-UHFFFAOYSA-N 0.000 description 1
- BUZICZZQJDLXJN-UHFFFAOYSA-N 3-azaniumyl-4-hydroxybutanoate Chemical compound OCC(N)CC(O)=O BUZICZZQJDLXJN-UHFFFAOYSA-N 0.000 description 1
- JIGUICYYOYEXFS-UHFFFAOYSA-N 3-tert-butylbenzene-1,2-diol Chemical compound CC(C)(C)C1=CC=CC(O)=C1O JIGUICYYOYEXFS-UHFFFAOYSA-N 0.000 description 1
- DBCAQXHNJOFNGC-UHFFFAOYSA-N 4-bromo-1,1,1-trifluorobutane Chemical compound FC(F)(F)CCCBr DBCAQXHNJOFNGC-UHFFFAOYSA-N 0.000 description 1
- JHWGFJBTMHEZME-UHFFFAOYSA-N 4-prop-2-enoyloxybutyl prop-2-enoate Chemical compound C=CC(=O)OCCCCOC(=O)C=C JHWGFJBTMHEZME-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 239000004342 Benzoyl peroxide Substances 0.000 description 1
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 1
- GXMLTDBPAGDQIQ-UHFFFAOYSA-N CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.OCC(CO)(CO)CO Chemical compound CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.OCC(CO)(CO)CO GXMLTDBPAGDQIQ-UHFFFAOYSA-N 0.000 description 1
- GAWIXWVDTYZWAW-UHFFFAOYSA-N C[CH]O Chemical group C[CH]O GAWIXWVDTYZWAW-UHFFFAOYSA-N 0.000 description 1
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Natural products CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 1
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- FQYUMYWMJTYZTK-UHFFFAOYSA-N Phenyl glycidyl ether Chemical compound C1OC1COC1=CC=CC=C1 FQYUMYWMJTYZTK-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- AUNGANRZJHBGPY-SCRDCRAPSA-N Riboflavin Chemical compound OC[C@@H](O)[C@@H](O)[C@@H](O)CN1C=2C=C(C)C(C)=CC=2N=C2C1=NC(=O)NC2=O AUNGANRZJHBGPY-SCRDCRAPSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- OKKRPWIIYQTPQF-UHFFFAOYSA-N Trimethylolpropane trimethacrylate Chemical compound CC(=C)C(=O)OCC(CC)(COC(=O)C(C)=C)COC(=O)C(C)=C OKKRPWIIYQTPQF-UHFFFAOYSA-N 0.000 description 1
- GQPVFBDWIUVLHG-UHFFFAOYSA-N [2,2-bis(hydroxymethyl)-3-(2-methylprop-2-enoyloxy)propyl] 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(CO)(CO)COC(=O)C(C)=C GQPVFBDWIUVLHG-UHFFFAOYSA-N 0.000 description 1
- CQHKDHVZYZUZMJ-UHFFFAOYSA-N [2,2-bis(hydroxymethyl)-3-prop-2-enoyloxypropyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(CO)COC(=O)C=C CQHKDHVZYZUZMJ-UHFFFAOYSA-N 0.000 description 1
- REUQOSNMSWLNPD-UHFFFAOYSA-N [2-(diethylamino)phenyl]-phenylmethanone Chemical compound CCN(CC)C1=CC=CC=C1C(=O)C1=CC=CC=C1 REUQOSNMSWLNPD-UHFFFAOYSA-N 0.000 description 1
- JUDXBRVLWDGRBC-UHFFFAOYSA-N [2-(hydroxymethyl)-3-(2-methylprop-2-enoyloxy)-2-(2-methylprop-2-enoyloxymethyl)propyl] 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(CO)(COC(=O)C(C)=C)COC(=O)C(C)=C JUDXBRVLWDGRBC-UHFFFAOYSA-N 0.000 description 1
- SWHLOXLFJPTYTL-UHFFFAOYSA-N [2-methyl-3-(2-methylprop-2-enoyloxy)-2-(2-methylprop-2-enoyloxymethyl)propyl] 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(C)(COC(=O)C(C)=C)COC(=O)C(C)=C SWHLOXLFJPTYTL-UHFFFAOYSA-N 0.000 description 1
- 125000005396 acrylic acid ester group Chemical group 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000004480 active ingredient Substances 0.000 description 1
- 238000012644 addition polymerization Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 229920005603 alternating copolymer Polymers 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 150000003863 ammonium salts Chemical class 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 230000003254 anti-foaming effect Effects 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 229920005601 base polymer Polymers 0.000 description 1
- 150000008366 benzophenones Chemical class 0.000 description 1
- 235000019400 benzoyl peroxide Nutrition 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- PZTQVMXMKVTIRC-UHFFFAOYSA-L chembl2028348 Chemical compound [Ca+2].[O-]S(=O)(=O)C1=CC(C)=CC=C1N=NC1=C(O)C(C([O-])=O)=CC2=CC=CC=C12 PZTQVMXMKVTIRC-UHFFFAOYSA-L 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 229910052570 clay Inorganic materials 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- XMEORSGHQPZTCP-UHFFFAOYSA-N dichloromethane;1,1,1-trichloroethane Chemical compound ClCCl.CC(Cl)(Cl)Cl XMEORSGHQPZTCP-UHFFFAOYSA-N 0.000 description 1
- 150000005690 diesters Chemical class 0.000 description 1
- 125000005442 diisocyanate group Chemical group 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical class OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
- STVZJERGLQHEKB-UHFFFAOYSA-N ethylene glycol dimethacrylate Substances CC(=C)C(=O)OCCOC(=O)C(C)=C STVZJERGLQHEKB-UHFFFAOYSA-N 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- 239000012796 inorganic flame retardant Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- CDOSHBSSFJOMGT-UHFFFAOYSA-N linalool Chemical compound CC(C)=CCCC(C)(O)C=C CDOSHBSSFJOMGT-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 description 1
- 229910052808 lithium carbonate Inorganic materials 0.000 description 1
- 235000010187 litholrubine BK Nutrition 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M methacrylate group Chemical group C(C(=C)C)(=O)[O-] CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000007645 offset printing Methods 0.000 description 1
- 150000002896 organic halogen compounds Chemical class 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 229950000688 phenothiazine Drugs 0.000 description 1
- 235000021317 phosphate Nutrition 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920005862 polyol Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 238000007142 ring opening reaction Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229940014800 succinic anhydride Drugs 0.000 description 1
- 150000003464 sulfur compounds Chemical class 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- KUAZQDVKQLNFPE-UHFFFAOYSA-N thiram Chemical compound CN(C)C(=S)SSC(=S)N(C)C KUAZQDVKQLNFPE-UHFFFAOYSA-N 0.000 description 1
- 229960002447 thiram Drugs 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- YFDSDPIBEUFTMI-UHFFFAOYSA-N tribromoethanol Chemical compound OCC(Br)(Br)Br YFDSDPIBEUFTMI-UHFFFAOYSA-N 0.000 description 1
- DWWMSEANWMWMCB-UHFFFAOYSA-N tribromomethylsulfonylbenzene Chemical compound BrC(Br)(Br)S(=O)(=O)C1=CC=CC=C1 DWWMSEANWMWMCB-UHFFFAOYSA-N 0.000 description 1
- HQUQLFOMPYWACS-UHFFFAOYSA-N tris(2-chloroethyl) phosphate Chemical compound ClCCOP(=O)(OCCCl)OCCCl HQUQLFOMPYWACS-UHFFFAOYSA-N 0.000 description 1
- BIKXLKXABVUSMH-UHFFFAOYSA-N trizinc;diborate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]B([O-])[O-].[O-]B([O-])[O-] BIKXLKXABVUSMH-UHFFFAOYSA-N 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
- 239000004034 viscosity adjusting agent Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、アルカリ現像型感光性樹脂組成物に関し、詳
しくは、プリント配線板上に該アルカリ現像型感光性樹
脂組成物よりなる被膜を形成させると、露光後アルカリ
現像が可能であり、露光硬化部はソルダーレジスト及び
無電解約つきレジストとして、さらには、永久保護マス
クとしても好適に使用できるアルカリ現像型感光性樹脂
組成物に関するものである。Detailed Description of the Invention (Industrial Application Field) The present invention relates to an alkali-developable photosensitive resin composition, and more specifically, to forming a film made of the alkali-developable photosensitive resin composition on a printed wiring board. This relates to an alkali-developable photosensitive resin composition that can be subjected to alkali development after exposure, and that the exposure-cured portion can be suitably used as a solder resist and an electroless shrinkage resist, as well as a permanent protective mask.
