JPH03270670A - Linear motor - Google Patents

Linear motor

Info

Publication number
JPH03270670A
JPH03270670A JP6612790A JP6612790A JPH03270670A JP H03270670 A JPH03270670 A JP H03270670A JP 6612790 A JP6612790 A JP 6612790A JP 6612790 A JP6612790 A JP 6612790A JP H03270670 A JPH03270670 A JP H03270670A
Authority
JP
Japan
Prior art keywords
magnetic
linear motor
permanent magnets
stroke
respect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6612790A
Other languages
Japanese (ja)
Inventor
Masaki Taketomi
正喜 武富
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP6612790A priority Critical patent/JPH03270670A/en
Publication of JPH03270670A publication Critical patent/JPH03270670A/en
Pending legal-status Critical Current

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  • Linear Motors (AREA)

Abstract

PURPOSE:To suppress thrust ripple by inclining the flux produced in a magnetic air gap by a predetermined angle with respect to the moving direction of a movable coil viewed on the drawing. CONSTITUTION:A magnet assembly 3b is constructed by securing a plurality of planar permanent magnets 3 having same dimensions, with predetermined intervals P, to a lower yoke 2 while inclining a predetermined angle theta with respect to the direction of stroke. In other words, the flux normal to the direction of stroke existing in a magnetic gap 4 is inclined with respect to the direction of stroke when viewed on the drawing. Consequently, flux density varies smoothly in the magnetic gap and an approximately sinusoidal flux distribution is realized, and the movable coil can be moved smoothly when a sine wave current is supplied.

Description

【発明の詳細な説明】 [産業上の利用分野コ 本発明は、対向する永久磁石間に形成された磁気空隙内
を可動コイルが直線運動する形式のりニアモータに関す
る。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a linear motor in which a moving coil moves linearly within a magnetic gap formed between opposing permanent magnets.

[従来の技術] 従来、Loan乃至100anといった長いストローク
の範囲内で物体の位置決めを行なうための駆動装置とし
ては、例えば、特公昭58−49100号に開示されて
いるような、可動コイル形リニアモータが多用されてい
る。このリニアモータは、厚み方向に着磁した複数の永
久磁石を着磁方向か異なるように向い合わせて配置し、
対向する永久磁石間に形成された空隙内に、磁束と直角
方向に運動する可動コイル組立体を配設した構造を有す
る。
[Prior Art] Conventionally, as a drive device for positioning an object within a long stroke range such as a loan to 100 ann, a moving coil type linear motor as disclosed in Japanese Patent Publication No. 58-49100 has been used. is frequently used. This linear motor has multiple permanent magnets magnetized in the thickness direction, arranged facing each other in different directions of magnetization.
It has a structure in which a moving coil assembly that moves in a direction perpendicular to the magnetic flux is disposed within a gap formed between opposing permanent magnets.

このようなりニアモータでは、磁気回路部にセンターヨ
ークがなくしかも空隙内で磁束が複数個の閉ループを構
成し、磁路の一部に磁束が集中しないようになっている
ので、長いストロークの全域にわたって−様な磁束密度
を発生させることができる。
In this type of near motor, there is no center yoke in the magnetic circuit section, and the magnetic flux forms multiple closed loops within the air gap, preventing the magnetic flux from concentrating on a part of the magnetic path. It is possible to generate different magnetic flux densities.

[発明が解決しようとする問題点コ 上記のりニアモータによれば、原理的にはストロークが
長くなっても−様な磁束密度分布を得ることは可能であ
るが、現実には次のような問題点がある。すなわち複数
個の永久磁石を長手方向に配置するために、通常は永久
磁石をヨークに接着することが行なわれるので、隣接す
る磁石間の継目の部分で磁束密度が低下し、必ずしも磁
石全長にわたって均一な磁束密度分布が得られるとはい
えない。したがって、上記のりニアモータを駆動して長
手方向の推力を測定してみると、ストローク全体にわた
って均一な推力分布ではなく、波形の推力分布となるこ
とがわかった。このような推力リップルが生ずると、滑
らかな直線運動ができないので、位置決め精度の低下と
いった不具合を招いてしまう。
[Problems to be solved by the invention] According to the linear motor described above, it is possible in principle to obtain a magnetic flux density distribution with a -like shape even if the stroke becomes long, but in reality, the following problems occur. There is a point. In other words, in order to arrange multiple permanent magnets in the longitudinal direction, permanent magnets are usually glued to a yoke, so the magnetic flux density decreases at the joint between adjacent magnets and is not necessarily uniform over the entire length of the magnet. It cannot be said that a perfect magnetic flux density distribution can be obtained. Therefore, when driving the above-mentioned linear motor and measuring the thrust in the longitudinal direction, it was found that the thrust distribution was not uniform over the entire stroke, but was wave-shaped. When such thrust ripples occur, smooth linear motion is not possible, resulting in problems such as a decrease in positioning accuracy.

