JPH03271460A - Vibro-suppressing floor structure - Google Patents

Abstract

PURPOSE:To decrease resonance between a device mounting bed and a supporting bed so as to suppress vibration of the device mounting bed, inexpensively, by providing a damping air spring, vibro-suppressing air spring, two vibration sensors, resonance decreasing control mechanism, air pressure control mechanism, etc. CONSTITUTION:The device mounting bed 13 is provided in a supporting bed 2 through a damping air spring 11 and a vibro-suppressing air spring 12, and further vibration sensors 22, 23 for detecting vibration in a vertical direction are provided in the supporting bed 2 and the mounting bed 13. A spring constant of the spring 11 is decreased and a damping amount is increased when the mounting bed 13 and the supporting bed 2 are placed in a resonance condition based on a detection result of the sensors 22, 23. A resonance decreasing control mechanism, comprising flow regulating valve 19 and an auxiliary tank 11a or the like, is provided. Further based on detection of the sensor 22, a pressure of air, given to the spring 12, is adjusted so as to negate vibration. An air pressure control mechanism, consisting of a servo valve 18 or the like, is provided. Propagation of vibration in the vertical direction to the mounting bed 13 is suppressed by adjusting the pressure of air given to the spring 12 while relaxing vibration by the springs 11, 12, and resonance in the vertical direction between the mounting bed 13 and the supporting bed 2 is reduced.

Description

[Detailed Description of the Invention] <Industrial Application Field> The present invention is applicable to large vibrations caused by earthquakes, etc.
The present invention relates to a vibration damping floor structure that prevents minute vibrations caused by walking etc. from propagating to a device mounting table placed on the floor.

<Conventional technology> Conventional vibration-damping floor structures are used in computer rooms, LSI manufacturing factories, laser applied product factories, etc., because even slight vibrations can cause computer malfunctions or product defects. , it is necessary to suppress these vibrations, and conventionally, spring elements such as laminated rubber and air springs have been installed between the equipment mounting table on which computers and manufacturing equipment are placed and the support such as the floor of the structure. interposed, and the device mounting table is supported softly and elastically by these spring elements,
The device i was configured to reduce the transmission of vertical vibrations to the stand.

<Problem to be solved by the invention> However, even minute vibrations cause resonance between the floor and the device mounting table, and with this resonance, the vibrations of the device's RW table are amplified and become large. There was a drawback.

The present invention has been made in view of the above circumstances, and it suppresses the resonance between the floor and the device mounting table, and reduces the transmission of vertical vibrations to the device mounting table using small amount of energy and at low cost. Another purpose is to suppress vibration propagation in the horizontal direction, and yet another purpose is to prevent vibration propagation due to the vibration prevention structure. The purpose is to avoid dust generation in a room where a stand is provided.

<Means for Solving the Problem> In order to achieve the above-mentioned object, the present invention, as the invention of claim (1), provides a support base with a buffering air huff and a vibration damping air spring. In addition to providing a device mounting table through the
A vibration sensor for detecting vibration in the vertical direction is attached to each of the support table and the device mounting table, and based on the detection results by both vibration sensors, when the device mounting table is in a state of resonance with the support table, the buffer A resonance reduction control mechanism is provided that reduces the spring constant of the air spring and increases the amount of attenuation, and further, the vibration damping air spring is configured to cancel vibration based on the detection result of a vibration sensor attached to the device mounting table. An air pressure control mechanism is provided to adjust the air pressure applied to the air.

In addition, as the invention of claim (2), claim (1)
A support base is provided on a fixed part so as to be horizontally displaceable, and a seismic isolation mechanism is interposed between the fixed part and the support base to alleviate horizontal vibration input from the fixed part. and configure.

In addition, as the invention of claim No. (3), claim No. (2)
The seismic isolation mechanism described above is composed of a horizontal hair ring support mechanism, mechanical springs, and a viscous damper.

In addition, as the invention of claim No. (4), claim No. (1)
In the damping floor structure according to any of paragraphs to (3),
The air supply source and exhaust port for the air pressure control mechanism are provided outside the room in which the device mounting table is installed.

In addition, as the invention of claim No. (5), claim No. (])
In the damping floor structure according to any of paragraphs to (4),
The air pressure control mechanism is constructed by connecting a high-pressure tank filled with air at high pressure and a damping air spring through a servo valve.

