JPH032547A - Method for inspecting circuit pattern - Google Patents

Method for inspecting circuit pattern

Info

Publication number
JPH032547A
JPH032547A JP13693889A JP13693889A JPH032547A JP H032547 A JPH032547 A JP H032547A JP 13693889 A JP13693889 A JP 13693889A JP 13693889 A JP13693889 A JP 13693889A JP H032547 A JPH032547 A JP H032547A
Authority
JP
Japan
Prior art keywords
circuit patterns
fluorescence
circuit pattern
insulating substrate
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13693889A
Other languages
Japanese (ja)
Other versions
JPH0676971B2 (en
Inventor
Nobukimi Hosoki
細木 伸仁
Shigeaki Kojima
小島 甚昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP13693889A priority Critical patent/JPH0676971B2/en
Publication of JPH032547A publication Critical patent/JPH032547A/en
Publication of JPH0676971B2 publication Critical patent/JPH0676971B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0266Marks, test patterns or identification means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/032Organic insulating material consisting of one material
    • H05K1/0326Organic insulating material consisting of one material containing O

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Epoxy Resins (AREA)

Abstract

PURPOSE:To accurately inspect circuit patterns with high efficiency by integrally coupling the high fluorescence imparted to an insulating layer and the specific stimulating light to strongly stimulate this fluorescence. CONSTITUTION:A wiring board consisting of an insulating substrate formed by perfecting of the curing of a resin compsn. contg. an epoxy resin, the diaminodiphenyl methane compd., which is expressed by formula, and is compounded at the ratio ranging 5 to 20 pts.wt. per 100 pts.wt. this epoxy resin, and a curing accelerator in the base material and the circuit patterns formed on this insulating substrate is irradiated with 350 to 500nm stimulating light. The abnormality of the circuit patterns is decided in comparison with the normal circuit patterns by utilizing the property that while the insulating patterns formed between the circuits of the circuit patterns exhibit the extreme by high fluorescence to 350 to 500nm stimulating light the circuit patterns do not exhibit the fluorescence. The circuit patterns are accurately inspected with the high efficiency by the fluorescence emitted by this stimulating light.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、絶縁基材中でエポキシ樹脂の硬化が完結した
絶縁基板とこの絶縁基板の上に形成された回路パターン
とから成るプリント配線板などの配線板の回路パターン
の検査法に関するものである。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a printed wiring board comprising an insulating substrate in which an epoxy resin has been completely cured in an insulating base material, and a circuit pattern formed on the insulating substrate. The present invention relates to a method for inspecting circuit patterns of wiring boards such as the above.

〔従来の技術〕[Conventional technology]

従来よりエポキシ樹脂は、積層板用などの樹脂として多
用されている。かかる積層板から作られるプリント配線
板の回路パターンの検査方法として、従来はプローブに
よる直接導通法、金属顕微鏡を応用した金属導体回路パ
ターンの反射光による方法、あるいは軟X線による方法
などが知られているが、最近−面精度良く、高能率に検
査できる方法として、励起光に感応して蛍光を発光する
蛍光性を絶縁層にイ」与することにより、プリント配線
板を励起光に対して発光しない導体回路パタンの部分と
、導体回路パターンの回路間に露出し、励起光に対して
発光する絶縁パターンの部分とに分け、これらの部分の
発光性の差異を利用して励起光を照射することにより回
路パターンの異常を正常な回路パターンとの比較で検査
する回路パターンの検査方法が試行されつつある。この
検査法の成否は当然のことながら絶縁層に付与する高い
発光性と、発光を強く励起する励起光の一体的な結合に
依存する。特に絶縁層に付与する発光性は、絶縁層の層
厚が薄いほど低(、また黒化処理した絶縁層を含むと低
下する性質があるのでこのような配線板では、絶縁層に
強烈な発光性を付与する必要がある。
Epoxy resins have traditionally been widely used as resins for laminates and the like. Conventionally known methods for inspecting circuit patterns on printed wiring boards made from such laminates include a direct conduction method using a probe, a method using reflected light from a metal conductor circuit pattern using a metallurgical microscope, and a method using soft X-rays. However, recently, as a method for highly efficient inspection with good surface accuracy, printed wiring boards are exposed to excitation light by imparting fluorescence to the insulating layer, which emits fluorescence in response to excitation light. The conductor circuit pattern is divided into the part of the conductor circuit pattern that does not emit light, and the part of the insulating pattern that is exposed between the circuits of the conductor circuit pattern and emits light in response to the excitation light, and the excitation light is irradiated by utilizing the difference in luminescence of these parts. A method of inspecting a circuit pattern is being attempted, in which an abnormality in a circuit pattern is inspected by comparing it with a normal circuit pattern. The success or failure of this testing method naturally depends on the high luminescence imparted to the insulating layer and the integral combination of excitation light that strongly excites luminescence. In particular, the luminescence imparted to the insulating layer decreases as the thickness of the insulating layer becomes thinner (and also decreases when the insulating layer is blackened). It is necessary to give gender.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

