JPH0325465Y2 - - Google Patents

Info

Publication number
JPH0325465Y2
JPH0325465Y2 JP1987032855U JP3285587U JPH0325465Y2 JP H0325465 Y2 JPH0325465 Y2 JP H0325465Y2 JP 1987032855 U JP1987032855 U JP 1987032855U JP 3285587 U JP3285587 U JP 3285587U JP H0325465 Y2 JPH0325465 Y2 JP H0325465Y2
Authority
JP
Japan
Prior art keywords
valve
valve body
piezoelectric
piezoelectric actuators
actuators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987032855U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63141380U (un
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987032855U priority Critical patent/JPH0325465Y2/ja
Publication of JPS63141380U publication Critical patent/JPS63141380U/ja
Application granted granted Critical
Publication of JPH0325465Y2 publication Critical patent/JPH0325465Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
JP1987032855U 1987-03-06 1987-03-06 Expired JPH0325465Y2 (un)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987032855U JPH0325465Y2 (un) 1987-03-06 1987-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987032855U JPH0325465Y2 (un) 1987-03-06 1987-03-06

Publications (2)

Publication Number Publication Date
JPS63141380U JPS63141380U (un) 1988-09-19
JPH0325465Y2 true JPH0325465Y2 (un) 1991-06-03

Family

ID=30839924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987032855U Expired JPH0325465Y2 (un) 1987-03-06 1987-03-06

Country Status (1)

Country Link
JP (1) JPH0325465Y2 (un)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6075775U (ja) * 1983-10-28 1985-05-27 株式会社小金井製作所 電子弁

Also Published As

Publication number Publication date
JPS63141380U (un) 1988-09-19

Similar Documents

Publication Publication Date Title
JP3215113B2 (ja) マイクロバルブ
JP4585690B2 (ja) 流体制御要素
CA2191767A1 (en) Valve actuator
GB2239553B (en) Flow rate control valve
JP2005517134A5 (un)
JP2002530611A (ja) ピボットバルブ装置、特に増幅器
JPH0744560U (ja) フロントカットオフバルブ
US4019532A (en) Flap valve
KR960011227A (ko) 직각 열응답 팽창밸브
US6250332B1 (en) Diaphragm valve
EP0302583A3 (en) Controllable fluid damper assembly
JPH0361706A (ja) マルチモード空気リレー
JPH0325465Y2 (un)
US5522430A (en) Flow valve or shut-off cock for flow networks with sealing means
JP2002514717A (ja) マイクロバルブ
JPH0331891Y2 (un)
CA2332223A1 (en) High gain fluid control valve assembly
JPS602556B2 (ja) 小型3方電磁弁
JPH0325467Y2 (un)
JPH0325466Y2 (un)
JPH0220874B2 (un)
JPH07785Y2 (ja) 圧電バルブ
JPH0378512B2 (un)
JPH0636371Y2 (ja) 電磁弁
JPH0430474Y2 (un)