JPH03242335A - Member for molding optical element - Google Patents

Member for molding optical element

Info

Publication number
JPH03242335A
JPH03242335A JP3575890A JP3575890A JPH03242335A JP H03242335 A JPH03242335 A JP H03242335A JP 3575890 A JP3575890 A JP 3575890A JP 3575890 A JP3575890 A JP 3575890A JP H03242335 A JPH03242335 A JP H03242335A
Authority
JP
Japan
Prior art keywords
molding
alloy
mold
optical element
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3575890A
Other languages
Japanese (ja)
Inventor
Yasuhiro Yoneda
靖弘 米田
Masahiro Katashiro
雅浩 片白
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP3575890A priority Critical patent/JPH03242335A/en
Publication of JPH03242335A publication Critical patent/JPH03242335A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06Construction of plunger or mould
    • C03B11/08Construction of plunger or mould for making solid articles, e.g. lenses
    • C03B11/084Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
    • C03B11/086Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor of coated dies
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/02Press-mould materials
    • C03B2215/08Coated press-mould dies
    • C03B2215/10Die base materials
    • C03B2215/12Ceramics or cermets, e.g. cemented WC, Al2O3 or TiC
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/02Press-mould materials
    • C03B2215/08Coated press-mould dies
    • C03B2215/14Die top coat materials, e.g. materials for the glass-contacting layers
    • C03B2215/20Oxide ceramics
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/02Press-mould materials
    • C03B2215/08Coated press-mould dies
    • C03B2215/30Intermediate layers, e.g. graded zone of base/top material
    • C03B2215/32Intermediate layers, e.g. graded zone of base/top material of metallic or silicon material

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

PURPOSE:To provide a mold member improved in the heat resistance, corrosion resistance, oxidation resistance and glass-demolding property thereof by preparing at least the surface portion of the mold member from an alloy of Ni, Cr and Al and subsequently oxidizing the outer most surface portion thereof to form an Al2O3 coating film thereon. CONSTITUTION:A Ni-Cr-Al alloy thin film 2 comprising 15-30wt.% of Ni and Cr and 2-16wt.% of Al is formed on the molding surface of a mold base material 1 comprising a WC-Ni alloy by a spattering method and subsequently thermally oxidized to form an Al2O3 coating film 3 on the outer most surface.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、光学素子成形用部材に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a member for molding optical elements.

〔従来の技術〕[Conventional technology]

近年、レンズ、プリズム等の光学素子を製造する方法と
して、研削、研磨等を行わずに高い面精度の一対の成形
用型間に加熱軟化した光学素子のガラス素材を挿入配置
し、これを加圧するだけで、光学素子を得る押圧成形が
行われている。
In recent years, as a method for manufacturing optical elements such as lenses and prisms, a glass material for optical elements that has been heated and softened is inserted between a pair of molds with high surface precision without grinding or polishing, and then processed. Press molding is used to obtain optical elements simply by pressing.

従来、この押圧成形で用いる光学素子成形用型。Traditionally, molds for molding optical elements are used in this press molding.

ガラス保持用部材等の光学素子成形用部材は、例えば特
開昭64−61327号公報や特開昭62−18585
1号公報に開示されるように、N1−Cr 、Ni −
V等の2元合金からなる材料を素材としている。ここに
、合金を用いているのは、光学素子成形用部材が高温の
加熱軟化したガラス素材に接触するので、高温に耐え得
るようにするためである。
Optical element molding members such as glass holding members are disclosed in, for example, JP-A-64-61327 and JP-A-62-18585.
As disclosed in Publication No. 1, N1-Cr, Ni-
The material is made of a binary alloy such as V. The reason why the alloy is used here is to make it able to withstand high temperatures since the optical element molding member comes into contact with a glass material that has been softened by heating at high temperatures.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかし、上記従来の光学素子成形用部材は、高温酸化雰
囲気中で表面にCr2O2やV、O3の酸化物の被膜が
形成されているので、低融点硝材の成形には耐え得るが
、高融点硝材では、600°C〜800°Cの高温にさ
らされるので、内部酸化の進行や酸化被膜の剥離等を生
じ、寿命が著しく低下し、コスト高になってしまうとい
う問題があった。
However, since the above-mentioned conventional optical element molding members have a film of Cr2O2, V, and O3 oxides formed on their surfaces in a high-temperature oxidizing atmosphere, they can withstand molding of low-melting point glass materials; In this case, since it is exposed to high temperatures of 600° C. to 800° C., internal oxidation progresses, the oxide film peels off, etc., resulting in a significant decrease in life span and high cost.