In addition, as the invention of claim No. (6), claim No. (1)
In the damping floor structure according to any of paragraphs to (5),
It is equipped with a displacement sensor that detects the relative displacement in the vertical direction between the device mounting table and the support table, and also has a level adjustment mechanism that adjusts the internal pressure applied to the buffer air springs based on the detection results of the displacement sensor. Establish and configure.

In addition, as the invention of claim (7), claim (6)
The air supply source for the level adjustment mechanism described in Section 3.2 shall be provided outside the room in which the equipment mounting table is installed.

<Function> According to the configuration of the vibration damping floor structure according to the invention of claim (1), the support platform vibrates in the vertical direction due to various vibrations such as vibrations caused by earthquakes and microvibrations caused by walking, etc. Then, the vibration is relaxed and absorbed by the buffering air springs and vibration damping air springs and propagated to the support base, and the resonance reduction control mechanism reduces the resonance between the equipment mounting base and the support base and damps the vibration. By adjusting the air pressure to the air spring, it is possible to suppress vibrations from propagating to the device mounting table.

Furthermore, according to the configuration of the vibration damping floor structure according to the invention of claim (2), when the fixed part vibrates due to an earthquake or micro-vibration, the vibration in the horizontal direction from the fixed part is seismically isolated. It can be relaxed and propagated to the support by a mechanism.

Further, according to the structure of the vibration damping floor structure according to the invention of claim (3), vibrations in the horizontal direction are transmitted to the support base by the supporting structure using the sufficiently soft mechanical spring and the horizontal bearing support mechanism. In addition, the viscous damper can suppress resonance in the horizontal direction between the fixing part and the support base due to their configuration.

Further, according to the configuration of the vibration damping floor structure according to the invention of claim (4), the air supply from the air supply source such as a compressor and the exhaust air from the vibration damping air springs can be carried out by installing a device mounting stand. Perform outside the room.

Further, according to the structure of the vibration damping floor structure according to the invention of claim (5), when large vibrations such as an earthquake propagate to the equipment mounting table, the air in the high pressure tank is transferred to the vibration damping air spring. can be supplied to cancel out the vibrations.

Further, according to the structure of the vibration damping floor structure according to the invention of claim (6), when the weight of the equipment mounted on the equipment mounting table changes, the larger the weight, the more the shock absorbing air spring By increasing the internal pressure, the desired cushioning effect can be achieved regardless of changes in the loaded weight.

Further, according to the structure of the vibration damping floor structure according to the invention of claim (7), air supply from an air supply source such as a compressor and exhaust air from a buffer air spring can be carried out indoors where an equipment mounting table is installed. done outside of.

<Example> Next, an example of the present invention will be described in detail based on the drawings.

As shown in the overall front view of the damping floor structure in Fig. 1 and the plan view of the support frame in Fig. 2, the floor W as a fixed part is
A support stand 2 is provided above so as to be horizontally displaceable via horizontal bearing support mechanisms 1 at four locations, and a support frame 3 of the support stand 2 and a bracket 4 erected on the floor W are provided.
A tension spring 5A serving as a mechanical spring constituting a seismic isolation mechanism and a viscous damper 5B provided at the center are interposed between the The structure is configured to alleviate the horizontal vibration caused by the floor W and to suppress resonance between the floor W and the support base 2 in the horizontal direction.

Horizontal hair ring support mechanism 1...Each is a fixed member attached to the floor W, as shown in the partially cutaway front view of the main part in Fig. 3 and the partially cutaway plan view of the main part in Fig. 4. A ball hair ring 8 is interposed between the side member 6 and the movable side member 7 attached to the support frame 3.

As shown in the partially cutaway front view of FIG. 5, the viscous damper 5B has a bottom plate 5a fixed to the floor W side with a cylindrical body protruding from the bottom plate 5a, which is filled with damper oil 5b. A resistance plate 5C attached to the support frame 3 and having a disk shape in plan view is immersed, and the damper oil 5b is configured to provide flow resistance to horizontal movement of the resistance plate 5C.

A recess 10 is formed in the center of the support base 2, and as shown in the plan view of FIG. 6, the front view of FIG. 7, and the side view of FIG. A device mounting table 13 equipped with an air tank 9 is provided via a buffer air bar 211 and a vibration damping air spring 12.

As shown in the plan view of FIG. 9, the buffer air springs 11 are provided at each of the four corners of the recess IO of the support base 2,
On the other hand, the damping air bar 212... is connected to the recess 1 of the support base 2.
It is provided at the center of each of the four sides forming 0.