(従来の技術) 近年、IC,LSIの高集積度化が進む中で。(Conventional technology) In recent years, as ICs and LSIs have become more highly integrated.
これらを搭載するプリント配線板も益々高密度化してお
り、配線間隔を狭めたり、フラットプラスチックパッケ
ージ(FPP)のようなLSI部品を基板の表面に実装
する表面実装方式が採用されたりしている。The printed wiring boards on which these devices are mounted are becoming increasingly dense, with narrower wiring spacing and surface mounting methods in which LSI components such as flat plastic packages (FPP) are mounted on the surface of the board.
ところで、プリント配線板上にソルダーレジストを形成
する際には、熱硬化タイプのレジストインキをスクリー
ン印刷法により印刷し、転写部を熱硬化させて得ていた
。しかし、この方法では高密度化の要求に対応しきれな
くなっているのが実情であり、写真法の原理を利用して
ソルダーレジストを得る方法が開発され、それに伴って
フォトレジストインキの開発が検討されている。By the way, when forming a solder resist on a printed wiring board, a thermosetting resist ink is printed by a screen printing method, and the transferred portion is thermoset. However, the reality is that this method cannot meet the demands for higher density, so a method of obtaining solder resist using the principles of photography has been developed, and along with this, the development of photoresist ink is being considered. has been done.
フォトレジストインキにおいても作業環境、処理コスト
の面で、有機溶剤で現像するタイプのものに代って、炭
酸ソーダ水溶液のような弱アルカリ水溶液で現像可能な
ものが提案されている。Regarding photoresist inks, from the viewpoint of working environment and processing cost, in place of the type that is developed with an organic solvent, one that can be developed with a weak alkaline aqueous solution such as a sodium carbonate aqueous solution has been proposed.
例えば、特開昭61−243.869号公報及び特開昭
63−278.052号公報には、ノボラック型もしく
はビスフェノールA型エポキシ樹脂骨格を有する樹脂成
分を含み1弱アルカリ水溶液で現像が可能であり、耐熱
性、耐薬品性等に優れた保護マスクが得られるという感
光性被膜組成物が開示されている。For example, JP-A No. 61-243.869 and JP-A No. 63-278.052 contain a resin component having a novolac type or bisphenol A type epoxy resin skeleton and can be developed with a slightly weak alkali aqueous solution. A photosensitive coating composition has been disclosed that provides a protective mask with excellent heat resistance, chemical resistance, etc.
また特開昭62−158.710号公報、特開昭62−
285゜903号公報及び特開昭63−11.930号
公報には無水マレイン酸とスチレンとの共重合体にヒド
ロキシアルキレン(メタ)アクリレートを開通付加した
ものをペースポリマーとするアルカリ現像タイプの樹脂
組成物が開示されている。Also, JP-A-62-158.710, JP-A-62-158.710,
No. 285゜903 and JP-A No. 63-11.930 disclose an alkali-developable type resin in which the base polymer is a copolymer of maleic anhydride and styrene with the open addition of hydroxyalkylene (meth)acrylate. Compositions are disclosed.
(発明が解決しようとする課題) しかし、これらの感光性樹脂組成物を用いて。(Problem to be solved by the invention) However, using these photosensitive resin compositions.
写真法によりソルダーレジストを形成した場合には、は
んだ耐熱性、無電解金めっき耐性、耐酸性さらには耐ア
ルカリ性が十分でなく、プリント配線板の永久保護マス
クとして使用するには満足できる性能のものが得られな
いという問題を有していた。When a solder resist is formed using a photographic method, it does not have sufficient soldering heat resistance, electroless gold plating resistance, acid resistance, or even alkali resistance, and the performance is satisfactory for use as a permanent protective mask for printed wiring boards. The problem was that it was not possible to obtain
そこで1本発明の課題は、このような問題のないアルカ
リ現像型感光性樹脂組成物を提供することにある。すな
わち、■光に対する感度が良好で短い露光時間で容易に
光硬化する。■炭酸す)IJウム等のような弱アルカリ
水溶液で容易に現像することができる。■光によって硬
化するばかりでなく熱によっても硬化する。■光と熱に
よって硬化した後はエポキシ樹脂に対する密着性が良好
で。Therefore, one object of the present invention is to provide an alkali-developable photosensitive resin composition free from such problems. That is, (1) it has good sensitivity to light and is easily photocured with a short exposure time; (2) It can be easily developed with a weak alkaline aqueous solution such as IJium carbonate. ■It hardens not only by light but also by heat. ■Good adhesion to epoxy resin after being cured by light and heat.
可撓性に富み、はんだ耐熱性、無電解金めっき耐性、耐
酸性及び耐水性等に優れている被膜を形成するようなア
ルカリ現像型感光性樹脂組成物を提供することにある。An object of the present invention is to provide an alkali-developable photosensitive resin composition that forms a film that is highly flexible and has excellent solder heat resistance, electroless gold plating resistance, acid resistance, water resistance, etc.
(課題を解決するための手段)
本発明者らは、このような課題を解決するために鋭意検
討の結果1組成物の有効成分として、同一分子内にカル
ボキシル基とビニル基を有し希アルカリ水溶液に可溶性
であるポリマー又はオリゴマー、末端にカルボキシル基
を有しブタジェンとアクリロニトリルとの共重合体及び
エポキシ基を少なくとも1個有する化合物を含有させる
と前記課題を達成することができることを見い出し本発
明に到達した。(Means for Solving the Problems) In order to solve the above problems, the present inventors have conducted intensive studies and found that a dilute alkali having a carboxyl group and a vinyl group in the same molecule is used as an active ingredient of one composition. It was discovered that the above object can be achieved by containing a polymer or oligomer that is soluble in an aqueous solution, a copolymer of butadiene and acrylonitrile having a terminal carboxyl group, and a compound having at least one epoxy group. Reached.
すなわち9本発明の要旨は次の通りである。That is, the gist of the present invention is as follows.
下記(A)、(B)、(C)及び(D)成分からなり、
(A)成分100重量部に対する(B)成分の割合が
5〜100重量部であり、(C)成分の割合が5〜10
0重量部であり、(D)成分の割合が0.1〜30重量
部であるアルカリ現像型感光性樹脂組成物。Consisting of the following components (A), (B), (C) and (D),
The ratio of component (B) to 100 parts by weight of component (A) is 5 to 100 parts by weight, and the ratio of component (C) is 5 to 10 parts by weight.
0 parts by weight, and the proportion of component (D) is 0.1 to 30 parts by weight.
(A)成分:同一分子内にカルボキシル基とビニル基を
有し、アルカリ水溶液に可溶性のポリマー又はオリゴマ
ー。Component (A): A polymer or oligomer that has a carboxyl group and a vinyl group in the same molecule and is soluble in an alkaline aqueous solution.