したがって本発明の目的は、推力リップルを少なくしう
るリニアモータを提供することである。
Therefore, an object of the present invention is to provide a linear motor that can reduce thrust ripple.

[問題点を解決するための手段] 上記目的を達成するため本発明は、所定の間隔をおいて
対向配置された一対のヨークと、前記各ヨークの対向面
に固着された、厚み方向に着磁されかつ相隣る磁極およ
び向い合う磁極が逆極性となるように長手方向に配置さ
れた複数個の永久磁石と、対向する永久磁石間に形成さ
れた磁気空隙内を長手方向移動可能に配置された可動コ
イルとを有するリニアモータにおいて、前記磁気空隙内
に発生する磁束は、平面からみて前記可動コイルの移動
方向に対して所定角度だけ傾斜していることを特徴とす
る。
[Means for Solving the Problems] In order to achieve the above object, the present invention includes a pair of yokes disposed facing each other at a predetermined interval, and a thickness direction bonding member fixed to opposing surfaces of each of the yokes. A plurality of permanent magnets are magnetized and arranged in the longitudinal direction so that adjacent magnetic poles and opposing magnetic poles have opposite polarities, and are arranged so as to be movable in the longitudinal direction within the magnetic gap formed between the opposing permanent magnets. In the linear motor having a moving coil, the magnetic flux generated in the magnetic gap is inclined by a predetermined angle with respect to the moving direction of the moving coil when viewed from a plane.

[実施例] 以下本発明の詳細を図面により説明する。[Example] The details of the present invention will be explained below with reference to the drawings.

第1図は、本発明の一実施例に係るリニアモータの正面
図である。
FIG. 1 is a front view of a linear motor according to an embodiment of the present invention.

第1図において、1は上部ヨーク、2は下部ヨークであ
り、いずれも強磁性材料により例えば平板状に形成する
。3は厚方向に着磁された平板状の永久磁石であり、表
面にN、 S磁極が交互に現出するように複数個配置し
、上部ヨーク1に固着して磁石集合体3aを形成する。
In FIG. 1, 1 is an upper yoke, and 2 is a lower yoke, both of which are made of ferromagnetic material and are formed into, for example, a flat plate shape. Numeral 3 is a flat permanent magnet magnetized in the thickness direction, and a plurality of permanent magnets are arranged so that N and S magnetic poles appear alternately on the surface, and are fixed to the upper yoke 1 to form a magnet assembly 3a. .

下部ヨーク2には、同様に永久磁石3を表面にN、 S
磁極が交互に現出するように複数個固着し、磁極集合体
3bを形成する。上部ヨークiと下部ヨーク2とは、磁
石集合体3a、3b間に磁気空隙4が形成されるように
非磁性材料からなるエンドプレート5゜6に固定されて
、磁気回路部1oが形成される。
Similarly, the lower yoke 2 has permanent magnets 3 on its surface.
A plurality of magnetic poles are fixed so that the magnetic poles appear alternately to form a magnetic pole assembly 3b. The upper yoke i and the lower yoke 2 are fixed to an end plate 5.6 made of a non-magnetic material so that a magnetic gap 4 is formed between the magnet assemblies 3a and 3b, thereby forming a magnetic circuit section 1o. .

磁石集合体3aと磁石集合体3bとは、N、 S磁極が
向い合うように対向しているので、磁気空隙4には長手
方向に垂直な磁束(図中破線で示す)が存在する。
Since the magnet assembly 3a and the magnet assembly 3b face each other so that the N and S magnetic poles face each other, a magnetic flux perpendicular to the longitudinal direction (indicated by a broken line in the figure) exists in the magnetic gap 4.

可動部20は、第1図のA−A断面図である第2図に示
すように例えば3相コイルである可動コイル21をコイ
ル固定具22によりキャリッジ23に固定して構成され
ている。キャリッジ23は、磁気回路部10を挾んで2
対のガイコロ24が取着されている。一方、上部ヨーク
1に沿って長手方向に伸びるスライドプレート7がエン
ドプレート5.6に組み付けられている。スライドプレ
ート7の両端はガイドコロ24の外周に保持されており
、これにより可動s20が長手方向に移動できる。
The movable part 20 is constructed by fixing a movable coil 21, which is, for example, a three-phase coil, to a carriage 23 with a coil fixture 22, as shown in FIG. 2, which is a sectional view taken along the line A-A in FIG. The carriage 23 holds the magnetic circuit section 10 between two parts.
A pair of mechanical rollers 24 are attached. On the other hand, a slide plate 7 extending longitudinally along the upper yoke 1 is assembled to the end plate 5.6. Both ends of the slide plate 7 are held on the outer periphery of the guide rollers 24, which allows the movable s20 to move in the longitudinal direction.

