JPH0326099U - - Google Patents
Info
- Publication number
- JPH0326099U JPH0326099U JP8578189U JP8578189U JPH0326099U JP H0326099 U JPH0326099 U JP H0326099U JP 8578189 U JP8578189 U JP 8578189U JP 8578189 U JP8578189 U JP 8578189U JP H0326099 U JPH0326099 U JP H0326099U
- Authority
- JP
- Japan
- Prior art keywords
- plasma generation
- generation chamber
- chamber
- magnet
- coaxial waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 239000006091 Macor Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Plasma Technology (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8578189U JPH0326099U (oth) | 1989-07-21 | 1989-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8578189U JPH0326099U (oth) | 1989-07-21 | 1989-07-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0326099U true JPH0326099U (oth) | 1991-03-18 |
Family
ID=31635082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8578189U Pending JPH0326099U (oth) | 1989-07-21 | 1989-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0326099U (oth) |
-
1989
- 1989-07-21 JP JP8578189U patent/JPH0326099U/ja active Pending
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