(B)成分二下記一般式[I’lで表され、末端にカル
ボキシル基を有するポリマー
(式中x、y及び2は10〜200の整数)(C)成分
:エポキシ樹脂
化合物。(B) Component 2 A polymer represented by the following general formula [I'l and having a carboxyl group at the end (in the formula, x, y and 2 are integers of 10 to 200) (C) Component: Epoxy resin compound.
(D)成分:光重合開始剤もしくは増感剤。Component (D): photopolymerization initiator or sensitizer.
以下1本発明のアルカリ現像型感光性樹脂組成物につい
て詳細に説明する。Below, the alkali-developable photosensitive resin composition of the present invention will be explained in detail.
(A)成分である同一分子内にカルボキシル基とビニル
基を有し、アルカリ水溶液に可溶性のポリマー又はオリ
ゴマーとしては1例えば、■エポキシアクリレートの水
酸基に酸無水物を付加させたカルボキシル基含有エポキ
シアクリレート、■無水マレイン酸と不飽和炭化水素と
の共重合体に2−ヒドロキシアルキレン(メタ)アクリ
レートを開環付加させたもの、■カルボキシル基を含有
する(メタ)アクリレート系共重合体の一部を。Examples of polymers or oligomers that have a carboxyl group and a vinyl group in the same molecule as component (A) and are soluble in aqueous alkaline solutions include: (1) carboxyl group-containing epoxy acrylate obtained by adding an acid anhydride to the hydroxyl group of epoxy acrylate; , ■ a ring-opening addition of 2-hydroxyalkylene (meth)acrylate to a copolymer of maleic anhydride and an unsaturated hydrocarbon, ■ a part of a (meth)acrylate copolymer containing a carboxyl group. .
ビニル基を有するモノマーで置換したものが挙げられる
。Examples include those substituted with a monomer having a vinyl group.
■の具体例としては1例えばフェノールノボラック型エ
ポキシ樹脂、クレゾールノボラック型エポキシ樹脂、ビ
スフェノールA型エポキシ樹脂。Specific examples of (1) include phenol novolac type epoxy resin, cresol novolac type epoxy resin, and bisphenol A type epoxy resin.
ビスフェノールF型エポキシ樹脂、ビスフェノールS型
エポキシ樹脂、ビフェニル型エポキシ樹脂。Bisphenol F type epoxy resin, bisphenol S type epoxy resin, biphenyl type epoxy resin.
脂環式エポキシ樹脂等のエポキシ樹脂に、(メタ)アク
リル酸を付加して得られるエポキシ(メタ)アクリレー
トに酸無水物を反応させたものが挙げられる。Examples include those obtained by reacting an acid anhydride with an epoxy (meth)acrylate obtained by adding (meth)acrylic acid to an epoxy resin such as an alicyclic epoxy resin.
■の具体例としては、無水マレイン酸と、スチレンに代
表されるビニル基を有する芳香族炭化水素との共重合体
に、下記一般式[II]で表されるヒドロキシアルキレ
ン(メタ)アクリレートを付加したものが挙げられる。As a specific example of (2), hydroxyalkylene (meth)acrylate represented by the following general formula [II] is added to a copolymer of maleic anhydride and an aromatic hydrocarbon having a vinyl group represented by styrene. The following can be mentioned.
[:H,=[ニーC−0−(CH2)、DH〔■〕
(式中、Rは水素原子又はメチル基を表し、nは1〜3
の整数を表す。)
さらに、■の具体例としだは1例えばアクリル酸もしく
はメタクリル酸等のカルボキシル基を含有する(メタ)
アクリル系モノマーを付加重合(共重合を含む)して得
られるポリマーのカルボキシル基の一部とグリシジルメ
タアクリレートを反応させて得られるものが挙げられる
。[:H,=[nee C-0-(CH2), DH[■] (wherein, R represents a hydrogen atom or a methyl group, and n is 1 to 3
represents an integer. ) Furthermore, as a specific example of ■, it contains a carboxyl group such as acrylic acid or methacrylic acid (meth).
Examples include those obtained by reacting glycidyl methacrylate with a portion of the carboxyl groups of a polymer obtained by addition polymerization (including copolymerization) of acrylic monomers.
また、 (B)成分である下記一般式〔■〕HOOC[
(CH,−C)I=CH−CH2) 、 (Ct12−
CH) y]ヨC0OHCN °[: I ]
(式中x、 y及び2は10〜200の整数であり、目
的に応じて種々のものが得られる。)
で表され、末端にカルボキシル基を有するポリマーとし
ては9例えばIIYcARCTポリマー(米国Good
−rich社製)が挙げられる。In addition, the following general formula [■] HOOC[
(CH,-C)I=CH-CH2), (Ct12-
CH) y]yoC0OHCN °[: I] (In the formula, x, y and 2 are integers from 10 to 200, and various values can be obtained depending on the purpose.) and has a carboxyl group at the end. Examples of polymers include 9, for example, IIYcARCT polymer (Good
-rich).
(C)成分であるエポキシ基を少なくとも1個有する化
合物は、樹脂組成物の加熱硬化を目的として配合される
ものであって、このような(C)成分としては1例えば
、ビスフェノールA型エポキシ樹脂、ビスフェノールS
型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、フ
ェノールノボラック型エポキシ樹脂、0−タレゾールノ
ボラック型エポキシ樹脂、p−タレゾールノボラック型
エポキシ樹脂、脂環式エポキシ樹脂等のエポキシ樹脂、
フェニルグリシジルエーテル、 p−1−f−ルフェ
ニルグリシジルエーテル、p−ブチルフェニルグリシジ
ルエーテル、クレジルグリシジルエーテル、ジグリシジ
ルイソシアヌレート、トリグリシジルイソシアヌレート
、3.3°、5.5’−テトラメチルビフェニル−4,
4°−ジグリシジルエーテル、アリルグリシジルエーテ
ル、グリシジルメタクリレート等のエポキシ基を有する
化合物等が挙げられる。The compound having at least one epoxy group, which is the component (C), is blended for the purpose of heat curing the resin composition. , bisphenol S
Epoxy resins such as type epoxy resin, bisphenol F type epoxy resin, phenol novolac type epoxy resin, 0-talesol novolac type epoxy resin, p-talesol novolac type epoxy resin, alicyclic epoxy resin,
Phenyl glycidyl ether, p-1-f-phenyl glycidyl ether, p-butylphenyl glycidyl ether, cresyl glycidyl ether, diglycidyl isocyanurate, triglycidyl isocyanurate, 3.3°, 5.5'-tetramethylbiphenyl -4,
Examples include compounds having an epoxy group such as 4°-diglycidyl ether, allyl glycidyl ether, and glycidyl methacrylate.
(D)成分は光重合開始剤もしくは増感剤であり9例え
ば、アセトフェノン、2.2−ジェトキシアセトフェノ
ン、p−ジメチルアセトフェノン。Component (D) is a photopolymerization initiator or sensitizer, such as acetophenone, 2,2-jethoxyacetophenone, p-dimethylacetophenone.
p−ジメチルアミノプロピオフェノン、ジクロロアセト
フェノン、トリクロロアセトフェノン、ptert−ブ
チルトリクロロアセトフェノン等のア七トフエノン類、
ベンゾフェノン、2−クロロベンゾフェノン、p、p“
−ジクロロベンゾフェノン。a7tophenones such as p-dimethylaminopropiophenone, dichloroacetophenone, trichloroacetophenone, ptert-butyltrichloroacetophenone;
Benzophenone, 2-chlorobenzophenone, p, p“
-Dichlorobenzophenone.
p、p”−ビスジメチルアミノベンゾフェノン(ミヒラ
ーケトンともいう)、p、p’−ビスジエチルアミノベ
ンゾフェノン、 3.3’、 4. 4°−テトラ
(tert−ブチルパーオキシカルボニル)ベンゾフェ
ノン等のベンゾフェノン類、ベンジル、ベンゾイン、ベ
ンゾインメチルエーテル、ベンゾインエチルエーテル、
ベンゾインイソプロピルエーテル。p, p”-bisdimethylaminobenzophenone (also referred to as Michler's ketone), p, p'-bisdiethylaminobenzophenone, benzophenones such as 3.3', 4.4°-tetra(tert-butylperoxycarbonyl)benzophenone, benzyl , benzoin, benzoin methyl ether, benzoin ethyl ether,
Benzoin isopropyl ether.
