JPH03276014A - Magnetic rotational angle detector - Google Patents

Magnetic rotational angle detector

Info

Publication number
JPH03276014A
JPH03276014A JP7766090A JP7766090A JPH03276014A JP H03276014 A JPH03276014 A JP H03276014A JP 7766090 A JP7766090 A JP 7766090A JP 7766090 A JP7766090 A JP 7766090A JP H03276014 A JPH03276014 A JP H03276014A
Authority
JP
Japan
Prior art keywords
magnetic
rotation angle
magnetic field
magnetic pole
rotates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7766090A
Other languages
Japanese (ja)
Inventor
Nagakatsu Ito
伊藤 永勝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CKD Corp
Original Assignee
CKD Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CKD Corp filed Critical CKD Corp
Priority to JP7766090A priority Critical patent/JPH03276014A/en
Publication of JPH03276014A publication Critical patent/JPH03276014A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To detect the angle of rotation of a rotary machine continuously over the entire area by arranging a magnetoelectric transducing element in a stationary magnetic field produced by an opposite permanent magnet. CONSTITUTION:The magnetic rotational angle detector 1 has its principal part composed of the permanent magnet 3, magnetic pole yokes 5a and 5b, and a magnetic detection unit 7 arranged between them. The plate surfaces 5aa and 5bb of the magnetic pole yokes 5a and 5b face each other in parallel, so the stationary magnetic field MF which crosses them at right angles is produced between the magnetic pole yokes 5a and 5b and rotates as a rotary shaft S rotates. The magnetic detection unit 7 consists of two Hall elements and generqtes an output corresponding to the angle theta of interlinkage between a magnetism sensing surface and the magnetic field MF. The angle theta of interlinkage rotates from 0 to 2pi as the rotary shaft S rotates, so the angle of rotation can be detected.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、回転機の回転角度を磁電変換素子を用いて検
出する磁気式回転角度検出器に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic rotation angle detector that detects the rotation angle of a rotating machine using a magnetoelectric conversion element.

[従来の技術1 従来より、回転機の回転角度を検出する磁気式回転角度
検出器の一つとして、N極及びS極が交互に着磁された
磁気ドラムの回転に伴う磁束の変化を、磁電変換素子(
たとえば、ホール素子や磁気抵抗素子など)によって検
出し電気的パルス信号として出力することで、回転角度
(アナログ量)をパルス数(ディジタル量)として検出
する磁気エンコーダが知られ−(いる。
[Prior art 1] Conventionally, as one of the magnetic rotation angle detectors for detecting the rotation angle of a rotating machine, changes in magnetic flux accompanying the rotation of a magnetic drum whose N pole and S pole are alternately magnetized are used to detect the rotation angle of a rotating machine. Magnetoelectric conversion element (
For example, a magnetic encoder is known that detects a rotation angle (analog amount) as a number of pulses (digital amount) by detecting the rotation angle (analog amount) using a Hall element, magnetoresistive element, etc. and outputting it as an electrical pulse signal.

また、回転軸に直結された半円形の永久磁石の回転に伴
う磁束の変化を、円形パターンに成形された磁気抵抗素
子(MR素子ともいう)によって検出し、回転角度に応
じた電圧信号を出力する無接触型ポテンションメータも
知られている。
In addition, changes in magnetic flux caused by the rotation of a semicircular permanent magnet directly connected to the rotating shaft are detected by a magnetic resistance element (also called an MR element) formed in a circular pattern, and a voltage signal is output according to the rotation angle. Contactless potentiometers are also known.

[発明が解決しようとする課題] しかし、上記磁気エンコーダは、その検出精度(分解能
)が磁気ドラムに形成された磁極の数によって決まる機
械的構造であるがゆえに、検出精度を上げるためには磁
気ドラムを大きくして磁極の数を増やさなければならず
、そのため検出精度を上げると磁気ドラムが重くなり回
転機にかかる負荷が増えるという問題が起こる。
[Problems to be Solved by the Invention] However, since the above magnetic encoder has a mechanical structure whose detection accuracy (resolution) is determined by the number of magnetic poles formed on the magnetic drum, it is necessary to use magnetic The drum must be made larger and the number of magnetic poles must be increased, so increasing the detection accuracy poses a problem in that the magnetic drum becomes heavier and the load on the rotating machine increases.

