JPH0325892U - - Google Patents
Info
- Publication number
- JPH0325892U JPH0325892U JP8762989U JP8762989U JPH0325892U JP H0325892 U JPH0325892 U JP H0325892U JP 8762989 U JP8762989 U JP 8762989U JP 8762989 U JP8762989 U JP 8762989U JP H0325892 U JPH0325892 U JP H0325892U
- Authority
- JP
- Japan
- Prior art keywords
- stator
- rotor
- threaded groove
- support member
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000002131 composite material Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案に係る真空ポンプとしての複合
型ターボ分子ポンプの一実施例を示す断面図であ
り、第２図は従来の真空ポンプを示す断面図であ
る。
４……ロータ、５……ロータ翼、６……ステー
タ翼、７……固定筒（支持部材）、１５……ネジ
溝部、１６……ステータ、１７，１８……ニクロ
ム線（加熱部）。
FIG. 1 is a sectional view showing an embodiment of a composite turbomolecular pump as a vacuum pump according to the present invention, and FIG. 2 is a sectional view showing a conventional vacuum pump. 4... Rotor, 5... Rotor blade, 6... Stator blade, 7... Fixed cylinder (supporting member), 15... Thread groove portion, 16... Stator, 17, 18... Nichrome wire (heating part).
Claims (1)
ロータを回転自在に支持する支持部材と、前記ロ
ータとステータの対向する壁面の少くともいずれ
か一方にかつ少くとも一部に形成されたネジ溝部
を備えた真空ポンプにおいて、前記ネジ溝部に対
向するステータあるいはネジ溝部が設けられたス
テータと前記支持部材との少くともいずれか一方
に加熱部を設けたことを特徴とする真空ポンプ。 A rotor that rotates relative to the stator, a support member that rotatably supports the rotor, and a threaded groove formed in at least one of and at least a portion of the opposing wall surfaces of the rotor and the stator. 1. A vacuum pump characterized in that a heating section is provided on at least one of the stator facing the threaded groove or the stator provided with the threaded groove and the support member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989087629U JP2557551Y2 (en) | 1989-07-24 | 1989-07-24 | Vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989087629U JP2557551Y2 (en) | 1989-07-24 | 1989-07-24 | Vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0325892U true JPH0325892U (en) | 1991-03-18 |
| JP2557551Y2 JP2557551Y2 (en) | 1997-12-10 |
Family
ID=31637274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989087629U Expired - Fee Related JP2557551Y2 (en) | 1989-07-24 | 1989-07-24 | Vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2557551Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108412786A (en) * | 2018-02-26 | 2018-08-17 | 北京海斯德电机技术有限公司 | A kind of composite molecular pump |
| CN108412785A (en) * | 2018-02-26 | 2018-08-17 | 北京海斯德电机技术有限公司 | A kind of composite molecular pump |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61145394A (en) * | 1984-12-18 | 1986-07-03 | Tokuda Seisakusho Ltd | Molecular pump |
| JPS6419198A (en) * | 1987-07-15 | 1989-01-23 | Hitachi Ltd | Vacuum pump |
-
1989
- 1989-07-24 JP JP1989087629U patent/JP2557551Y2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61145394A (en) * | 1984-12-18 | 1986-07-03 | Tokuda Seisakusho Ltd | Molecular pump |
| JPS6419198A (en) * | 1987-07-15 | 1989-01-23 | Hitachi Ltd | Vacuum pump |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108412786A (en) * | 2018-02-26 | 2018-08-17 | 北京海斯德电机技术有限公司 | A kind of composite molecular pump |
| CN108412785A (en) * | 2018-02-26 | 2018-08-17 | 北京海斯德电机技术有限公司 | A kind of composite molecular pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2557551Y2 (en) | 1997-12-10 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |