JPH03247788A - Production of stamper for optical disk - Google Patents
Production of stamper for optical diskInfo
- Publication number
- JPH03247788A JPH03247788A JP4388090A JP4388090A JPH03247788A JP H03247788 A JPH03247788 A JP H03247788A JP 4388090 A JP4388090 A JP 4388090A JP 4388090 A JP4388090 A JP 4388090A JP H03247788 A JPH03247788 A JP H03247788A
- Authority
- JP
- Japan
- Prior art keywords
- stamper
- cutting tool
- crystal diamond
- grooving
- plating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 46
- 230000003287 optical effect Effects 0.000 title claims abstract description 45
- 239000000758 substrate Substances 0.000 claims abstract description 44
- 238000007747 plating Methods 0.000 claims abstract description 30
- 238000005520 cutting process Methods 0.000 claims abstract description 24
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 22
- 239000010432 diamond Substances 0.000 claims abstract description 22
- 239000013078 crystal Substances 0.000 claims abstract description 19
- 229910018104 Ni-P Inorganic materials 0.000 claims abstract description 7
- 229910018536 Ni—P Inorganic materials 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 20
- 238000005323 electroforming Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 7
- 238000003754 machining Methods 0.000 abstract description 4
- 230000003746 surface roughness Effects 0.000 abstract description 2
- 238000004904 shortening Methods 0.000 abstract 1
- 238000007796 conventional method Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 238000000465 moulding Methods 0.000 description 3
- 239000012779 reinforcing material Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229920005668 polycarbonate resin Polymers 0.000 description 2
- 239000004431 polycarbonate resin Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000011536 re-plating Methods 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、光ディスク用スタンパの製造方法に関し、詳
細には、光ディスク基板を成形するためのスタンバに関
する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method for manufacturing a stamper for an optical disc, and more particularly to a stamper for molding an optical disc substrate.
（従来の技術）
従来、光ディスク用スタンパの製造は第６回に示す如き
工程により行われている。即ち、（ａ）ガラス基板ａ壬
を高精度に平面研磨した後、（ｂ）該基板側上にホトレ
ジスト０５）をスピンコードし、（Ｃ）レーザにより案
内溝を露光し、（ｄ）現像して溝（５）付きガラス原板
（１ωを作り、（ｅ）該原板θωの表面を導体化し、（
ｆ）Ｎｉ電鋳して電鋳材を採取（以降、電鋳転写という
）してマスター０７）と成し、（ｇ）該マスター０りを
電鋳転写してマザー０８）と成し、（１１）該マザー０
８）を電鋳転写してスタンバθりを採取する。（ｉ）該
スタンバ０２）は、厚みが０．３ｍｍ程度であって薄い
ので、裏面に補強材として硬質材０９）を貼り合わせた
後、スタンバ■として用いられる。(Prior Art) Conventionally, a stamper for an optical disk has been manufactured by the steps shown in the sixth section. That is, (a) after polishing the surface of the glass substrate A with high precision, (b) spin-coding photoresist 05) on the substrate side, (C) exposing the guide groove with a laser, and (d) developing. (e) make the surface of the original plate θω a conductor, (
f) Ni electroforming and collecting the electroformed material (hereinafter referred to as electroform transfer) to form master 07), (g) electroforming transfer of the master 0 to form mother 08), ( 11) The mother 0
8) was electroformed and transferred, and the standby angle θ was sampled. (i) Since the stand bar 02) is thin, having a thickness of about 0.3 mm, it is used as a stand bar (2) after a hard material 09) is bonded to the back side as a reinforcing material.
上記スタンバＱｌ）に樹脂を注型し、樹脂成形温度に加
熱し、冷却後樹脂を採取する事により、スタンバＣ！０
の溝形状が反転転写された樹脂製光ディスり基板が製造
される。尚、スタンパばかかる基板製造に複数回使用さ
れ、溝の形状精度が低下すると、更新される。該更新用
スタンパは、前記ガラス基板を再研磨した後、上記（ｂ
）〜（ｉ）の工程により製造される。By pouring the resin into the above-mentioned standba Ql), heating it to the resin molding temperature, and collecting the resin after cooling, the standba C! 0
A resin optical disk substrate with the groove shape reversely transferred is manufactured. Note that if the stamper is used multiple times to manufacture the substrate and the shape accuracy of the groove deteriorates, the stamper is updated. After re-polishing the glass substrate, the renewal stamper performs the above (b)
) to (i).
