JPH03273105A - Automatic x-ray inspection device - Google Patents

Automatic x-ray inspection device

Info

Publication number
JPH03273105A
JPH03273105A JP7406590A JP7406590A JPH03273105A JP H03273105 A JPH03273105 A JP H03273105A JP 7406590 A JP7406590 A JP 7406590A JP 7406590 A JP7406590 A JP 7406590A JP H03273105 A JPH03273105 A JP H03273105A
Authority
JP
Japan
Prior art keywords
ray
voltage
intensity
rays
variation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7406590A
Other languages
Japanese (ja)
Inventor
Kuniyuki Fukuzawa
福沢 邦之
Tadashi Yoshida
正 吉田
Fumitaka Hayata
早田 文隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Plant Technologies Ltd
Original Assignee
Hitachi Plant Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Plant Technologies Ltd filed Critical Hitachi Plant Technologies Ltd
Priority to JP7406590A priority Critical patent/JPH03273105A/en
Publication of JPH03273105A publication Critical patent/JPH03273105A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To cope with short-period variation in X-ray intensity due to source voltage and load variation and long-period variation due to the aging of an X-rays tube by performing feedback control over the intensity of X-rays and suppressing the variation in X-ray intensity. CONSTITUTION:The high frequency voltage outputted by a high frequency generating circuit 1 is converted by a multistage voltage doubling circuit 2 into a high DC voltage, which is applied to the X-ray tube 3 to generate X rays. The X rays irradiate a body 7 to be inspected which is carried in an X-ray irradiation part by a belt 5 for conveyance. Then an X-ray transmission image of the body 7 to be inspected is converted by an image pickup tube 6 into an electric video signal, which is processed by an image processing part 8 to decide whether the body 7 is normal or defective. A defective is removed by a rejecting mechanism 9. Further, if the output voltage varies owing to load variation or a ripple nd the X rays vary in intensity, the frequency of the output voltage of the circuit 1 is varied to control the X-ray intensity to a constant value. The brightness of the X-ray image can accurately be compared with set gradations without being affected by the variation in X-ray intensity.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明はX線自動検査装置に係り、特に画像処理を行
って自動的に被検体の内部構造を判定するX線自動検査
装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an automatic X-ray inspection device, and more particularly to an automatic X-ray inspection device that performs image processing to automatically determine the internal structure of a subject.

〔従来の技術とその課題〕[Conventional technology and its issues]

この種の従来装置は、X線発生源として商用周波数の電
圧を昇圧し、半波あるいは全波整流した後、コンデンサ
に蓄電し平滑化させてXuA管に印加する方法が用いら
れている。しかし、この方法は電源電圧の変動あるいは
負荷による脈動の影響でX線管から照射されるX線強度
が変動し、X線透過像の輝度が一定しないことから画像
処理による検出が安定しない欠点かある。このため、コ
ンデンサの8董を大きくして出力の変動を抑える方法も
行われているが、装置が大型化し、コストも高くなる欠
点がある。また、X線強度の変動には前記印加電圧の変
動の他、X線管の劣化による経時的な変化もあり、これ
に関しては特に対策を施した例は見当たらない。
This type of conventional device uses a method in which a commercial frequency voltage is boosted as an X-ray generation source, subjected to half-wave or full-wave rectification, and then stored in a capacitor to be smoothed and applied to the XuA tube. However, this method has the disadvantage that detection by image processing is not stable because the intensity of the X-rays emitted from the X-ray tube fluctuates due to fluctuations in the power supply voltage or pulsations due to the load, and the brightness of the X-ray transmission image is not constant. be. For this reason, a method has been used to suppress fluctuations in the output by increasing the size of the capacitor, but this method has the disadvantage of increasing the size of the device and increasing the cost. Furthermore, in addition to the fluctuations in the applied voltage, fluctuations in the X-ray intensity also include changes over time due to deterioration of the X-ray tube, and no particular measures have been taken to deal with this problem.

この発明の目的は、電源電圧及び負荷変動による短期的
なX線強度の変動及びX線管の経時劣化による長期的な
変動のいずれにも対応できるX線自動検査装置を提供す
るにある。
An object of the present invention is to provide an automatic X-ray inspection device that can cope with both short-term fluctuations in X-ray intensity due to changes in power supply voltage and load, and long-term fluctuations due to deterioration of an X-ray tube over time.

