JPH03265478A

JPH03265478A - Energy converter and ion beam generator through energy conversion

Info

Publication number: JPH03265478A
Application number: JP6494190A
Authority: JP
Inventors: Susumu Nakano; 晋中野; Yoshikazu Kimura; 木村　好和; Kuniyoshi Tsubouchi; 邦良坪内; Shohei Yoshida; 正平吉田; Kiyoshi Namura; 清名村
Original assignee: Hitachi Ltd
Current assignee: Hitachi Ltd
Priority date: 1990-03-15
Filing date: 1990-03-15
Publication date: 1991-11-26

Abstract

PURPOSE:To take out energy directly from steam flow without employing a charge injection source by feeding saturated steam from a steam supply source and taking out charges of charged particles, produced through a supersonic nozzle as the steam is condensed, by means of a collector. CONSTITUTION:A pressure reducing unit arranged in a discharge system is operated under a state where no steam is supplied thus bringing the inside of a flow path into low pressure state. Subsequently, steam is fed to a supersonic nozzle. The steam fed from a steam supply source to the supersonic nozzle adiabatically expands but it is condensed in the way. Charged particles produced through condensation are collected at the step part 35 at the outlet of the supersonic nozzle and electrostatic charges are accumulated thereat. When a collector is connected with a load 36, current flows through the load 36 and electric energy can be taken out.

Description

【発明の詳細な説明】〔産業上の利用分野〕本発明はエネルギ変換装Ｗ及びイオンビーム発生装置に
係り、特に蒸気流の持つエネルギーを直接電気エネルギ
ーに変換する装置、及び、蒸気流よりイオンビームを取
り出す装置に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an energy conversion device W and an ion beam generator, and particularly to a device that directly converts the energy of a vapor flow into electrical energy, and a device that converts ion beam generation from a vapor flow directly. This invention relates to a device for extracting a beam.

〔従来の技術〕蒸気等の流体の持つ運動エネルギーを直接電気エネルギ
ーに変換する装置の一種として、ＥＨＤ（電気流体力学
）発電がある。従来のＥＨＤ発電について静電気ハンド
ブック（静電気学会編、昭和　年）に記載されたものや
、特開昭５７−１６０３７３号公報に記載されたものが
ある。[Prior Art] EHD (electrohydrodynamic) power generation is a type of device that directly converts the kinetic energy of a fluid such as steam into electrical energy. Conventional EHD power generation is described in the Electrostatic Handbook (edited by the Electrostatic Society of Japan, 1920) and in Japanese Patent Application Laid-open No. 160373/1983.

第１２図（ａ）は、従来のＥ　ＨＤ発電で、高速流を用
いるものである。超音速ノズル１のスロート付近にノズ
ル外部から強制的に加圧液体２を加えて、細管３から噴
出させる。このとき、ノズルのスロート部に設けた電極
４間に電圧をかけて、コロナ放電等により、細管３から
噴出する液滴を誘導帯電Ｌコよって帯電させる。帯電粒
子は流体の運動によってコレクタ５に運ばれる。コレク
タに集められた電荷は負荷６に流れる。FIG. 12(a) shows conventional EHD power generation using high-speed flow. A pressurized liquid 2 is forcibly applied to the vicinity of the throat of a supersonic nozzle 1 from outside the nozzle, and is ejected from a thin tube 3. At this time, a voltage is applied between the electrodes 4 provided at the throat portion of the nozzle, and the droplets ejected from the thin tube 3 are charged by induction charging L by corona discharge or the like. The charged particles are carried to the collector 5 by the movement of the fluid. The charge collected in the collector flows to the load 6.

第１２図（１））は加熱装置７と冷却装置８により作ら
れる雰囲気中の温度差による自然対流により、流体の運
動を行わせるものである。作動流体は上昇流路９側底面
に設けられた加熱装置７により気化する。このとき、電
極１０間に電圧を印加して気体を電離させる。この電離
した気体は、自然対流によりコレクタ５に運ばれ、外部
の負荷に流れる。In FIG. 12 (1)), fluid movement is caused by natural convection due to a temperature difference in the atmosphere created by the heating device 7 and the cooling device 8. The working fluid is vaporized by a heating device 7 provided on the bottom surface of the ascending flow path 9 . At this time, a voltage is applied between the electrodes 10 to ionize the gas. This ionized gas is carried to the collector 5 by natural convection and flows to an external load.

第１３図は超音速膨張による気体の温度低下を利用して
揺らぎの少ないイオンビームを得る装置の概略を示した
ものである。放電室１１に備えた電極１−２に電圧を印
加して、搬送気体１３を電離する。この電離気体は放電
室に注入された試料気体１４と衝突して試料気体をイオ
ン化させる。イオン化した試料気体と搬送気体は超音速
ノズル１より噴出し、超音速ノズル下流に設けられた引
き出は電極１５間のイオン通過孔１６を通り、この間で
引き出し電極間の電場により図中矢印のように加速して
イオンビーム１７が得られる。FIG. 13 schematically shows an apparatus for obtaining an ion beam with little fluctuation by utilizing the temperature reduction of gas due to supersonic expansion. A voltage is applied to the electrode 1-2 provided in the discharge chamber 11 to ionize the carrier gas 13. This ionized gas collides with the sample gas 14 injected into the discharge chamber to ionize the sample gas. The ionized sample gas and the carrier gas are ejected from the supersonic nozzle 1, and the extraction provided downstream of the supersonic nozzle passes through the ion passage hole 16 between the electrodes 15, and between these, the electric field between the extraction electrodes causes the flow indicated by the arrow in the figure. The ion beam 17 is obtained by accelerating the ion beam as shown in FIG.

[Problem to be solved by the invention]

しかしながらこれらの従来技術は、気体に電荷を注入す
る装置が必須のものであり、結局のところ電気エネルギ
ーを注入して電気を得、また、電気エネルギーを注入し
てイオンビームを発生するものであった。However, these conventional techniques require a device that injects charge into the gas, and in the end they inject electrical energy to obtain electricity, and inject electrical energy to generate an ion beam. Ta.

本発明の目的は、電荷注入源を用いずに蒸気流から直接
電気エネルギーを取り出す装置を提供することである。It is an object of the present invention to provide a device for extracting electrical energy directly from a vapor stream without the use of a charge injection source.

また５本発明の他の目的は、電荷注入源を用いずにイオ
ンビームを取り出す装置を提供することにある。Another object of the present invention is to provide an apparatus for extracting an ion beam without using a charge injection source.

[Means to solve the problem]

上記目的は以下の手段によって達成することができる。 The above objective can be achieved by the following means.

（ア）蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの出口側に設けられ、噴出する蒸気の凝縮に伴って発
生する帯電粒子の電荷を取り出す導電体とからなり、該
導電体から電気を取り出すことによって前記蒸気の有す
るエネルギを電気エネルギに変換するものであるエネル
ギ変換装置。(a) Consisting of a supersonic nozzle that spouts steam and a conductor that is installed on the exit side of the supersonic nozzle and extracts the charge of charged particles generated as the jetted steam condenses, electricity is generated from the conductor. An energy conversion device that converts the energy of the steam into electrical energy by extracting the steam.

（イ）蒸気を供給する蒸気供給源と、該蒸気供給源から
の蒸気を導入する入口側流路と、該入口側流路から導入
された蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの噴出側に連続する出１コ側流路と、導出［Ｉ側流路
に接続し減圧部を有する排気系とからなり、該出口側流
路内に導電材よりなるコレクタを設け、前記蒸気供給源
から飽和蒸気を供給して、前記超音速ノズルにより蒸気
の凝縮に伴って発生する帯電粒子の電荷を該コ１／クタ
から取り出すことにより、前記蒸気の有するエネルギを
電気エネルギに変換するものであるエネルギ変換装置。(a) A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and the supersonic nozzle. It consists of an outlet 1 side flow path that is continuous to the ejection side of the steam, and an exhaust system that is connected to the outlet [I side flow path and has a pressure reducing part. A device that converts the energy of the steam into electrical energy by supplying saturated steam from a source and extracting the electric charge of charged particles generated as the steam condenses from the supersonic nozzle. An energy conversion device.

（つ）蒸気を供給する蒸気供給源と、該蒸気供給源から
の蒸気を導入する入口側流路と、該入口側流路から導入
された蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの噴出側に連続する出口側流路と、該出口側流路に接
続し減圧部を有する排気系とからなり、該出口側流路内
の下流側に導電材よりなるコレクタを設け、前記蒸気供
給源から飽和蒸気を供給して、前記超音速ノズルにより
蒸気の凝縮に伴って発生する帯電粒子の電荷を該コレク
タから取り出すことにより、前記蒸気の有するエネルギ
を電気エネルギに変換するものであるエネルギ変換装Ｗ
。(1) a steam supply source that supplies steam, an inlet side flow path that introduces steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and the supersonic nozzle. It consists of an outlet side flow path continuous to the ejection side of the steam, and an exhaust system connected to the outlet side flow path and having a pressure reducing part, and a collector made of a conductive material is provided on the downstream side of the outlet side flow path. Energy that converts the energy of the steam into electrical energy by supplying saturated steam from a source and extracting the charge of charged particles generated as the steam condenses from the collector through the supersonic nozzle. Conversion unit W
.

（１）蒸気を供給する蒸気供給源と、該蒸気供給源から
の蒸気を導入する入口側流路と、該入口側流路から導入
された蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの噴出側に連続する出口側流路と、該出口側流路に接
続し減圧部を有する排気系とからなり、該出口側流路内
に超音速ディフューザを設けると共に、該超音速ディフ
ューザの下流側に導電材よりなるコレクタを設け、前記
蒸気供給源から飽和蒸気を供給して、前記超音速ノズル
により蒸気の凝縮に伴って発生する帯電粒子の電荷を該
コレクタから取り出すことにより、前記蒸気の有するエ
ネルギを電気エネルギに変換するものであるエネルギ変
換装置。(1) A steam supply source that supplies steam, an inlet side flow path that introduces steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and the supersonic nozzle. It consists of an outlet side flow path that is continuous to the ejection side of the air, and an exhaust system that is connected to the outlet side flow path and has a pressure reducing part, and a supersonic diffuser is provided in the outlet side flow path, and a supersonic diffuser is provided downstream of the supersonic diffuser. A collector made of a conductive material is provided on the side, saturated steam is supplied from the steam supply source, and charges of charged particles generated as the steam is condensed by the supersonic nozzle are extracted from the collector. An energy conversion device that converts energy into electrical energy.

