JPH03232718A - Device for synthesizing ammonia by plasma reaction - Google Patents
Device for synthesizing ammonia by plasma reactionInfo
- Publication number
- JPH03232718A JPH03232718A JP2673090A JP2673090A JPH03232718A JP H03232718 A JPH03232718 A JP H03232718A JP 2673090 A JP2673090 A JP 2673090A JP 2673090 A JP2673090 A JP 2673090A JP H03232718 A JPH03232718 A JP H03232718A
- Authority
- JP
- Japan
- Prior art keywords
- reaction
- plasma
- section
- nitrogen
- ammonia
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 title claims abstract description 42
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 31
- 229910021529 ammonia Inorganic materials 0.000 title claims abstract description 21
- 230000002194 synthesizing effect Effects 0.000 title 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000007789 gas Substances 0.000 claims abstract description 14
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 13
- 238000003786 synthesis reaction Methods 0.000 claims abstract description 13
- 238000010406 interfacial reaction Methods 0.000 claims abstract description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 24
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 10
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract description 7
- 229910001873 dinitrogen Inorganic materials 0.000 abstract description 5
- 239000001257 hydrogen Substances 0.000 abstract description 5
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 5
- -1 Nitrogen molecule ions Chemical class 0.000 abstract description 2
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 abstract 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
- 239000007788 liquid Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、プラズマ反応を用いたアンモニア合成装置に
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an ammonia synthesis apparatus using plasma reaction.
従来、この種のプラズマ反応を用いたアンモニア合成装
置は、ガス供給機構部と、プラズマ反応機構部と、それ
らに付属する真空系形成用の真空ポンプ群とから構成さ
れており、プラズマ反応ガスとして水素ガスと窒素ガス
を用いてアンモニアの合成を行なっていた。Conventionally, an ammonia synthesis apparatus using this type of plasma reaction consists of a gas supply mechanism section, a plasma reaction mechanism section, and a group of attached vacuum pumps for forming a vacuum system. Ammonia was synthesized using hydrogen gas and nitrogen gas.
上述した従来のプラズマ反応によるアンモニア合成装置
は、プラズマ反応ガスとして水素ガスと窒素ガスを用い
ており、アンモニア合成過程において反応に関与しない
水素ガスを多量に排出しているという欠点がある。The conventional ammonia synthesis apparatus using a plasma reaction described above uses hydrogen gas and nitrogen gas as plasma reaction gases, and has the disadvantage that a large amount of hydrogen gas that does not participate in the reaction is discharged during the ammonia synthesis process.
本発明のプラズマ反応を用いたアンモニア合成装置は、
装置内に過酸化水素水を張った層がプラズマ反応部の下
流に設けられており、窒素プラズマと過酸化水素水と・
の界面反応によりアンモニアが合成される。The ammonia synthesis apparatus using plasma reaction of the present invention is
A layer filled with hydrogen peroxide is installed in the device downstream of the plasma reaction section, and nitrogen plasma and hydrogen peroxide are mixed together.
Ammonia is synthesized through an interfacial reaction.
次に、本発明について図面を参照して説明する。第１図
は本発明のプラズマ反応を用いたアンモニア合成装置の
一実施例の構成図である。プラズマ反応を用いたアンモ
ニア合成装置は、Ｎ２ガスボンベ１とニードルバルブ２
とガスラインフィルタ３とマスフローコントローラ４よ
りなるガス供給部２０と、反応炉５と誘導コイル６と過
酸化水素水槽７と圧力計８と電力計９と高周波発振器１
０とからなる反応部３０と、ストップバルブ１１と真空
ポンプ１２と液体窒素トラップ１３よりなる排気部４０
の三部から構成されている。反応に際し、反応系内を５
０Ｔｏｒｒ前後まで液体窒素トラップ１３を通して真空
ポンプ１２により排気し、反応ガスとしての窒素ガスを
ガスボンベ１よリマスフローコントローラ４を通し、所
定の流量にてプラズマ反応部３０の反応炉５へ導入する
。Next, the present invention will be explained with reference to the drawings. FIG. 1 is a block diagram of an embodiment of an ammonia synthesis apparatus using plasma reaction according to the present invention. The ammonia synthesis device using plasma reaction consists of N2 gas cylinder 1 and needle valve 2.
A gas supply section 20 consisting of a gas line filter 3 and a mass flow controller 4, a reactor 5, an induction coil 6, a hydrogen peroxide tank 7, a pressure gauge 8, a power meter 9, and a high frequency oscillator 1
0, an exhaust section 40 consisting of a stop valve 11, a vacuum pump 12, and a liquid nitrogen trap 13.
It consists of three parts. During the reaction, the inside of the reaction system is
The gas is evacuated by the vacuum pump 12 through the liquid nitrogen trap 13 to around 0 Torr, and nitrogen gas as a reaction gas is introduced into the reaction furnace 5 of the plasma reaction section 30 at a predetermined flow rate from the gas cylinder 1 through the remass flow controller 4.