したがって、この発明は、精度よく高効率に回路パター
ンの検査を励起光により発光する蛍光でもって行うこと
のできる新規な回路パターンの検査法に関し、具体的に
は絶縁層に付与した高い蛍光性とこの蛍光性を強く励起
する特定の励起光の一体的な結合によって解決する点に
ある。
Therefore, the present invention relates to a novel circuit pattern inspection method that can accurately and efficiently inspect circuit patterns using fluorescence emitted by excitation light. The problem is solved by integral combination of specific excitation light that strongly excites this fluorescence.

〔課題を解決するための手段〕[Means to solve the problem]

本発明に係る絶縁基板の上に形成された回路パターンの
検査法は、 (イ)エポキシ樹脂、 (ロ)前記エポキシ樹脂100重量部に対して5〜20
重量部の範囲となる量で配合される次の一般式 (R,、R2は水素原子あるいは炭素数1〜4のアルキ
ル基)で示されるジアミノジフェニルメタン化合物、 (ハ)および、硬化促進剤を含有する樹脂組成物が基材
中で硬化が完結した絶縁基板とこの絶縁基板に形成され
た回路パターンとからなる配線板に350〜500 n
mの励起光を照射することを特徴とするものである。
The method for inspecting a circuit pattern formed on an insulating substrate according to the present invention includes: (a) epoxy resin; (b) 5 to 20 parts by weight per 100 parts by weight of the epoxy resin;
Contains a diaminodiphenylmethane compound represented by the following general formula (R, R2 is a hydrogen atom or an alkyl group having 1 to 4 carbon atoms) blended in an amount within the range of parts by weight, (iii) and a curing accelerator. The resin composition was applied to a wiring board consisting of an insulating substrate that had been completely cured in the base material and a circuit pattern formed on this insulating substrate.
It is characterized by irradiating m excitation light.