（オ）蒸気を供給する蒸気供給源と、該蒸気供給源から
の蒸気を導入する入口側流路と、該入口側流路から導入
された蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの噴出側に連続する出口側流路と、該出口側流路に接
続し減圧部を有する排気系とからなり、前記超音速ノズ
ルを導電材により形成し、該超音速ノズルから前記蒸気
供給源からの飽和蒸気を噴出して、蒸気の凝縮に伴って
発生し該超音ノズルの出口端に滞留する帯電粒子の静電
荷を、該超音速ノズルにより取り出すことによって前記
蒸気の有するエネルギを電気エネルギに変換するもので
あるエネルギ変換装置。(E) A steam supply source that supplies steam, an inlet side flow path that introduces steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and the supersonic nozzle. The supersonic nozzle is formed of a conductive material, and the supersonic nozzle is made of a conductive material, and the steam supply source is The energy of the steam is converted into electrical energy by ejecting saturated steam from the supersonic nozzle and extracting the static charge of the charged particles generated as the steam condenses and staying at the exit end of the supersonic nozzle. An energy conversion device that converts energy into

（力）蒸気を供給する蒸気供給源と、該蒸気供給源から
の蒸気を導入する入口側流路と、該入口側流路から導入
された蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの噴出側に連続する出口側流路と、該出口側流路に接
続し減圧部を有する排気系とからなり、前記出口側流路
に予め電界を設け、前記超音速ノズルから飽和蒸気を噴
出させて、蒸気の凝縮に伴って発生する帯電粒子を蒸気
噴流と共に前記電界に抗して移動させることにより電気
エネルギを発生させるものであるエネルギ変換装置。(Power) A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and the supersonic nozzle. It consists of an outlet side flow path continuous to the ejection side of the exhaust system, and an exhaust system connected to the outlet side flow path and having a pressure reducing part, an electric field is provided in advance in the outlet side flow path, and saturated steam is ejected from the supersonic nozzle. An energy conversion device that generates electrical energy by moving charged particles generated as steam condenses together with a steam jet against the electric field.

（キ）蒸気を供給する蒸気供給源と、該蒸気供給源から
の蒸気を導入する入口側流路と、該入口側流路から導入
された蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの噴出側に連続する出口側流路と、該出口側流路に接
続し減圧部を有する排気系とからなり、該出口側流路の
壁を絶縁材で形成し、蒸気の流れ方向に直交する任意の
一方向と交わる一対の流路壁面の一方に磁石のＮ極を。(g) A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and the supersonic nozzle. It consists of an outlet side flow path that is continuous to the jetting side of the steam, and an exhaust system that is connected to the outlet side flow path and has a pressure reducing part, the wall of the outlet side flow path is formed of an insulating material, and the exhaust system is perpendicular to the flow direction of the steam. Place the N pole of the magnet on one of the pair of channel walls that intersects with any one direction.

他方にＳ極を配置し、更に、この磁石により生じる磁界
方向と蒸気の流れ方向との２方向に直交する方向が交わ
るーの流路壁面にそれぞれ電極を取り付けて、前記蒸気
供給源から飽和蒸気を供給し、前記超音速ノズルにより
蒸気の凝縮に伴って発生する帯電粒子の流れと、該磁石
の磁界とに基づいてこれら電極間に発生する起電力によ
り、該電極から電気エネルギを取り出すものであるエネ
ルギ変換装置。An S pole is placed on the other side, and electrodes are attached to the wall surfaces of the flow paths where the direction of the magnetic field generated by the magnet intersects with the flow direction of the steam, and saturated steam is supplied from the steam supply source. Electrical energy is extracted from the electrodes by an electromotive force generated between the electrodes based on the flow of charged particles generated by the supersonic nozzle as the steam condenses and the magnetic field of the magnet. An energy conversion device.

（り）蒸気を供給する蒸気供給源と、該蒸気供給源から
の蒸気を導入する入口側流路と、該入口側流路から導入
された蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの噴出側に連続する出口側流路と、該出口側流路に接
続し減圧部を有する排気系とからなり、該出口側流路内
に導電材よりなるコレクタを設け、前記蒸気供給源から
飽和状態に近い状態の加熱蒸気又は未飽和蒸気を供給し
て、前記超音速ノズルにより蒸気の凝縮に伴って発生す
る帯電粒子の電荷を該コレクタから取り出すことにより
、前記蒸気の有するエネルギを電気エネルギに変換する
ものであるエネルギ変換装置。(i) a steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and the supersonic nozzle. It consists of an outlet side flow path that is continuous to the ejection side of the steam, and an exhaust system that is connected to the outlet side flow path and has a pressure reducing part, and a collector made of a conductive material is provided in the outlet side flow path, and The energy of the steam is converted into electrical energy by supplying heated steam or unsaturated steam in a state close to a saturated state and extracting the charges of charged particles generated as the steam condenses through the supersonic nozzle from the collector. An energy conversion device that converts energy into

（ケ）蒸気を供給する蒸気供給源と、該蒸気供給源から
の蒸気を導入する入口側流路と、該入口側流路から導入
された蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの噴出側に連続する出口側流路と、該出口側流路に接
続し減圧部を有する排気系とからなり、該超音速ノズル
を同一流路断面内に多数並列配置すると共に、該出口側
流路内に導電材よりなるコレクタを設け、前記蒸気供給
源から飽和蒸気を供給して、前記超音速ノズルにより蒸
気の凝縮に伴って発生する帯電粒子の電荷を該コレクタ
から取り出すことにより、前記蒸気の有するエネルギを
電気エネルギに変換するものであるエネルギ変換装置。(k) A steam supply source that supplies steam, an inlet side flow path that introduces steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and the supersonic nozzle. It consists of an outlet side flow path that is continuous to the ejection side of the flow path, and an exhaust system that is connected to the outlet side flow path and has a pressure reducing part, and a large number of the supersonic nozzles are arranged in parallel in the same cross section of the flow path, and the outlet side A collector made of a conductive material is provided in the flow path, saturated steam is supplied from the steam supply source, and charges of charged particles generated as the steam is condensed by the supersonic nozzle are extracted from the collector. An energy conversion device that converts the energy of steam into electrical energy.

（コ）蒸気を供給する蒸気供給源と、該蒸気供給源から
の蒸気を導入する入口側流路と、該入口側流路から導入
された蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの噴出側に連続する出口側流路と、該出口側流路に接
続し減圧部を有する排気系とからなり、該出口側流路の
壁を絶縁材で形成すると共に、該出口側流路内に導電材
よりなるコレクタを設け、前記蒸気供給源から飽和蒸気
を供給して、前記超音速ノズルにより蒸気の凝縮に伴っ
て発生する帯電粒子の電荷を該コレクタから取り出すこ
とにより、前記蒸気の有するエネルギを電気エネルギに
変換するものであるエネルギ変換装置。(g) A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and the supersonic nozzle. It consists of an outlet side flow path that is continuous to the ejection side of the flow path, and an exhaust system that is connected to the outlet side flow path and has a pressure reducing part, and the wall of the outlet side flow path is formed of an insulating material, and the outlet side flow path is A collector made of a conductive material is provided in the interior, saturated steam is supplied from the steam supply source, and charges of charged particles generated as the steam is condensed by the supersonic nozzle are extracted from the collector. An energy conversion device that converts energy into electrical energy.

（す）蒸気を供給する蒸気供給源と、該蒸気供給源から
の蒸気を導入する入口側流路と、該入口側流路から導入
された蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの噴出側に連続する出口側流路と、該出口側流路に接
続し減圧部を有する排気系とからなり、該超音速ノズル
を同一流路断面内に多数並列配置し、且つそれぞれのノ
ズル出口端に連続して絶縁材よりなる隔壁を蒸気の流れ
方向に平行に設置すると共に、その下流に導電材よりな
るコレクタを設け、前記蒸気供給源から飽和蒸気を供給
して、前記超音速ノズルにより蒸気の凝縮に伴って発生
する帯電粒子の電荷を該コレクタから取り出すことによ
り、前記蒸気の有するエネルギを電気エネルギに変換す
るものであるエネルギ変換装置。(a) a steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and the supersonic nozzle. The supersonic nozzles are arranged in parallel in the same cross-section of the flow path, and each nozzle is A partition wall made of an insulating material is installed continuously at the outlet end parallel to the flow direction of the steam, and a collector made of a conductive material is provided downstream of the partition wall, and saturated steam is supplied from the steam supply source to the supersonic nozzle. An energy conversion device that converts the energy of the steam into electrical energy by extracting the charge of charged particles generated as the steam condenses from the collector.

（シ）蒸気を供給する蒸気供給源と、該蒸気供給源から
の蒸気を導入する入口側流路と、該入口側流路から導入
された蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの噴出側に連続する出口側流路と、該出口側流路に接
続し減圧部を有する排気系とからなり、該超音速ノズル
の壁を銅等の導電性熱良導体により形成すると共に、該
出口側流路内に導電材よりなるコレクタを設け、前記蒸
気供給源から飽和蒸気を供給して、前記超音速ノズルに
より蒸気の凝縮に伴って発生する帯電粒子の電荷を該コ
レクタから取り出すことにより、前記蒸気の有するエネ
ルギを電気エネルギに変換するものであるエネルギ変換
装置。(c) a steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and the supersonic nozzle. The supersonic nozzle consists of an outlet side flow path continuous to the ejection side of the supersonic nozzle, and an exhaust system connected to the outlet side flow path and having a pressure reducing part. By providing a collector made of a conductive material in the outlet side flow path, supplying saturated steam from the steam supply source, and extracting from the collector the charges of charged particles generated as the steam condenses by the supersonic nozzle. , an energy conversion device that converts the energy of the steam into electrical energy.