一方、無接触型ポテンションメータは回転角度を電圧レ
ベルとして連続的に検出できるものの、回転角度と電圧
との関係が線形的にならない検出角度領域があり、全回
転角度を検出することはできないといった問題を有して
いる。
On the other hand, although non-contact potentiometers can continuously detect the rotation angle as a voltage level, there is a detection angle range where the relationship between rotation angle and voltage is not linear, and it is not possible to detect the entire rotation angle. I have a problem.

本発明(よ全領域にわたって回転角度を連続的に検出で
きる磁気式回転角度検出器を提供することを目的として
なされた。
The present invention has been made with the object of providing a magnetic rotation angle detector that can continuously detect rotation angles over the entire range.

[課題を解決するための手段1 本発明の要旨とするところ(よ 回転機の回転角度を磁電変換素子を用いて検出する磁気
式回転角度検出器であって、 永久磁石と、該永久磁石の各磁極に接続され、所定間隔
を隔てて互いに対向して配設された磁極部材と、を備え
、 磁電変換素子を、両磁極部材の間に形成された磁場空間
に配設すると共に、 上記永久磁石及び磁極部材と上記磁電変換素子との何れ
か一方を、回転機の回転軸に軸心を同じくして装着して
なることを特徴とする磁気式回転角度検出器にある。
[Means for Solving the Problems 1] The gist of the present invention is a magnetic rotation angle detector for detecting the rotation angle of a rotating machine using a magneto-electric conversion element, comprising: a permanent magnet; magnetic pole members connected to each magnetic pole and disposed facing each other at a predetermined interval, a magnetoelectric conversion element being disposed in the magnetic field space formed between the two magnetic pole members, and the permanent A magnetic rotation angle detector characterized in that either a magnet, a magnetic pole member, or the magnetoelectric transducer is mounted on the rotating shaft of a rotating machine with the same axis.

[作用] 以上のように構成された本発明の磁気式回転角度検出器
によれ1戴 永久磁石の磁極の夫々には、磁極部材が、所定間隔を隔
てて互いに対向して配設されているので、二つの磁極部
材の間に(よ磁束密度が一定の定常磁場が形成される。
[Function] In the magnetic rotation angle detector of the present invention configured as described above, magnetic pole members are arranged on each of the magnetic poles of the single permanent magnet so as to face each other at a predetermined interval. Therefore, a steady magnetic field with a constant magnetic flux density is formed between the two magnetic pole members.

永久磁石及び磁極部材と磁電変換素子との何れか一方が
、回転機の回転と共に回転すると、磁電変換素子に対す
る定常磁場の方向(磁電変換素子に対する磁束の鎖交角
度)も周期的に変わる。すると、磁電変換素子は、定常
磁場の方向の周期的変化を検出し電気信号に変換して出
力する。
When either the permanent magnet, the magnetic pole member, or the magnetoelectric transducer rotates with the rotation of the rotating machine, the direction of the steady magnetic field with respect to the magnetoelectric transducer (the interlinkage angle of the magnetic flux with respect to the magnetoelectric transducer) also changes periodically. Then, the magnetoelectric conversion element detects the periodic change in the direction of the steady magnetic field, converts it into an electric signal, and outputs it.

[実施例] 以下に本発明の実施例仁図面と共に説明する。[Example] Embodiments of the present invention will be described below with reference to the drawings.

第1図は実施例の磁気式回転角度検出器の構造を表す断
面図、第2図(A)及び(B)は磁気検出ユニットの配
置説明図である。
FIG. 1 is a sectional view showing the structure of a magnetic rotation angle detector according to an embodiment, and FIGS. 2(A) and 2(B) are illustrations of the arrangement of a magnetic detection unit.

図に示すように、磁気式回転角度検出器1は、永久磁石
3と、細長の平板状をなし永久磁石3を間にして長手方
向が互いに平行になるように配設された一対の磁極ヨー
ク5a、5bと、磁極ヨーク5a及び5bの間の空間に
配置された磁気検出ユニット7とを主要部として構成さ
れ、 モータ回転軸(以下、単に回転軸という)Sの軸
受は部SBの内部に収納されている。
As shown in the figure, the magnetic rotation angle detector 1 includes a permanent magnet 3 and a pair of magnetic pole yokes that are shaped like an elongated flat plate and are arranged so that their longitudinal directions are parallel to each other with the permanent magnet 3 in between. 5a, 5b, and a magnetic detection unit 7 arranged in the space between the magnetic pole yokes 5a and 5b as main parts, and the bearing of the motor rotation shaft (hereinafter simply referred to as the rotation shaft) S is inside the part SB. It is stored.