（発明が解決しようとする課題）
ところが、上記光ディスク基板の製造の際に、スタンパ
も樹脂成形温度に加熱されるので、スタンパと前記硬質
材との接合強度が低下し、密着度が低くなり、その結果
得られる光ディスク基板の形状精度が悪くなるという問
題点がある。(Problems to be Solved by the Invention) However, during the production of the optical disc substrate, the stamper is also heated to the resin molding temperature, so the bonding strength between the stamper and the hard material decreases, and the degree of adhesion decreases. As a result, there is a problem in that the shape accuracy of the resulting optical disc substrate deteriorates.
又、前記の如く、スタンパの製造に際し電鋳転写が数多
く行われ、該転写の度に溝の形状精度が低下するので、
スタンパの溝の形状精度が充分でなく、その結果得られ
る光ディスク基板の溝の形状精度が低くなるという欠点
もある。In addition, as mentioned above, many electroforming transfers are performed when manufacturing the stamper, and the shape accuracy of the grooves decreases with each transfer.
Another drawback is that the shape precision of the grooves of the stamper is not sufficient, and as a result, the shape precision of the grooves of the resulting optical disk substrate is low.
そこで、上記問題点の解決策が検討され、特開昭６２−
３４４７号公報には第７図に示す如き工程による方法が
提案されている。即ち、（ａ）ガラス基板側を研磨した
後、（１））該基板０４上にＣｒの薄膜、その上にＡｕ
の薄膜を形成し、（Ｃ）該二層をダイヤモンドスタイラ
ス（２１）により切削して案内溝を形成せしめ、光ディ
スク用スタンパ（２２）と成すものである。Therefore, solutions to the above problems were considered, and
Japanese Patent No. 3447 proposes a method using steps as shown in FIG. That is, (a) after polishing the glass substrate side, (1)) a thin film of Cr is deposited on the substrate 04, and a thin film of Au is deposited thereon.
(C) The two layers are cut with a diamond stylus (21) to form a guide groove to form an optical disk stamper (22).
しかし、上記提案された方法により得られるスタンパも
、前記従来法の場合と同様、光ディスク基板製造に複数
回使用すると、溝の形状精度が低下するので、更新する
必要がある。該更新用スタンパの製造は、少なくとも前
記ガラス基板の再研磨から始める必要があるので、該製
造に長時間を要するという問題点がある。However, similarly to the conventional method, when the stamper obtained by the method proposed above is used multiple times to manufacture an optical disk substrate, the accuracy of the groove shape deteriorates, so it is necessary to renew the stamper. The manufacture of the renewal stamper requires at least the re-polishing of the glass substrate, so there is a problem in that the manufacture takes a long time.
本発明はこの様な事情に着目してなされたものであって
、その目的は優れたスタンパの溝の形状精度及び光ディ
スク基板の加工精度が得られると共に、更新用スタンパ
の製造時間を短縮し得る光ディスク用スタンパの製造方
法を提供しようとするものである。The present invention has been made in view of these circumstances, and its purpose is to obtain excellent shape accuracy of stamper grooves and processing accuracy of optical disk substrates, and to shorten the manufacturing time of replacement stampers. The present invention aims to provide a method for manufacturing a stamper for optical discs.
（課題を解決するだめの手段）
上記の目的を達成するために、本発明に係る光ディスク
用スタンパの製造方法は次のような構成としている。(Means for Solving the Problems) In order to achieve the above object, the method for manufacturing an optical disk stamper according to the present invention has the following configuration.
即ち、請求項１に記載の製造方法は、金属基板上に無電
解層−Ｐめっき層を形成せしめ、該めっき層を単結晶ダ
イヤモンドバイトにより鏡面切削した後、溝入れ用単結
晶ダイヤモンドバイトにより溝入れ加工し、該めっき層
に溝を形成せしめ、光ディスク用スタンパと成すことを
特徴とする光ディスク用スタンパの製造方法である。That is, in the manufacturing method according to claim 1, an electroless layer-P plating layer is formed on a metal substrate, the plating layer is mirror-cut with a single-crystal diamond cutting tool, and then a groove is cut with a single-crystal diamond cutting tool for grooving. This is a method of manufacturing a stamper for an optical disc, characterized in that a stamper for an optical disc is manufactured by forming a groove in the plating layer.
