JPH0327350B2 - - Google Patents

Info

Publication number
JPH0327350B2
JPH0327350B2 JP59101049A JP10104984A JPH0327350B2 JP H0327350 B2 JPH0327350 B2 JP H0327350B2 JP 59101049 A JP59101049 A JP 59101049A JP 10104984 A JP10104984 A JP 10104984A JP H0327350 B2 JPH0327350 B2 JP H0327350B2
Authority
JP
Japan
Prior art keywords
dust
wafer
cover
gripping
robot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59101049A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60242996A (ja
Inventor
Takanori Funahashi
Akira Nakada
Haruo Tada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP10104984A priority Critical patent/JPS60242996A/ja
Publication of JPS60242996A publication Critical patent/JPS60242996A/ja
Publication of JPH0327350B2 publication Critical patent/JPH0327350B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
JP10104984A 1984-05-18 1984-05-18 無塵把持装置 Granted JPS60242996A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10104984A JPS60242996A (ja) 1984-05-18 1984-05-18 無塵把持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10104984A JPS60242996A (ja) 1984-05-18 1984-05-18 無塵把持装置

Publications (2)

Publication Number Publication Date
JPS60242996A JPS60242996A (ja) 1985-12-02
JPH0327350B2 true JPH0327350B2 (enrdf_load_stackoverflow) 1991-04-15

Family

ID=14290263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10104984A Granted JPS60242996A (ja) 1984-05-18 1984-05-18 無塵把持装置

Country Status (1)

Country Link
JP (1) JPS60242996A (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5790956A (en) * 1980-11-28 1982-06-05 Hitachi Ltd Gripper for wafer
JPS5848914A (ja) * 1981-09-18 1983-03-23 Toshiba Corp ウエハピンセツト

Also Published As

Publication number Publication date
JPS60242996A (ja) 1985-12-02

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