以下に、本発明を詳説する。本発明の回路パターンの検
査法に適用される配線板を構成する絶縁基板は、エポキ
シ樹脂とこのエポキシ樹脂100重量部に対して5〜2
0重量部の範囲となる量で配合されたジアミノジフェニ
ルメタン化合物と硬化促進剤を含む樹脂組成物が基材中
で硬化が完結した絶縁基板に限定される。ここでエポキ
シ樹脂としては、ビスフェノールA型エポキシ樹脂およ
びこれに難燃性を付与したハロゲン化ビスフェノルA型
エポキシ樹脂、あるいは耐熱性を向上させるために混合
させて用いられるノボラック型エポキシ樹脂およびこれ
に難燃性を付与したハロゲン化ノボラック型エポキシ樹
脂などが例示される。そしてこようなエポキシ樹脂10
0重量部に対して配合されるジアミノジフェニルメタン
化合物を5〜20重量部に制限した理由は、下限の5重
量部未満の配合量では、励起光に対する蛍光性が弱く、
上限の20重量部を越えるとエポキシ樹脂の硬化速度が
早く樹脂ワニスでの使用が困難となるからである。この
ジアミノジフェニルメタン化合物は、この発明において
は、エポキシ樹脂の硬化剤として選択的に採用された硬
化剤であって、かつ特定の波長に属する光に対して蛍光
を発する蛍光剤としての新規な作用を同時に有するもの
である。
The present invention will be explained in detail below. The insulating substrate constituting the wiring board applied to the circuit pattern inspection method of the present invention contains epoxy resin and 5 to 2 parts by weight per 100 parts by weight of this epoxy resin.
The resin composition containing a diaminodiphenylmethane compound and a curing accelerator blended in an amount in the range of 0 parts by weight is limited to an insulating substrate in which curing is completed in the base material. Here, the epoxy resins include bisphenol A epoxy resins and halogenated bisphenol A epoxy resins that have flame retardancy, or novolac epoxy resins that are used in combination to improve heat resistance, and epoxy resins that are resistant to these. Examples include halogenated novolac type epoxy resins that have been imparted with flammability. And 10 epoxy resins like this
The reason why the amount of the diaminodiphenylmethane compound blended is limited to 5 to 20 parts by weight relative to 0 parts by weight is that if the blending amount is less than the lower limit of 5 parts by weight, the fluorescence against excitation light will be weak.
This is because if the upper limit of 20 parts by weight is exceeded, the curing speed of the epoxy resin is too fast and it becomes difficult to use it in a resin varnish. In the present invention, this diaminodiphenylmethane compound is a curing agent selectively employed as a curing agent for epoxy resin, and has a novel action as a fluorescent agent that emits fluorescence in response to light belonging to a specific wavelength. at the same time.