請求項２に記載の製造方法は、前記請求項１に記載の製
造方法においてめっき層に溝を形成した後、該溝形成材
を溝付き電鋳用原盤として用いてＮｉ電鋳し、該電鋳材
を採取して光ディスク用スタンパと成すことを特徴とす
る光ディスク用スタンパの製造方法である。In the manufacturing method according to claim 2, after forming grooves in the plating layer in the manufacturing method according to claim 1, Ni electroforming is performed using the groove forming material as a grooved master plate for electroforming. This is a method for manufacturing a stamper for an optical disc, which is characterized in that a cast material is collected and made into a stamper for an optical disc.
（作 用）
本発明に係る光ディスク用スタンパの製造方法は、前記
の如く、金属基板上に無電解Ｎｉ−Ｐめっき層を形成せ
しめるようにしているので、比較的表面が平滑なめっき
層を準備し得る。次に、該めっき層を単結晶ダイヤモン
ドバイトにより鏡面切削するようにしており、該バイト
は鏡面切削加圧性に優れているので、表面が極めて平滑
なめっき層を有する金属基板が得られる。尚、金属基板
を用いているのは、無電解Ｎｉ−Ｐめっき層を形成せし
めるためである。(Function) As described above, in the method for manufacturing an optical disc stamper according to the present invention, an electroless Ni-P plating layer is formed on a metal substrate, so a plating layer with a relatively smooth surface is prepared. It is possible. Next, the plating layer is mirror-cut with a single-crystal diamond cutting tool, and since the cutting tool has excellent mirror-cutting and pressurizing properties, a metal substrate having a plating layer with an extremely smooth surface can be obtained. Note that the reason why the metal substrate is used is to form an electroless Ni--P plating layer.
」二記鏡面切削後、溝入れ用単結晶ダイヤモンドバイト
により溝入れ加工するようにしており、該ハイドは溝入
れ加工性に優れているので、寸法形状精度が優れ且つ充
分に深い溝を、めっき層に形成し得る。即ち、前記従来
法のレーザにより案内溝を露光する場合と異なり、めっ
き層の厚みは特に制限がなく、充分に厚いめっき層に所
要寸法形状の溝を形成し得、そのため厚みが大きい光デ
ィスク用スタンパが得られるようになる。従って、補強
材（硬質材）を貼り合わせる事なく、そのままスタンパ
として使用し得、そのため光ディスク基板の加工精度が
向上する。After mirror cutting, grooving is performed using a single-crystal diamond tool for grooving.Since this hide has excellent grooving properties, it is possible to create grooves with excellent dimensional shape accuracy and sufficient depth by plating. It can be formed into layers. That is, unlike the conventional method in which guide grooves are exposed using a laser, there is no particular restriction on the thickness of the plating layer, and grooves of the desired size and shape can be formed in a sufficiently thick plating layer. will be obtained. Therefore, it can be used as a stamper as it is without bonding a reinforcing material (hard material), and therefore the processing accuracy of the optical disk substrate is improved.
又、上記製造方法は、電鋳転写などの転写工程を経ない
ので、転写による溝の形状精度低下が生じず、そのため
優れた溝形状精度を有するスタンパが得られる。Furthermore, since the above manufacturing method does not involve a transfer step such as electroforming transfer, the shape accuracy of the grooves does not deteriorate due to transfer, and therefore a stamper having excellent groove shape accuracy can be obtained.
更に、前記の如くめっき層厚の大きなスタンパに成し得
るので、更新用スタンパの製造に際しては、再度めっき
する必要がなく、めっき層の鏡面切削から始め、次いで
溝入れ加工すればよい。従って、加工工程数が少なく、
更新用スタンパの製造時間を短縮し得る。Furthermore, since the stamper can be made with a thick plating layer as described above, there is no need for re-plating when manufacturing a renewal stamper, and it is sufficient to start with mirror cutting of the plating layer and then grooving. Therefore, the number of processing steps is small,
The manufacturing time of the renewal stamper can be shortened.