〔課題を解決するための手段〕[Means to solve the problem]

上記の目的を達成するため1本発明はX線発生源から発
するX線を被検体に照射し、この被検体のX&l透過像
を画像処理して内部構造の良否判定を行うX線自動検査
装置において、X線発生源の高電圧供給部は高周波発生
回路と該高周波発生回路からの交流入力電圧を直流高電
圧に変換する多段型倍電圧回路とから成り、前記直流高
電圧をX線管に印加して出力されるX線強度をモニタす
るセンサを設け、該センサの出力に基づいて高周波発生
回路の出力電圧の周波数を可変する手段を備えたもので
ある。
In order to achieve the above objects, the present invention provides an automatic X-ray inspection device that irradiates an object with X-rays emitted from an In this, the high voltage supply section of the X-ray generation source consists of a high frequency generation circuit and a multistage voltage doubler circuit that converts the AC input voltage from the high frequency generation circuit into a DC high voltage, and supplies the DC high voltage to the X-ray tube. A sensor for monitoring the applied and output X-ray intensity is provided, and means is provided for varying the frequency of the output voltage of the high frequency generation circuit based on the output of the sensor.

〔作 用〕[For production]

負荷変動やリップルにより出力電圧が変動してX線強度
が変化すると、この変化量に応じて高周波発生回路の出
力電圧の周波数を可変し、一定のX線強度となるように
制御される。したがって、X線画像の明るさは、X線強
度の変動による影響を受けることがなく、設定されたv
lImとの正確な比較ができる。
When the output voltage fluctuates due to load fluctuations or ripples and the X-ray intensity changes, the frequency of the output voltage of the high-frequency generating circuit is varied according to the amount of change, and the X-ray intensity is controlled to be constant. Therefore, the brightness of the X-ray image is not affected by fluctuations in X-ray intensity, and the brightness of the X-ray image is
Accurate comparison with lIm can be made.

〔実施例〕〔Example〕

以下、本発明の詳細な説明をする。 The present invention will be explained in detail below.

第1図は本発明のX!!自動検査装置の構成を示してい
る0本装置はX線発生源、X線検出部、画像処理部及び
被検体の搬送系とから構成されて0る。
Figure 1 shows the X! ! This device is composed of an X-ray generation source, an X-ray detection section, an image processing section, and a subject transport system.

X線発生源は高周波発生回路1と多段型倍電圧回路2(
例えばコツククロフト回路)及びX線管3から成り、高
周波発生回路1から出力される高周波電圧を多段型倍電
圧2で直流高電圧に変換してXi管3に印加し、X線を
発生させる。このX線は、搬送用ベルト5でX線照射部
に搬入される被検体7に照射される。被検体7のX線透
過像は、撮像管6で電気的な映像信号に変換され1画像
処理部8で画像処理され、被検体の良、不良か判定され
る。そして、不良品は排除機構9により取り除かれる。
The X-ray generation source consists of a high frequency generation circuit 1 and a multistage voltage doubler circuit 2 (
For example, a Kotscroft circuit) and an X-ray tube 3, the high-frequency voltage output from the high-frequency generating circuit 1 is converted into a DC high voltage by a multistage voltage doubler 2 and applied to the Xi tube 3 to generate X-rays. These X-rays are irradiated onto the subject 7 that is carried into the X-ray irradiation section by the conveyor belt 5. The X-ray transmitted image of the subject 7 is converted into an electrical video signal by the image pickup tube 6 and subjected to image processing by the single image processing section 8 to determine whether the subject is good or bad. Then, the defective products are removed by the removal mechanism 9.

ところで、xi強度の安定化には、X線管に印加される
電圧が安定していることが必要である。
By the way, in order to stabilize the xi intensity, it is necessary that the voltage applied to the X-ray tube be stable.