ガス圧力は、圧力計８にて所定の圧力に設定する。電力
は周波数１３．５６ＭＨｚ、出力２００Ｗの高周波発振
器１０より誘導結合方式により移送する０反応炉５内の
放電によって生成された窒素プラズマ中の窒素分子イオ
ンによるプラズマ反応アフターグロ一部下端に張られた
過酸化水素水槽７へのスパッタリングによりアンモニア
合成の水素源である水素が供給され、下記の反応が進行
し、アンモニアが合成される。The gas pressure is set to a predetermined pressure using a pressure gauge 8. Electric power is transferred by an inductive coupling method from a high frequency oscillator 10 with a frequency of 13.56 MHz and an output of 200 W.A plasma reaction afterglow caused by nitrogen molecular ions in the nitrogen plasma generated by the discharge in the reactor 5 is applied to a part of the lower end. Hydrogen, which is a hydrogen source for ammonia synthesis, is supplied by sputtering to the hydrogen peroxide tank 7, and the following reaction proceeds to synthesize ammonia.
Ｎ２ ＋ｅ−＋Ｎ” ２ ＋２ｅ −−−−
（ａ）Ｎ” ２ ＋Ｈ２０２＋ｅ→２ＮＨ＋０２−・・
（ｂ）ＮＨ十Ｈ−＋ＮＨ２・・・・・・（Ｃ）ＮＨ２＋
Ｈ４ＮＨ３・・・・・・（ｄ）〔発明の効果〕
以上説明したように本発明は、プラズマ反応を用いたア
ンモニア合成装置に過酸化水素水を張った槽を設けるこ
とにより、過酸化水素水を水素源とし、窒素プラズマと
の界面反応からアンモニア合成ができるという効果があ
る。N2 +e-+N" 2 +2e ---
(a)N" 2 +H202+e→2NH+02-...
(b) NH1H-+NH2... (C) NH2+
H4NH3... (d) [Effects of the Invention] As explained above, the present invention provides hydrogen peroxide solution by providing a tank filled with hydrogen peroxide solution in an ammonia synthesis apparatus using plasma reaction. The effect is that ammonia can be synthesized from an interfacial reaction with nitrogen plasma using hydrogen as a hydrogen source.
第１図は、本発明の一実施例のプラズマ反応を用いたア
ンモニア合成装置の構成図である。
１・・・Ｎ２ガスボンベ、２・・・ニードルバルブ、３
・・・ガスラインフィルタ、４・・・マスフローコント
ローラ、５・・・反応炉、６・・・誘導コイル、７・・
・過酸化水素水槽、８・・・圧力計、９・・・電力計、
１０・・・高周波発振器、１１・・・ストップバルブ、
１２・・・真空ポンプ、１３・・・液体窒素トラップ、
２０・・・ガス供給部、２０・・・反応部、４０・・・
排気部。FIG. 1 is a block diagram of an ammonia synthesis apparatus using plasma reaction according to an embodiment of the present invention. 1...N2 gas cylinder, 2...needle valve, 3
... Gas line filter, 4... Mass flow controller, 5... Reactor, 6... Induction coil, 7...
・Hydrogen peroxide tank, 8...pressure gauge, 9...power meter,
10... High frequency oscillator, 11... Stop valve,
12... Vacuum pump, 13... Liquid nitrogen trap,
20... Gas supply section, 20... Reaction section, 40...
Exhaust part.
Claims (1)
ラズマ反応を用いたアンモニア合成装置において、前記
プラズマ反応部と排気部との間にプラズマと界面反応を
生じる過酸化水素水槽を含むことを特徴とするプラズマ
反応を用いたアンモニア合成装置。An ammonia synthesis apparatus using a plasma reaction that includes a gas supply section, a plasma reaction section, and an exhaust section, including a hydrogen peroxide tank that causes an interfacial reaction with plasma between the plasma reaction section and the exhaust section. An ammonia synthesis device using a plasma reaction characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2673090A JPH03232718A (en) | 1990-02-05 | 1990-02-05 | Device for synthesizing ammonia by plasma reaction |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2673090A JPH03232718A (en) | 1990-02-05 | 1990-02-05 | Device for synthesizing ammonia by plasma reaction |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03232718A true JPH03232718A (en) | 1991-10-16 |
Family
ID=12201434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2673090A Pending JPH03232718A (en) | 1990-02-05 | 1990-02-05 | Device for synthesizing ammonia by plasma reaction |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03232718A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010132469A (en) * | 2008-12-02 | 2010-06-17 | Toyota Gakuen | Method and apparatus for producing nitrogen compound |
-
1990
- 1990-02-05 JP JP2673090A patent/JPH03232718A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010132469A (en) * | 2008-12-02 | 2010-06-17 | Toyota Gakuen | Method and apparatus for producing nitrogen compound |
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