JPH0323933U - - Google Patents
Info
- Publication number
- JPH0323933U JPH0323933U JP8463189U JP8463189U JPH0323933U JP H0323933 U JPH0323933 U JP H0323933U JP 8463189 U JP8463189 U JP 8463189U JP 8463189 U JP8463189 U JP 8463189U JP H0323933 U JPH0323933 U JP H0323933U
- Authority
- JP
- Japan
- Prior art keywords
- main body
- cover
- chuck
- top plate
- top surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8463189U JPH0323933U (sv) | 1989-07-18 | 1989-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8463189U JPH0323933U (sv) | 1989-07-18 | 1989-07-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0323933U true JPH0323933U (sv) | 1991-03-12 |
Family
ID=31633236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8463189U Pending JPH0323933U (sv) | 1989-07-18 | 1989-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0323933U (sv) |
-
1989
- 1989-07-18 JP JP8463189U patent/JPH0323933U/ja active Pending