JPH03256220A - Magnetic disk and production thereof - Google Patents
Magnetic disk and production thereofInfo
- Publication number
- JPH03256220A JPH03256220A JP5385490A JP5385490A JPH03256220A JP H03256220 A JPH03256220 A JP H03256220A JP 5385490 A JP5385490 A JP 5385490A JP 5385490 A JP5385490 A JP 5385490A JP H03256220 A JPH03256220 A JP H03256220A
- Authority
- JP
- Japan
- Prior art keywords
- protective film
- magnetic layer
- magnetic disk
- film
- diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 230000001681 protective effect Effects 0.000 claims abstract description 31
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims abstract description 7
- 229920000620 organic polymer Chemical group 0.000 claims description 8
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 4
- 230000005415 magnetization Effects 0.000 claims description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 abstract description 9
- 239000000758 substrate Substances 0.000 abstract description 8
- 239000002245 particle Substances 0.000 abstract description 4
- 229920000642 polymer Polymers 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 1
- 229910052799 carbon Inorganic materials 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 6
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000001069 Raman spectroscopy Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔概 要〕
磁気ディスク装置に用いられる磁気ディスク及びその製
造方法に関し、
磁性層をヘッドクラッシュから保護するための保護膜の
性能向上を目的とし、
磁性層に磁化状態を情報として記録する磁気ディスクに
おいて、上記磁性層の上にダイヤモンド状構造と、グラ
ファイト構造と、有機高分子構造とが混在した保護膜を
設けて成るように構成する。[Detailed Description of the Invention] [Summary] Regarding a magnetic disk used in a magnetic disk drive and a method for manufacturing the same, the present invention aims to improve the performance of a protective film for protecting the magnetic layer from head crashes, by changing the magnetization state of the magnetic layer. A magnetic disk for recording information is configured such that a protective film in which a diamond-like structure, a graphite structure, and an organic polymer structure are mixed is provided on the magnetic layer.
また上記保護膜をｒｆ電力によってプラズマを形成する
平行平板容量結合型プラズマＣＶＤによって成膜するよ
うに構成する。Further, the protective film is formed by parallel plate capacitively coupled plasma CVD in which plasma is generated using RF power.
本発明は、磁気ディスク装置に用いられる磁気ディスク
に関し、特にその保護膜及びその製造方法に関する。The present invention relates to a magnetic disk used in a magnetic disk device, and particularly to a protective film thereof and a method for manufacturing the same.
近年情報の電子化の進展により、計算機の外部記憶装置
である磁気ディスク装置の記憶容量は益々増大する傾向
にある。装置の大容量化に伴ない情報の消失を伴う所謂
ヘッドクラッシュは益々重要な問題とな、っている。In recent years, with the progress of computerization of information, the storage capacity of magnetic disk devices, which are external storage devices for computers, has tended to increase more and more. As the capacity of devices increases, so-called head crashes, which involve loss of information, have become an increasingly important problem.
（１）
（２）
〔従来の技術〕
従来の磁気ディスク装置は大容量化に伴ない磁気ヘッド
の浮上量は０．１５１Ｊｍ程度まで低下してきているた
めゴミ等によるヘッドクラッシュの発生の恐れが多い。(1) (2) [Conventional technology] As the capacity of conventional magnetic disk devices increases, the flying height of the magnetic head has decreased to about 0.151 Jm, so there is a high risk of head crashes caused by dust, etc. .
このためヘッドクラッシュから磁気ディスクの磁性層を
保護するためにスパッタリングカーボンや５ｉ０２など
の硬質な保護膜を磁性層上に設けている。Therefore, in order to protect the magnetic layer of the magnetic disk from head crashes, a hard protective film such as sputtering carbon or 5i02 is provided on the magnetic layer.
しかし、上記のような従来の硬質保護膜は磁気ヘッドの
保護膜への衝突時に硬質な粒子を生じ、該硬質粒子が磁
気ヘッドと磁気ディスクとの間に入り込み、これによっ
てさらに磁性層を破壊するといった問題が生じている。However, the conventional hard protective film as described above generates hard particles when the magnetic head collides with the protective film, and the hard particles enter between the magnetic head and the magnetic disk, thereby further destroying the magnetic layer. Problems such as these are occurring.
