JPH0323695U - - Google Patents
Info
- Publication number
- JPH0323695U JPH0323695U JP8428089U JP8428089U JPH0323695U JP H0323695 U JPH0323695 U JP H0323695U JP 8428089 U JP8428089 U JP 8428089U JP 8428089 U JP8428089 U JP 8428089U JP H0323695 U JPH0323695 U JP H0323695U
- Authority
- JP
- Japan
- Prior art keywords
- air supply
- vacuum pump
- bearings
- gas bearing
- casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010926 purge Methods 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8428089U JPH0323695U (en18) | 1989-07-18 | 1989-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8428089U JPH0323695U (en18) | 1989-07-18 | 1989-07-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0323695U true JPH0323695U (en18) | 1991-03-12 |
Family
ID=31632636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8428089U Pending JPH0323695U (en18) | 1989-07-18 | 1989-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0323695U (en18) |
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1989
- 1989-07-18 JP JP8428089U patent/JPH0323695U/ja active Pending