次に、上記一対の磁極ヨーク5a、5bのうち、一方の
磁極ヨーク5aの板面5aaは永久磁石3のN極側端面
に、他方の磁極ヨーク5bの板面5bbは同S極側端面
に、夫々接合されている。また、各磁極ヨーク5a、5
bの一端(友取り付は部材9を介して回転軸Sの軸端S
aに固定され、永久磁石3及び磁極ヨーク5a、5bが
回転軸Sと軸心を同じにして一体的に回転するように構
成されている。したがって、磁極ヨーク5a、5bの板
面5aa、5bbが互いに対向し、かつ平行になるので
、磁極ヨーク5a、5bの間に1社板面5a、5bに直
交する磁場MFが形成され、 回転軸Sの回転と共に磁
場MFも回転する。この磁場M「の磁束密度は、磁気式
回転角度検出器1が軸受は部SBの鉄製ケースCにより
外部と磁気的に遮蔽されているため、一定に保持され、
磁場MFは定常磁場となっている。
Next, among the pair of magnetic pole yokes 5a and 5b, the plate surface 5aa of one magnetic pole yoke 5a is connected to the N-pole side end surface of the permanent magnet 3, and the plate surface 5bb of the other magnetic pole yoke 5b is connected to the S-pole side end surface of the permanent magnet 3. , are connected to each other. In addition, each magnetic pole yoke 5a, 5
One end of b (for friend mounting, attach the shaft end S of the rotating shaft S via the member 9
The permanent magnet 3 and the magnetic pole yokes 5a and 5b are configured to rotate integrally with the rotating shaft S with the same axis. Therefore, the plate surfaces 5aa, 5bb of the magnetic pole yokes 5a, 5b are opposed to and parallel to each other, so a magnetic field MF orthogonal to the plate surfaces 5a, 5b is formed between the magnetic pole yokes 5a, 5b, and the rotation axis As S rotates, the magnetic field MF also rotates. The magnetic flux density of this magnetic field M is kept constant because the bearing of the magnetic rotation angle detector 1 is magnetically shielded from the outside by the iron case C of part SB.
The magnetic field MF is a steady magnetic field.

磁気検出ユニット7は磁電変換素子である2個のホール
素子11a、11bからなり、ホール素子11a、11
bは夫々の磁場検出面(以下、感磁面という)llaa
、11bbが互いに直交しL字形をなすように支持基板
13の上に固定されている。細長の板状をなす支持基板
1.i+i  ホール素子11a、llbの直交点が回
転軸Sの軸心の延長線上に定位するように、軸受は部S
Bの側壁SBaに固定されている。また、支持基板13
にはホール素子11a、llbの信号線SLa、Sして
いる。
The magnetic detection unit 7 consists of two Hall elements 11a and 11b, which are magnetoelectric conversion elements.
b is each magnetic field detection surface (hereinafter referred to as magnetically sensitive surface) llaa
, 11bb are fixed on the support substrate 13 so as to be orthogonal to each other and form an L-shape. Support substrate in the form of a long and narrow plate 1. i+i The bearing is placed in the part S so that the orthogonal point of the Hall elements 11a and llb is located on the extension line of the axis of the rotating shaft S.
It is fixed to the side wall SBa of B. In addition, the support substrate 13
There are signal lines SLa and S of the Hall elements 11a and llb.

ホール素子11a、11bE 周知のように、印加され
た磁場の強さに応じた電圧(ホール電圧)を出力するも
のであるため、磁場M「の強さ(=磁束密度)B及び制
御電流ICが一定とすれば、感磁面11aa、11bb
に対する磁場MFの鎖交角度θに応じた電圧vHを出力
する(VH= k X l cX B Xcosθ、k
はホール素子]1a、llbの積感度)。なお、ホール
素子11a、11bとしては、たとえ(ヱ ガリュウム
ひ素ホールセンサやインジュウム・アンチモンホールセ
ンサなどが知られている(東芝社製のTHSI○2A、
三菱電機社製の5H8IIOなど)。
Hall elements 11a, 11bE As is well known, since they output a voltage (Hall voltage) according to the strength of the applied magnetic field, the strength of the magnetic field M (=magnetic flux density) B and the control current IC If constant, magnetically sensitive surfaces 11aa, 11bb
Outputs a voltage vH according to the interlinkage angle θ of the magnetic field MF with respect to the magnetic field MF (VH= k
is the Hall element] product sensitivity of 1a and llb). Note that as the Hall elements 11a and 11b, there are known examples such as gallium arsenide hall sensors and indium antimony hall sensors (THSI○2A manufactured by Toshiba Corporation,
5H8IIO manufactured by Mitsubishi Electric, etc.).