本発明は、かかる従来の問題点に鑑みてなされたもので
、600℃以上の高温下でも部材表面に何ら変化がなく
、長時間の使用にも耐え得る光学素子成形用部材を提供
することを目的とする。
The present invention has been made in view of such conventional problems, and aims to provide an optical element molding member that does not undergo any change in the surface of the member even at high temperatures of 600°C or higher and can withstand long-term use. purpose.

〔課題を解決するための手段〕[Means to solve the problem]

上記目的を達成するために、本発明は、少なくとも表面
部をNi とCrとAl2との合金で形成するとともに
、その最表面を酸化させることによりA l z Ox
被膜を形成して光学素子成形用部材を構成した。
In order to achieve the above object, the present invention forms at least the surface portion with an alloy of Ni, Cr, and Al2, and oxidizes the outermost surface to form Al z Ox
A film was formed to constitute an optical element molding member.

本発明において、Ni 、CrおよびAlの成分比は、
Crが15〜30重量%、Al2が2〜16重景%およ
び残部がNi というものが好ましい。
In the present invention, the component ratio of Ni, Cr and Al is as follows:
It is preferable that Cr is 15 to 30% by weight, Al2 is 2 to 16% by weight, and the balance is Ni.

〔作用〕[Effect]

上記構成の本発明の光学素子成形用部材においては、表
面がA I! z Os被膜で覆われているので、熱的
および化学的にも安定で、しかも合金の酸化速度がCr
、0.やV、O,よりも遅い、また、NiCr−Al!
、3元合金としたことでA 120 x被膜の密着性も
高く、合金からA A z Os被膜が剥離することは
ほとんどない。したがって、本発明の光学素子成形用部
材は、高温にさらされた状態でも劣化せず、しかもAN
工O1が熱的および化学的に安定なために、ガラスが高
い圧力で接触してもガラスの融着を生じることがなく、
長時間の使用に耐えることができる。
In the optical element molding member of the present invention having the above configuration, the surface is A I! z Because it is covered with an Os film, it is thermally and chemically stable, and the oxidation rate of the alloy is lower than that of Cr.
, 0. , V, O, and NiCr-Al!
By using a ternary alloy, the adhesion of the A 120 x film is high, and the A z Os film hardly peels off from the alloy. Therefore, the optical element molding member of the present invention does not deteriorate even when exposed to high temperatures, and has an AN
Because O1 is thermally and chemically stable, it does not cause glass fusion even when glasses come into contact with each other under high pressure.
Can withstand long-term use.

〔実施例〕〔Example〕

(第1実施例) 第1図は、本実施例の光学素子成形用型を示すもので、
W C−N i系合金からなる型基材1の加工面(成形
基礎面)laに、Cr含有量が20重量%、A2含有量
が2重量%および残部がNiで構成されたNi−Cr−
Al1合金薄膜2をスパッタリング法により0.5μ−
の厚さで形成した後、これを大気中で1200°Cに加
熱して成形面(最表面)にA l z O3被膜3を形
成し、成形用型を得た。
(First Example) Figure 1 shows a mold for molding an optical element according to this example.
Ni-Cr containing 20% by weight of Cr, 2% by weight of A2, and the balance being Ni is applied to the processed surface (forming base surface) la of the mold base material 1 made of W C-Ni alloy. −
Al1 alloy thin film 2 was deposited at 0.5 μ- by sputtering method.
This was heated to 1200° C. in the atmosphere to form an Al z O 3 coating 3 on the molding surface (outermost surface) to obtain a mold.