又、上記製造方法は電鋳転写回数が一回であって少ない
ので、優れた溝形状精度を有するスタンパが得られる。Further, since the above manufacturing method requires only one electroforming transfer, which is small, a stamper with excellent groove shape accuracy can be obtained.
更に、更新用スタンパの製造は、前記溝形成材のめっき
層の鏡面切削から始めればよいので、その製造時間を短
縮し冑る。Furthermore, since the renewal stamper can be manufactured by starting with mirror cutting of the plating layer of the groove forming material, the manufacturing time can be shortened and completed.
尚、請求項１に記載の製造方法で得られるスタンパによ
り、光ディスク基板を製造すると、スタンパの溝（溝入
れ加工により形成された溝）の凸部は基板の四部となっ
て反転転写されるので、溝入れ力ｌ工に際しては基板四
部の所要形状に対応させてスタンパ凸部を形成させる必
要がある。Note that when an optical disk substrate is manufactured using the stamper obtained by the manufacturing method according to claim 1, the convex portions of the grooves of the stamper (grooves formed by grooving) become four parts of the substrate and are reversely transferred. During the grooving process, it is necessary to form the stamper protrusions corresponding to the required shapes of the four parts of the substrate.
これに対し、請求項２に記載の製造方法で得られるスタ
ンパによる場合は、前記溝形成材（溝入れ加工したもの
）の溝の凹部は光ディスク基板の凹部と対応するので、
溝入れ加工に際しては基板凹部の所要形状に対応させて
溝形底材凹部を形成すればよい。On the other hand, in the case of the stamper obtained by the manufacturing method according to claim 2, the recesses of the grooves of the groove forming material (grooved material) correspond to the recesses of the optical disc substrate.
In the grooving process, the groove-shaped bottom material recess may be formed in accordance with the desired shape of the substrate recess.
従って、基板凹部の所要形状によって上記いづれかの方
法を選択して使用すればよく、基板凹部が中挟で深い場
合などの如く、基板凹部に対応すイ）ソ、タンパ凸部の
形成力嘆ましい場合には、請求項２に記載の製造方法の
方が好適である。Therefore, it is only necessary to select and use one of the above methods depending on the required shape of the substrate recess, and in cases where the substrate recess is deep and sandwiched between the substrate, it is possible to In such a case, the manufacturing method according to claim 2 is more suitable.
（実施例）
尖酪桝土
実施例■に係る光ディスク用スタンパの製造工程の概要
図を第１図に示す。(Example) FIG. 1 shows a schematic diagram of the manufacturing process of an optical disc stamper according to Example 2.
第１図に示す如く、（ａ）先ず、金属基板（＋）上に無
電解Ｎｉ−Ｐめっき層（２）（厚み５０μｍ、Ｐ量：１
１．２χ）を形成せしめ、（ｂ）次に、めっき層（２）
表面の形状精度をよくするため、単結晶ダイヤモンドバ
イト（３）（先端Ｒ：２０Ｒ）を用い、切込み量：５μ
ｍ、送り： １０１ｔ ｍ／ｒｅｖの切削加工条件で、
前記めっき層（２）の表面を鏡面切削して、表面粗さ：
０．００２μｍ Ｒａ以下の鏡面に仕上げた。尚、上記
単結晶ダイヤモンドハイｌ−（３’ｌには天然の単結晶
ダイヤモンドを使用した。As shown in FIG. 1, (a) first, electroless Ni-P plating layer (2) (thickness 50 μm, P amount: 1
(b) Next, a plating layer (2) is formed.
In order to improve the surface shape accuracy, use a single crystal diamond cutting tool (3) (tip radius: 20R), depth of cut: 5μ.
m, feed: 101t m/rev cutting conditions,
The surface of the plating layer (2) is mirror-cut to obtain surface roughness:
Finished with a mirror finish of 0.002 μm Ra or less. Incidentally, a natural single crystal diamond was used for the above single crystal diamond high l-(3'l).
