JPH0326461A - Pressurizing device in grinding, polishing device of optical element - Google Patents

Abstract

PURPOSE:To almost eliminate an operating resistance and to enable the fine adjustment of a working pressure by pressurizing/holding with non-contact the pressurizing shaft to which a work of an optical element etc., is fitted. CONSTITUTION:A fluid film by the air etc., fed from a fluid feeding port 2 is formed between a housing 1 and pressurizing shaft 4. The operating resistance between the both 1 and 4 is thus almost eliminated and also the force in the radial direction caused by working is received on the pressurizing shaft 4. Moreover a magnetic force and magnetic pole are changed by adjusting.varying the size.direction of the current flowed on the coil 6 of an electromagnet 7 and the holding force holding the working pressure applied on the pressurizing shaft 4 and the pressurizing shaft 4 in the thrust direction is adjusted with non-contact.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a pressurizing device in a grinding and polishing device for optical elements and the like. [Prior Art] An example of a device conventionally used as a pressurizing device in grinding and polishing equipment that processes and abuts a workpiece such as an optical element and a tool and applies pressure by relative sliding motion is disclosed in Japanese Patent Publication No. 45-620.
The piston-type fluid operating mechanism described in Publication No. 8 is shown in FIG. 5 and will be explained. The pressurizing device A shown in FIG. 5 includes a cylindrical housing 1, a diaphragm 2 made of rubber or the like, and a housing 1 that is fixed to the diaphragm 2.
The pressurizing shaft 4 protrudes from the outside. Also,
The housing l has a fluid supply hole 3 for supplying fluid such as air, which is separated by a diaphragm 2 and connected to a pressurizing shaft 4.
It communicates with the pressure chamber 5 on the opposite side of the air chamber 6 through which the air passes. According to the pressurizing device IA, the diaphragm 2 is pushed by supplying high-pressure air or the like from the fluid supply hole 3 and increasing the pressure in the pressure chamber 5, and the pressurizing shaft 4 fixed to the diaphragm 2 is pushed.
pressure is transmitted to. A workpiece such as an optical element (not shown) is attached to the pressure shaft 4, and the pressure is configured to act as processing pressure.

[Problems to be Solved by the Invention] However, in the conventional pressurizing device, the pressure was adjusted using a fluid such as air, which made it difficult to adjust the processing pressure. Since the fluid is transmitted through the formed diaphragm 2, it is difficult to obtain a processing pressure proportional to the applied fluid pressure due to the elastic force generated due to the flexure of the diaphragm 2. Furthermore, it is difficult to obtain a low processing pressure due to the above-mentioned process. SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention aims to provide a pressurizing device that can adjust the machining pressure in lm and obtain a low machining pressure. [Means and operations for solving the problems] Fig. 1 shows a conceptual diagram of the present invention. A device that generates a shaft holding force P to hold the pressure shaft 4 without contact, similar to a device that applies and transmits processing pressure P1 without contact to the pressure shaft 4 to which a workpiece such as an optical element is attached. It is composed of

According to Honyoko Aru, since the pressure shaft 4 is pressed and held without contact, there is almost no operational resistance, the machining pressure can be finely adjusted, and low machining pressure can be obtained.

[Examples] Examples of the present invention will be described below with reference to the drawings. (First Embodiment) FIG. 2 is a sectional view showing the first embodiment of the present invention. As shown in the figure, a pressurizing shaft 4 is inserted into the housing 1 in a non-contact manner, and a workpiece such as an optical element (not shown) is attached to the lower end thereof.

An electromagnet 7 having a coil 6 wound around an iron core 5 is attached to the upper end of the housing 1. A magnet 3 such as a permanent magnet is fixed to the upper end of the pressurizing shaft 4, and the magnet 3 is installed facing the iron core 5 of the electromagnet 70. Further, the housing 1 is provided with a fluid supply port 2 and a fluid discharge port 8 for fluid supply, which communicate with the charging hole 9 into which the pressurizing shaft 4 is inserted. According to the above f#I or a certain pressurizing device X, the housing 1
Since a fluid film formed by the air supplied from the fluid supply port 2 is formed between the pressurizing shaft 4 and the pressurizing shaft 4, there is almost no movement resistance between the two, and furthermore, the radial direction force generated by machining on the pressurizing shaft 4 is suppressed. You can accept it. More T! By adjusting and changing the magnitude and direction of the current flowing through the coil 6 of the lft 1 stone 7, the magnetic force and magnetic poles are changed, and the processing pressure applied to the pressurizing shaft 4 and the pressurizing shaft 4 are held in the thrust direction. Holding force can be adjusted without contact.