即ち、多段型倍電圧回路の出力電圧は、第3図に示すよ
うに、無負荷時の出力電圧Vから負荷による電圧降下分
△Vとリップル分δVを引いた値となる。ここで、第2
図に示す回路の条件として、C1=C2=・・ ・=C
2n=C 入力電圧の周波数f1負荷電流Iとすると、になる。
That is, as shown in FIG. 3, the output voltage of the multistage voltage doubler circuit is the value obtained by subtracting the voltage drop ΔV due to the load and the ripple δV from the output voltage V at no-load. Here, the second
As the conditions for the circuit shown in the figure, C1=C2=... ・=C
2n=C If the frequency of the input voltage is f1 and the load current is I, then

したがって、コンデンサの容量Cを大きくするか、また
は入力電圧の周波数fを高くすることにより△V、δ■
は小さくすることができる。しかし、コンデンサを大き
くすると、装置が大型化し、コスト高となるため、本発
明では高周波発生回路を用いて周波数fを高め、出力電
圧の安定化を図るように構成されている。
Therefore, by increasing the capacitance C of the capacitor or increasing the frequency f of the input voltage, △V, δ■
can be made smaller. However, increasing the size of the capacitor increases the size and cost of the device, so the present invention uses a high frequency generation circuit to increase the frequency f and stabilize the output voltage.

またX線画像を画像処理する際、第4図に示すように、
画像の明るさを256141調に分解し、検出物に相当
する階調の設定値と画像との比較を行って、検出物を抽
出している。したがって、XM、画像の明るさ(階調)
が△V、δVにより変動すると、設定値との比較が正確
に行えず、誤検出を起こす、即ち、△Vは平均的な明る
さの変動として、δ■は瞬時瞬時の明るさの変動として
表れる。
Also, when performing image processing on X-ray images, as shown in Figure 4,
The brightness of the image is decomposed into 256,141 tones, and the detected object is extracted by comparing the set value of the gradation corresponding to the detected object with the image. Therefore, XM, image brightness (gradation)
If it fluctuates due to △V and δV, comparison with the set value cannot be performed accurately, resulting in false detection. In other words, △V is the average brightness fluctuation, and δ■ is the instantaneous brightness fluctuation. appear.

そこで、画像処理の際、x!!透過像を得る時のX線強
度を一定に保持する手段として、X線強度をモニタする
センサをX&I照射部に設け、このセンサ出力に基づい
て高周波発生回路lの出力電圧の周波数fを制御し、△
V、δ■を可変して一定のX線強度が得られるようにj
lll整している。
Therefore, when processing images, x! ! As a means of keeping the X-ray intensity constant when obtaining a transmission image, a sensor for monitoring the X-ray intensity is provided in the X&I irradiation section, and the frequency f of the output voltage of the high-frequency generating circuit l is controlled based on the sensor output. , △
In order to obtain a constant X-ray intensity by varying V and δ■
It's all in order.

例えば、f=15KH2の運転時において、電源電圧変
動、X線管の劣化、温度変化等の原因でX線強度が下が
った場合、当初設定のX線強度になるまでfを、例えば
18KHzに増加して調整する。
For example, when operating at f=15KH2, if the X-ray intensity decreases due to power supply voltage fluctuations, X-ray tube deterioration, temperature changes, etc., increase f to, for example, 18KHz until the initially set X-ray intensity is reached. and adjust.

本実施例によれば、X線強度の変動率は1%以下に保た
れ、きわめて安定な検査が可能となる。
According to this embodiment, the rate of variation in X-ray intensity is kept at 1% or less, making it possible to perform extremely stable inspections.

また周波数制御は高周波発生回路のスイッチング周期を
変えるだけなので、回n構成が簡単となる。なお、周波
数fを調整するかわりに、高周波発生回路の出力電圧の
パルス中あるいは波高値を変えても同様の効果が得られ
る。
In addition, since frequency control only changes the switching period of the high frequency generation circuit, the n-times configuration becomes simple. Note that, instead of adjusting the frequency f, the same effect can be obtained by changing the pulse or peak value of the output voltage of the high frequency generation circuit.