（Ｃ）次に、第３図に示す先端形状を有する溝入れ用単
結晶ダイヤモンドバイト（４）を用い、めっき層（２）
に溝入れ加工し、溝（５）を形成せしめた。該加工に際
しては、溝深さを一定にするため第４〜５図に示す微小
切込み工具台（９）を使用し、非接触変位計００）によ
りめっき層（２）表面の振れを検出し、溝深さが一定に
なるように圧電素子（１１）への印加電圧を制御した。(C) Next, using a single-crystal diamond bit for grooving (4) having the tip shape shown in Fig. 3, the plating layer (2) is
Grooving was performed to form grooves (5). During this machining, in order to keep the groove depth constant, a micro-cutting tool stand (9) shown in Figs. The voltage applied to the piezoelectric element (11) was controlled so that the groove depth was constant.
溝（５）は、溝深さ：０．０１７ｚｍ、溝ピンチ二１．
６ μｍにし、旋削により螺旋状に仕上げた。Groove (5) has a groove depth of 0.017 zm and a groove pinch 21.
It was made into a spiral shape by turning to a thickness of 6 μm.
上記工程（Ｃ）で得られた溝形成材は、従来法により得
られるスタンパに比し、溝の形状精度が極めて優れてい
た。The groove forming material obtained in the above step (C) had extremely superior groove shape accuracy compared to the stamper obtained by the conventional method.
該溝形成材をスタンパ（６）として用い、スタンパ（６
）の溝形状が反転転写されたポリカーボネート樹脂製の
光ディスク基板（７）を製作した。該基板（力の加工精
度は、従来法で得られるスタンパによる場合に比し、極
めて優れていた。The groove forming material is used as a stamper (6), and the stamper (6) is
) An optical disk substrate (7) made of polycarbonate resin was manufactured, on which the groove shape of the groove was reversely transferred. The processing accuracy of the substrate (force) was extremely superior to that obtained using a stamper obtained by a conventional method.
上記スタンパ（６）による光ディスク基板の製造を繰り
返し、溝の形状精度が低下した時点で更新用スタンパの
製作を行った。該製作は、上記スタンパ（６）のめっき
層（２）を前記（ｂ）工程と同様の方法で鏡面切削し、
前記（Ｃ）工程と同様の方法で溝入れ加工する事により
行った。該製作の所要時間は、従来法での更新用スタン
パ製作のそれに比し、極めて短いものであった。The production of optical disk substrates using the stamper (6) was repeated, and when the accuracy of the groove shape decreased, a replacement stamper was produced. The production involves mirror-cutting the plating layer (2) of the stamper (6) in the same manner as in step (b),
Grooving was performed in the same manner as in step (C) above. The time required for this manufacturing was extremely short compared to that for manufacturing a renewal stamper using the conventional method.
実差ｆｌ
実施例２に係る光ディスク用スタンパの製造工程の概要
図を第２図に示す。Actual difference fl A schematic diagram of the manufacturing process of the optical disk stamper according to the second embodiment is shown in FIG. 2.
第２図に示す如く、先ず、実施例１の場合と同様の工程
（ａ）、（ｂ）、（Ｃ）により、同様の溝形状を有する
溝形成材を製作した。（ｄ）次いで、該溝形成材を溝付
き電鋳用原盤（８）として用い、Ｎｉ電鋳し、該電鋳材
を採取して光ディスク用スタンパ０２）とした。As shown in FIG. 2, first, a groove forming material having the same groove shape as in Example 1 was manufactured through the same steps (a), (b), and (C). (d) Next, the groove forming material was used as a grooved master disk for electroforming (8), Ni electroforming was performed, and the electroforming material was collected to form an optical disc stamper 02).
該スタンパ０２）は、従来法による場合のスタンパに比
し、溝の形状精度が極めて優れていた。The stamper 02) had extremely superior groove shape accuracy compared to stampers made by the conventional method.
上記スタンパ０２）を用い、硬質材０９）を貼り合わせ
て、ポリカーボネート樹脂製の光ディスク基板０３）を
製作した。該基板の加工精度は、従来法で得られるスタ
ンパによる場合に比し、極めて優れていた。Using the stamper 02), a hard material 09) was bonded together to produce an optical disc substrate 03) made of polycarbonate resin. The processing accuracy of the substrate was extremely superior to that obtained using a stamper obtained by a conventional method.