ベンゾインイソブチルエーテル、ベンゾイン−nブチル
エーテル等のベンゾインエーテル類、ベンジルジメチル
ケタール、テトラメチルチウラムモノサルファイド、テ
トラメチルチウラムジサルファイド、チオキサンソン、
2−クロロチオキサンソン、2,4−ジエチルチオキサ
ンソン、2−メチルチオキサンソン2−イソプロピルチ
オキサンソン等のイオウ化合物、2−エチルアントラキ
ノン、 2−tert−ブチルアントラキノン、オク
タメチルアントラキノン、l、2−ベンズアントラキノ
ン、2.3−ジフェニルアントラキノン等のアントラキ
ノン類、アゾビスイソブチロニトリル。Benzoin ethers such as benzoin isobutyl ether and benzoin-n-butyl ether, benzyl dimethyl ketal, tetramethylthiuram monosulfide, tetramethylthiuram disulfide, thioxanthone,
Sulfur compounds such as 2-chlorothioxanthone, 2,4-diethylthioxanthone, 2-methylthioxanthone, 2-isopropylthioxanthone, 2-ethylanthraquinone, 2-tert-butylanthraquinone, octamethylanthraquinone, l, Anthraquinones such as 2-benzanthraquinone and 2,3-diphenylanthraquinone, azobisisobutyronitrile.
ベンゾイルパーオキシド、ジーtart−ブチルパーオ
キシド、クメンパーオキシド等の有機過酸化物。Organic peroxides such as benzoyl peroxide, di-tart-butyl peroxide, and cumene peroxide.
2.4.5−)IJアリールイミダゾールニ量体。2.4.5-) IJ arylimidazole dimer.
リボフラビンテトラブチレート、2−メルカプトベンゾ
イミダゾール、2−メルカプトベンゾオキサゾール、2
−メルカプトベンゾチアゾール等のチオール化合物、2
.4.6−トリス(トリクロロメチル)−s−トリアジ
ン、2,2.2−トリブロモエタノール、トリブロモメ
チルフェニルスルホン等の有機ハロゲン化合物等が挙げ
られる。Riboflavin tetrabutyrate, 2-mercaptobenzimidazole, 2-mercaptobenzoxazole, 2
- Thiol compounds such as mercaptobenzothiazole, 2
.. Examples include organic halogen compounds such as 4,6-tris(trichloromethyl)-s-triazine, 2,2,2-tribromoethanol, and tribromomethylphenylsulfone.
これらの化合物は、一種以上を組合せて使用することも
できる。また、それ自体は光重合開始剤として作用しな
いが、上記の化合物と組合せて用いると、光重合開始剤
の能力を増大させ得るような化合物を添加することもで
きる。そのような化合物としては1例えば、トリエタノ
ールアミン等の第3級アミンを挙げることができ、これ
らはベンゾフェノンと組み合わせて使用すると効果的で
ある。These compounds can also be used in combination of one or more. It is also possible to add compounds that do not act as photopolymerization initiators by themselves, but can increase the ability of the photopolymerization initiators when used in combination with the above compounds. Such compounds include, for example, tertiary amines such as triethanolamine, which are effective when used in combination with benzophenone.
本発明の樹脂組成物は、前記のように(A)成分、(B
)成分、(C)成分及び(D)成分よりなるものであり
、各成分の配合割合は(A)成分100重量部に対して
、(B)成分は5〜100重量部、(C)成分は5〜1
00重量部、(D)成分は0.1〜30重量部とする。The resin composition of the present invention comprises component (A), component (B), as described above.
) component, (C) component, and (D) component, and the blending ratio of each component is 100 parts by weight of component (A), 5 to 100 parts by weight of component (B), and component (C). is 5-1
00 parts by weight, and component (D) is 0.1 to 30 parts by weight.
(A)成分100重量部に対する(B)成分が5重量部
未満では硬化物が可撓性に欠け、ソルダーレジストとし
て使用した場合、耐アルカリ性、無電解金めっき耐性に
欠けるので好ましくない。一方100重量部を超えると
光重合速度が遅くなって感度が低下したり、露光後のア
ルカリ現像性が悪くなる。(A)成分100重量部に対
する(C)成分が5重量部未満では樹脂組成物の加熱に
よる硬化が低下し、はんだ耐熱性等に欠けるので好まし
くない、100重量部を超えると感度が低下したり、露
光後のアルカリ現像性が低下する。(A>成分100重
量部に対する(D)成分の割合が0.1重量部未満では
、光照射により十分な架橋を行わせることができず、3
0重量部を超える場合には、光が基板にまで到達しにく
いため、基板と樹脂との密着性が悪くなり好ましくない
。If the amount of component (B) is less than 5 parts by weight based on 100 parts by weight of component (A), the cured product will lack flexibility and, when used as a solder resist, will lack alkali resistance and electroless gold plating resistance, which is not preferable. On the other hand, if it exceeds 100 parts by weight, the photopolymerization rate slows down, resulting in decreased sensitivity and poor alkali developability after exposure. If the amount of component (C) is less than 5 parts by weight based on 100 parts by weight of component (A), curing of the resin composition by heating will decrease and the soldering heat resistance will be lacking, which is undesirable. If it exceeds 100 parts by weight, sensitivity may decrease. , the alkali developability after exposure decreases. (A>If the ratio of component (D) to 100 parts by weight of component is less than 0.1 part by weight, sufficient crosslinking cannot be achieved by light irradiation,
If it exceeds 0 parts by weight, it is difficult for light to reach the substrate, resulting in poor adhesion between the substrate and the resin, which is not preferable.
本発明のアルカリ現像型感光性樹脂組成物は。The alkali-developable photosensitive resin composition of the present invention is.
次に述べるようにしてプリント配線板のソルダーレジス
トとして好適に使用することができる。例えば、プリン
ト配線板の表面に本発明の感光性樹脂組成物を溶媒に溶
解して塗布するか、あるいは本発明のアルカリ現像型感
光性樹脂組成物からなるドライフィルムをプリント配線
板の表面に張り付ける等の方法によって被膜を形成させ
1次いで。It can be suitably used as a solder resist for printed wiring boards as described below. For example, the photosensitive resin composition of the present invention may be dissolved in a solvent and applied to the surface of a printed wiring board, or a dry film made of the alkali-developable photosensitive resin composition of the present invention may be pasted on the surface of the printed wiring board. First, a film is formed by a method such as
このようにして得た被膜の上にネガフィルムをあて、活
性光線を照射して露光部を硬化させた後。A negative film was placed on the film thus obtained, and the exposed areas were cured by irradiation with actinic rays.
アルカリ水溶液を用いて未露光部を溶出させて現像して
、ソルダーレジストを形成させる。また。The unexposed areas are eluted using an alkaline aqueous solution and developed to form a solder resist. Also.