次に本発明の特徴とする磁石配列について、第3図によ
り説明する。第3図は第1図のB−B矢視部分拡大図で
あり、磁石集合体3bについて示しであるが、磁石集合
体3aもこれと同様の磁石配列である。磁石集合体3b
は、いずれも実質的に同一寸法である複数個の平板状の
永久磁石3を所定間隔(P)をおいてかつストローク方
向に対して所定角度(θンだけ傾斜して、下部ヨーク2
に固着して形成されている。すなわち永久磁石3の長辺
3′は一点鎖線Sで示すストローク方向に対して直交し
ないような関係にある。要するに磁気室i!i4内に存
在するストローク方向に垂直な磁束は、平面からみてス
トローク方向に対して傾斜した状態となる。これにより
磁気空隙における磁束密度が滑らかに変化し、概略正弦
波状の磁束分布形状とすることができ、可動コイルに正
弦波電流を供給することによりその移動がスムーズに行
なわれる。したがって推力リップルを大幅に低減するこ
とができる。
Next, the magnet arrangement, which is a feature of the present invention, will be explained with reference to FIG. FIG. 3 is a partially enlarged view taken along the line B--B in FIG. 1, and shows the magnet assembly 3b, but the magnet assembly 3a also has a similar magnet arrangement. Magnet assembly 3b
, a plurality of flat permanent magnets 3, all of which have substantially the same dimensions, are placed at a predetermined interval (P) and inclined at a predetermined angle (θ) with respect to the stroke direction, and the lower yoke 2 is
It is formed by adhering to. That is, the long side 3' of the permanent magnet 3 is in a relationship such that it is not orthogonal to the stroke direction indicated by the dashed line S. In short, magnetic room i! The magnetic flux perpendicular to the stroke direction existing in i4 is inclined to the stroke direction when viewed from the plane. As a result, the magnetic flux density in the magnetic gap changes smoothly, resulting in a substantially sinusoidal magnetic flux distribution shape, and by supplying a sinusoidal current to the movable coil, its movement is performed smoothly. Therefore, thrust ripple can be significantly reduced.

また本発明では、第3図に示すように永久磁石3をスト
ローク方向に対して傾斜して配置する代わりに、磁石配
置は従来と同様であるが、各磁石の着磁方向を平面から
みてストローク方向に対して傾斜するようにしてもよい
Furthermore, in the present invention, instead of arranging the permanent magnets 3 at an angle with respect to the stroke direction as shown in FIG. It may be made to be inclined with respect to the direction.

本発明のりニアモータは、従来のものと同様に。The linear motor of the present invention is similar to the conventional one.

可動コイルに通電して推力を発生させるものの、その電
流を正弦波電流とし、可動コイルと永久磁石との相対位
置を適当な検出手段により検出し、電流を流すコイルお
よびその方向を切換えることにより、連続して長ストロ
ーク移動させることができる。また可動コイルは、モー
タ効率の点から特開昭62−193543号に記載され
ているように、1個の永久磁石の長手方向の巾の数分の
1以下のコイル巾寸法を有する複数個のコイルを、各コ
イルの中央部が重ならない様隣合わせて同一平面上に順
次配列し、磁気空隙内に位置するコイル中央部のみ一相
分の厚さとした多相偏平コイルとすることが望ましい。
Although the moving coil is energized to generate thrust, the current is made into a sine wave current, the relative position between the moving coil and the permanent magnet is detected by an appropriate detection means, and the coil in which the current flows and its direction are switched. Can be moved continuously over long strokes. In addition, from the point of view of motor efficiency, the moving coil is composed of a plurality of coils each having a coil width smaller than a fraction of the longitudinal width of one permanent magnet, as described in Japanese Patent Application Laid-Open No. 193543/1983. It is desirable to form a multiphase flat coil in which the coils are sequentially arranged next to each other on the same plane so that the central portions of the coils do not overlap, and only the central portion of the coil located within the magnetic gap has a thickness equivalent to one phase.

また本発明では、永久磁石3は、第4図に示すような形
状としてもよい。
Further, in the present invention, the permanent magnet 3 may have a shape as shown in FIG.