上記成形用型を用いて、SKIに対し5000シヨント
の連続成形を行い、その後の成形用型の表面及び成形レ
ンズ面を観察したところ、成形用型の表面にはガラスの
融着はなく、変化はなかった。また、5000シヨツト
の成形レンズもほぼ良好な面となっていた。
Using the above mold, continuous molding was performed for 5,000 shots of SKI, and when the surface of the mold and the molded lens surface were observed, there was no fusion of glass on the surface of the mold, and there was no change. There was no. Furthermore, the 5000 shot molded lens also had a generally good surface.

これに対し、型基材1の加工面1aにN i −Cr〜
A1合金薄膜2の代わりとしてNi  Cr合金薄膜を
スパッタリング法により0.5μ−の厚さで形成した後
、大気中で600°Cに加熱して成形面にCr工O8被
膜を形成した従来の成形用型を用いて、SKIに対し5
000シヨツトの連続成形を行ったところ、成形面の表
面粗さがRmaxで0.20μ−以上となってしまい、
5000シヨツトの成形レンズ中2000個にくもりが
生じて不良となってしまった。
On the other hand, on the processed surface 1a of the mold base material 1, N i -Cr~
Conventional molding in which a Ni-Cr alloy thin film was formed with a thickness of 0.5 μm by sputtering as a substitute for the A1 alloy thin film 2, and then heated to 600°C in the air to form a Cr-O8 coating on the molding surface. 5 for SKI using a mold
When 000 shots were continuously molded, the surface roughness of the molded surface was 0.20μ or more at Rmax.
Out of 5,000 shots of molded lenses, 2,000 were defective due to cloudiness.

(第2実施例) 第1実施例と同様の光学素子成形用型において、型基材
をNi−Cr−Al2合金により形成し、加工面を成形
面として加工した後、大気中で1200°Cに加熱して
成形用型最表面にA t2 z Os被膜を形成し、成
形用型を得た。
(Second Example) In a mold for molding an optical element similar to the first example, the mold base material was formed from a Ni-Cr-Al2 alloy, and the processed surface was processed as a molding surface, and then heated at 1200°C in the atmosphere. A mold was obtained by heating to form an A t2 z Os coating on the outermost surface of the mold.

本実施例の成形用型を用いて、5KIIに対し5000
シヨツトの連続成形を行ったところ、成形用型の成形面
にガラスの融着はなく、成形用型に何ら変化はなかった
。また、5000シヨツトの成形レンズもほぼ良好な面
となっていた。
Using the mold of this example, 5000 for 5KII
When the shot was continuously molded, there was no melting of the glass on the molding surface of the mold, and there was no change in the mold. Furthermore, the 5000 shot molded lens also had a generally good surface.

(第3実施例) 第2図は、本実施例のガラス保持用部材を示すもので、
加熱軟化したガラス素材4を保持するガラス保持用部材
5は、Cr含有量が20重量%、A2含有量が2重量%
および残部がNlで構成された合金で形成されており、
大気中にて1000°Cで加熱酸化させて、最表面にA
ffiア03被膜6が形成されている。
(Third Example) Figure 2 shows the glass holding member of this example.
The glass holding member 5 that holds the heat-softened glass material 4 has a Cr content of 20% by weight and an A2 content of 2% by weight.
and the remainder is formed of an alloy composed of Nl,
Oxidize by heating at 1000°C in the air to form A on the outermost surface.
An ffi 03 coating 6 is formed.

本実施例のガラス保持用部材5を用いて、比較的軟化点
が高いLaKlBに対し連続成形を行う際に10000
回使用したところ800°Cの高温下で長時間使用した
にも拘らず、表面に何ら変化はなく、ガラスと接触する
内径が酸化の進行によって、変化することがなかった。
Using the glass holding member 5 of this example, when continuous molding is performed on LaKlB, which has a relatively high softening point,
Even though it was used several times at a high temperature of 800°C for a long time, there was no change in the surface, and the inner diameter in contact with the glass did not change due to the progress of oxidation.