（ス）蒸気流路の上流側に超音速ノズルと下流側に少く
とも１以上の先細末広形状ノズルとを設け、それぞれを
蒸気供給管で蒸気発生器に連結すると共に、前記蒸気流
路に導電体よりなるコレクタを設け、前記先細末広形状
ノズルから蒸気を噴出することにより減圧された蒸気流
路に、前記超音速ノズルから蒸気を噴出させ凝縮に伴っ
て発生する帯電粒子の電荷を前記コレクタから蒸気流路
外に取り出すことによって、蒸気の有するエネルギを電
気エネルギに変換するものであるエネルギ変換装置。(S) Provide a supersonic nozzle on the upstream side of the steam flow path and at least one or more tapered and divergent nozzles on the downstream side, and connect each to the steam generator with a steam supply pipe, and conduct electricity to the steam flow path. A collector is provided, and the charge of charged particles generated by ejecting steam from the supersonic nozzle and condensation is removed from the collector into a steam flow path whose pressure is reduced by ejecting steam from the tapered and wide-shaped nozzle. An energy conversion device that converts the energy of steam into electrical energy by extracting it from the steam flow path.

（セ）蒸気を断熱膨張させ、凝縮に伴って発生する帯電
粒子から電荷を取り出すことにより、該蒸気の有するエ
ネルギを電気エネルギに変換するエネルギ変換方法。(C) An energy conversion method in which the energy of the steam is converted into electrical energy by adiabatically expanding the steam and extracting charges from the charged particles generated as the steam condenses.

（ソ）水を加熱して水蒸気を発生させ、該水蒸気を断熱
膨張させ、凝縮に伴って発生する帯電粒子から電荷を取
り出すことにより、水から電気エネルギを取り出すエネ
ルギ変換方法。(iv) An energy conversion method for extracting electrical energy from water by heating water to generate water vapor, adiabatically expanding the water vapor, and extracting electric charges from charged particles generated as a result of condensation.

（り）蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの近傍に設けられ、試料気体を流出する試料気体供給
ノズルと、該試料気体供給ノズルから流出した試料気体
と該超音速ノズルにより発生する凝縮蒸気の帯電粒子と
の衝突により生じる電離した試料気体の引き出し電極と
を有し、該引き出し電極から該試料気体のイオンビーム
を引き出すものであるイオンビーム発生装置。(i) A supersonic nozzle that spouts out steam, a sample gas supply nozzle that is installed near the supersonic nozzle and that discharges the sample gas, and a sample gas that flows out from the sample gas supply nozzle and generated by the supersonic nozzle. An ion beam generator comprising an extraction electrode for extracting ionized sample gas generated by collision of condensed vapor with charged particles, and extracting an ion beam of the sample gas from the extraction electrode.

（チ）蒸気を供給する蒸気供給源と、該蒸気供給源から
の蒸気を導入する入口側流路と、該入口側流路から導入
された蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの噴出側に連続する出口側流路と、該出口側流路に接
続し減圧部を有する排気系とからなり、該超音速ノズル
の近傍に試料気体供給ノズルを設けると共に、該試料気
体供給ノズルの下流にイオン通過孔を有する引き出し電
極と、該引き出し電極に電場を発生させる電場発生手段
とを備え、前記蒸気供給源から飽和蒸気を供給して、前
記超音速ノズルにより発生する凝縮蒸気の帯電粒子と前
記試料気体供給ノズルから流出する試料気体との衝突に
より生じる電離した試料気体を前記イオン通過孔から取
り出すものであるイオンビーム発生装置。(H) A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and the supersonic nozzle. It consists of an outlet side flow path that is continuous to the ejection side of the supersonic nozzle, and an exhaust system that is connected to the outlet side flow path and has a pressure reducing part, and a sample gas supply nozzle is provided near the supersonic nozzle, and a sample gas supply nozzle is provided near the supersonic nozzle. an extraction electrode having an ion passage hole downstream of the extraction electrode, and an electric field generating means for generating an electric field in the extraction electrode, and supplying saturated steam from the steam supply source to charge the condensed steam generated by the supersonic nozzle. An ion beam generator that extracts ionized sample gas generated by collision between particles and sample gas flowing out from the sample gas supply nozzle from the ion passage hole.

（ツ）蒸気を供給する蒸気供給源と、該蒸気供給源から
の蒸気を導入する入口側流路と、該入口側流路から導入
された蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの噴出側に連続する出口側流路と、該出口側流路に接
続し減圧部を有する排気系とからなり、該超音速ノズル
の近傍に試料気体供給ノズルを設けると共に、該試料気
体供給ノズルの下流にイオン通過孔を有する引き出し電
極と、該引き出し電極に電場を発生させる電場発生手段
とを備え、前記蒸気供給源から飽和状態に近い状態の加
熱蒸気又は未飽和蒸気を供給して。(X) A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and the supersonic nozzle. It consists of an outlet side flow path that is continuous to the ejection side of the supersonic nozzle, and an exhaust system that is connected to the outlet side flow path and has a pressure reducing part, and a sample gas supply nozzle is provided near the supersonic nozzle, and a sample gas supply nozzle is provided near the supersonic nozzle. an extraction electrode having an ion passage hole downstream of the extraction electrode, and electric field generation means for generating an electric field in the extraction electrode, and supplies heated steam or unsaturated steam in a state close to a saturated state from the steam supply source.

前記超音速ノズルにより発生する凝縮蒸気の帯電粒子と
前記試料気体供給ノズルから流出する試料気体との衝突
により生じる電離した試料気体を前記イオン通過孔から
取り出すものであるイオンビーム発生装置。An ion beam generator for extracting ionized sample gas from the ion passage hole, which is generated by a collision between charged particles of condensed steam generated by the supersonic nozzle and the sample gas flowing out from the sample gas supply nozzle.

（テ）蒸気を供給する蒸気供給源と、該蒸気供給源から
の蒸気を導入する入口側流路と、該入口側流路から導入
された蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの噴出側に連続する出口側流路と、該出口側流路に接
続し減圧部を有する排気系とからなり、該超音速ノズル
を同一流路断面内に多数並列配置すると共に、該超音速
ノズルの近傍に試料気体供給ノズルを設け、該試料気体
供給ノズルの下流にイオン通過孔を有する引き出し電極
と、該引き呂し電極に電場を発生させる電場発生手段と
を備え、前記蒸気供給源から飽和蒸気を供給して、前記
超音速ノズルにより発生する凝縮蒸気の帯電粒子と前記
試料気体供給ノズルから流出する試料気体との衝突によ
り生じる電離した試料気体を前記イオン通過孔から取り
出すものであるイオンビーム発生装置。(Te) a steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and the supersonic nozzle. The supersonic nozzles are arranged in parallel in the same cross-section of the flow path, and the supersonic nozzles are arranged in parallel in the same cross-section of the flow path. A sample gas supply nozzle is provided near the nozzle, and downstream of the sample gas supply nozzle, an extraction electrode having an ion passage hole and an electric field generating means for generating an electric field in the extraction electrode are provided. Ions that supply saturated steam and extract ionized sample gas from the ion passage hole caused by collision between charged particles of condensed steam generated by the supersonic nozzle and the sample gas flowing out from the sample gas supply nozzle. Beam generator.

（ト）蒸気を供給する蒸気供給源と、該蒸気供給源から
の蒸気を導入する入口側流路と、該入口側流路から導入
された蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの噴出側に連続する出口側流路と、該出口側流路に接
続し減圧部を有する排気系とからなり、該出口側流路の
壁を絶縁材で形成すると共に、前記超音速ノズルの近傍
に試料気体供給ノズルを設け、該試料気体供給ノズルの
下流にイオン通過孔を有する引き呂し電極と、該引き出
し電極に電場を発生させる電場発生手段とを備え、前記
蒸気供給源から飽和蒸気を供給して、前記超音速ノズル
により発生する凝縮蒸気の帯電粒子と前記試料気体供給
ノズルから流出する試料気体との衝突により生じる電離
した試料気体を前記イオン通過孔から取り出すものであ
るイオンビーム発生装置。(G) A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and the supersonic nozzle. It consists of an outlet side flow path that is continuous to the jetting side of the supersonic nozzle, and an exhaust system that is connected to the outlet side flow path and has a pressure reducing part. A sample gas supply nozzle is provided near the sample gas supply nozzle, and downstream of the sample gas supply nozzle, a drawing electrode having an ion passage hole and an electric field generating means for generating an electric field in the extraction electrode are provided. ion beam generation, in which ionized sample gas produced by collision between charged particles of condensed vapor generated by the supersonic nozzle and the sample gas flowing out from the sample gas supply nozzle is extracted from the ion passage hole. Device.

（す）蒸気を供給する蒸気供給源と、該蒸気供給源から
の蒸気を導入する入口側流路と、該入口側流路から導入
された蒸気を噴出させる超音速ノズルと、該超音速ノズ
ルの噴出側に連続する出口側流路と、該出口側流路に接
続し減圧部を有する排気系とからなり、該超音速ノズル
の壁を銅等の導電性熱良導体により形成すると共に、該
超音速ノズルの近傍に試料気体供給ノズルを設け、該試
料気体供給ノズルの下流にイオン通過孔を有する引き出
し電極と、該引き出し電極に電場を発生させる電場発生
手段とを備え、前記蒸気供給源から飽和蒸気を供給して
、前記超音速ノズルにより発生する凝縮蒸気の帯電粒子
と前記試料気体供給ノズルから流出する試料気体との衝
突により生じる電離した試料気体を前記イオン通過孔か
ら取り出すものであるイオンビーム発生装Ｗ。(a) a steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and the supersonic nozzle. The supersonic nozzle consists of an outlet side flow path continuous to the ejection side of the supersonic nozzle, and an exhaust system connected to the outlet side flow path and having a pressure reducing part. A sample gas supply nozzle is provided near the supersonic nozzle, an extraction electrode having an ion passage hole downstream of the sample gas supply nozzle, and an electric field generating means for generating an electric field in the extraction electrode, and Ions that supply saturated steam and extract ionized sample gas from the ion passage hole caused by collision between charged particles of condensed steam generated by the supersonic nozzle and the sample gas flowing out from the sample gas supply nozzle. Beam generator W.