硬化促進剤としては、ヘンシルジメチルアミンのような
第3級アミン、2エチル4メチルイミダゾール(2E4
MZ)のようなイミダゾール類が用いられ、その配合割
合は前記エポキシ樹脂の100重量部に対して0.05
〜1重量部が適当である。以上の成分が基材中で架橋反
応の促進にともなって硬化した樹脂の固形分を与えるま
でのプロセスに沿って説明すると、上記成分は溶媒中に
溶解された樹脂ワニスに含有される。ここで溶媒として
はジメチルホルムアミド(DMF) 、メチルエチルケ
トン(MEK)、アセトン、メチルセロソルブ、ジメチ
ルアセトアミド、ジオキサンなどの単独又は、混合した
ものを樹脂の含有率40〜80重量%、好ましくは55
〜70重量%となる量で用いることができる。そしてこ
のように調製された樹脂フェスを例えばガラスクロスの
基材に含浸させた後、乾燥によって溶媒を蒸発させつつ
エポキシ樹脂の反応を進行させ基材中の樹脂組成物を半
硬化させてプリプレグとする。上記基材の種類は特に限
定されない。通常はガラスクロス等が用いられる。この
他、石英繊維布等の無機繊維布、ポリイミド樹脂繊維布
等の高耐熱性有機繊維布等でもよい。半硬化させる時の
温度は140〜+70 ’Cで行うのが好ましい。17
0°Cを越えるとエポキシ樹脂の反応が進め過ぎ、得ら
れるプリプレグの層間接着力が低下し、絶縁基板として
吸水率などの性能低下の原因となる。このようにして得
られたプリプレグを数枚重ねた上に銅、ニッケル、アル
ミニウムなどの金属箔を重ねてこれを常用される条件で
熱圧成形することにより回路パターンを形成できる金属
箔張りの絶縁基板とし、次に回路形成法として一般に行
われているサブトラクティブ法によって、この金属箔に
エツチングを施すと絶縁基板上に回路パターンが形成さ
れた配線板が得られる。従って絶縁基板上は2回路バタ
ンとこの回路パターンの回路間に露出する絶縁基板によ
って形成される絶縁パターンとに分けられる。なお、絶
縁基板上にアディティブ法による方法で回路パターンを
形成した配線板もこの発明における配線板として適用で
きる。
As curing accelerators, tertiary amines such as hensyldimethylamine, 2ethyl4methylimidazole (2E4
An imidazole such as MZ) is used, and its blending ratio is 0.05 parts by weight per 100 parts by weight of the epoxy resin.
~1 part by weight is suitable. Explaining the process by which the above-mentioned components promote the crosslinking reaction in the base material and give a solid content of the cured resin, the above-mentioned components are contained in a resin varnish dissolved in a solvent. Here, as a solvent, dimethylformamide (DMF), methyl ethyl ketone (MEK), acetone, methyl cellosolve, dimethyl acetamide, dioxane, etc. are used alone or as a mixture, and the resin content is 40 to 80% by weight, preferably 55% by weight.
It can be used in an amount of up to 70% by weight. After impregnating the resin face prepared in this way into a base material such as glass cloth, the solvent is evaporated by drying and the reaction of the epoxy resin is progressed to semi-cure the resin composition in the base material to form a prepreg. do. The type of the base material is not particularly limited. Glass cloth or the like is usually used. In addition, inorganic fiber cloth such as quartz fiber cloth, highly heat-resistant organic fiber cloth such as polyimide resin fiber cloth, etc. may be used. The temperature during semi-curing is preferably 140 to +70'C. 17
If the temperature exceeds 0°C, the reaction of the epoxy resin will proceed too much, and the interlayer adhesion of the obtained prepreg will decrease, causing a decrease in performance as an insulating substrate, such as water absorption. A metal foil-covered insulation that can form a circuit pattern by stacking several sheets of prepreg obtained in this way and then layering a metal foil such as copper, nickel, or aluminum, and then hot-pressing this under commonly used conditions. This metal foil is then etched using a subtractive method, which is a commonly used circuit forming method, to obtain a wiring board with a circuit pattern formed on the insulating substrate. Therefore, the insulating substrate is divided into two circuit patterns and an insulating pattern formed by the insulating substrate exposed between the circuits of this circuit pattern. Note that a wiring board in which a circuit pattern is formed on an insulating substrate by an additive method can also be used as the wiring board in this invention.

本発明における以上の絶縁基板とこの絶縁基板の上に形
成された回路パターンからなる配線板は波長が350〜
500 nmの光に対して特に蛍光を発する性質を利用
するものである。すなわち、回路パターンの回路間に形
成される絶縁パターンが350〜500nmの励起光に
対して著しい蛍光性を示す反面、回路パターンは蛍光性
を示さない性質を利用して回路パターンの異常を正常な
回路パターンとの比較において判別できるものである。
A wiring board according to the present invention comprising the above insulating substrate and a circuit pattern formed on the insulating substrate has a wavelength of 350 to 350.
This method utilizes the property of emitting fluorescence especially when exposed to light of 500 nm. In other words, while the insulating pattern formed between the circuits of the circuit pattern exhibits significant fluorescence in response to excitation light of 350 to 500 nm, the circuit pattern does not exhibit fluorescence to detect abnormalities in the circuit pattern. This can be determined by comparing it with the circuit pattern.

特に絶縁層の蛍光性は、絶縁層の層厚が薄いほど低く、
また黒化処理した絶縁層を含むと低下する性質があるの
で、例えば0.2mm以下の絶縁基板あるいは黒化処理
した絶縁基板を有する配線板の回路パターンの検査にお
いて、絶縁層の蛍光強度を高めることは極めて有用であ
る。以下、具体的な実施例を挙げる。
In particular, the thinner the insulating layer, the lower the fluorescence of the insulating layer.
In addition, since there is a property that the fluorescence intensity decreases when an insulating layer that has been treated with blackening is included, for example, when inspecting a circuit pattern of an insulating substrate of 0.2 mm or less or a wiring board that has an insulating substrate that has been treated with blackening, the fluorescence intensity of the insulating layer is increased. This is extremely useful. Specific examples will be given below.