上記スタンパ０２）による光ディスク基板の製造を繰り
返し、溝の形状精度が低下した時点で更新用スタンパの
製作を行った。該製作は、前記電鋳用原盤（８）のめっ
き層（２）を、前記工程（ｂ）〜（ｄ）と同様の方法で
鏡面切削、溝入れ加工、Ｎｉ電鋳する事により行った。The production of optical disk substrates using the above-mentioned stamper 02) was repeated, and when the shape precision of the grooves decreased, a replacement stamper was produced. This production was performed by mirror-cutting, grooving, and Ni electroforming the plating layer (2) of the electroforming master (8) in the same manner as in steps (b) to (d).
該製作の所要時間は、従来法での更新用スタンパ製作の
それに比し、極めて短いものであった。The time required for this manufacturing was extremely short compared to that for manufacturing a renewal stamper using the conventional method.
尚、実施例１の場合は、溝形成材の溝の四部が光ディス
ク基板の凹部と対応し、実施例２の場合は、溝形成材の
溝の四部が光ディスク基板の四部と対応する。In the case of Example 1, the four parts of the groove of the groove forming material correspond to the recessed parts of the optical disc substrate, and in the case of Example 2, the four parts of the groove of the groove forming material correspond to the four parts of the optical disc substrate.
（発明の効果）
本発明に係る光ディスク用スタンパの製造方法によれば
、転写による溝の形状精度低下が生じないので、優れた
溝形状精度を有するスタンパが得られるようにな″る。(Effects of the Invention) According to the method of manufacturing a stamper for an optical disk according to the present invention, a decrease in groove shape accuracy due to transfer does not occur, so that a stamper having excellent groove shape accuracy can be obtained.
又、厚みが大きいスタンパが得られるので、補強材を貼
り合わせることなく、そのままスタンパとして使用し得
、そのため光ディスク基板の加工精度が向上する。更に
、更新用スタンパの製造に際し、その製造工程数が少な
くてずみ、該製造の所要時間を大幅に短縮し得るように
なる。Furthermore, since a stamper with a large thickness can be obtained, it can be used as a stamper as it is without bonding a reinforcing material to it, thereby improving the processing accuracy of the optical disk substrate. Furthermore, when manufacturing the renewal stamper, the number of manufacturing steps is reduced, and the time required for manufacturing can be significantly shortened.
第１回は、実施例１に係る光ディスク用スタンパの製造
工程の概要図、第２図は、実施例２に係る光ディスク用
スタンパの製造工程の概要図、第３図は、溝入れ用単結
晶ダイヤモンドバイトの先端形状を示す図、第４図は、
溝入れ加工用の微小切込み工具台の側断面回、第５図は
前記微小切込み工具台の正面図、第６図は、従来の光デ
ィスク用スタンパの製造工程を示す図、第７図は、特開
昭６２−３４４７号公報に記載の光ディスク用スタンバ
の製造工程を示す図である。
（１）−金属基板 （２）−無電解Ｎｉ−Ｐめっき
層（３）−単結晶ダイヤモンドハイト
（４）−溝入れ用単結晶ダイヤモンドバイト（５）−溝
（６） ０２） Ｃ！１（２２）−光ディスク用ス
タンパ（７）−光ディスク基板 （８）−電鋳用原盤
（９）−微小切込み工具台 ００）−非接触変位計０１
）−圧電素子 （＋３Ｌ−光ディスク基板０４
）−ガラス基板 θω−ホトレジスト０ω−溝付
きガラス原板 ０７）−マスターθＢ）−マザー
０９）−硬質材（２１Ｌ−ダイヤモンドスタイラ
スThe first part is a schematic diagram of the manufacturing process of the stamper for optical discs according to Example 1, FIG. 2 is a schematic diagram of the manufacturing process of the stamper for optical discs according to Example 2, and FIG. Figure 4 shows the shape of the tip of a diamond bite.