さらに光硬化部を加熱すると硬化が進み緒特性が向上す
る。Further heating of the photo-curing part will progress the curing process and improve the properties.
本発明のアルカリ現像型感光性樹脂組成物を溶解するの
に適した溶剤としては1例えば、メチルエチルケトン、
メチルイソブチルケトン等のケトン類、メチルセロソル
ブ、エチルセロソルブ、ブチルセロソルブ、セロソルブ
アセテ−)等のセロソルブ類が挙げられる。Examples of solvents suitable for dissolving the alkali-developable photosensitive resin composition of the present invention include methyl ethyl ketone,
Examples include ketones such as methyl isobutyl ketone, and cellosolves such as methyl cellosolve, ethyl cellosolve, butyl cellosolve, and cellosolve acetate.
本発明のアルカリ現像型感光性樹脂組成物を溶解した溶
液をプリント配線板に塗布する方法としては、溶液浸漬
法、スプレー法の他、ローラーコーター機やスピンナー
塗布機を用いて塗布する方法等があり、いずれの方法を
も採用することができる。これらの方法によって1例え
ば20〜30μmの厚さに塗布した後、溶剤を除去すれ
ばプリント配線板上に被膜が形成される。Methods for applying a solution containing the alkali-developable photosensitive resin composition of the present invention to a printed wiring board include a solution dipping method, a spray method, and a method using a roller coater or spinner coater. Yes, either method can be used. After coating to a thickness of, for example, 20 to 30 μm using these methods, a film is formed on the printed wiring board by removing the solvent.
また1本発明のアルカリ現像型感光性樹脂組成物の溶液
をポリエチレンテレフタレートフィルム等の可撓性の支
持体上に塗布して乾燥するとドライフィルムを作成する
ことができる。なお、ドライフィルムには、保護のため
ポリエチレンフィルム等を被覆してもよい。Furthermore, a dry film can be prepared by applying a solution of the alkali-developable photosensitive resin composition of the present invention onto a flexible support such as a polyethylene terephthalate film and drying it. Note that the dry film may be covered with a polyethylene film or the like for protection.
本発明のアルカリ現像型感光性樹脂組成物を硬化させる
ために適した光としては、超高圧水銀ランプ、高圧水銀
ランプあるいはメタルハライドランプ等のランプから発
振される光等が挙げられる。Examples of light suitable for curing the alkali-developable photosensitive resin composition of the present invention include light emitted from lamps such as ultra-high pressure mercury lamps, high-pressure mercury lamps, and metal halide lamps.
露光後アルカリ現像するのに適した現像液としては9例
えば、アルカリ金属やアルカリ土類金属の炭酸塩の水溶
液やアルカリ金属の水酸化物の水溶液等を挙げることが
できる。中でも炭酸ナトリウム、炭酸カリウム、炭酸リ
チウム等の炭酸塩の1〜3重量%からなる弱アルカリ性
水溶液を用いると微細な画像を精密に現像することがで
きる。Examples of developing solutions suitable for alkali development after exposure include aqueous solutions of alkali metal or alkaline earth metal carbonates, aqueous solutions of alkali metal hydroxides, and the like. Among these, a weakly alkaline aqueous solution containing 1 to 3% by weight of a carbonate such as sodium carbonate, potassium carbonate, or lithium carbonate can be used to precisely develop fine images.
アルカリ現像は、10〜50℃、好ましくは20〜40
℃の温度で、市販の現像機や超音波洗浄機を用いて行な
うことができる。Alkaline development is carried out at 10 to 50°C, preferably 20 to 40°C.
It can be carried out using a commercially available developer or ultrasonic cleaner at a temperature of .degree.
アルカリ現像後、N光硬化部の耐蝕性を向上させるため
、加熱処理を施すと強アルカリ水に対する耐久性、銅等
の金属に対する密着性、耐熱耐久性9表面硬度等が著し
く向上し、プリント配線板の保護マスクに要求される諸
性質がより向上する。After alkaline development, heat treatment is applied to improve the corrosion resistance of the N-light cured area, which significantly improves durability against strong alkaline water, adhesion to metals such as copper, heat resistance durability 9 surface hardness, etc., and improves printed wiring. Various properties required for a plate protective mask are further improved.
加熱処理条件は、8()〜200℃で10分間〜2時間
とするのが好ましい。The heat treatment conditions are preferably 8() to 200°C for 10 minutes to 2 hours.
本発明のアルカリ現像型感光性樹脂組成物には。In the alkali-developable photosensitive resin composition of the present invention.
(A)、(B)、(C)及び(D)成分以外に、光重合
性のモノマーやオリコマ−、エポキシ基硬化促進剤2熱
重合禁止剤、フィラー、染料、顔料、可塑剤、レベリン
グ剤、密着性向上剤、消泡剤、難燃剤等の添加剤や有機
溶剤等の配合剤や添加剤を配合することができる。In addition to components (A), (B), (C), and (D), photopolymerizable monomers and olicomers, epoxy group curing accelerators, bithermal polymerization inhibitors, fillers, dyes, pigments, plasticizers, and leveling agents , additives such as adhesion improvers, antifoaming agents, flame retardants, and organic solvents.
このような配合剤や添加剤等の種類や使用量は。What are the types and amounts of such compounding agents and additives?
本発明の感光性樹脂組成物の性質を損なわない範囲で適
宜選択することができる。It can be appropriately selected within a range that does not impair the properties of the photosensitive resin composition of the present invention.
光重合性の千ツマ−やオリゴマーとしては1例えば、2
−ヒドロキシエチル(メタ)アクリレート、2−ヒドロ
キシプロピル(メタ)アクリレート、2−エチルヘキシ
ル(メタ)アクリレート等の水酸基を有するモノマー、
エチレングリコールジアクリレート、ジエチレングリコ
ールジアクリレート、トリエチレングリコールジアクリ
レートテトラエチレングリコールジアクリレート、テト
ラメチレングリコールジアクリレート、トリメチロール
プロパントリアクリレート、トリメチロールエタンドリ
アクリレート、ペンタエリスリトールジアクリレート、
ペンタエリスリトールトリアクリレート、ペンタエリス
リトールテトラアクリレート、ジペンタエリスリトール
テトラアクリレート、ジペンタエリスリトールへキサア
クリレート、グリセロールアクリレート等のアクリル酸
エステル、エチレングリコールジメタクリレート。Photopolymerizable polymers and oligomers include 1, for example, 2
- Monomers having hydroxyl groups such as hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, 2-ethylhexyl (meth)acrylate,
Ethylene glycol diacrylate, diethylene glycol diacrylate, triethylene glycol diacrylate, tetraethylene glycol diacrylate, tetramethylene glycol diacrylate, trimethylolpropane triacrylate, trimethylolethane diacrylate, pentaerythritol diacrylate,
Acrylic acid esters such as pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol tetraacrylate, dipentaerythritol hexaacrylate, glycerol acrylate, and ethylene glycol dimethacrylate.