[発明の効果〕 以上に詳述の如く、本発明によれば、磁気空隙内でスト
ローク方向に垂直な磁束が、平面からみてストローク方
向に対して傾斜し、磁束分布として正弦波分布形状に近
似することにより、可動コイルに通電する電流を正弦波
とした場合、その相互作用による発生推力の推力リップ
ルを低減させることができる。
[Effects of the Invention] As detailed above, according to the present invention, the magnetic flux perpendicular to the stroke direction within the magnetic gap is inclined with respect to the stroke direction when viewed from the plane, and the magnetic flux distribution approximates a sinusoidal distribution shape. By doing so, when the current flowing through the movable coil is made into a sine wave, the thrust ripple of the generated thrust due to the interaction can be reduced.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の一実施例に係るリニアモータの正面
図、第2図は第1図のA−A矢視断面図、第3図は第1
図のB−B矢視断面図、第4図は本発明に使用される磁
石の形状を示す図である。 1:上部ヨーク、2;下部ヨーク、3:永久磁石、4:
磁気空隙、21:可動コイル (シ
1 is a front view of a linear motor according to an embodiment of the present invention, FIG. 2 is a sectional view taken along the line A-A in FIG. 1, and FIG.
FIG. 4 is a sectional view taken along the line BB in the figure, and is a diagram showing the shape of the magnet used in the present invention. 1: Upper yoke, 2: Lower yoke, 3: Permanent magnet, 4:
Magnetic air gap, 21: Moving coil (series)

Claims (2)

【特許請求の範囲】[Claims] (1)所定の間隔をおいて対向配置された一対のヨーク
と、前記各ヨークの対向面に固着された、厚み方向に着
磁されかつ相隣る磁極および向い合う磁極が逆極性とな
るように長手方向に配置された複数個の永久磁石と、対
向する永久磁石間に形成された磁気空隙内を長手方向移
動可能に配置された可動コイルとを有するリニアモータ
において、前記磁気空隙内に発生する磁束は、平面から
みて前記可動コイルの移動方向に対して所定角度だけ傾
斜していることを特徴とするリニアモータ。
(1) A pair of yokes facing each other at a predetermined interval, magnetized in the thickness direction and fixed to the opposing surfaces of each yoke so that adjacent magnetic poles and opposing magnetic poles have opposite polarities. In a linear motor having a plurality of permanent magnets disposed in the longitudinal direction, and a moving coil disposed so as to be movable in the longitudinal direction within the magnetic gap formed between the opposing permanent magnets, The linear motor is characterized in that the magnetic flux is inclined by a predetermined angle with respect to the moving direction of the movable coil when viewed from a plane.
(2)前記永久磁石は略直方体状の板状磁石であり、各
永久磁石は長辺が前記可動コイルの移動方向に対して角
度をもって交差するように等間隔で配置されていること
を特徴とする請求項(1)に記載のリニアモータ。
(2) The permanent magnets are plate magnets having a substantially rectangular parallelepiped shape, and each permanent magnet is arranged at equal intervals so that its long sides intersect at an angle with the moving direction of the moving coil. The linear motor according to claim (1).
JP6612790A 1990-03-16 1990-03-16 Linear motor Pending JPH03270670A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6612790A JPH03270670A (en) 1990-03-16 1990-03-16 Linear motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6612790A JPH03270670A (en) 1990-03-16 1990-03-16 Linear motor

Publications (1)

Publication Number Publication Date
JPH03270670A true JPH03270670A (en) 1991-12-02

Family

ID=13306898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6612790A Pending JPH03270670A (en) 1990-03-16 1990-03-16 Linear motor

Country Status (1)

Country Link
JP (1) JPH03270670A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5519266A (en) * 1993-06-01 1996-05-21 Anorad Corporation High efficiency linear motor
JP2004343853A (en) * 2003-05-14 2004-12-02 Sony Corp Linear actuator, lens driver and imaging apparatus
WO2007040009A1 (en) * 2005-09-30 2007-04-12 Thk Co., Ltd. Linear synchronous motor and linear motor actuator
US9108845B2 (en) 2009-03-26 2015-08-18 Mitsui Chemicals, Inc. Chlorine production catalyst and chlorine production process using the catalyst

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5519266A (en) * 1993-06-01 1996-05-21 Anorad Corporation High efficiency linear motor
JP2004343853A (en) * 2003-05-14 2004-12-02 Sony Corp Linear actuator, lens driver and imaging apparatus
WO2007040009A1 (en) * 2005-09-30 2007-04-12 Thk Co., Ltd. Linear synchronous motor and linear motor actuator
US7888827B2 (en) 2005-09-30 2011-02-15 Thk Co., Ltd. Linear synchronous motor and linear motor actuator
JP4993609B2 (en) * 2005-09-30 2012-08-08 Thk株式会社 Linear synchronous motor and linear motor actuator
US9108845B2 (en) 2009-03-26 2015-08-18 Mitsui Chemicals, Inc. Chlorine production catalyst and chlorine production process using the catalyst

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