At each location near the four corners of the recessed portion IO of the support base,
As shown in the partially cutaway side view of FIG. 0, a pair of guide rollers 14.14 are provided rotatably around a horizontal axis. A cylindrical guide 15 is provided that slides into contact with the
The device mounting table 13 is configured to be able to be smoothly displaced in the vertical direction.

The buffer air spring 11... and the vibration damping air spring 1
2... As shown in the schematic configuration diagram of FIG. 11, each of them is connected to an auxiliary tank 1la12a provided at the lower part thereof through orifice holes 11b and 12b.

A compressor 16 is connected to each of the auxiliary tanks lla of the buffering air springs 11 through an electromagnetic on-off valve 17, while the auxiliary tanks 12a of the vibration damping air springs 12 are connected to each other. A compressor 16 is connected to the air tank 9 through a servo valve 18.

Air tank 9... High-pressure air (for example, 10 kg/Cf1l, etc.) is sealed in each of the air tanks 9, so that vibrations can be suppressed without constantly driving the compressor 16. Even when 16 cannot be started, the vibration damping air spring 12...
- Constructed to ensure a reliable supply of air to each.

Buffer air bar 12... and auxiliary tank 11a.
... are connected to each other via a pipe 20 equipped with a flow control valve 19 that can change the opening degree in two stages so as to change the buffering force.

Displacement sensors 21 are attached at three predetermined locations between the device mounting table 13 and the recess 10 of the support table 2 to detect the relative displacement in the vertical direction between the two. Based on the detection results by the displacement sensors 21, the level An electric signal is output to the electromagnetic on-off valve 17 via the control amplifier 21a, the magnetic on-off valve 17 is opened and closed, and the pressure inside each of the buffer air springs 11 is adjusted. The level adjustment mechanism is configured to set the initial level for adjusting the buffer force applied by the buffer air springs 11 to a predetermined level, regardless of the weight of the device. This level adjustment mechanism may be configured to adjust the initial pressure within each of the vibration damping air springs I2.

A first vibration sensor 22 for measuring vibrations in the vertical direction of the device mounting table 13 is attached to the back side of the inspection lid 13a at the center of the device mounting table 13. vibration (the vertical vibration of the support base 2 is also the same)
A second vibration sensor 23 is attached to measure the .

A controller 24 is connected to the first and second vibration sensors 22 and 23, and the controller 2
A flow control valve 19 is connected to 4, and a controller 24 determines whether the support base 2 and the device mounting base 13 are in a resonant state based on the detection results from the first and second vibration sensors 22 and 23. , when in a resonant state, outputs a drive signal to the flow control valve 19, opens and closes it, and adjusts its opening degree to reduce the spring constant and increase the attenuation of the buffer air springs 11... A resonance reduction control mechanism is configured to reduce resonance between the support base 2 and the support base 2 .

That is, in normal times when there is no vibration from the floor W side, the flow rate control valve 19 is fully closed and the buffer air spring 11 is closed.
. . . and the auxiliary tank lla . . . are connected in communication only through the orifice hole 11b, and the buffer air springs 11 . to a state where the deformation is small in response to external forces. In the event of a small earthquake where the vibration from the floor W side is small, the flow control valve 19 is opened and the buffer air drains 11 and auxiliary tanks 11, 11, 11, 11, 11, 11, 11, 11, 11, 11, 10, 10, 11, 11, 11, 11, 11, 11, 11, 11,,1,,1,,11,,11,,11,,,11,…,,,,10,2,2,22, 21,…,2,2,4,3,3,3,4,3,4,2,2,2,2/2/2/2/2/2/2/21/2013/1/1/2, 2, 1, 2, 3, etc.
These are connected through the orifice hole 11b and the piping 20, and the buffer air springs 11 are made soft and have a large damping state, and the vibrations between the device mounting table 3 and the support table 2 are reduced while the floor Propagation of vibration from the W side to the device mounting table 13 is suppressed. Furthermore, in the event of a major earthquake where vibrations from the floor W side are large, the flow rate control valve 19 is further opened, and the buffer air drains 11 and the auxiliary tank lla are further opened.
... orifice hole 11b and piping 20, respectively.
The buffer air springs 11 are made soft and have even greater damping, and the device mounting table 13
The propagation of vibrations from the floor W side to the device mounting table 3 is suppressed while reducing the resonance between the support table 2 and the support table 2.

As such a resonance reduction control mechanism, for example, instead of providing the orifice hole 11b as described above, an on-off valve is provided for each of the buffer air springs 11 and the auxiliary tank lla. The device mounting table 13 is connected to the device via two pipes, and the device mounting table 13 is switched to either a closed state, a state in which - two on-off valves are opened, or a state in which two on-off valves are opened. The configuration may be such that resonance between the support base 2 and the support base 2 is reduced.