ジエチレングリコールジメタクリレート、トリエチレン
グリコールジメタクリレート、テトラエチレングリコー
ルジメタクリレート、トリメチロールプロパントリメタ
クリレート、トリメチロールエタントリメタクリレート
、ペンタエリスリトールジメタクリレート、ペンタエリ
スリトールトリメタクリレート、ペンタエリスリトール
テトラメタクリレート、ジペンタエリスリトールテトラ
メタクリレート、ジペンタエリスリトールへキサメタク
リレート、グリセロールメタクリレート等のメタクリル
酸エステル等の不飽和カルボン酸と脂肪族ポリオール化
合物とのエステル類、ジイソシアネートと少なくとも1
個のアクリレート基又はメタクリレート基を有する1価
アルコールとの反応によって得られるウレタンアクリレ
ート化合物等を挙げることができる。また、これらの化
合物は、1種以上を併用して使用することもできる。Diethylene glycol dimethacrylate, triethylene glycol dimethacrylate, tetraethylene glycol dimethacrylate, trimethylolpropane trimethacrylate, trimethylolethane trimethacrylate, pentaerythritol dimethacrylate, pentaerythritol trimethacrylate, pentaerythritol tetramethacrylate, dipentaerythritol tetramethacrylate, di Esters of unsaturated carboxylic acids such as methacrylic esters such as pentaerythritol hexamethacrylate and glycerol methacrylate and aliphatic polyol compounds, diisocyanates and at least one
Examples include urethane acrylate compounds obtained by reaction with a monohydric alcohol having 1 acrylate group or methacrylate group. Moreover, these compounds can also be used in combination of 1 or more types.
これらの化合物は、粘度調整剤あるいは光架橋剤として
作用する。These compounds act as viscosity modifiers or photocrosslinking agents.
エポキシ基硬化促進剤としては、アミン化合物類、イミ
ダゾール化合物類、カルボン酸類、フェノール類、第4
級アンモニウム塩類又はメチロール基含有化合物類等が
挙げられる。これらを少量併用して得た被膜を後加熱す
ると、耐熱性、耐溶剤性、耐酸性、耐メツキ性、密着性
、電気特性及び硬度等の緒特性が向上する。したがって
、特にソルダーレジスト、無電界金めっきレジスト及び
永久保護マスクとして用いる場合は好適なものが得られ
る。Epoxy group curing accelerators include amine compounds, imidazole compounds, carboxylic acids, phenols, quaternary
Examples include class ammonium salts and methylol group-containing compounds. When a film obtained by using a small amount of these together is heated after heating, properties such as heat resistance, solvent resistance, acid resistance, plating resistance, adhesion, electrical properties, and hardness are improved. Therefore, it is particularly suitable for use as a solder resist, an electroless gold plating resist, and a permanent protective mask.
熱重合禁止剤としては、ハイドロキノン、ハイドロキノ
ンモノメチルエーテル、ピロガロール。Thermal polymerization inhibitors include hydroquinone, hydroquinone monomethyl ether, and pyrogallol.
tert−ブチルカテコール、フェノチアジン等が挙げ
られる。Examples include tert-butylcatechol and phenothiazine.
フィラーとしては、アルミナ白、クレー、タルク、微粉
末シリカ、硫酸バリウム、炭酸バリウム。Fillers include white alumina, clay, talc, finely powdered silica, barium sulfate, and barium carbonate.
酸化マグネシウム、酸化チタン等が挙げられる。Examples include magnesium oxide and titanium oxide.
染料、顔料としては、フタロシアニングリーン。Phthalocyanine green is used as a dye and pigment.
フタロシアニンブルー フタロシアニンイエローベンジ
ジンイエロー、パーマネントレッドR,ブリリアントカ
ーミン6B等が挙げられる。Examples include Phthalocyanine Blue, Phthalocyanine Yellow, Benzidine Yellow, Permanent Red R, and Brilliant Carmine 6B.
可塑剤としては、ジブチルフタレート、ジオクチルフタ
レート、トリクレジル等が挙げられる。Examples of the plasticizer include dibutyl phthalate, dioctyl phthalate, tricresyl, and the like.
消泡剤、レベリング剤としては、シリコン系。Silicone-based antifoaming and leveling agents.
フッ素系、アクリル系の化合物が挙げられる。Examples include fluorine-based and acrylic-based compounds.
難燃剤としては1例えば、水酸化アルミニウム。Examples of flame retardants include aluminum hydroxide.
ホウ酸亜鉛等の無機系の難燃剤、トリス−(β−クロロ
エチル)−ホスフェート、ペンタクロロフェノールメタ
アクリレート等のハロゲン含有リン酸塩等の有機系の難
燃剤が挙げられる。Examples include inorganic flame retardants such as zinc borate, and organic flame retardants such as halogen-containing phosphates such as tris-(β-chloroethyl)-phosphate and pentachlorophenol methacrylate.
(実施例)
以下9本発明を実施例によって具体的に説明する。なお
、以下において、「部」は「重量部」を示す。(Examples) The present invention will be specifically described below using nine examples. In addition, in the following, "parts" indicate "parts by weight."
実施例1〜6.比較例1〜4 (A)成分、(B)成分、(C)成分、(D)成分。Examples 1-6. Comparative examples 1 to 4 (A) component, (B) component, (C) component, (D) component.
フィラー、染顔料、熱硬化剤1重合禁止剤及び有機溶剤
を後述のとおり配合し、テスト用3本ロールミルを用い
て混練し、レジストインキを調製した。次いで、脱脂洗
浄した銅張積層板上に、これらのレジストインキを塗布
し、乾燥させた後、ネガフィルムを密着させ、!!光し
、露光後、現像し。Fillers, dyes and pigments, thermosetting agents, polymerization inhibitors, and organic solvents were blended as described below and kneaded using a three-roll mill for testing to prepare resist inks. Next, these resist inks are applied onto the copper-clad laminate that has been degreased and cleaned, and after drying, a negative film is attached, and! ! After exposure, develop.
熱処理を行った。この際、後に詳述するようにして、塗
膜の乾燥性、ll光感度、アルカリ溶液に対する現像性
、塗膜硬度、塗膜と基板との密着性。Heat treatment was performed. At this time, as will be detailed later, drying properties of the coating film, photosensitivity, developability with respect to alkaline solutions, coating film hardness, and adhesion between the coating film and the substrate are determined.
はんだ耐熱性、塗膜の無電界金めっき耐性、耐薬品性及
び絶縁抵抗について評価した。それらの結果を第1表に
示した。The solder heat resistance, electroless gold plating resistance of the coating film, chemical resistance, and insulation resistance were evaluated. The results are shown in Table 1.
なお、塗膜乾燥性については厚さ1.6mmの銅張積層
板上にレジストインキを17〜25μmの厚さで塗布し
たものについて試験し、ll光感度、アルカリ溶液にた
いする現像性については、さらに70℃で30分間乾燥
して得た塗膜について試験した。The drying properties of the coating film were tested using resist ink applied to a thickness of 17 to 25 μm on a copper-clad laminate with a thickness of 1.6 mm. A coating film obtained by drying at 70° C. for 30 minutes was tested.
また、基板との密着性、はんだ耐熱性、無電解金メツキ
耐性、耐薬品性、耐溶剤性及び絶縁抵抗については、前
記のようにして露光、現像した後。In addition, the adhesion with the substrate, soldering heat resistance, electroless gold plating resistance, chemical resistance, solvent resistance, and insulation resistance were determined after exposure and development as described above.
145℃で50分間加熱を行い、完全硬化した後のソル
ダーレジストとしての塗膜について試験した。After heating at 145° C. for 50 minutes and completely curing, the coating film as a solder resist was tested.