本発明は、上記従来の問題点に鑑み、磁性層をヘッドク
ラッシュから保護するための保護膜の性能を向上した磁
気ディスク及びその製造方法を提供することを目的とす
る。SUMMARY OF THE INVENTION In view of the above-mentioned conventional problems, an object of the present invention is to provide a magnetic disk with improved performance of a protective film for protecting a magnetic layer from head crashes, and a method for manufacturing the same.
上記目的を達成するために本発明の磁気ディスクでは、
磁性層に磁化状態を情報として記録する磁気ディスクに
おいて、上記磁性層２の上に、ダイヤモンド状構造と、
グラファイト構造と、有機高分子構造とが混在した保護
膜３を設けたことを特徴とする。In order to achieve the above object, the magnetic disk of the present invention has the following features:
In a magnetic disk that records a magnetization state as information in a magnetic layer, a diamond-like structure is provided on the magnetic layer 2,
It is characterized by providing a protective film 3 in which a graphite structure and an organic polymer structure coexist.
また前記目的を達成するために本発明の磁気ディスクの
製造方法では、前記保護膜３をｒｆ電力によってプラズ
マを形成する平行平板容量結合型プラズマＣＶＤによっ
て成膜することを特徴とする。In order to achieve the above object, the magnetic disk manufacturing method of the present invention is characterized in that the protective film 3 is formed by parallel plate capacitively coupled plasma CVD in which plasma is generated using RF power.
ｒｆ電力によってプラズマを形成する平行平板容量結合
型プラズマＣＶＤによって磁気ディスクの磁性層２の上
に成膜した保護膜３は、ダイヤモンド状構造と、グラフ
ァイト構造と、有機高分子構造とが混在した膜となり、
第５図に示すように従来のスパッタリングカーボンの保
護膜に比し大（３）
（４）
幅な耐久性の向上が得られる。The protective film 3 formed on the magnetic layer 2 of the magnetic disk by parallel plate capacitively coupled plasma CVD in which plasma is generated using RF power is a film in which a diamond-like structure, a graphite structure, and an organic polymer structure are mixed. Then,
As shown in FIG. 5, the durability can be greatly improved by (3) (4) compared to the conventional sputtering carbon protective film.
第１図は本発明の実施例を示す図である。 FIG. 1 is a diagram showing an embodiment of the present invention.
同図において、１はディスク基板、２は情報を記録する
磁性層、３は保護膜である。そして該保護膜３はダイヤ
モンド状構造と、グラファイト構造と、有機高分子構造
とが混在したものである。In the figure, 1 is a disk substrate, 2 is a magnetic layer for recording information, and 3 is a protective film. The protective film 3 has a diamond-like structure, a graphite structure, and an organic polymer structure mixed together.
このように構成された本実施例は、保護膜３を構成する
ダイヤモンド状構造が硬質であるので耐クラツク性が高
く、また有機高分子構造は軟かいため磁気ヘッドが衝突
しても従来のスパッタリングカーボンの様な硬質粒子の
発生を抑えることができ、保護膜としての耐久性の向上
が得られる。In this embodiment configured in this way, the diamond-like structure constituting the protective film 3 is hard, so it has high crack resistance, and the organic polymer structure is soft, so even if the magnetic head collides with it, it will not be damaged by conventional sputtering. The generation of hard particles such as carbon can be suppressed, resulting in improved durability as a protective film.
次に本発明の磁気ディスクの製造方法を第２図を用いて
説明する。Next, a method for manufacturing a magnetic disk according to the present invention will be explained with reference to FIG.
同図はｒｆ電源をプラズマ源とする容量結合型プラズマ
重合装置であり、１０は反応器（真空チャンバ） 、１
１１ｔ４モータ１２で回転駆動されるｒｆ電極、１３は
対向電極、１４は電極に電力を供給する高周波電源、１
５は真空装置、１６は圧力計、１７はベンゼン１８等を
入れた恒温槽である。本実施例の製造方法は、先ず反応
器１０内のｒｆ電極１１上に磁性層を成膜したＮｉＰ基
板２０を設置する。この際磁性層を成膜したＮｉＰ基板
は、５０℃〜２００℃に加熱保持する。The figure shows a capacitively coupled plasma polymerization apparatus using an RF power source as a plasma source, where 10 is a reactor (vacuum chamber), 1
11t4 An rf electrode rotationally driven by a motor 12, 13 a counter electrode, 14 a high frequency power source that supplies power to the electrode, 1
5 is a vacuum device, 16 is a pressure gauge, and 17 is a constant temperature bath containing benzene 18 and the like. In the manufacturing method of this embodiment, first, a NiP substrate 20 on which a magnetic layer is formed is placed on the RF electrode 11 in the reactor 10. At this time, the NiP substrate on which the magnetic layer has been formed is heated and maintained at 50°C to 200°C.
次にプラズマを形成するためにＡｒガスを１１００５Ｃ
Ｃ流入し、反応器１０内が０．ＩＴｏｒｒになるように
排気量を調整し、さらにｒｆ電力５０〜２００Ｗを与え
る。Next, Ar gas was added at 11005C to form a plasma.
C flows in, and the inside of the reactor 10 becomes 0. Adjust the displacement so that it becomes ITorr, and further apply RF power of 50 to 200W.
ここで恒温槽１７からガス化したベンゼン等有機物を流
入し、基板上で数１０秒重合を行なう。この条件による
成膜によって、硬質なダイヤモンド状構造とグラファイ
ト構造と硬質な有機物高分子構造が混在した保護膜を得
ることができる。なお成膜条件の範囲はｒｆ電力５０〜
１００ＯＷ、温度５０℃〜３００℃程度で良い。Here, gasified organic substances such as benzene are introduced from the constant temperature bath 17 and polymerized on the substrate for several tens of seconds. By forming the film under these conditions, it is possible to obtain a protective film in which a hard diamond-like structure, a graphite structure, and a hard organic polymer structure are mixed. The range of film forming conditions is RF power 50~
100OW and a temperature of about 50°C to 300°C are sufficient.
第３図はこのようにして成膜した膜をラマン分光分析で
調査した結果を示した図である。同図において、横軸に
はシフト量（波数）、縦軸には強度をとり、曲線Ａで生
データを示し、曲線Ｂ、Ｃで波形分離した曲線を示した
。このＢ、Ｃ曲線で（５）
（６）
それぞれ囲む面積が１：ｌであり、このような場合はダ
イヤモンドが７０％含まれるダイヤモンドライク状のア
モルファス膜が構成されているのである。さらにこの膜
の赤外吸収を第４図に示す。この図より有機物が膜中に
残存していることがわかる。FIG. 3 is a diagram showing the results of Raman spectroscopic analysis of the film thus formed. In the figure, the horizontal axis represents the amount of shift (wave number), and the vertical axis represents the intensity, curve A represents raw data, and curves B and C represent waveform separated curves. The area enclosed by curves B and C is 1:l, respectively, and in such a case, a diamond-like amorphous film containing 70% diamond is formed. Furthermore, the infrared absorption of this film is shown in FIG. This figure shows that organic substances remain in the film.
第５図は上記膜の摺動特性を従来のスパッタリングカー
ボンと比較して示した図である。試験条件は、保護膜を
成膜した５インチディスクを３６００ｒｐｌＴｌで回転
し、その保護膜上をＡ Ｒ２０３ＴｉＣ製のスライダで
摺動させた。なおスライダは磁気ディスク用の浮上スラ
イダを浮上させないで用いた。同図より本実施例のダイ
ヤモンド、グラファイト、有機物混在膜は従来のスパッ
タリングカーボンに比して遥かに耐久性が高いことがわ
かる。FIG. 5 is a diagram showing the sliding characteristics of the above film in comparison with that of conventional sputtering carbon. The test conditions were as follows: A 5-inch disk on which a protective film was formed was rotated at 3600 rpm, and a slider made of AR203TiC was slid on the protective film. Note that the slider used was a floating slider for a magnetic disk without being floated. From the figure, it can be seen that the diamond, graphite, and organic substance mixed film of this example has much higher durability than conventional sputtered carbon.
以上説明した様に、本発明によれば、硬質なダイヤモン
ド状構造と軟質な有機物高分子構造が混在した保護膜を
用いることにより、ヘッドによる磁気ディスクの破壊を
防ぐことができ、磁気ディスク装置の信頼性向上に寄与
するところ大である。As explained above, according to the present invention, by using a protective film in which a hard diamond-like structure and a soft organic polymer structure are mixed, it is possible to prevent the magnetic disk from being destroyed by the head, and to improve the performance of the magnetic disk device. This greatly contributes to improving reliability.
第１図は本発明の実施例の磁気ディスクを示す図、
第２図は本発明の磁気ディスクの製造方法を説明するた
めの図、
第３図は本発明の実施例の保護膜のラマン分光分析結果
を示す図、
第４図は本発明の実施例の保護膜の赤外吸収を示す図、
第５図は本発明の実施例の保護膜の摺動特性を従来のス
パッタリングカーボンと比較して示した図である。
図において、
１はディスク基板、
２は磁性層、
３は保護膜
を示す。
（７〉
（８）
２・・・磁性層
３・・・保護膜
本発明の磁気ディスクの製造方法を説明するための図第
２図
−シフト量（波数）
→波数
スパッタカーボン
ダイヤモンド・グラファイト・FIG. 1 is a diagram showing a magnetic disk according to an embodiment of the present invention, FIG. 2 is a diagram for explaining a method for manufacturing a magnetic disk according to the present invention, and FIG. 3 is a Raman spectroscopy of a protective film according to an embodiment of the present invention. Figure 4 is a diagram showing the analysis results. Figure 4 is a diagram showing the infrared absorption of the protective film of the example of the present invention. Figure 5 is a comparison of the sliding characteristics of the protective film of the example of the present invention with conventional sputtering carbon. FIG. In the figure, 1 is a disk substrate, 2 is a magnetic layer, and 3 is a protective film. (7> (8) 2...Magnetic layer 3...Protective film Figure 2 for explaining the manufacturing method of the magnetic disk of the present invention - Shift amount (wave number) → Wave number sputtering carbon diamond graphite
Claims (1)
クにおいて、 上記磁性層（２）の上にダイヤモンド状構造と、グラフ
ァイト構造と、有機高分子構造とが混在した保護膜（３
）を設けて成ることを特徴とする磁気ディスク。 ２、請求項１記載の磁気ディスクにおいて、その保護膜
（３）をｒｆ電力によってプラズマを形成する平行平板
容量結合型プラズマＣＶＤによって成膜することを特徴
とする磁気ディスクの製造方法。[Claims] 1. In a magnetic disk in which a magnetization state is recorded as information in a magnetic layer, a protective film in which a diamond-like structure, a graphite structure, and an organic polymer structure are mixed on the magnetic layer (2); (3
) A magnetic disk characterized by comprising: 2. A method for manufacturing a magnetic disk according to claim 1, characterized in that the protective film (3) is formed by parallel plate capacitively coupled plasma CVD in which plasma is generated using RF power.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5385490A JPH03256220A (en) | 1990-03-07 | 1990-03-07 | Magnetic disk and production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5385490A JPH03256220A (en) | 1990-03-07 | 1990-03-07 | Magnetic disk and production thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03256220A true JPH03256220A (en) | 1991-11-14 |
Family
ID=12954358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5385490A Pending JPH03256220A (en) | 1990-03-07 | 1990-03-07 | Magnetic disk and production thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03256220A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5981000A (en) * | 1997-10-14 | 1999-11-09 | International Business Machines Corporation | Method for fabricating a thermally stable diamond-like carbon film |
| US6165582A (en) * | 1992-11-19 | 2000-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Magnetic recording medium |
| US6805941B1 (en) | 1992-11-19 | 2004-10-19 | Semiconductor Energy Laboratory Co., Ltd. | Magnetic recording medium |
-
1990
- 1990-03-07 JP JP5385490A patent/JPH03256220A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6165582A (en) * | 1992-11-19 | 2000-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Magnetic recording medium |
| US6194047B1 (en) | 1992-11-19 | 2001-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Magnetic recording medium |
| US6258434B1 (en) | 1992-11-19 | 2001-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Magnetic recording medium |
| US6623836B1 (en) | 1992-11-19 | 2003-09-23 | Semiconductor Energy Laboratory Co., Ltd. | Magnetic recording medium |
| US6805941B1 (en) | 1992-11-19 | 2004-10-19 | Semiconductor Energy Laboratory Co., Ltd. | Magnetic recording medium |
| US7083873B2 (en) | 1992-11-19 | 2006-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Magnetic recording medium including a diamond-like carbon protective film with hydrogen and at least two additional elements |
| US7391592B2 (en) | 1992-11-19 | 2008-06-24 | Semiconductor Energy Laboratory Co., Ltd. | Magnetic recording medium including a diamond-like carbon protective film and at least two additional elements |
| US5981000A (en) * | 1997-10-14 | 1999-11-09 | International Business Machines Corporation | Method for fabricating a thermally stable diamond-like carbon film |
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