Further, a servo valve 18 is connected to the controller 24, and an air pressure control mechanism is configured to adjust the air pressure applied to the vibration damping air spring 12 to cancel vibrations based on the detection result by the first vibration sensor 22. It is configured.

With the above configuration, the shock absorbing air springs 11 and the damping air springs 1 prevent vibration from propagating to the device mounting table 13.
2..., and by adjusting the opening degree of the flow rate control valve 19 by the resonance reduction control mechanism.
By adjusting the air pressure applied to the vibration damping air springs 12 while reducing the resonance between the support table 2 (floor W) and the support table 2 (floor W), the vibration propagated to the device mounting table 13 is canceled out as a whole. , vibration of the device mounting table 13 can be effectively prevented.

The state of vibration transmission by the vibration damping floor structure (indicated by A), the state of vibration transmission in the case of no control (indicated by C), and the state of vibration transmission by only the resonance reduction control mechanism (indicated by B)
For each, the horizontal axis represents the dimensionless frequency (excitation frequency/resonance frequency), and the vertical axis represents the transmissibility (vibration of the device mounting table 13/
When the vibrations of the floor W were analyzed, the results shown in the graph of FIG. 12 were obtained.

From this result, the vibrations applied from the floor W can be suppressed by the buffer air springs 11..., and the amplification of vibrations due to resonance can be suppressed by reducing the spring constant of the buffer air springs 11... This can be suppressed by a resonance reduction control mechanism that increases the amount of attenuation, and further, the remaining vibration can be canceled by adjusting the air pressure applied to the vibration damping air springs 12. It is clear that the damping floor structure of the example achieves extremely good damping. In addition, in this way, by adjusting the air pressure applied to the vibration damping air springs 12, only a small amount of vibration can be canceled out.
It is clear that a high vibration damping effect can be obtained even though the energy for vibration damping is small, that is, the amount of air supplied to and discharged from the vibration damping air springs 12 is small.

The compressor 16 is installed outside the room separately from the room where the device mounting table 13 is installed, and an exhaust hose (not shown) connected to the exhaust pipe 18b of the servo valve 18 is also extended outside the room to supply air. The device mounting table 1 is removed by exhaust air.
This is designed to prevent dust from being generated in the room where 3 is installed.

In the above embodiment, the air tank 9 filled with high pressure air is
...The vibration damping air springs 12... are configured so that air can be supplied from each of them without the need to constantly drive the compressor 16. For example, the vibration damping air springs 12... An accumulator may be interposed between the compressor 16 and the compressor 16.

<Effects of the Invention> According to the vibration damping floor structure according to the invention of claim (1), vibrations can be alleviated by each of the buffering air spring and the vibration damping air spring, while the vibration damping air spring is By adjusting the air pressure, vertical vibrations can be suppressed from propagating to the device mounting table, and by the resonance reduction control mechanism, vertical resonance between the device mounting table and the support table can be reduced.
It has become possible to effectively suppress vibrations of the device mounting table caused by both vibrations such as earthquakes and microvibrations.

Moreover, due to the vibration mitigation effect due to the elasticity of the buffer air spring and vibration damping air spring, and the reduction of resonance by the resonance reduction control mechanism that reduces the spring constant of the buffer air spring and increases the damping amount, large vibration displacement can be achieved. In this state, the air pressure to the vibration damping air spring is adjusted to cancel the vibration, so the energy required for vibration damping is small, even if air is constantly supplied to the vibration damping air spring. Even in cases where the air is supplied to and discharged from vibration damping air springs, the amount of air supplied to and discharged from the vibration damping air spring is small, and a compressor or other device with a small capacity can be used as the air supply means. When damping vibrations, not only can a compressor with a small capacity be used, but the amount of air stored is also small, and an accumulator with a small capacity can be used. Now we can reduce both costs.

Further, according to the vibration damping floor structure according to the invention of claim (2), it is possible to satisfactorily suppress horizontal vibrations of the support base due to earthquakes, etc. Even in this case, vibration of the device mounting table can be suppressed well.

Further, according to the vibration damping floor structure according to the invention as claimed in claim (3), since horizontal resonance between the fixed part and the support base is suppressed, horizontal vibration of the support base is suppressed even better. can do.