〔実施例〕〔Example〕

実施例 I エポキシ樹脂として、ブロム化エポキシ樹脂(東部化成
社、Y D B−500、エポキシ当量500)を10
0重量部、前記のジアミノジフェニルメタン化合物でR
,とR2がエチル基の3.3′−ジエチル−4,4′−
ジアミノジフェニルメタンを20重量部、硬化促進剤と
して2E4MZを0. 1重量部、そして溶媒としてM
EK、l!:DMFの等景況合液を上記の樹脂含有率が
65重量%となるように添加して樹脂ワニスとし、この
樹脂ワニスを0.1mmのガラスクロスに含浸乾燥して
プリプレグを得た。そしてこのプリプレグの両面に、厚
さ18μmの銅箔を配し、これを金属プレートに挟んで
成形圧50kg/ci、温度170°Cで100分間熱
圧成形し、この銅箔にエツチングを施して絶縁基板上に
回路パターンとこの回路パターンの回路間に絶縁基板が
露出した絶縁パターンを有する配線板とした。この配線
板に分光蛍光光度計を使い350〜500nmの励起光
を照射し、その時現れた蛍光強度の最大値を蛍光強度と
して第1表に示した。また、300mmX500mmの
この配線板に442nmの励起光による蛍光式パターン
検査装置を適用し、回路パターンの導体幅、導体間隔、
断線、ショート、ピンホール、銅残り、銅欠けについて
検査した結果、蛍光式パターン検査装置で異常箇所と検
出した回路パターンを再度、顕微鏡で観察し、その結果
、回路パターンに異常なしと確認できた個数、すなわち
、蛍光式パターン検査装置が誤って検出した個数を検査
精度としてその結果も第1表に示した。
Example I As an epoxy resin, brominated epoxy resin (Tobu Kasei Co., Ltd., Y D B-500, epoxy equivalent weight 500) was used at 10
0 parts by weight, R with the above diaminodiphenylmethane compound
, and 3,3'-diethyl-4,4'- where R2 is an ethyl group
20 parts by weight of diaminodiphenylmethane and 0.0 parts of 2E4MZ as a curing accelerator. 1 part by weight, and M as a solvent.
EK,l! A resin varnish was prepared by adding the above-mentioned resin content to 65% by weight, and this resin varnish was impregnated into a 0.1 mm glass cloth and dried to obtain a prepreg. Then, copper foil with a thickness of 18 μm was placed on both sides of this prepreg, and this was sandwiched between metal plates and hot-press molded at a molding pressure of 50 kg/ci and a temperature of 170°C for 100 minutes, and this copper foil was etched. The wiring board has a circuit pattern on an insulating substrate and an insulating pattern in which the insulating substrate is exposed between the circuits of the circuit pattern. This wiring board was irradiated with excitation light of 350 to 500 nm using a spectrofluorometer, and the maximum value of the fluorescence intensity that appeared at that time was shown in Table 1 as the fluorescence intensity. In addition, a fluorescent pattern inspection device using 442 nm excitation light was applied to this wiring board of 300 mm x 500 mm, and the conductor width of the circuit pattern, conductor spacing,
As a result of inspection for disconnections, short circuits, pinholes, copper residue, and copper chips, the circuit patterns that were detected as abnormal using the fluorescent pattern inspection device were again observed using a microscope, and as a result, it was confirmed that there were no abnormalities in the circuit patterns. The number of pieces, that is, the number of pieces erroneously detected by the fluorescent pattern inspection device was defined as the inspection accuracy, and the results are also shown in Table 1.