回転軸Sの回転(時計方向)と共に磁場M「が回転する
と、すなわち、鎖交角度θがO〜2πの範囲で周期的に
変化すると、ホール素子11a、11bは検出信号V 
Ha、  V Hbを出力する。この検出信号VHa及
びVHb次式で表される。
When the magnetic field M'' rotates with the rotation (clockwise) of the rotation axis S, that is, when the interlinkage angle θ changes periodically in the range of O to 2π, the Hall elements 11a and 11b generate the detection signal V.
Output Ha, V Hb. The detection signals VHa and VHb are expressed by the following equations.

VHa=KXcos ωt VHb= KXcos(π/2−ωt)= KXsin
ωt<e=ωt、に=kXlcXB) これらの検出信号VHa、  VHbfよ信号線SLa
、SLbを介して信号処理回路30へ出力される。
VHa=KXcos ωt VHb= KXcos(π/2−ωt)=KXsin
ωt<e=ωt, = kXlcXB) These detection signals VHa, VHbf and signal line SLa
, SLb to the signal processing circuit 30.

第3図に示すように、信号処理回路30は、ホル素子1
1a、11bの出力端子T]とT2と間の電圧(=出力
電圧VHa、  VHb)を取り出して増幅する差動増
幅器32a、32bと、これら差動増幅回路32からの
入力信号(sinωを及びCOSωt)に基づいて回転
角度信号Vθ(=arcsinωt)を作成する変換モ
ジュール34とを主要部として構成さね2軸受は部SB
の外部1こある制御盤(図示路)に収納されている。
As shown in FIG. 3, the signal processing circuit 30 includes a Hall element 1
Differential amplifiers 32a and 32b take out and amplify the voltage (=output voltage VHa, VHb) between output terminals T] and T2 of output terminals 1a and 11b, and input signals (sinω and COSωt) from these differential amplifier circuits 32. ) and a conversion module 34 that creates a rotation angle signal Vθ (= arcsinωt) based on the rotation angle signal Vθ (=arcsinωt).
It is housed in a control panel (shown in the diagram) located outside.

変換モジュール34(よ二つの入力信号(sinωを及
びcosωt)から回転角度θ(=ωt)を検出するも
ので、減算器や逆正弦関数発生器などを集積化したもの
である。変換モジュール34は周知のものであって、た
とえばバー・ブラウン社製モデル4302が知られてい
る。
The conversion module 34 (detects the rotation angle θ (=ωt) from two input signals (sinω and cosωt), and integrates a subtracter, an arc sine function generator, etc. It is well known, for example, model 4302 manufactured by Burr-Brown.

また、制御盤内には定電流回路からなる駆動回路50も
設けられており、ホール素子11a、]1bに電源供給
線PLLa、PLbを介して制御電流ICを供給する。
Further, a drive circuit 50 consisting of a constant current circuit is also provided in the control panel, and supplies a control current IC to the Hall elements 11a and 1b via power supply lines PLLa and PLb.

上記のように構成された磁気式回転角度検出器1におい
て(よ回転軸Sの回転と共に磁場M「が回転すると、第
4図(A)及び(B)に示すように、磁気検出ユニット
7が検出信号VHa、  VHbを信号処理回路30へ
出力し、信号処理回路30が検出信号V Ha、  V
 Hbに基づいて回転角度信号Vθを出力する。
In the magnetic rotation angle detector 1 configured as described above, when the magnetic field M rotates with the rotation of the rotation axis S, the magnetic detection unit 7 is activated as shown in FIGS. 4(A) and 4(B). The detection signals VHa, VHb are output to the signal processing circuit 30, and the signal processing circuit 30 outputs the detection signals VHa, VHb.
A rotation angle signal Vθ is output based on Hb.