（ニ）先細末広形状のノズル孔を有し、該ノズル孔から
噴出する蒸気の凝縮に伴って帯電粒子を発生ずるエネル
ギ変換用の超音速ノズル。(d) A supersonic nozzle for energy conversion that has a nozzle hole with a tapered and widened shape and generates charged particles as steam ejected from the nozzle hole condenses.

（ヌ）並列配置した多数のスリット状のノズル孔を有し
、該ノズル孔から噴出する蒸気の凝縮に伴って帯電粒子
を発生するエネルギ変換用の超音速ノズル。(v) A supersonic nozzle for energy conversion that has a large number of slit-shaped nozzle holes arranged in parallel and generates charged particles as steam ejected from the nozzle holes condenses.

（ネ）円錐形状のノズル孔を多数スクリーン状に配置し
、該ノズル孔から噴出する蒸気の凝縮に伴って帯電粒子
を発生するエネルギ変換用の超音速ノズル。(f) A supersonic nozzle for energy conversion in which a large number of conical nozzle holes are arranged in a screen shape, and charged particles are generated as steam ejected from the nozzle holes is condensed.

（））蒸気を噴出するノズルを導電材により形成し、該
ノズル孔から噴出する蒸気の凝縮に伴って発生する帯電
粒子から電荷を取り出すものであるエネルギ変換用の超
音速ノズル。()) A supersonic nozzle for energy conversion, in which a nozzle for ejecting steam is formed of a conductive material, and charges are extracted from charged particles generated as the steam ejected from the nozzle hole condenses.

（ハ）先細末広形状のノズル孔を有し、該ノズル孔から
噴出する蒸気の凝縮に伴って帯電粒子を発生し、該帯電
粒子を試料気体に衝突させて該試料気体のイオンビーム
を発生させるものであるイオンビーム発生用の超音速ノ
ズル。(c) It has a nozzle hole with a tapered and divergent shape, and generates charged particles as the steam ejected from the nozzle hole condenses, and causes the charged particles to collide with the sample gas to generate an ion beam of the sample gas. A supersonic nozzle for generating ion beams.

[Effect]

Ｌ記構酸による作用を図面を用いて説明する。 The action of L structural acid will be explained using the drawings.

第２図は、超音速ノズル内の蒸気の流動状態を示す図で
ある。超音速ノズルに供給された蒸気流は、ノズルのス
ロート部で音速に達し、以後、ノズル断面積の増加に伴
い膨張して、流速の増加、静圧及び温度の低下を生じる
。このように高速で流れる蒸気流では、流れの局所熱力
学状態に対応した凝縮粒子を形成するのに要する時間が
、蒸気流の通過時間に比べて長いため、凝縮の発生は遅
れ、飽和状態より離れた状態で起こり始める。FIG. 2 is a diagram showing the flow state of steam within the supersonic nozzle. The steam flow supplied to the supersonic nozzle reaches sonic speed at the throat of the nozzle, and thereafter expands as the nozzle cross-sectional area increases, resulting in an increase in flow velocity and a decrease in static pressure and temperature. In such a fast-flowing vapor stream, the time required to form condensate particles corresponding to the local thermodynamic state of the stream is long compared to the passage time of the vapor stream, so the onset of condensation is delayed and the time is longer than the saturated state. It starts happening at a distance.

第３図は、飽和蒸気圧線をよぎって変化する場合の圧力
と温度の関係を示したものである。蒸気の飽和線より右
側の過熱状態２０にある蒸気が膨張する。膨張はほぼ等
エンドコピー線に沿って起こり、飽和線と交差する（状
］１ｉ２１）。もし流れが遅い場合には蒸気は飽和縁近
傍で凝縮するが、上記のように流れが非常に速い場合に
は、飽和線よりも、かなり離れた状態２２で始めて凝縮
が発生する。凝縮が起こると等エンドコピー線からずれ
る（状態２３）。FIG. 3 shows the relationship between pressure and temperature when changing across the saturated vapor pressure line. The steam in the superheated state 20 to the right of the steam saturation line expands. The expansion occurs approximately along the isoendocopy line, which intersects the saturation line (shape] 1i21). If the flow is slow, the vapor will condense near the saturation edge, but if the flow is very fast, as described above, condensation will only occur at a point 22 well away from the saturation line. When condensation occurs, it deviates from the isoendocopy line (state 23).

第３図の状態２］から状態２２までの間は、蒸気は過飽
和状態にあり、凝縮核が発生すると、凝縮核の周りに分
子（または原子）が次つぎと付着することによって凝縮
核が生長する。この凝縮核の生成速度は、蒸気の過飽和
の度合が大きい程大きく、つまり、急膨張の場合程、凝
縮は急激に起こる。凝縮により発生した液滴はノズル下
流へ流出するが、一部はノズル壁面を伝わってノズル出
口端のエツジ部１］より噴出する。スローｌ−下流のノ
ズル断面積がスロート部の断面積に比して数倍〜数十倍
と大きい場合には、ノズル内の温度低下が大きく、液滴
の融点を下回るようになり、発生した液滴は固化する。From state 2] to state 22 in Figure 3, the steam is in a supersaturated state, and when a condensation nucleus is generated, the condensation nucleus grows as molecules (or atoms) adhere one after another around the condensation nucleus. . The rate at which condensation nuclei are generated increases as the degree of supersaturation of the vapor increases; in other words, the faster the expansion occurs, the more rapidly condensation occurs. The droplets generated by condensation flow downstream of the nozzle, but some of them travel along the nozzle wall surface and are ejected from the edge portion 1 at the nozzle outlet end. Slow L - If the cross-sectional area of the downstream nozzle is several times to several tens of times larger than the cross-sectional area of the throat, the temperature inside the nozzle will drop significantly and drop below the melting point of the droplet, causing The droplets solidify.

また、ノズルの同−断面内について見ると、ノズルの壁
面近くを除いた領域では、流速は非常に速いが、壁面近
傍では流速は低下し、この領域では温度も高速領域に比
べて高くなる。このため、ノズル流路中央部において凝
縮粒子が固化しても、この領域では液滴の状態をとる。Furthermore, when looking at the same cross-section of the nozzle, the flow velocity is very high in the region excluding the vicinity of the nozzle wall, but the flow velocity decreases near the wall, and the temperature in this region is also higher than in the high-speed region. Therefore, even if the condensed particles solidify in the center of the nozzle flow path, they remain in the form of droplets in this region.

このように、膨張比の大ぎい超音速ノズル内の蒸気流は
、液滴とそれらが固化した固体粒子とが混在した流れと
なる。ここで、ノズル内の流れを電気的に見ると、液滴
が固化するときに、電荷をもった細かい液滴が発散する
。固体粒子は電離した状態で流出するものと、電荷が再
付着して、電気的に中性になるものとがある。これらの
粒子は互いに衝突しながら流れていくが、ノズル壁面上
に形成される流れの境界層の外縁付近では、境界層外か
ら流れ込む比較的温度の低い固体粒子と境界層内で生成
した温度の高い固体粒子との衝突または接触の際の摩擦
により固体粒子が帯電する。In this way, the vapor flow in the supersonic nozzle with a large expansion ratio becomes a flow in which liquid droplets and solid particles formed by solidification of the liquid droplets coexist. Here, when looking at the flow inside the nozzle electrically, when the droplets solidify, fine droplets with an electric charge diverge. Some solid particles flow out in an ionized state, while others re-attached charges and become electrically neutral. These particles flow while colliding with each other, but near the outer edge of the boundary layer of the flow formed on the nozzle wall, the relatively low temperature solid particles flowing from outside the boundary layer and the temperature of the solid particles generated within the boundary layer occur. Friction upon collision or contact with tall solid particles causes the solid particles to become electrically charged.

さらには、ノズル壁面を伝わって流れ、ノズル出口端面
より噴出する液滴が、噴出の際に、大小の液滴に飛散し
、このとき液滴が帯電する。Furthermore, the droplets that flow along the nozzle wall surface and are ejected from the nozzle exit end surface are scattered into large and small droplets when ejected, and at this time, the droplets become electrically charged.

以上のように、電気的には、ノズル内及びノズルから流
出する粒子は帯電状態にある。ここで、ノズル出口端に
おいて、第２図に示したようにノズル出口とそれに続く
下流側流路との間に、流路断面の段差があると、この部
分は、流れのよどみ域になり、この部分に、上記の帯電
粒子が集まる。As described above, electrically, the particles inside the nozzle and flowing out from the nozzle are in a charged state. Here, at the nozzle outlet end, if there is a step in the cross section of the flow path between the nozzle outlet and the subsequent downstream flow path as shown in FIG. 2, this part becomes a stagnation area of the flow. The above-mentioned charged particles gather in this part.

超音速ノズルに蒸気が連続的に供給されていると、この
よどみ域に停滞する帯電粒子の数密度は増加する。When steam is continuously supplied to the supersonic nozzle, the number density of charged particles stagnant in this stagnation area increases.

また、このよどみ域に帯電する粒子とは電気的に反対の
符号を持つ帯電粒子は蒸気流とともに下流に流される。Further, charged particles having an electrically opposite sign to those charged in this stagnation region are flowed downstream together with the steam flow.