なお、上記各実施例において、Ni−Cr −A1合金
にLa、Ce、Y、Th、Ca、Hfまたはこれらの酸
化物を0.1〜数重量%、好ましくは0.5〜1重量%
添加することにより、さらに耐高温腐食性を向上させ、
またA l t Os被膜の密着性を向上させることが
できる。
In each of the above examples, 0.1 to several weight %, preferably 0.5 to 1 weight % of La, Ce, Y, Th, Ca, Hf or oxides thereof are added to the Ni-Cr-A1 alloy.
By adding it, the high temperature corrosion resistance is further improved.
Furthermore, the adhesion of the Al t Os film can be improved.

〔発明の効果〕〔Effect of the invention〕

以上のように、本発明の光学素子成形用部材によれば、
耐熱性、耐食性および耐酸化性に優れ、かつガラスとの
離型性にも優れており、光学ガラス素子の連続成形にお
いて高温下で使用することを要求される部材や、加熱軟
化されたガラスが接触する部材に対して長寿命化を図る
ことができ、光学ガラス素子を安価に製造することがで
きる。
As described above, according to the optical element molding member of the present invention,
It has excellent heat resistance, corrosion resistance, and oxidation resistance, as well as excellent mold releasability from glass, and is suitable for parts that are required to be used at high temperatures in continuous molding of optical glass elements, and for heat-softened glass. It is possible to extend the life of the contacting members, and it is possible to manufacture optical glass elements at low cost.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の第1実施例の光学素子成形用型を示す
縦断面図、第2図は本発明の第3実施例のガラス保持用
部材を示す縦断面図である。 1・・・型基材 2−Ni−Cr  AN合金薄膜 3.6・・・Al□O8被膜 5・・・ガラス保持用部材
FIG. 1 is a vertical cross-sectional view showing a mold for molding an optical element according to a first embodiment of the present invention, and FIG. 2 is a vertical cross-sectional view showing a glass holding member according to a third embodiment of the present invention. 1... Type base material 2-Ni-Cr AN alloy thin film 3.6... Al□O8 coating 5... Glass holding member

Claims (1)

【特許請求の範囲】[Claims] (1)少なくとも表面部をNiとCrとAlとの合金で
形成するとともに、その最表面を酸化させることにより
Al_2O_3被膜を形成したことを特徴とする光学素
子成形用部材。
(1) An optical element molding member characterized in that at least the surface portion thereof is formed of an alloy of Ni, Cr, and Al, and the outermost surface thereof is oxidized to form an Al_2O_3 film.
JP3575890A 1990-02-16 1990-02-16 Member for molding optical element Pending JPH03242335A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3575890A JPH03242335A (en) 1990-02-16 1990-02-16 Member for molding optical element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3575890A JPH03242335A (en) 1990-02-16 1990-02-16 Member for molding optical element

Publications (1)

Publication Number Publication Date
JPH03242335A true JPH03242335A (en) 1991-10-29

Family

ID=12450743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3575890A Pending JPH03242335A (en) 1990-02-16 1990-02-16 Member for molding optical element

Country Status (1)

Country Link
JP (1) JPH03242335A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009096682A (en) * 2007-10-18 2009-05-07 Olympus Corp Method for producing optical element molding die, method for processing optical element molding die, and optical element molding die processed thereby
JPWO2015087429A1 (en) * 2013-12-12 2017-03-16 Hoya株式会社 Polishing glass optical element blank molding die, polishing glass optical element blank manufacturing method, and optical element manufacturing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009096682A (en) * 2007-10-18 2009-05-07 Olympus Corp Method for producing optical element molding die, method for processing optical element molding die, and optical element molding die processed thereby
JPWO2015087429A1 (en) * 2013-12-12 2017-03-16 Hoya株式会社 Polishing glass optical element blank molding die, polishing glass optical element blank manufacturing method, and optical element manufacturing method

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