上記したように本実施例の磁気式回転角度検出器1は、
永久磁石3を間にして長手方向が互い(二平行になるよ
うに配設された一対の磁極ヨーク5a、5bの間に磁場
MFを形成し、磁場MF内に配設された磁気検出ユニッ
ト7によって、回転軸Sと共に回転する磁場M「の方向
を検出するので、回転角度θを連続的に検出することが
できる。それゆえ、従来のように回転角度を正確に検出
できない領域がなく全領域(O〜2π)にわたって回転
角度θを正確に検出できる。
As described above, the magnetic rotation angle detector 1 of this embodiment is
A magnetic field MF is formed between a pair of magnetic pole yokes 5a and 5b arranged so that their longitudinal directions are parallel to each other with a permanent magnet 3 in between, and a magnetic detection unit 7 is arranged within the magnetic field MF. Since the direction of the magnetic field M that rotates with the rotation axis S is detected, the rotation angle θ can be detected continuously.Therefore, there is no area where the rotation angle cannot be detected accurately as in the conventional case, and the entire area can be detected. The rotation angle θ can be accurately detected over the range (0 to 2π).

また、永久磁石3に平板状の磁極ヨーク5a、5bを接
合する極めて簡単な構造であり、磁極ヨーク5a、5b
も薄手に形成されているので軽量なものとして作製でき
る。したがって、従来のように、検出精度を上げるため
に磁気ドラムを大きくして回転軸Sの負荷を増すといっ
たことがない。
In addition, it has an extremely simple structure in which the flat magnetic pole yokes 5a, 5b are joined to the permanent magnet 3, and the magnetic pole yokes 5a, 5b are connected to the permanent magnet 3.
Since it is formed thinly, it can be made lightweight. Therefore, there is no need to increase the load on the rotating shaft S by increasing the size of the magnetic drum in order to improve detection accuracy, as is the case in the past.

ここで、本実施例では永久磁石3及び磁極ヨーク5a、
5bを回転するように構成したが、磁気検出ユニット7
の方が、回転軸Sと軸心を同じにして共に回転するよう
に構成してもよい。この場合には、第5図に示すように
、磁極ヨーク5a、5bの長手方向を回転軸Sの軸方向
に直交するように配設することも可能となる。
Here, in this embodiment, the permanent magnet 3 and the magnetic pole yoke 5a,
5b is configured to rotate, but the magnetic detection unit 7
Alternatively, it may be configured such that the axis of rotation S and the axis thereof are the same so that they rotate together. In this case, as shown in FIG. 5, it is also possible to arrange the magnetic pole yokes 5a, 5b so that the longitudinal direction thereof is orthogonal to the axial direction of the rotating shaft S.

また、温度変化の激しい環境では、温度変化による磁場
MFの強さの変動が問題となるが、このようなときには
、図に示すように、磁極ヨーク5a及び5bの間を、環
境温度の変化に応じて透磁率が変わる整磁合金60によ
って架橋して温度変化による磁場MFの強さの変動を緩
衝することで、磁場MFの磁束密度を一定に保つ。この
ようにして、磁気式回転角度検出器1の温度補償を行う
ことができる。
Furthermore, in an environment with rapid temperature changes, fluctuations in the strength of the magnetic field MF due to temperature changes poses a problem, but in such cases, as shown in the figure, the gap between the magnetic pole yokes 5a and 5b is The magnetic flux density of the magnetic field MF is kept constant by being bridged by the magnetic shunt alloy 60 whose magnetic permeability changes accordingly to buffer fluctuations in the strength of the magnetic field MF due to temperature changes. In this way, temperature compensation of the magnetic rotation angle detector 1 can be performed.

なお、整磁合金として(よ たとえ(ヱ東芝社製5JK
−A、5JK−B、5JK−Cなどが用いられる。
In addition, as a magnetic shunt alloy (for example, 5JK manufactured by Toshiba Corporation)
-A, 5JK-B, 5JK-C, etc. are used.

さらに、本実施例ではホール素子をL字形に配設したが
、このほかに、第6図(A)及び(B)に示すように、
丁字形に配設してもよい。
Furthermore, in this embodiment, the Hall elements are arranged in an L-shape, but in addition to this, as shown in FIGS. 6(A) and (B),
They may be arranged in a T-shape.