Further, according to the vibration damping floor structure according to the invention of claim (4), air pollution such as dust scattering due to airflow in the room where the device mounting table is installed is caused by air supply and exhaust for vibration suppression. can be avoided, and can be suitably applied to an OA room where OA equipment is installed or a clean room where semiconductor manufacturing equipment is installed.

Further, according to the vibration damping floor structure according to the invention of claim (5), even if a damage accident or failure occurs due to an earthquake or the like and the compressor cannot be started, the vibration damping air spring It is possible to reliably supply air to the device and effectively prevent large vibrations from propagating to the device mounting table.

Further, the vibration damping floor structure according to the invention as claimed in claim (6) can easily accommodate the case where additional equipment is mounted on the device mounting table, and is extremely useful in practice.

Further, according to the vibration damping floor structure according to the invention of claim (7), airflow in the room where the device mounting table is installed is caused by air supply and exhaust for adjusting the level of the device 'Ri and the device mounting table. It is possible to avoid air contamination such as dust scattering caused by air pollution, and it can be suitably applied to an OA room where OA equipment is installed or a clean room where semiconductor manufacturing equipment is installed.

[Brief explanation of drawings]

The drawings show an embodiment of the vibration damping floor structure according to the present invention, and the first embodiment
The figure is an overall front view of the damping floor structure, Figure 2 is a plan view of the support frame, Figure 3 is a partially cutaway front view of the main part, Figure 4 is a partially cutaway plan view of the main part, and Figure 4 is a partially cutaway plan view of the main part. 5 is a partially cutaway front view of the viscous damper, FIG. 6 is a general plan view, FIG. 7 is a general front view, FIG. 8 is a general side view, FIG. 9 is a general plan view, and FIG. The figure is a partially cutaway side view, FIG. 11 is a schematic configuration diagram, and FIG. 12 is a graph showing the state of vibration transmission. 1...Horizontal bearing support mechanism that constitutes a seismic isolation mechanism 2...Support stand 5A...Tension spring 5B that constitutes a seismic isolation mechanism
... Viscous damper 9 that constitutes a seismic isolation mechanism ... Support column 1 that also serves as an air tank that forms a high-pressure tank ... Buffer air spring b ... Orifice hole 2 ... Vibration damping air spring 3 ...Equipment mounting table 7...Solenoid on-off valve 8 that constitutes the level adjustment mechanism...
Servo valve 9...Flow rate control valve 0...Piping 1...Displacement sensor 2...First vibration sensor 23 for measuring vertical vibration of the device mounting table...Vertical vibration of the support base Second vibration sensor W that measures vibration...floor as a fixed part

Claims (7)

[Claims] (1) A device mounting table is provided on the support table via a buffering air spring and a vibration damping air spring, and a vibration sensor for detecting vibration in the vertical direction is attached to each of the support table and the device placing table. A resonance reduction control mechanism is provided that reduces the spring constant of the buffer air spring and increases the damping amount when the device mounting table is in a resonance state with the support table based on the detection results by both vibration sensors, and further, A vibration damping floor characterized by being provided with an air pressure control mechanism that adjusts the air pressure applied to the vibration damping air spring so as to cancel out vibrations based on the detection result by a vibration sensor attached to the device mounting table. structure. (2) The support according to the top of claim (1) is provided on a fixed part so as to be horizontally displaceable, and the horizontal direction input from the fixed part is provided between the fixed part and the support. A vibration-damping floor structure equipped with a seismic isolation mechanism to reduce vibrations. (3) A vibration damping floor structure in which the seismic isolation mechanism according to claim (2) is comprised of a horizontal bearing support mechanism, a mechanical spring, and a viscous damper. (4) In the vibration damping floor structure according to any one of claims (1) to (3), the air supply source and exhaust port for the air pressure control mechanism are connected to the outside of the room in which the device mounting table is installed. A vibration-damping floor structure installed in (5) In the vibration damping floor structure according to any one of claims (1) to (4), the air pressure control mechanism is comprised of a high pressure tank filled with air at high pressure in advance and a vibration damping air spring. A vibration-damping floor structure configured by communicating and connecting through a servo valve. (6) The vibration damping floor structure according to any one of claims (1) to (5), further comprising a displacement sensor that detects relative vertical displacement between the device mounting table and the support table. At the same time, based on the detection results from the displacement sensor,
A vibration damping floor structure equipped with a level adjustment mechanism that adjusts the internal pressure applied to the buffer air spring. (7) A vibration-damping floor structure in which an air supply source for the level adjustment mechanism according to claim (6) is provided outside a room in which a device mounting table is installed.