■実施例1〜3.比較例1〜2の配合割合(^)ビスフ
ェノールA型エポキシアクリレートの水酸基に無水こは
く酸を付加したカルボキシル基含有エポキシアクリレー
ト (第1表参照)(B) HYCARCTBN 1
300x31 (Goodrich社製)(第1表参照
)
(C)トリグリシジルイソシアヌレート 10 1(
D)ベンゾフェノン 4.5部ジエ
チルアミノベンゾフェノン 0.5部その他の配合
剤
ジペンタエリスリトールヘキサアクリレート5 部
硫酸バリウム 15 部フタロシ
アニングリーン 0.5Nジシアンジアミド
1.0部ハイドロキノン千ツメチル
エーテル 0.05部セロソルブアセテ−)
23.45部■ 実施例4〜6.比較例3〜4の配
合割合(A)スチレンと無水マレイン酸の交互共重合体
(AR[’0ケミカル社製、 SMAレジン1000)
にヒドロキシエチルアクリレートを付加して得られるカ
ルボキシル基含有ポリマー
(第1表参照)
(B) HYCARCTBN 1300X 8 (
Goodrich社製)(第1表参照)
(C) 3.3°、5.5’−テトラメチルビフェニ
ル−4,4°−ジグリシジルエーテル 1o 部
(D)ベンゾフェノン 4.5部
ジエチルチオキサンソン 0.5部その他の
配合剤
ペンタエリスリトールトリアクリレート5部
硫酸バリウム 15 部微粉末
シリカ 3 部フタロシアニング
リーン 0.5Rジシアンジアミド
1.5部ハイドロキノン
0.1部カルピトールアセテート 21
.4部〔評価方法〕
(1)塗膜の乾燥性
J Is K−5400に準じて試験した。評価のラン
クは次のとおりである。■Examples 1 to 3. Blend ratio of Comparative Examples 1 and 2 (^) Carboxyl group-containing epoxy acrylate obtained by adding succinic anhydride to the hydroxyl group of bisphenol A type epoxy acrylate (see Table 1) (B) HYCARCTBN 1
300x31 (manufactured by Goodrich) (see Table 1) (C) Triglycidyl isocyanurate 10 1 (
D) Benzophenone 4.5 parts Diethylaminobenzophenone 0.5 parts Other ingredients Dipentaerythritol hexaacrylate 5 parts Barium sulfate 15 parts Phthalocyanine green 0.5N dicyandiamide 1.0 parts Hydroquinone 1,000 parts Methyl ether 0.05 parts Cellosolve acetate)
23.45 parts■ Examples 4-6. Blending ratio of Comparative Examples 3 to 4 (A) Alternating copolymer of styrene and maleic anhydride (AR [manufactured by '0 Chemical Co., Ltd., SMA Resin 1000]
Carboxyl group-containing polymer obtained by adding hydroxyethyl acrylate to (see Table 1) (B) HYCARC TBN 1300X 8 (
(manufactured by Goodrich) (see Table 1) (C) 3.3°, 5.5'-tetramethylbiphenyl-4,4°-diglycidyl ether 10 parts (D) Benzophenone 4.5 parts Diethylthioxanthone 0 .5 parts Other ingredients Pentaerythritol triacrylate 5 parts Barium sulfate 15 parts Fine powder silica 3 parts Phthalocyanine green 0.5R dicyandiamide
1.5 parts hydroquinone
0.1 part carpitol acetate 21
.. 4 parts [Evaluation method] (1) Drying property of coating film Tested according to JIS K-5400. The evaluation ranks are as follows.
○:全くタックが認められないもの
△:わずかにタックが認められるもの
X:顕著にタックが認められるもの
(2)露光感度
コダックステップタブレットNα2 (イーストマンコ
ダック社製、光学濃度段差0.15.21段差のネガフ
ィルム)を塗膜に密着し、IKW超高圧水銀ランプ〔■
オーク製作新製、HMW−6−N〕を用いて波長365
nm付近の紫外線を照度5mw/cm2で100秒間(
光量500mJ/cm”)照射し、後記(3)の弱アル
カリ水溶液に対する現像性試験と同様に処理して。○: No tack observed at all △: Slight tack observed X: Significant tack observed (2) Exposure sensitivity Kodak Step Tablet Nα2 (manufactured by Eastman Kodak Company, optical density step 0.15. A negative film with 21 steps) was adhered to the paint film, and an IKW ultra-high pressure mercury lamp [■
Wavelength 365 using new oak manufactured HMW-6-N]
Ultraviolet light around nm for 100 seconds at an illuminance of 5 mw/cm2 (
The sample was irradiated with light of 500 mJ/cm" and processed in the same manner as the developability test for a weak alkaline aqueous solution described in (3) below.
銅箔上に残存するステップタブレットの段数を調べた。The number of step tablets remaining on the copper foil was investigated.
この評価法では、高感度であるほど残存する段数が多く
なる。In this evaluation method, the higher the sensitivity, the greater the number of remaining stages.
(3)弱アルカリ水溶液に対する現像性前記(2)のよ
うにして露光処理したものについて。(3) Developability in a weak alkaline aqueous solution For those exposed as described in (2) above.
1重量%の炭酸ナトリウム水溶液を使用して、現像機(
古谷商会■製、YCE−85)により、2.1kg /
cdの圧力下、30℃で80秒間現像を行なった。Using a 1% by weight aqueous sodium carbonate solution, a developing machine (
Manufactured by Furuya Shokai ■, YCE-85), 2.1kg /
Development was carried out at 30° C. for 80 seconds under a pressure of CD.
現像後、30倍に拡大して観察し、残存する樹脂を目視
で評価した。After development, it was observed under 30x magnification, and the remaining resin was visually evaluated.
評価のランクは次のとおりである。The evaluation ranks are as follows.
○:現像性の良好なもの
(銅面上にレジストが全く残らないもの)×:現像性の
不良なもの
(銅面上にレジストが少し残るもの)
(4)塗膜硬度
前記(2)及び(3)のようにして露光、現像した後。○: Good developability (no resist remains on the copper surface) ×: Poor developability (some resist remains on the copper surface) (4) Coating film hardness (2) and After exposure and development as in (3).
145℃で50分間加熱した塗膜の硬度を、 JISK
−5400の試験法に準じて鉛筆硬度試験機を用いて荷
重1kgを掛けた際、被膜に傷が付かない最も高硬度を
もって表示した。鉛筆は、「三菱ハイユニ」 (三菱鉛
筆社製)S使用した。The hardness of the coating film heated at 145℃ for 50 minutes is determined by JISK.
When a load of 1 kg was applied using a pencil hardness tester according to the test method of -5400, the highest hardness without scratching the coating was displayed. The pencil used was "Mitsubishi Hi-Uni" S (manufactured by Mitsubishi Pencil Co., Ltd.).
(5)基板との密着性 前記(2)及び(3)のようにして露光、現像した後。(5) Adhesion to the substrate After exposure and development as described in (2) and (3) above.
145℃で50分間加熱した塗膜に、少なくとも100
個の基盤目が得られるようにクロスカットを入れ。The coating heated at 145°C for 50 minutes has a
Insert crosscuts to obtain individual base marks.
次いで、粘着テープを用いてピーリング試験を行い、基
盤目の剥離の状態を目視によって評価した。Next, a peeling test was conducted using an adhesive tape, and the state of peeling of the base grains was visually evaluated.
評価のランクは次のとおりである。The evaluation ranks are as follows.
○:全ての測定点で全く剥離が認められなかったもの
△:100の測定点中1〜20の点で剥離が認められた
もの
X : 100の測定点中21以上の点で剥離が認めら
れたもの
(6)はんだ耐熱性
前記(2)及び(3)のようにして露光、現像した後。○: No peeling was observed at all measurement points △: Peeling was observed at 1 to 20 of 100 measurement points X: Peeling was observed at 21 or more points out of 100 measurement points (6) Solder heat resistance After exposure and development as described in (2) and (3) above.
145℃で50分間加熱した塗膜について、JIS D
−0202に準じて、260℃のはんだ浴に20秒間浸
漬し、浸漬後の塗膜の状態を評価した。評価のランクは
次のとおりである。For coating films heated at 145°C for 50 minutes, JIS D
-0202, it was immersed in a 260°C solder bath for 20 seconds, and the state of the coating film after immersion was evaluated. The evaluation ranks are as follows.
