JPH0327040U - - Google Patents
Info
- Publication number
- JPH0327040U JPH0327040U JP8778489U JP8778489U JPH0327040U JP H0327040 U JPH0327040 U JP H0327040U JP 8778489 U JP8778489 U JP 8778489U JP 8778489 U JP8778489 U JP 8778489U JP H0327040 U JPH0327040 U JP H0327040U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- solid body
- nozzle
- semiconductor
- ejects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007787 solid Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8778489U JPH0327040U (fr) | 1989-07-26 | 1989-07-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8778489U JPH0327040U (fr) | 1989-07-26 | 1989-07-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0327040U true JPH0327040U (fr) | 1991-03-19 |
Family
ID=31637424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8778489U Pending JPH0327040U (fr) | 1989-07-26 | 1989-07-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0327040U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002014617A (ja) * | 2000-06-29 | 2002-01-18 | Sato Corp | 荷 札 |
-
1989
- 1989-07-26 JP JP8778489U patent/JPH0327040U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002014617A (ja) * | 2000-06-29 | 2002-01-18 | Sato Corp | 荷 札 |