実施例 2 実施例1で用いた3、3゛−ジエチル−4,4′ジアミ
ノジフ工ニルメタン14重量部とし、さらにジシアンジ
アミド0.6重量部を配合した以外は実施例1と同様に
実施し第1表の結果を得た。
Example 2 The same procedure as in Example 1 was carried out except that 14 parts by weight of 3,3'-diethyl-4,4'diaminodiphenylmethane used in Example 1 was used, and 0.6 parts by weight of dicyandiamide was added. Obtained the results in the table.

実施例 3 実施例1で用いた3、3゛−ジエチル−4,4′ジアミ
ノジフ工ニルメタン5重量部とし、ジシアンジアミド1
.8重量部を配合した以外は実施例1と同様に実施し第
1表の結果を得た。
Example 3 5 parts by weight of 3,3'-diethyl-4,4'diaminodiphenylmethane used in Example 1, 1 part of dicyandiamide
.. The same procedure as in Example 1 was carried out except that 8 parts by weight was added, and the results shown in Table 1 were obtained.

比較例工 実施例1で用いた3、3′ジエチル−4,4′ジアミノ
ジフエニルメタンを配合せず、ジシアンジアミド2.5
重量部を配合した以外は実施例1と同様に実施し第1表
の結果を得た。
Comparative Example: The 3,3'diethyl-4,4'diaminodiphenylmethane used in Example 1 was not blended, and 2.5% of dicyandiamide was used.
The same procedure as in Example 1 was carried out except that the parts by weight were added, and the results shown in Table 1 were obtained.

第1表から明らかな通り、実施例1乃至3による本発明
の実施例によると、蛍光強度が増大しその結果、具体的
には絶縁層に付与した高い蛍光性を強く励起することが
でき、この性質を利用した検査の精度も向上できるので
ある。
As is clear from Table 1, according to the examples of the present invention according to Examples 1 to 3, the fluorescence intensity increases, and as a result, specifically, the high fluorescence imparted to the insulating layer can be strongly excited. The accuracy of inspection using this property can also be improved.

第1表 ※1 配線板1枚当たりの誤って検出した個数○・・0
〜5個 ×・・・50〜200個 実施例 4 実施例1におけるプリプレグを硬化した絶縁基板とこの
絶縁基板」二に回路形成された回路パタンとを、黒化処
理した0、5mmの内層プリント配線板の両面に実施例
1で得たプリプレグを配し、さらにその外側両面に18
μmの銅箔を配してこれを金属プレー1・に挟んで実施
例1の熱圧条件で積層成形し、さらにエツチングを施し
て絶縁基板上に回路パターンを得、実施例1と同様に蛍
光強度と回路パターンの検査を行った。これらの結果を
第2表に示した。
Table 1 *1 Number of incorrectly detected pieces per wiring board○...0
~5 pieces×...50 to 200 pieces Example 4 An insulating substrate obtained by hardening the prepreg in Example 1 and a circuit pattern formed on this insulating substrate were printed with a 0.5 mm inner layer that was blackened. The prepreg obtained in Example 1 was placed on both sides of the wiring board, and 18
A copper foil with a thickness of μm was arranged, sandwiched between metal plates 1 and laminated under the heat and pressure conditions of Example 1, and then etched to obtain a circuit pattern on the insulating substrate. The strength and circuit pattern were inspected. These results are shown in Table 2.

実施例5 実施例4で使用した実施例1の内層プリント配線板とプ
リプレグを実施例2の内層プリント配線板とプリプレグ
に変えた以外は実施例4と同様に実施し、これらの結果
を第2表に示した。
Example 5 The same procedure as in Example 4 was carried out except that the inner layer printed wiring board and prepreg of Example 1 used in Example 4 were changed to the inner layer printed wiring board and prepreg of Example 2. Shown in the table.

実施例6 実施例4で使用した実施例1の内層プリント配線板とプ
リプレグを実施例3の内層プリント配線板とプリプレグ
に変えた以外は実施例4と同様に実施し、これらの結果
を第2表に示した。
Example 6 The same procedure as in Example 4 was carried out except that the inner layer printed wiring board and prepreg of Example 1 used in Example 4 were changed to the inner layer printed wiring board and prepreg of Example 3, and these results were compared to the second example. Shown in the table.

