JPH0325555U - - Google Patents
Info
- Publication number
- JPH0325555U JPH0325555U JP8637189U JP8637189U JPH0325555U JP H0325555 U JPH0325555 U JP H0325555U JP 8637189 U JP8637189 U JP 8637189U JP 8637189 U JP8637189 U JP 8637189U JP H0325555 U JPH0325555 U JP H0325555U
- Authority
- JP
- Japan
- Prior art keywords
- introduction port
- vacuum chamber
- vacuum
- sample
- sealed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8637189U JPH0325555U (da) | 1989-07-20 | 1989-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8637189U JPH0325555U (da) | 1989-07-20 | 1989-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0325555U true JPH0325555U (da) | 1991-03-15 |
Family
ID=31635896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8637189U Pending JPH0325555U (da) | 1989-07-20 | 1989-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325555U (da) |
-
1989
- 1989-07-20 JP JP8637189U patent/JPH0325555U/ja active Pending