JPH03261062A - Plasma trace element mass spectrometer - Google Patents

Plasma trace element mass spectrometer

Info

Publication number
JPH03261062A
JPH03261062A JP2056359A JP5635990A JPH03261062A JP H03261062 A JPH03261062 A JP H03261062A JP 2056359 A JP2056359 A JP 2056359A JP 5635990 A JP5635990 A JP 5635990A JP H03261062 A JPH03261062 A JP H03261062A
Authority
JP
Japan
Prior art keywords
ion
area
samples
torr
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2056359A
Other languages
Japanese (ja)
Inventor
Yukio Okamoto
Soji Shimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2056359A priority Critical patent/JPH03261062A/en
Priority to DE19914107794 priority patent/DE4107794A1/en
Publication of JPH03261062A publication Critical patent/JPH03261062A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]

Abstract

PURPOSE: To reduce the power consumption of a mass spectrometer and miniaturize the spectrometer and reduce the cost of the spectrometer by setting the degree of vacuum of a first actuation area to less than 1Torr.
CONSTITUTION: Samples are introduced into atmospheric pressure plasma 10 generated in the area (I) of atmospheric pressure on a plasma generating system so that the samples are ionized. The sample ions are expanded and diffused in the area (II) of 1 to 10-3Torr via a plasma sampling system 70 and an ion beam composed of the sample ions, etc., is formed by an ion takeout system provided in the area (III) of 10-4 to 10-5Torr and consisting of an ion takeout electrode 80 and an ion accelerating electrode 90, etc. The ion beam is transported via an ion transporting system 100 to a mass spectrometry system 110 provided in the area (IV) of 10-6 to 10-7Torr and the samples are identified by an ion detecting system 120.
COPYRIGHT: (C)1991,JPO&Japio
JP2056359A 1990-03-09 1990-03-09 Plasma trace element mass spectrometer Pending JPH03261062A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2056359A JPH03261062A (en) 1990-03-09 1990-03-09 Plasma trace element mass spectrometer
DE19914107794 DE4107794A1 (en) 1990-03-09 1991-03-11 Plasma mass spectrometer for trace element analysis - has atmospheric region followed by differential pump region for generation of diffusion plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2056359A JPH03261062A (en) 1990-03-09 1990-03-09 Plasma trace element mass spectrometer

Publications (1)

Publication Number Publication Date
JPH03261062A true JPH03261062A (en) 1991-11-20

Family

ID=13025051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2056359A Pending JPH03261062A (en) 1990-03-09 1990-03-09 Plasma trace element mass spectrometer

Country Status (2)

Country Link
JP (1) JPH03261062A (en)
DE (1) DE4107794A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE45386E1 (en) 1998-09-16 2015-02-24 Thermo Fisher Scientific (Bremen) Gmbh Means for removing unwanted ions from an ion transport system and mass spectrometer
USRE45553E1 (en) 2002-05-13 2015-06-09 Thermo Fisher Scientific Inc. Mass spectrometer and mass filters therefor
JP2016530680A (en) * 2013-07-19 2016-09-29 スミスズ ディテクション インコーポレイティド Mass spectrometer inlet that allows a reduction in average flow

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5381008A (en) * 1993-05-11 1995-01-10 Mds Health Group Ltd. Method of plasma mass analysis with reduced space charge effects
US5565679A (en) * 1993-05-11 1996-10-15 Mds Health Group Limited Method and apparatus for plasma mass analysis with reduced space charge effects
GB9417700D0 (en) * 1994-09-02 1994-10-19 Fisons Plc Apparatus and method for isotopic ratio plasma mass spectrometry
KR100257903B1 (en) * 1997-12-30 2000-08-01 윤종용 Plasma etching apparatus capable of in-situ monitoring, its in-situ monitoring method and in-situ cleaning method for removing residues in plasma etching chamber
GB2483314B (en) * 2010-12-07 2013-03-06 Microsaic Systems Plc Miniature mass spectrometer system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE45386E1 (en) 1998-09-16 2015-02-24 Thermo Fisher Scientific (Bremen) Gmbh Means for removing unwanted ions from an ion transport system and mass spectrometer
USRE45553E1 (en) 2002-05-13 2015-06-09 Thermo Fisher Scientific Inc. Mass spectrometer and mass filters therefor
JP2016530680A (en) * 2013-07-19 2016-09-29 スミスズ ディテクション インコーポレイティド Mass spectrometer inlet that allows a reduction in average flow

Also Published As

Publication number Publication date
DE4107794A1 (en) 1991-09-19

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