JPH0325873U - - Google Patents
Info
- Publication number
- JPH0325873U JPH0325873U JP8672989U JP8672989U JPH0325873U JP H0325873 U JPH0325873 U JP H0325873U JP 8672989 U JP8672989 U JP 8672989U JP 8672989 U JP8672989 U JP 8672989U JP H0325873 U JPH0325873 U JP H0325873U
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- vacuum
- detection means
- positive displacement
- evacuation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 238000006073 displacement reaction Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8672989U JPH0325873U (US08063081-20111122-C00115.png) | 1989-07-24 | 1989-07-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8672989U JPH0325873U (US08063081-20111122-C00115.png) | 1989-07-24 | 1989-07-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0325873U true JPH0325873U (US08063081-20111122-C00115.png) | 1991-03-18 |
Family
ID=31636355
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8672989U Pending JPH0325873U (US08063081-20111122-C00115.png) | 1989-07-24 | 1989-07-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0325873U (US08063081-20111122-C00115.png) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002541541A (ja) * | 1999-04-07 | 2002-12-03 | アルカテル | 真空チャンバ内の圧力を調整するためのシステム、このシステムを装備した真空ポンピングユニット |
JP2018159682A (ja) * | 2017-03-24 | 2018-10-11 | 株式会社日立ハイテクノロジーズ | 自動分析装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5713286A (en) * | 1980-06-30 | 1982-01-23 | Toshiba Corp | Operating method of vacuum pump |
-
1989
- 1989-07-24 JP JP8672989U patent/JPH0325873U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5713286A (en) * | 1980-06-30 | 1982-01-23 | Toshiba Corp | Operating method of vacuum pump |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002541541A (ja) * | 1999-04-07 | 2002-12-03 | アルカテル | 真空チャンバ内の圧力を調整するためのシステム、このシステムを装備した真空ポンピングユニット |
JP2018159682A (ja) * | 2017-03-24 | 2018-10-11 | 株式会社日立ハイテクノロジーズ | 自動分析装置 |
US11624752B2 (en) | 2017-03-24 | 2023-04-11 | Hitachi High-Tech Corporation | Automatic analyzer |