このため、ノズル出口端のよどみ域に導電材を挿入する
と、電気エネルギーを取り出すことができる。さらに、
ＥＨＤ発電のごとく、このノズルの下流にグリッドを設
けることにより、蒸気流の持つ運動エネルギーを直接電
気エネルギーに変換することができる。また、この電離
気体をさらに加速することにより、イオンビームを得る
ことができる。Therefore, if a conductive material is inserted into the stagnation area at the nozzle exit end, electrical energy can be extracted. moreover,
As in EHD power generation, by providing a grid downstream of this nozzle, the kinetic energy of the steam flow can be directly converted into electrical energy. Further, by further accelerating this ionized gas, an ion beam can be obtained.

〔Example〕

以下、本発明のいくつかの実施例を図面により説明する
。尚、従来例と同一構造部分には同一符号を付してその
説明を省略する。Hereinafter, some embodiments of the present invention will be described with reference to the drawings. Note that the same reference numerals are given to the same structural parts as in the conventional example, and the explanation thereof will be omitted.

（第１実施例）本実施例のエネルギ変換装置は、超音速ノズル３０と蒸
気供給源から送られてくる蒸気を超音速ノズル３ｏへ導
く入口側流路３１と、超音速ノズル３ｏの下流に設置さ
れ、蒸気を減圧排気系に導く出口側流路３２から構成さ
れている。ここで、ノズルの出口面積は、スロート面積
の数倍〜数十倍の面積を有する。また、超音速ノズル呂
口面より下流に設置される出口側流路３２は、流路断面
積が超音速ノズル出口面積よりも大きく、超音速ノズル
出口部で段差ができている。(First Example) The energy conversion device of this example has a supersonic nozzle 30, an inlet side flow path 31 that guides steam sent from a steam supply source to the supersonic nozzle 3o, and a downstream side of the supersonic nozzle 3o. It is comprised of an outlet side flow path 32 that is installed and guides steam to a reduced pressure exhaust system. Here, the exit area of the nozzle has an area several times to several tens of times as large as the throat area. Further, the outlet side flow path 32 installed downstream of the supersonic nozzle mouth surface has a flow path cross-sectional area larger than the supersonic nozzle exit area, and has a step at the supersonic nozzle exit portion.

超音速ノズル３ｏの出口端面には、導電性の材料からで
きているコレクタ３３が取り付けられていて、さらに、
超音速ノズル３０とコレクタ３３を絶縁するために、絶
縁板３４が超音速ノズル３０とコレクタ３３の間に取り
付けられている。A collector 33 made of a conductive material is attached to the exit end face of the supersonic nozzle 3o, and further,
An insulating plate 34 is attached between the supersonic nozzle 30 and the collector 33 to insulate the supersonic nozzle 30 and the collector 33.

まず、蒸気を供給しない状態で排気系に取り付けられた
減圧装置を作動させて流路内を低圧力状態にする。その
後に、超音速ノズルに蒸気を供給する。蒸気供給源から
超音速ノズルに流入した蒸気は、超音速ノズルで断熱的
に膨張しようとするが、膨張の途中で、凝縮が起こる。First, a pressure reducing device attached to the exhaust system is operated without supplying steam to bring the inside of the flow path into a low pressure state. Steam is then supplied to the supersonic nozzle. Steam flowing into the supersonic nozzle from the steam supply source attempts to expand adiabatically in the supersonic nozzle, but condensation occurs during the expansion.

また、凝縮に伴って発生した帯電粒子は、超音速ノズル
出口部の流路段差部３５に滞留し、ここに静電荷が蓄積
さる。ここで、コレクタを負荷３６につなげておけば、
負荷３６に電荷が流れ、電気エネルギーを取り出すこと
ができる。電気エネルギーの取り出しを停止するには、
蒸気の供給を停止すればよいが、蒸気の供給を止めなく
ても、供給飽和蒸気を減圧して過熱蒸気状態にすること
により、超音速ノズル内で凝縮が発生しないようにして
もよい。Further, the charged particles generated due to the condensation remain in the flow path step portion 35 at the exit portion of the supersonic nozzle, and electrostatic charges are accumulated there. Here, if the collector is connected to the load 36,
Charge flows to the load 36, and electrical energy can be extracted. To stop extracting electrical energy,
It is sufficient to stop the supply of steam, but even if the supply of steam is not stopped, the supply saturated steam may be depressurized to a superheated steam state to prevent condensation from occurring within the supersonic nozzle.

第１図では、コレクタ３３と超音速ノズル３０の間に絶
縁板３４を設置したが、超音速ノズルがこの流路系に対
して絶縁状態にあれば、導電材よりなる超音速ノズル自
体をコレクタとして用いてもよい。In FIG. 1, an insulating plate 34 is installed between the collector 33 and the supersonic nozzle 30, but if the supersonic nozzle is insulated from this flow path system, the supersonic nozzle itself made of a conductive material can be used as a collector. It may also be used as

本実施例によれば、蒸気流から直接電気エネルギーを取
り出せるという効果がある。According to this embodiment, there is an effect that electrical energy can be extracted directly from the steam flow.

（第２実施例）本発明の第２の実施例では、超音速ノズル３０に未飽和
蒸気または、飽和状態に近い過熱蒸気を供給する。過熱
状態にある蒸気を供給する場合には、超音速ノズルの面
積比を大きくして、蒸気の膨張比を大きくする。例えば
、超音速ノズル３０の面積比（ノズル出口断面積／ノズ
ルスロート断面積）を５０程度にすれば、供給蒸気温度
が１７０℃のものでも、６〜８　ｋｇ　ｆ　／ｃｊの圧
力の蒸気を供給することによって、凝縮を発生させるこ
とができ、流路段差部３５に帯電領域を形成することが
できる。(Second Embodiment) In a second embodiment of the present invention, unsaturated steam or superheated steam close to a saturated state is supplied to the supersonic nozzle 30. When superheated steam is supplied, the area ratio of the supersonic nozzle is increased to increase the steam expansion ratio. For example, if the area ratio (nozzle exit cross-sectional area/nozzle throat cross-sectional area) of the supersonic nozzle 30 is set to about 50, even if the supplied steam temperature is 170°C, steam at a pressure of 6 to 8 kg f /cj can be supplied. By doing so, condensation can be generated and a charged region can be formed in the channel step portion 35.

本実施例によれば、供給蒸気を飽和状態に保たなくても
、蒸気流から直接電気エネルギーを取り出せるため、供
給蒸気の状態設定または状態管理が容易になるという効
果がある。According to this embodiment, electrical energy can be extracted directly from the steam flow without keeping the supplied steam in a saturated state, so that there is an effect that setting or managing the condition of the supplied steam is facilitated.

（第３実施例）第４図に本発明のｊＩ３の実施例を示す。第４図では、
超音速ノズルに急拡大ノズルを多数配列したノズルブロ
ック３７を用い、これを出口側流路３２の上流に設置す
るものである。第４図（ａ）は、超音速ノズルに、二次
元形状のノズルを多数配列したマルチノズル型を、第４
図（ｂ）は、円錐形のノズル孔を多数設けたスクリーン
ノズル型を示したものである。これらのノズルを用いる
ことにより、超音速ノズル出口部でのよどみ領域が広く
なるため、帯電領域の面積が大きくなるという効果があ
る。(Third Embodiment) FIG. 4 shows an embodiment of jI3 of the present invention. In Figure 4,
A nozzle block 37 in which a large number of rapidly expanding nozzles are arranged as a supersonic nozzle is used, and this is installed upstream of the outlet side flow path 32. Figure 4(a) shows a multi-nozzle type in which a large number of two-dimensional nozzles are arranged in a supersonic nozzle.
Figure (b) shows a screen nozzle type in which many conical nozzle holes are provided. By using these nozzles, the stagnation area at the exit of the supersonic nozzle becomes wider, which has the effect of increasing the area of the charged area.

（第４実施例）また、本発明の第４の実施例では、第４図（ｂ）に示し
たスクリーンノズルのひとつのノズル孔の寸法が、ノズ
ル出口径を５＋ｍ程度と小さくして、さらに、ノズルの
スロートから出口までの長さを１０〜２０ｍと短かくし
た。このため、このノズル内を通過する蒸気の凝縮核生
成の際の過飽和の度合は非常に大きく、凝縮は急激に起
こるため、凝縮の際に発生する帯電粒子の密度が増すと
いう効果がある。(Fourth Embodiment) Furthermore, in the fourth embodiment of the present invention, the size of one nozzle hole of the screen nozzle shown in FIG. 4(b) is reduced to approximately 5+m, and further , the length from the nozzle throat to the outlet was shortened to 10 to 20 m. For this reason, the degree of supersaturation during condensation nucleation of the vapor passing through this nozzle is very large, and condensation occurs rapidly, which has the effect of increasing the density of charged particles generated during condensation.

（第５実施例）本発明の第５の実施例では、超音速ノズルを形成するノ
ズル体の材質を、例えば銅等の導電性でかつ熱伝導率の
高い材質で形成する。これにより、超音速ノズル上流で
の供給蒸気の熱量をノズルに伝え易くして、ノズル壁面
を比較的高温に保つことにより、ノズル壁面での液膜の
凍結を防止して。(Fifth Embodiment) In a fifth embodiment of the present invention, the nozzle body forming the supersonic nozzle is made of a material that is electrically conductive and has high thermal conductivity, such as copper. This makes it easier to transfer the amount of heat from the supplied steam upstream of the supersonic nozzle to the nozzle and keeps the nozzle wall at a relatively high temperature, thereby preventing the liquid film from freezing on the nozzle wall.

ノズル出口端からの液滴の飛散を発生しやすくしたもの
である。また、ノズル壁面を高温にすることにより、ノ
ズル壁面近傍での気体の温度変化を大きくして、この領
域で衝突する固体粒子が互いに温度差を持つものの衝突
となるようにして、衝突の際に電離しやすいようにする
。このように本実施例では電離粒子の数が増し、取り出
せる電気エネルギーが増すという効果がある。This makes it easier for droplets to scatter from the nozzle exit end. In addition, by increasing the temperature of the nozzle wall surface, the temperature change of the gas near the nozzle wall surface is increased, and the solid particles that collide in this area have a temperature difference between them. Make it easier to ionize. In this way, this embodiment has the effect of increasing the number of ionized particles and increasing the electrical energy that can be extracted.

（第６実施例）第５図は、本発明の第６の実施例を示す図である。第５
図は、出口側流路３２の側壁製絶縁材３８で構成したも
のである。超音速ノズル出口端面の流れのよどみ域に電
離粒子（帯電粒子と同義）は蓄積するが、よどみ域に流
れ込まずにノズル下流に流れ去るものもある。これらの
中で、比較的流路壁面に近い領域を流れる電離粒子が、
絶縁材３８の表面上を流れるとき、帯電粒子の正・負イ
オンの絶縁材３８への吸着エネルギーの差により、一方
のイオン（例えば負イオン）が絶縁材３８に吸着される
。このため、流路段差部３５の電荷量が増す。本実施例
では、超音速ノズル出口端面部だけでなく、流路壁でも
電荷を捕らえるため、電気エネルギー変換効率を上げる
ことができるという効果がある。(Sixth Embodiment) FIG. 5 is a diagram showing a sixth embodiment of the present invention. Fifth
In the figure, the outlet side flow path 32 is constructed with an insulating material 38 made of the side wall. Ionized particles (synonymous with charged particles) accumulate in the stagnation region of the flow at the exit end of a supersonic nozzle, but some particles do not flow into the stagnation region and flow away downstream of the nozzle. Among these, ionized particles flowing in a region relatively close to the channel wall are
When flowing over the surface of the insulating material 38, one ion (for example, a negative ion) is adsorbed to the insulating material 38 due to the difference in the adsorption energy of the positive and negative ions of the charged particles to the insulating material 38. Therefore, the amount of charge in the flow path step portion 35 increases. In this embodiment, since charges are captured not only at the end face of the supersonic nozzle exit but also at the channel wall, there is an effect that the electrical energy conversion efficiency can be increased.

（第７実施例）第６図は、本発明の第７の実施例を示す図である。第６
図では、出口側流路３２の下流に、導電性の材料からで
きているコレクタ３９が取り付けられていて、さらに、
コレクタ３９は負荷３６につながっている。蒸気の供給
により超音速ノズル内で凝縮が起こると、凝縮に伴って
発生した電離粒子は、超音速ノズル出口部の流路段差部
３５に滞留するが、流路段差部３５に滞留する粒子の静
電荷と符号が反対の電荷をおびた粒子は、蒸気の流れと
共に流路３２の下流に流される。ここで、流路下流にコ
レクタ３９を設置しておけば、蒸気によって運ばれてき
た電離粒子を捕えることができ、さらに、コレクタ３９
に接続している負荷３６に電荷が流れ、電気エネルギー
を取り出すことができる１本実施例によれば、蒸気流か
ら直接電気エネルギーを取り出せるという効果がある。(Seventh Embodiment) FIG. 6 is a diagram showing a seventh embodiment of the present invention. 6th
In the figure, a collector 39 made of a conductive material is attached downstream of the outlet flow path 32, and further,
Collector 39 is connected to load 36. When condensation occurs in the supersonic nozzle due to the supply of steam, the ionized particles generated due to the condensation stay in the flow path step 35 at the exit of the supersonic nozzle. Particles charged with an opposite sign to the electrostatic charge are flown downstream of the flow path 32 with the flow of vapor. Here, if the collector 39 is installed downstream of the flow path, the ionized particles carried by the steam can be captured, and the collector 39
According to this embodiment, electrical energy can be extracted directly from the steam flow.

（第８実施例）第７図は、本発明の第８の実施例を示す図である。第７
図では、出口側流路の下流に、超音速ディフューザ４０
を設けたものである。コレクタ３９はこの超音速ディフ
ューザ４０の下流に設置される。このため、コレクタ３
９の設置位置では蒸気の流速は音速以下の低速状態にな
っており、コレクタ設置による流体抵抗の低減を図れる
。また、超音速ディフューザの効果により、超音速ディ
フューザ上流の流路内を、排気系の減圧装置による真空
度よりもさらに高い真空度にすることができる。つまり
、超音速ディフューザ４０を設けることにより、減圧装
置で保つ圧力状態は、超音速ディフューザを設けない場
合に対して１０〜２０倍の高い圧力状態でよい。超音速
ディフューザ４０の設置により、供給蒸気が自らの持つ
エネルギーで、超音速ノズル出口から、超音速ディフュ
ーザ入口間の気体を排出して、超音速ノズルの面積比に
対応した到達マツハ数状態の低圧力状態を作り出す。こ
のため、超音速ディフューザを設けることにより減圧装
置の消費エネルギーを低減できるという効果がある６（第９実施例）第８図は、本発明の第９の実施例を示すものである。第
８図の実施例では、超音速ノズルの構成が第４図で示し
たように多数の超音速ノズルを配置したものになってい
る。また、出口側流路３２はそれぞれの超音速ノズル間
に絶縁材よりなる隔壁４１が設置されている。また、超
音速ノズルを形成するノズルブロック３７は紙面垂直方
向の流路壁面で電気的には導通したひとつのブロックで
ある。第８図の流路系に蒸気が供給され、超音速ノズル
中で凝縮を起こすと、各ノズルから電離粒子が噴出する
が、第５図の第６実施例のところで述べたように、電離
粒子が、絶縁材３８の表面上を流れるとき、電離粒子の
正・負イオンの絶縁材３８への吸着エネルギーの差によ
り、一方のイオン（例えば負イオン）が絶縁材３８に吸
着される。(Eighth Embodiment) FIG. 7 is a diagram showing an eighth embodiment of the present invention. 7th
In the figure, a supersonic diffuser 40 is provided downstream of the outlet side flow path.
It has been established. A collector 39 is installed downstream of this supersonic diffuser 40. For this reason, collector 3
At the installation position 9, the flow velocity of steam is low, below the speed of sound, and the fluid resistance can be reduced by installing the collector. Further, due to the effect of the supersonic diffuser, the inside of the flow path upstream of the supersonic diffuser can be made to have a higher degree of vacuum than the degree of vacuum caused by the pressure reducing device of the exhaust system. That is, by providing the supersonic diffuser 40, the pressure state maintained by the pressure reducing device may be 10 to 20 times higher than that in the case where the supersonic diffuser is not provided. By installing the supersonic diffuser 40, the supplied steam uses its own energy to exhaust the gas between the supersonic nozzle outlet and the supersonic diffuser inlet, thereby reducing the reached Matsuha number state corresponding to the area ratio of the supersonic nozzle. Create a pressure state. Therefore, by providing a supersonic diffuser, it is possible to reduce the energy consumption of the pressure reducing device.6 (Ninth Embodiment) FIG. 8 shows a ninth embodiment of the present invention. In the embodiment shown in FIG. 8, the configuration of the supersonic nozzle is such that a large number of supersonic nozzles are arranged as shown in FIG. Further, in the outlet side flow path 32, a partition wall 41 made of an insulating material is installed between each supersonic nozzle. Further, the nozzle block 37 forming the supersonic nozzle is a single block that is electrically connected to the channel wall surface in the direction perpendicular to the plane of the paper. When steam is supplied to the channel system shown in FIG. 8 and condenses in the supersonic nozzles, ionized particles are ejected from each nozzle. When flowing on the surface of the insulating material 38, one ion (for example, a negative ion) is adsorbed by the insulating material 38 due to the difference in the adsorption energy of the positive and negative ions of the ionized particles to the insulating material 38.

このため、絶縁材で区切られた各流路を流れる電離粒子
は、隔壁４１上に堆積する電離粒子と電気的に逆の符号
を持つものが増す。このため、隔壁４１の下流にコレク
タ３９を設置すると、電気的に同符号の電離粒子を捕え
られるため、電気エネルギー変換効率を上げることがで
きるという効果がある。Therefore, the number of ionized particles flowing through each channel separated by the insulating material has an electrically opposite sign to that of the ionized particles deposited on the partition wall 41. Therefore, when the collector 39 is installed downstream of the partition wall 41, ionized particles having the same electrical sign can be captured, which has the effect of increasing the electrical energy conversion efficiency.

（第１０実施例）第９図は１本発明の第１Ｏの実施例を示すものである。(10th example) FIG. 9 shows a first embodiment of the present invention.

出口側流路３２の壁は絶縁材でできており、図４２Ａ、
４２Ｂの相対する一対の流路壁には磁石のＮ極とＳ極が
置かれ、矢印Ｂで示すように磁界が働く。また、流路壁
４３Ａ、４３Ｂには電極４４Ａ、４４Ｂが置かれており
、それぞれ導線によって負荷３６につなげられている。The wall of the outlet side channel 32 is made of an insulating material, and the wall of the outlet side flow path 32 is made of an insulating material.
The north and south poles of a magnet are placed on a pair of opposing channel walls of 42B, and a magnetic field acts as shown by arrow B. Moreover, electrodes 44A and 44B are placed on the channel walls 43A and 43B, and are connected to the load 36 by conductive wires, respectively.

超音速ノズル３０に蒸気を供給することにより、流路中
を電離粒子が流れると、磁界Ｂとの作用によりフレミン
グの右手の法則により電極４４Ａ、４４Ｂ間に起電力が
発、生する。通常この種のエネルギー変換はＭＨＤ発電
と呼ばれるが、ＭＨＤ発電では作動流体を電離するのに
２０００’　Ｋ程度の高温にする必要があるが、本実施
例では、飽和状態の蒸気を供給することにより、直接発
電が行えるという効果がある。When ionized particles flow through the flow path by supplying steam to the supersonic nozzle 30, an electromotive force is generated between the electrodes 44A and 44B due to the interaction with the magnetic field B according to Fleming's right-hand rule. This type of energy conversion is usually called MHD power generation, but in MHD power generation it is necessary to raise the working fluid to a high temperature of about 2000'K to ionize it, but in this example, by supplying saturated steam, , which has the effect of directly generating electricity.