[発明の効果] 以上説明したように、本発明によれば永久磁石を間にし
て互いに対向するように配設された一対の磁極部材の間
に定常磁場を形成し、定常磁場内に配設された磁電変換
素子によって、回転機の回転と共に回転する磁場の方向
変化を検出するので、回転機の回転角度を全領域にわた
って連続的に検出することができる。
[Effects of the Invention] As explained above, according to the present invention, a steady magnetic field is formed between a pair of magnetic pole members arranged to face each other with a permanent magnet in between, and The magneto-electric transducer detects changes in the direction of the magnetic field that rotates with the rotation of the rotating machine, so the rotation angle of the rotating machine can be continuously detected over the entire range.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は実施例の磁気式回転角度検出器の構成図、第2
図(A)及び(B)は磁気検出ユニットの配置状態を表
す説明図、第3図は信号処理回路を表わすブロック図、
第4図(A)はホール素子の検出信号波形を表すグラフ
、第4図(B)は変換モジュールの出力信号波形を表す
グラフ、第5図は他の実施例の説明図、第6図(A)及
び(B)は磁気検出ユニットの配置の別個を表す説明図
である。 1・・・磁気式回転角度検出器  3・・・永久磁石5
a、5b・・・磁極ヨーク 7・・・磁気検出ユニット
Fig. 1 is a configuration diagram of the magnetic rotation angle detector of the embodiment, Fig. 2
Figures (A) and (B) are explanatory diagrams showing the arrangement of the magnetic detection unit, and Figure 3 is a block diagram showing the signal processing circuit.
4(A) is a graph representing the detection signal waveform of the Hall element, FIG. 4(B) is a graph representing the output signal waveform of the conversion module, FIG. 5 is an explanatory diagram of another embodiment, and FIG. 6( A) and (B) are explanatory diagrams showing different arrangements of magnetic detection units. 1...Magnetic rotation angle detector 3...Permanent magnet 5
a, 5b...Magnetic pole yoke 7...Magnetic detection unit

Claims (1)

【特許請求の範囲】 回転機の回転角度を磁電変換素子を用いて検出する磁気
式回転角度検出器であつて、 永久磁石と、該永久磁石の各磁極に接続され、所定間隔
を隔てて互いに対向して配設された磁極部材と、を備え
、 磁電変換素子を、両磁極部材の間に形成された磁場空間
に配設すると共に、 上記永久磁石及び磁極部材と上記磁電変換素子との何れ
か一方を、回転機の回転軸に軸心を同じくして装着して
なることを特徴とする磁気式回転角度検出器。
[Claims] A magnetic rotation angle detector that detects the rotation angle of a rotating machine using a magneto-electric conversion element, comprising: a permanent magnet; magnetic pole members arranged to face each other, a magnetoelectric conversion element is arranged in a magnetic field space formed between the two magnetic pole members, and any one of the permanent magnet and the magnetic pole member and the magnetoelectric conversion element is provided. A magnetic rotation angle detector characterized in that one of the two is mounted on the rotating shaft of a rotating machine with the same axis.
JP7766090A 1990-03-27 1990-03-27 Magnetic rotational angle detector Pending JPH03276014A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7766090A JPH03276014A (en) 1990-03-27 1990-03-27 Magnetic rotational angle detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7766090A JPH03276014A (en) 1990-03-27 1990-03-27 Magnetic rotational angle detector

Publications (1)

Publication Number Publication Date
JPH03276014A true JPH03276014A (en) 1991-12-06

Family

ID=13640032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7766090A Pending JPH03276014A (en) 1990-03-27 1990-03-27 Magnetic rotational angle detector

Country Status (1)

Country Link
JP (1) JPH03276014A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04299586A (en) * 1991-03-27 1992-10-22 Agency Of Ind Science & Technol Forming method of josephson junction
JP2007302443A (en) * 2006-05-12 2007-11-22 Asahi Kasei Electronics Co Ltd Equipment using paper feed tray
JP2014032154A (en) * 2012-08-06 2014-02-20 Denso Corp Position detector
JP2017090068A (en) * 2015-11-03 2017-05-25 株式会社ヴァレオジャパン Rotation angle detection device and angle sensor unit used therefor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04299586A (en) * 1991-03-27 1992-10-22 Agency Of Ind Science & Technol Forming method of josephson junction
JP2007302443A (en) * 2006-05-12 2007-11-22 Asahi Kasei Electronics Co Ltd Equipment using paper feed tray
JP2014032154A (en) * 2012-08-06 2014-02-20 Denso Corp Position detector
JP2017090068A (en) * 2015-11-03 2017-05-25 株式会社ヴァレオジャパン Rotation angle detection device and angle sensor unit used therefor

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