According to this embodiment, the force in the radial direction generated on the pressurizing shaft 4 due to the pressing is received by the fluid, and the force in the thrust direction and the machining pressure applied to the pressurizing shaft 4 are applied by magnetic force.

As a result, since the pressure shaft 4 is pressed and held without contact, there is almost no operational resistance, the machining pressure can be adjusted, and low machining pressure can be obtained.

(Second Embodiment) FIG. 3 is a sectional view showing a second embodiment of the present invention. The same parts as those in the first embodiment are given the same numbers, and the description thereof will be omitted.

In particular, in this embodiment, the pressurizing shaft 4 is pressurized by magnetic force in a non-contact manner.
The special attack is to hold it.

As shown in the figure, the upper end 10 of the pressurizing shaft 4 is shaped into a conical surface shape of about 45 degrees, and the conical surfaces 10a and 10
A magnet 3 such as a permanent magnet is fixed to b. Further, in the inner side of the bag-storing part 11 in which the upper end part 10 of the pressurizing shaft 4 of the housing 1 is housed, at least some of the iron core 5a and the coil 6a and the iron core 5b and the coil 6b are arranged at positions facing the magnets 3. Two or more electromagnets 7a and 7b are arranged. According to the above-mentioned pressurizing device, the electromagnets 7a and 7b can receive the force in the radial direction and the holding force in the thrust direction generated on the pressurizing shaft 4 during processing. As a result, as in the first embodiment, the pressurizing shaft 4 is pressed and held in a non-contact manner, so there is almost no operating resistance, the machining pressure can be finely adjusted, and a low machining pressure can be obtained. (Third Embodiment) FIG. 4 is a sectional view showing a third embodiment of the present invention. The same parts as those in the first and second embodiments are given the same numbers and their explanations are omitted. This embodiment is particularly characterized in that the pressurizing shaft 4 is pressurized and held by magnetic force in a non-contact manner. Housing 1 as shown in the figure
At least two or more electromagnets 7a and 7b (separated from the iron cores 5a and 5b and the coils 6a and 6b) are arranged in the radial direction of the pressurizing shaft 4 on the inner peripheral side of the charging section 11. In this embodiment, by applying magnetic attraction between two or more electromagnets 7a and 7b arranged on the inner peripheral side of the charging portion l1 of the housing l and the pressurizing shaft 4, the pressurizing shaft 4 is It can receive the force in the radial direction and the holding force in the thrust direction. As a result, as in the second embodiment, there is almost no operational resistance for pressurizing and holding the pressurizing shaft 4 without contact, and it is possible to finely adjust the machining pressure and obtain a low machining pressure.

[Effects of the Invention] According to the present invention, since the pressurizing shaft to which a workpiece such as an optical element is attached is pressed and held without contact, there is almost no operating resistance, and the processing pressure can be finely adjusted. Low processing pressure can be obtained.

[Brief explanation of drawings]

Fig. 1 is a conceptual diagram of the present invention, Fig. 2 is a sectional view showing a first embodiment of the invention, Fig. 3 is a sectional view showing a second embodiment of the invention, and Fig. 4 is a sectional view showing a second embodiment of the invention. A sectional view showing the third embodiment, and FIG. 5 is a sectional view showing a conventional pressurizing device. P1... Processing pressure P1... Shaft holding force 1... Housing 2... Fluid supply port 3... Magnet 4... Pressure shaft 5.5a, 5b... Iron core 6, 6a, 6b... r il? , 7 a. 7 b-i1iffi Stone 8... Fluid outlet 9... Charging hole 10... Upper end 1l... Charging part P2... Shaft holding force 4... Pressure shaft Fig. 1 4 Figure 2 Figure 4 Figure 3 10 3 5 6 Figure 3 Figure 5

Claims (2)

[Claims] (1) In grinding and polishing equipment that presses and contacts a workpiece such as an optical element with a tool and performs processing by relative sliding motion.
A pressurizing device for grinding and polishing equipment for optical elements, etc., characterized in that a pressurizing shaft to which a workpiece or a tool is attached is movably held in the thrust direction and rotational direction by a fluid, and processing pressure is applied by magnetic force. (2) In grinding and polishing equipment that presses and contacts a workpiece such as an optical element with a tool and performs processing by relative sliding motion.
A pressurizing device for grinding and polishing equipment for optical elements, etc., which holds a pressurizing shaft to which a workpiece or tool is attached movably in the thrust direction and rotational direction using magnetic force, and applies processing pressure using magnetic force.