（第１１実施例）第１０図は、本発明の第１１の実施例を示す図である。(11th example) FIG. 10 is a diagram showing an eleventh embodiment of the present invention.

第１０図では、超音速ノズル３０間のデッドスペース部
４５にスリット状ノズル４６を設け、さらに、その下流
に、イオン通過孔１６があけられた引き出し電極１５を
設ける。超音速ノズル間のデッドスペース部４５に設け
られたスリット状ノズル４６より試料気体４７を供給し
、蒸気流のよどみ域に試料気体を充満させる。このデッ
ドスペース部４５には、超音速ノズルから噴出する凝縮
蒸気の電離粒子が堆積しており、電荷密度が高く、スリ
ット状ノズルから流出する試料気体は電離粒子と衝突し
て電離する。引き出し電極間には電圧が印可されており
電界が生じている。電離した試料気体は引き出し電極間
で加速され、矢印に示すようにイオンビーム１７として
流路下流より取り出すことができる。In FIG. 10, a slit-shaped nozzle 46 is provided in a dead space 45 between the supersonic nozzles 30, and an extraction electrode 15 with an ion passage hole 16 is provided downstream thereof. A sample gas 47 is supplied from a slit-shaped nozzle 46 provided in a dead space 45 between the supersonic nozzles, and the stagnation region of the vapor flow is filled with the sample gas. Ionized particles of condensed steam ejected from the supersonic nozzle are deposited in this dead space portion 45, and the charge density is high, and the sample gas flowing out from the slit-shaped nozzle collides with the ionized particles and is ionized. A voltage is applied between the extraction electrodes and an electric field is generated. The ionized sample gas is accelerated between the extraction electrodes, and can be extracted from the downstream of the flow path as an ion beam 17, as shown by the arrow.

第１０図では、スリット状ノズルとしたが、ノズルの形
状はスリット状でなく先細末広形状のものでもよい。本
実施例では、試料気体を電離するための電気的手段を用
いずとも、試料気体のイオンビームを取り出せるという
効果がある。In FIG. 10, a slit-shaped nozzle is used, but the nozzle shape may not be slit-shaped but may be tapered and widened. This embodiment has the advantage that an ion beam of the sample gas can be extracted without using any electrical means for ionizing the sample gas.

（第１２実施例）第１１図は本発明の第１２の実施例を示す図である。第
１１図の実施例では、装置は水供給源と水供給源から送
られてくＡ水を加熱して水蒸気を発生させる蒸気発生器
５０と流路５１の上流端に設置される超音速ノズル３０
と、この流路の下流域に少なくとも一つ以上設置される
先細末広形状をしたノズル３２と、これらノズルに蒸気
発生器５０をつなぎ各ノズルに蒸気を供給する蒸気供給
管３３．３４から構成されている。蒸気発生器５０で発
生する蒸気を流路の下流域に設置される先細末広ノズル
５２に供給して、先細末広ノズル５２が設置される流路
位置よりも上流側をエゼクタ効果により減圧する０次に
、上流端に設置された超音速ノズル３０に蒸気を供給す
る。このとき、超音速ノズル３０で生じる凝縮により、
帯電粒子が生成される。この帯電粒子の電荷をコレクタ
より取り出すことにより、連続的に電気エネルギーを取
り出すことができる。電気の取り出し方法は、第１図ま
たは第５図または第６図または第７図または第８図のい
ずれかの方法を用いてもよい。また、本実施例では、液
体として水を用いているが、他の液体でもよい。本実施
例によれば液体を供給し、加熱するだけで、電気エネル
ギーが連続的に取り出せるという効果がある。尚、図中
の符号５５は水を加熱する加熱器、５６は水供給管、５
７はバルブである。(Twelfth Embodiment) FIG. 11 is a diagram showing a twelfth embodiment of the present invention. In the embodiment shown in FIG. 11, the device includes a water supply source, a steam generator 50 that heats water sent from the water supply source to generate steam, and a supersonic nozzle 30 installed at the upstream end of a flow path 51.
, at least one nozzle 32 with a tapered and divergent shape installed in the downstream region of this flow path, and steam supply pipes 33 and 34 that connect the steam generator 50 to these nozzles and supply steam to each nozzle. ing. The steam generated by the steam generator 50 is supplied to the tapered and diverging nozzle 52 installed in the downstream region of the flow path, and the pressure is reduced upstream of the flow path position where the tapered and widened nozzle 52 is installed by the ejector effect. Then, steam is supplied to a supersonic nozzle 30 installed at the upstream end. At this time, due to condensation occurring in the supersonic nozzle 30,
Charged particles are generated. By extracting the charge of the charged particles from the collector, electric energy can be continuously extracted. As the method for extracting electricity, any of the methods shown in FIG. 1, FIG. 5, FIG. 6, FIG. 7, or FIG. 8 may be used. Furthermore, although water is used as the liquid in this embodiment, other liquids may be used. According to this embodiment, electric energy can be continuously extracted simply by supplying and heating the liquid. In addition, the reference numeral 55 in the figure is a heater for heating water, 56 is a water supply pipe, and 5 is a water supply pipe.
7 is a valve.

〔Effect of the invention〕

上述のとおり、本発明によれば、蒸気の持つエネルギー
を直接電気エネルギーに変換することができる。また、
蒸気流を用いてイオンビームを取り出すことができると
いう効果がある。As described above, according to the present invention, the energy of steam can be directly converted into electrical energy. Also,
This has the advantage that an ion beam can be extracted using a vapor flow.

[Brief explanation of drawings]

第１図は本発明の一実施例を示す概略図、第２図は超音
速ノズル内の蒸気の流動状態図、第３図は急膨張時の蒸
気の状態変化を示すグラフ、第４図ないし第１１図はそ
れぞれ本発明の他の実施例を説明する概略図、第１２図
は従来のエネルギー変換装置を示す概略図、第〕−３図
は従来のイオンビーム発生装置を示す概略図である。１．３０・・・超音速ノズル、　　１７・・・イオンビ
ーム、３１・・・入口側流路、　　　　　３２・・・出
口側流路、３３．３９・・・コレクタ、　　　３４・・
・絶縁板、３５・・・流路段差部、　　　　３６・・・
負荷、３７・・・ノズルブロック、　　　３８・・・絶
縁材、４０・・・超音速ディフコーザ、４１・・・隔壁
。４６・・・スリット状ノズル、　４７・・・試料気体。Fig. 1 is a schematic diagram showing an embodiment of the present invention, Fig. 2 is a diagram of the flow state of steam in a supersonic nozzle, Fig. 3 is a graph showing changes in the state of steam during rapid expansion, and Figs. Fig. 11 is a schematic diagram illustrating another embodiment of the present invention, Fig. 12 is a schematic diagram showing a conventional energy conversion device, and Fig. 1-3 is a schematic diagram showing a conventional ion beam generator. . 1.30...Supersonic nozzle, 17...Ion beam, 31...Inlet side flow path, 32...Outlet side flow path, 33.39...Collector, 34...
・Insulating plate, 35... Channel step part, 36...
Load, 37... Nozzle block, 38... Insulating material, 40... Supersonic diffuser, 41... Partition wall. 46... Slit-shaped nozzle, 47... Sample gas.