〔発明の効果〕〔Effect of the invention〕

上述のとおり、本発明によれば、X線強度をフードパッ
ク制御することにより、X線強度の変動が抑えられ、そ
の安定性が確保されるから、自動検出の安定性が増す。
As described above, according to the present invention, by controlling the X-ray intensity in a food pack, fluctuations in the X-ray intensity are suppressed and its stability is ensured, thereby increasing the stability of automatic detection.

またX線強度の変動を抑えるのにコンデンサの容量を大
きくする必要がないから、装置がコンパクトにできる。
Furthermore, since there is no need to increase the capacitance of the capacitor to suppress fluctuations in X-ray intensity, the apparatus can be made more compact.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明のX線自動検査装置の一実施例を示す構
成図、第2図は多段型倍電圧回路図、第3図は多段型倍
電圧回路の出力電圧波形図、第4図はX線画像の画像処
理を説明する図である。 1・・・高周波発生回路、2・・・多段型倍電圧回路、
3・・・X線管5   4・・・X線強度センサ、5・
・・搬送用ベルト、 6・・X線透過像撮像管、7・・
・被検体     8・・・画像処理装置。 イ 第 図 第 図 1 1・#l百遣発蛇郁アか 8’  A(聡にメルズ[1? 91位R標榛
Fig. 1 is a configuration diagram showing an embodiment of the automatic X-ray inspection device of the present invention, Fig. 2 is a multi-stage voltage doubler circuit diagram, Fig. 3 is an output voltage waveform diagram of the multi-stage voltage doubler circuit, and Fig. 4 FIG. 2 is a diagram illustrating image processing of an X-ray image. 1...High frequency generation circuit, 2...Multi-stage voltage doubler circuit,
3... X-ray tube 5 4... X-ray intensity sensor, 5...
・・Transportation belt, 6.・X-ray transmission imaging tube, 7.・
- Subject 8... Image processing device. Figure 1 Figure 1 1.#lHyakusai Hatsuja Iku Aka 8' A (Satoshi ni Merz [1? 91st place R mark

Claims (1)

【特許請求の範囲】[Claims] (1)X線発生源から発するX線を被検体に照射し、こ
の被検体のX線透過像を画像処理して内部構造の良否判
定を行うX線自動検査装置において、X線発生源の高電
圧供給部は高周波発生回路と該高周波発生回路からの交
流入力電圧を直流高電圧に変換する多段型倍電圧回路と
から成り、前記直流高電圧をX線管に印加して出力され
るX線強度をモニタするセンサを設け、該センサの出力
に基づいて高周波発生回路の出力電圧の周波数を可変す
る手段を備えたX線自動検査装置。
(1) In an automatic X-ray inspection device that irradiates a subject with X-rays emitted from an X-ray source and processes the X-ray transmission image of the subject to determine the quality of the internal structure, The high voltage supply section consists of a high frequency generation circuit and a multistage voltage doubler circuit that converts the AC input voltage from the high frequency generation circuit into a DC high voltage, and applies the DC high voltage to the X-ray tube to output X. An automatic X-ray inspection device includes a sensor for monitoring ray intensity and means for varying the frequency of the output voltage of a high frequency generation circuit based on the output of the sensor.
JP7406590A 1990-03-23 1990-03-23 Automatic x-ray inspection device Pending JPH03273105A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7406590A JPH03273105A (en) 1990-03-23 1990-03-23 Automatic x-ray inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7406590A JPH03273105A (en) 1990-03-23 1990-03-23 Automatic x-ray inspection device

Publications (1)

Publication Number Publication Date
JPH03273105A true JPH03273105A (en) 1991-12-04

Family

ID=13536419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7406590A Pending JPH03273105A (en) 1990-03-23 1990-03-23 Automatic x-ray inspection device

Country Status (1)

Country Link
JP (1) JPH03273105A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030003155A (en) * 2002-11-15 2003-01-09 (주)뉴트란 Automatic Radio Graphic Teting System
US8047265B2 (en) 2004-10-15 2011-11-01 Nippon Steel Corporation Electromagnetic stirrer coil

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030003155A (en) * 2002-11-15 2003-01-09 (주)뉴트란 Automatic Radio Graphic Teting System
US8047265B2 (en) 2004-10-15 2011-11-01 Nippon Steel Corporation Electromagnetic stirrer coil

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