FIG. 5 is a front view of the micro-cutting tool stand for grooving, FIG. 6 is a diagram showing the manufacturing process of a conventional stamper for optical disks, and FIG. 7 is a special It is a figure which shows the manufacturing process of the standber for optical discs described in the patent publication 62-3447. (1) - Metal substrate (2) - Electroless Ni-P plating layer (3) - Single crystal diamond height (4) - Single crystal diamond bite for grooving (5) - Groove (6) 02) C! 1 (22) - Stamper for optical disc (7) - Optical disc substrate (8) - Master disc for electroforming (9) - Fine cutting tool stand 00) - Non-contact displacement meter 01
)-Piezoelectric element (+3L-Optical disk board 04
) - Glass substrate θω - Photoresist 0ω - Grooved glass original plate 07) - Master θB) - Mother
09)-Hard material (21L-Diamond stylus
Claims (2)
め、該めっき層を単結晶ダイヤモンドバイトにより鏡面
切削した後、溝入れ用単結晶ダイヤモンドバイトにより
溝入れ加工し、該めっき層に溝を形成せしめ、光ディス
ク用スタンパと成すことを特徴とする光ディスク用スタ
ンパの製造方法。(1) Form an electroless Ni-P plating layer on a metal substrate, mirror-cut the plating layer with a single-crystal diamond cutting tool, and then grooving with a single-crystal diamond cutting tool to make grooves in the plating layer. 1. A method for producing a stamper for an optical disc, the method comprising: forming a stamper for an optical disc.
め、該めっき層を単結晶ダイヤモンドバイトにより鏡面
切削した後、溝入れ用単結晶ダイヤモンドバイトにより
溝入れ加工し、該めっき層に溝を形成せしめて溝付き電
鋳用原盤と成し、該原盤を用いてＮｉ電鋳し、該電鋳材
を採取して光ディスク用スタンパと成すことを特徴とす
る光ディスク用スタンパの製造方法。(2) Form an electroless Ni-P plating layer on a metal substrate, mirror-cut the plating layer with a single-crystal diamond cutting tool, and then grooving with a single-crystal diamond cutting tool to make grooves in the plating layer. A method for producing a stamper for an optical disc, comprising: forming a grooved master for electroforming, performing Ni electroforming using the master, and collecting the electroformed material to form a stamper for an optical disc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4388090A JPH03247788A (en) | 1990-02-23 | 1990-02-23 | Production of stamper for optical disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4388090A JPH03247788A (en) | 1990-02-23 | 1990-02-23 | Production of stamper for optical disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03247788A true JPH03247788A (en) | 1991-11-05 |
Family
ID=12676019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4388090A Pending JPH03247788A (en) | 1990-02-23 | 1990-02-23 | Production of stamper for optical disk |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03247788A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1156138A2 (en) * | 2000-05-12 | 2001-11-21 | Pioneer Corporation | Electrode material for forming stamper and thin film for forming stamper |
| JP2006205332A (en) * | 2005-01-31 | 2006-08-10 | Towa Corp | Microstructure, its manufacturing method, master pattern used for its manufacture and light emitting mechanism |
| JP2009287048A (en) * | 2008-05-27 | 2009-12-10 | Nippon Zeon Co Ltd | Method for manufacturing die member, and die member |
| US7632628B2 (en) * | 2003-04-18 | 2009-12-15 | Pioneer Corporation | Stamper and method for production thereof |
-
1990
- 1990-02-23 JP JP4388090A patent/JPH03247788A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1156138A2 (en) * | 2000-05-12 | 2001-11-21 | Pioneer Corporation | Electrode material for forming stamper and thin film for forming stamper |
| EP1156138A3 (en) * | 2000-05-12 | 2004-07-14 | Pioneer Corporation | Electrode material for forming stamper and thin film for forming stamper |
| US7632628B2 (en) * | 2003-04-18 | 2009-12-15 | Pioneer Corporation | Stamper and method for production thereof |
| JP2006205332A (en) * | 2005-01-31 | 2006-08-10 | Towa Corp | Microstructure, its manufacturing method, master pattern used for its manufacture and light emitting mechanism |
| JP2009287048A (en) * | 2008-05-27 | 2009-12-10 | Nippon Zeon Co Ltd | Method for manufacturing die member, and die member |
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