比較例2 実施例4で使用した実施例1の内層プリント配線板とプ
リプレグを比較例1の内層プリント配線板とプリプレグ
に変えた以′外は実施例4と同様に実施し、これらの結
果を第2表に示した第2表 以」二のとおり、本発明は絶縁層に付与した高い蛍光性
とこの蛍光性を強く励起する特定の励起光の一体的な結
合によって、回路パターンの検査を励起光により発光す
る蛍光でもって精度よく高効率に行うことのできるので
ある。
Comparative Example 2 The same procedure as in Example 4 was carried out except that the inner layer printed wiring board and prepreg of Example 1 used in Example 4 were changed to the inner layer printed wiring board and prepreg of Comparative Example 1. As shown in Table 2, the present invention enables inspection of circuit patterns by integrally combining high fluorescence imparted to an insulating layer and specific excitation light that strongly excites this fluorescence. This can be carried out with high precision and high efficiency using fluorescence emitted by excitation light.

Claims (1)

【特許請求の範囲】[Claims] (1)(イ)エポキシ樹脂、 (ロ)前記エポキシ樹脂100重量部に対して5〜20
重量部の範囲となる量で配合される次の一般式 ▲数式、化学式、表等があります▼ (R_1、R_2は水素原子あるいは炭素数1〜4のア
ルキル基)で示されるジアミノジフェニルメタン化合物
、 (ハ)および、硬化促進剤を含有する樹脂組成物が基材
中で硬化が完結した絶縁基板とこの絶縁基板に形成され
た回路パターンとからなる配線板に350〜500nm
の励起光を照射することを特徴とする回路パターンの検
査法。
(1) (a) Epoxy resin (b) 5 to 20 parts by weight per 100 parts by weight of the epoxy resin
A diaminodiphenylmethane compound represented by the following general formula ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼ (R_1 and R_2 are hydrogen atoms or alkyl groups having 1 to 4 carbon atoms), which is blended in amounts within the range of parts by weight. c) and a wiring board consisting of an insulating substrate on which the resin composition containing a curing accelerator has been completely cured in the base material and a circuit pattern formed on this insulating substrate, with a thickness of 350 to 500 nm.
A circuit pattern inspection method characterized by irradiating with excitation light.
JP13693889A 1989-05-30 1989-05-30 Circuit pattern inspection method Expired - Fee Related JPH0676971B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13693889A JPH0676971B2 (en) 1989-05-30 1989-05-30 Circuit pattern inspection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13693889A JPH0676971B2 (en) 1989-05-30 1989-05-30 Circuit pattern inspection method

Publications (2)

Publication Number Publication Date
JPH032547A true JPH032547A (en) 1991-01-08
JPH0676971B2 JPH0676971B2 (en) 1994-09-28

Family

ID=15187052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13693889A Expired - Fee Related JPH0676971B2 (en) 1989-05-30 1989-05-30 Circuit pattern inspection method

Country Status (1)

Country Link
JP (1) JPH0676971B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008051635A (en) * 2006-08-24 2008-03-06 Sumitomo Electric Ind Ltd Method and device for inspecting mounted piece
CN100406873C (en) * 2002-02-25 2008-07-30 索尼化学&信息部件株式会社 Non-destructive detecting method for solidification level of solidified article of solidified adhesive composition and method for producing electronic device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100406873C (en) * 2002-02-25 2008-07-30 索尼化学&信息部件株式会社 Non-destructive detecting method for solidification level of solidified article of solidified adhesive composition and method for producing electronic device
JP2008051635A (en) * 2006-08-24 2008-03-06 Sumitomo Electric Ind Ltd Method and device for inspecting mounted piece

Also Published As

Publication number Publication date
JPH0676971B2 (en) 1994-09-28

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