○:塗膜の外観に異常なし
X:塗膜の外観に膨れ、溶融、剥離あり(7)無電解金
めっき耐性
前記(2)及び(3)のようにして露光、現像した後。○: There is no abnormality in the appearance of the coating film.
145℃で50分間加熱してパターン形成した基板を脱
脂洗浄し、触媒活性化処理し、市販の無電解ニッケルめ
っき液(PH=6)を用いて90℃で15分処理した。The patterned substrate was heated at 145° C. for 50 minutes, degreased and cleaned, subjected to catalyst activation treatment, and treated at 90° C. for 15 minutes using a commercially available electroless nickel plating solution (PH=6).
さらに、無電解金めっき液[P)l=6. KAu (
CN) 3g/l]を用いて90℃で90分開始理する
ことにより2μmの厚みの金を付着させ、粘着テープを
用いてビーリング試験を行い、銅回路上の剥離の状態を
目視によって評価した。評価のランクは次のとおりであ
る。Furthermore, electroless gold plating solution [P)l=6. KAu (
CN) 3g/l] at 90°C for 90 minutes to adhere gold to a thickness of 2μm, conduct a peeling test using adhesive tape, and visually evaluate the state of peeling on the copper circuit. did. The evaluation ranks are as follows.
○:銅回路上の剥れが認められなかったもの△:1〜2
個所で剥れが認められたものX:3個以上の剥れが認め
られたもの
(8)耐薬品性
前記(2)及び(3)のようにして露光、現像し、14
5℃で50分間加熱した塗膜に対して下記の薬品にそれ
ぞれ25℃で1時間浸漬し、浸漬後の外観、密着性を評
価した。○: No peeling was observed on the copper circuit △: 1 to 2
Items with peeling observed in some places X: Items with peeling in 3 or more areas (8) Chemical resistance Exposure and development as described in (2) and (3) above.
The coating film heated at 5° C. for 50 minutes was immersed in each of the following chemicals at 25° C. for 1 hour, and the appearance and adhesion after immersion were evaluated.
■耐酸性 10重量%H(l水溶液 ■耐アルカリ性 10重量%NaOH水溶液 ■耐溶剤性 トリクロルエタン 塩化メチレン イソプロピルアルコール 評価のランクは次のとおりである。■Acid resistance 10% by weight H (l aqueous solution ■Alkali resistance 10% by weight NaOH aqueous solution ■Solvent resistance trichloroethane methylene chloride Isopropyl alcohol The evaluation ranks are as follows.
○:異常なし
X:溶解又は膨潤あり
(9)絶縁抵抗
前記(2)及び(3)のようにして露光、現像し、14
5℃で50分間加熱した塗膜に、 JIS Z−319
7に従って円形電極を作成し、常態及び55℃、95%
RH,100時間後の絶縁性を東亜電波■製、 5up
er MegohmeterModel S M −5
hを用いて測定した。○: No abnormality X: Dissolution or swelling (9) Insulation resistance Exposure and development as in (2) and (3) above.
JIS Z-319 on the coating film heated at 5℃ for 50 minutes.
A circular electrode was prepared according to 7, normal condition and 55°C, 95%
RH, insulation after 100 hours, manufactured by Toa Denpa ■, 5up
er MegohmeterModel SM-5
It was measured using h.
第1表から明らかなように1本発明の樹脂組成物よりな
る塗膜は、無電解金めっき耐性を初めとし、その他の特
性にも優れていることが分かる。As is clear from Table 1, it can be seen that the coating film made of the resin composition of the present invention has excellent resistance to electroless gold plating as well as other properties.
(発明の効果)
本発明は以上のように構成されているので1本発明のア
ルカリ現像型感光性樹脂組成物よりなる被膜をプリント
配線板上に形成させ、!!光後、アルカリ現像すると、
耐酸性、耐アルカリ性、耐溶剤性、はんだ耐熱性、電気
絶縁性1機械的強度。(Effects of the Invention) Since the present invention is configured as described above, 1) a film made of the alkali-developable photosensitive resin composition of the present invention is formed on a printed wiring board; ! After light and alkaline development,
Acid resistance, alkali resistance, solvent resistance, soldering heat resistance, electrical insulation 1 Mechanical strength.
表面硬度等に優れた保護マスクが得られる。さらに、!
!光部を熱硬化するとこれらの特性はより向上する。ま
た、無電解めっき耐性も有するようになるので、この上
に無電解金めっきを施すことができ、高価な金の無駄使
いを省くことができる。A protective mask with excellent surface hardness etc. can be obtained. moreover,!
! These properties are further improved by thermosetting the light part. Furthermore, since it has resistance to electroless plating, electroless gold plating can be applied thereon, and wasteful use of expensive gold can be avoided.
このような特性を有するので本発明のアルカリ現像型感
光性樹脂組成物は、前述のようなレジストインキを初め
とし、プリント配線板関連のエツチングレジストや層間
絶縁材料、感光性接着剤。Because it has such properties, the alkali-developable photosensitive resin composition of the present invention can be used not only in resist inks as described above, but also in etching resists related to printed wiring boards, interlayer insulating materials, and photosensitive adhesives.
塗料、プラスチックレリーフ、プラスチックのハードコ
ート剤、オフセット印刷板としての28版。28 editions as paints, plastic reliefs, plastic hard coats, and offset printing plates.
スクリーン印刷用の感光液等に用いることができ。It can be used as a photosensitive liquid for screen printing.
幅広い分野に使用することができる。Can be used in a wide range of fields.
Claims (1)
なり、(A)成分100重量部に対する(B)成分の割
合が5〜100重量部であり、(C)成分の割合が5〜
100重量部であり、(D)成分の割合が0.1〜30
重量部であるアルカリ現像型感光性樹脂組成物。 (A)成分:同一分子内にカルボキシル基とビニル基を
有し、アルカリ水溶液に可溶性のポリマー又はオリゴマ
ー。 (B)成分:下記一般式〔 I 〕で表され、末端にカル
ボキシル基を有するポリマー。 ▲数式、化学式、表等があります▼〔 I 〕 (式中x、y及びzは10〜200の整数)(C)成分
:エポキシ基を少なくとも1個有する化合物。 (D)成分:光重合開始剤もしくは増感剤。(1) Consisting of the following components (A), (B), (C) and (D), the ratio of component (B) to 100 parts by weight of component (A) is 5 to 100 parts by weight, and component (C) The percentage of
100 parts by weight, and the proportion of component (D) is 0.1 to 30
Parts by weight of an alkali-developable photosensitive resin composition. Component (A): A polymer or oligomer that has a carboxyl group and a vinyl group in the same molecule and is soluble in an alkaline aqueous solution. Component (B): A polymer represented by the following general formula [I] and having a carboxyl group at the end. ▲There are mathematical formulas, chemical formulas, tables, etc.▼ [I] (In the formula, x, y and z are integers from 10 to 200) (C) component: A compound having at least one epoxy group. Component (D): photopolymerization initiator or sensitizer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8191690A JPH03280059A (en) | 1990-03-29 | 1990-03-29 | Alkaline development type photosensitive resin composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8191690A JPH03280059A (en) | 1990-03-29 | 1990-03-29 | Alkaline development type photosensitive resin composition |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03280059A true JPH03280059A (en) | 1991-12-11 |
Family
ID=13759779
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8191690A Pending JPH03280059A (en) | 1990-03-29 | 1990-03-29 | Alkaline development type photosensitive resin composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03280059A (en) |
-
1990
- 1990-03-29 JP JP8191690A patent/JPH03280059A/en active Pending
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