Claims

[Scope of Claims] 1. Consisting of a supersonic nozzle that ejects steam, and a conductor that is provided on the exit side of the supersonic nozzle and extracts the charge of charged particles generated as the ejected steam condenses, An energy conversion device that converts the energy of the steam into electrical energy by extracting electricity from the conductor. 2. A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and a supersonic nozzle that blows out the steam introduced from the inlet side flow path. It consists of an outlet side flow path that is continuous to the ejection side, and an exhaust system that is connected to the outlet side flow path and has a pressure reducing part. A collector made of a conductive material is provided in the outlet side flow path, and the An energy conversion device that converts the energy of the steam into electrical energy by supplying steam and extracting the charge of charged particles generated as the steam condenses from the collector through the supersonic nozzle. 3. A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and a supersonic nozzle that blows out the steam introduced from the inlet side flow path. It consists of an outlet side flow path that is continuous to the ejection side, and an exhaust system that is connected to the outlet side flow path and has a pressure reducing part, and a collector made of a conductive material is provided on the downstream side of the outlet side flow path, and the steam supply Energy conversion that converts the energy of the steam into electrical energy by supplying saturated steam from a source and extracting the charge of charged particles generated as the steam condenses from the collector through the supersonic nozzle. Device. 4. A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and a supersonic nozzle that blows out the steam introduced from the inlet side flow path. It consists of an outlet side flow path continuous to the ejection side, and an exhaust system connected to the outlet side flow path and having a pressure reducing part, and a supersonic diffuser is provided in the outlet side flow path, and a supersonic diffuser is provided downstream of the supersonic diffuser. A collector made of a conductive material is provided in the collector, saturated steam is supplied from the steam supply source, and the charge of charged particles generated as the steam condenses is extracted from the collector by the supersonic nozzle, thereby reducing the amount of charge that the steam has. An energy conversion device that converts energy into electrical energy. 5. A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and a supersonic nozzle that ejects the steam introduced from the inlet side flow path. The supersonic nozzle is formed of a conductive material, and the supersonic nozzle is made of a conductive material. The energy of the steam is converted into electrical energy by ejecting saturated steam and extracting the electrostatic charges of charged particles generated as the steam condenses and staying at the outlet end of the supersonic nozzle using the supersonic nozzle. An energy conversion device that converts energy. 6. A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and a supersonic nozzle that blows out the steam introduced from the inlet side flow path. It consists of an outlet side flow path that is continuous to the ejection side, and an exhaust system that is connected to the outlet side flow path and has a pressure reducing part, and an electric field is provided in advance in the outlet side flow path, and the flow from the supersonic nozzle to the steam supply source is An energy conversion device that generates electrical energy by ejecting saturated steam and moving charged particles generated as the steam condenses together with the steam jet against the electric field. 7. A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and a supersonic nozzle that blows out the steam introduced from the inlet side flow path. It consists of an outlet side flow path that is continuous to the ejection side, and an exhaust system that is connected to the outlet side flow path and has a pressure reducing part, the wall of the outlet side flow path is formed of an insulating material, and the outlet side flow path is perpendicular to the flow direction of steam. The north pole of a magnet is placed on one side of a pair of channel wall surfaces that intersect with an arbitrary direction, and the south pole is placed on the other side, and furthermore, a direction that is orthogonal to the direction of the magnetic field generated by this magnet and the flow direction of the steam is arranged. Electrodes are attached to the walls of a pair of intersecting flow channels, and saturated steam is supplied from the steam supply source, and based on the flow of charged particles generated by the supersonic nozzle as the steam condenses and the magnetic field of the magnet. An energy conversion device that extracts electrical energy from these electrodes by electromotive force generated between the electrodes. 8. A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and a supersonic nozzle that blows out the steam introduced from the inlet side flow path. It consists of an outlet side flow path that is continuous to the ejection side, and an exhaust system that is connected to the outlet side flow path and has a pressure reducing part. A collector made of a conductive material is provided in the outlet side flow path, and the By supplying heated steam or unsaturated steam in a state close to that of the supersonic nozzle, the charges of charged particles generated as the steam condenses are extracted from the collector,
An energy conversion device that converts the energy of the steam into electrical energy. 9. A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and a supersonic nozzle that blows out the steam introduced from the inlet side flow path. It consists of an outlet side flow path that is continuous to the ejection side, and an exhaust system that is connected to the outlet side flow path and has a pressure reducing part, and a large number of the supersonic nozzles are arranged in parallel in the same cross section of the flow path, and the outlet side flow A collector made of a conductive material is provided in the path, saturated steam is supplied from the steam supply source, and charges of charged particles generated as the steam is condensed are extracted from the collector by the supersonic nozzle. An energy conversion device that converts the energy possessed by a device into electrical energy. 10. A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and a supersonic nozzle that blows out the steam introduced from the inlet side flow path. It consists of an outlet side flow path that is continuous to the ejection side, and an exhaust system that is connected to the outlet side flow path and has a pressure reducing part, and the wall of the outlet side flow path is formed of an insulating material, and A collector made of a conductive material is provided in the collector, saturated steam is supplied from the steam supply source, and the charge of charged particles generated as the steam condenses is extracted from the collector by the supersonic nozzle, thereby reducing the amount of charge that the steam has. An energy conversion device that converts energy into electrical energy. 11. A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and a supersonic nozzle that blows out the steam introduced from the inlet side flow path. It consists of an outlet side flow path that is continuous to the ejection side, and an exhaust system that is connected to the outlet side flow path and has a pressure reducing part, and a large number of the supersonic nozzles are arranged in parallel within the same flow path cross section, and each nozzle outlet A partition wall made of an insulating material is installed continuously at the end in parallel to the flow direction of the steam, and a collector made of a conductive material is provided downstream of the partition wall, and saturated steam is supplied from the steam supply source, and the supersonic nozzle An energy conversion device that converts the energy of the steam into electrical energy by extracting the charge of charged particles generated as the steam condenses from the collector. 12. A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and the supersonic nozzle. The supersonic nozzle is composed of an outlet side flow path continuous to the ejection side of the supersonic nozzle, and an exhaust system connected to the outlet side flow path and having a pressure reducing part, and the wall of the supersonic nozzle is formed of an electrically conductive thermally good conductor such as copper,
A collector made of a conductive material is provided in the outlet side flow path, saturated steam is supplied from the steam supply source, and charges of charged particles generated as the steam is condensed by the supersonic nozzle are extracted from the collector. An energy conversion device that converts the energy of the steam into electrical energy. 13. A supersonic nozzle is provided on the upstream side of the steam flow path, and at least one or more tapered and divergent nozzles are provided on the downstream side, each of which is connected to the steam generator via a steam supply pipe, and a conductor is provided in the steam flow path. A collector is provided, and the steam is ejected from the supersonic nozzle into a steam flow path whose pressure is reduced by ejecting steam from the tapered and wide-shaped nozzle, and the charge of charged particles generated due to condensation is removed from the vapor from the collector. An energy conversion device that converts the energy of steam into electrical energy by extracting it from a flow path. 14. An energy conversion method in which the energy of the steam is converted into electrical energy by adiabatically expanding the steam and extracting charges from charged particles generated as the steam condenses. 15. An energy conversion method for extracting electrical energy from water by heating water to generate water vapor, adiabatically expanding the water vapor, and extracting electric charges from charged particles generated as a result of condensation. 16. A supersonic nozzle that spouts out steam, a sample gas supply nozzle that is installed near the supersonic nozzle and that discharges the sample gas, and a sample gas that flows out from the sample gas supply nozzle and generated by the supersonic nozzle. An ion beam generator comprising an extraction electrode for extracting ionized sample gas generated by collision of condensed vapor with charged particles, and extracting an ion beam of the sample gas from the extraction electrode. 17. A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and a supersonic nozzle that blows out the steam introduced from the inlet side flow path. It consists of an outlet side flow path continuous to the ejection side, and an exhaust system connected to the outlet side flow path and having a pressure reducing part, and a sample gas supply nozzle is provided near the supersonic nozzle. An extraction electrode having an ion passage hole downstream thereof, and an electric field generation means for generating an electric field in the extraction electrode, and charged particles of condensed steam generated by the supersonic nozzle by supplying saturated steam from the steam supply source. An ion beam generation device that extracts ionized sample gas generated by a collision between the sample gas and the sample gas flowing out from the sample gas supply nozzle from the ion passage hole. 18. A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and a supersonic nozzle that blows out the steam introduced from the inlet side flow path. It consists of an outlet side flow path continuous to the ejection side, and an exhaust system connected to the outlet side flow path and having a pressure reducing part, and a sample gas supply nozzle is provided near the supersonic nozzle. It is equipped with an extraction electrode having an ion passage hole downstream thereof, and an electric field generation means for generating an electric field in the extraction electrode, and supplies heated steam or unsaturated steam in a state close to a saturated state from the steam supply source to An ion beam generator that extracts ionized sample gas generated by a collision between charged particles of condensed steam generated by a sonic nozzle and sample gas flowing out from the sample gas supply nozzle from the ion passage hole. 19. A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and a supersonic nozzle that blows out the steam introduced from the inlet side flow path. It consists of an outlet side flow path continuous to the ejection side, and an exhaust system connected to the outlet side flow path and having a pressure reducing part, and a large number of the supersonic nozzles are arranged in parallel in the same flow path cross section, and the supersonic nozzle A sample gas supply nozzle is provided near the sample gas supply nozzle, an extraction electrode having an ion passage hole downstream of the sample gas supply nozzle, and an electric field generating means for generating an electric field in the extraction electrode, and saturated steam is supplied from the vapor supply source. an ion beam generator for extracting ionized sample gas produced by collision between charged particles of condensed vapor generated by the supersonic nozzle and the sample gas flowing out from the sample gas supply nozzle from the ion passage hole; . 20. A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and a supersonic nozzle that blows out the steam introduced from the inlet side flow path. It consists of an outlet side flow path that is continuous to the ejection side, and an exhaust system that is connected to the outlet side flow path and has a pressure reducing part, and the wall of the outlet side flow path is formed of an insulating material, and the wall of the outlet side flow path is formed of an insulating material, and the A sample gas supply nozzle is provided in the sample gas supply nozzle, an extraction electrode having an ion passage hole downstream of the sample gas supply nozzle, and an electric field generating means for generating an electric field in the extraction electrode, and saturated steam is supplied from the vapor supply source. and an ion beam generator for extracting ionized sample gas generated by a collision between charged particles of condensed steam generated by the supersonic nozzle and the sample gas flowing out from the sample gas supply nozzle from the ion passage hole. 21. A steam supply source that supplies steam, an inlet side flow path that introduces the steam from the steam supply source, a supersonic nozzle that jets out the steam introduced from the inlet side flow path, and a supersonic nozzle that blows out the steam introduced from the inlet side flow path. The supersonic nozzle consists of an outlet side flow path continuous to the ejection side, and an exhaust system connected to the outlet side flow path and having a pressure reducing part. A sample gas supply nozzle is provided near the sonic nozzle, and downstream of the sample gas supply nozzle, an extraction electrode having an ion passage hole and an electric field generating means for generating an electric field in the extraction electrode are provided. An ion beam that supplies steam and extracts ionized sample gas from the ion passage hole caused by collision between charged particles of condensed steam generated by the supersonic nozzle and the sample gas flowing out from the sample gas supply nozzle. Generator. 22. A supersonic nozzle for energy conversion, which has a nozzle hole with a tapered and divergent shape and generates charged particles as steam ejected from the nozzle hole condenses. 23. A supersonic nozzle for energy conversion that has a large number of slit-shaped nozzle holes arranged in parallel and generates charged particles as steam ejected from the nozzle holes condenses. 24. A supersonic nozzle for energy conversion in which a large number of conical nozzle holes are arranged in a screen shape, and charged particles are generated as steam ejected from the nozzle holes is condensed. 25. A supersonic nozzle for energy conversion, in which a nozzle for ejecting steam is formed of a conductive material, and charges are extracted from charged particles generated as the steam ejected from the nozzle hole condenses. 26. A device that has a nozzle hole with a tapered and widened shape, generates charged particles as steam ejected from the nozzle hole condenses, and collides the charged particles with a sample gas to generate an ion beam of the sample gas. A supersonic nozzle for generating ion beams.