JPH03232173A - Manufacture of magnetic head slider - Google Patents
Manufacture of magnetic head sliderInfo
- Publication number
- JPH03232173A JPH03232173A JP2886490A JP2886490A JPH03232173A JP H03232173 A JPH03232173 A JP H03232173A JP 2886490 A JP2886490 A JP 2886490A JP 2886490 A JP2886490 A JP 2886490A JP H03232173 A JPH03232173 A JP H03232173A
- Authority
- JP
- Japan
- Prior art keywords
- air
- width
- magnetic head
- head slider
- slider
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000000034 method Methods 0.000 claims abstract description 12
- 238000000227 grinding Methods 0.000 claims description 10
- 238000007667 floating Methods 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000005520 cutting process Methods 0.000 abstract 4
- 238000009434 installation Methods 0.000 abstract 2
- 238000000992 sputter etching Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000005339 levitation Methods 0.000 description 1
Landscapes
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- Supporting Of Heads In Record-Carrier Devices (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気ディスク装置用磁気ヘッドに関し、特にハ
ードディスク装置に使用される磁気ヘッドスライダの製
造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic head for a magnetic disk drive, and more particularly to a method of manufacturing a magnetic head slider used in a hard disk drive.
現在ハードディスク装置に最も多く用いられている磁気
ヘッドスライダは、空気流入端にテーパを設けた平行に
伸びる2つのフラットな空気軸受面を有する(以下テー
パフラットスライダと言う)ものである。磁気記憶密度
が年々高まっている情勢において、浮上量(媒体とスラ
イダの間隙)を小さくすることが急務になっている。現
在、実用化されているテーパフラットスライダの浮上量
は0.2μm〜0.3μm程度であるが、現在のテーパ
フラットスライダでこれ以下の浮上量を得ようとすると
ピッチ角が減少するため安定した浮上状態を確保するこ
とが極めて困難であった。The magnetic head slider currently most commonly used in hard disk drives has two parallel flat air bearing surfaces with a tapered air inflow end (hereinafter referred to as a tapered flat slider). In a situation where magnetic storage density is increasing year by year, there is an urgent need to reduce the flying height (the gap between the medium and the slider). The flying height of the tapered flat slider currently in practical use is about 0.2 μm to 0.3 μm, but if you try to obtain a flying height of less than this with the current taper flat slider, the pitch angle will decrease and it will not be stable. It was extremely difficult to maintain levitation.
そこで、この問題を解決すべく低浮上量においても所定
のピッチ角を確保し、且つ、安定した浮上状態を確保で
きるスライダが提案された(特開昭62−231481
号)。この従来型スライダを第3図に示す。第3図にお
いて、このスライダは2つの空気軸受面2a及び2bの
内側エツジに段差を形成することにより、空気流入端側
の幅を空気流出端側の幅より狭くしたものであった。図
中3a3bはテーパ部、4a、4bは空気流入端、5a
。Therefore, in order to solve this problem, a slider was proposed that could secure a predetermined pitch angle even at low flying heights and ensure a stable flying state (Japanese Patent Laid-Open No. 62-231481
issue). This conventional slider is shown in FIG. In FIG. 3, this slider has a step formed on the inner edges of the two air bearing surfaces 2a and 2b so that the width on the air inflow end side is narrower than the width on the air outflow end side. In the figure, 3a and 3b are tapered parts, 4a and 4b are air inflow ends, and 5a
.
5bは空気流出端、8は溝部、9a、9bは段差部及び
lla、llbは電磁変換器である。この幅差によりス
ライダ1の受ける浮上刃は空気流入端側の方が空気流出
端側に比べて相対的に大きくなり、その結果ピッチ角が
大きくなる。また、この幅差を調整することにより所定
のピッチ角が得られ、且つ、低浮上量でも安定した浮上
姿勢を保つことができるというものであった。5b is an air outflow end, 8 is a groove portion, 9a and 9b are stepped portions, and lla and llb are electromagnetic transducers. Due to this width difference, the floating blade received by the slider 1 becomes relatively larger on the air inflow end side than on the air outflow end side, and as a result, the pitch angle becomes larger. Furthermore, by adjusting this width difference, a predetermined pitch angle can be obtained, and a stable flying posture can be maintained even at a low flying height.
上述した従来の磁気ヘッドスライダは、空気軸受面の内
側にあって、しかも斜め方向に段差を設けたものである
ため、これを形成するにはスパッタエツチング装置やイ
オンミリング装置等のように特殊で、且つ、高価な設備
を必要とする加工技術を使わざるを得なかった。The above-mentioned conventional magnetic head slider is located inside the air bearing surface and has a step in an oblique direction, so special equipment such as sputter etching equipment or ion milling equipment is required to form this step. , and had to use processing techniques that required expensive equipment.
本発明の磁気ヘッドスライダの製造方法は、(1)磁気
記録媒体の走行によって生ずる動圧を利用して、前記磁
気記録媒体上を浮上する磁気ヘッドスライダの空気軸受
面の形成において、研削加工により前記空気軸受面の空
気流出端側の幅を空気流入端側の幅よりも小さくして形
成することを特徴とする。The method for manufacturing a magnetic head slider of the present invention includes (1) a grinding process in forming an air bearing surface of a magnetic head slider that flies above the magnetic recording medium using dynamic pressure generated by the running of the magnetic recording medium; The air bearing surface is characterized in that the width on the air outflow end side is smaller than the width on the air inflow end side.
(2)前記空気軸受面の途中より研削加工を行うことを
特徴とする。(2) It is characterized in that the grinding process is performed from the middle of the air bearing surface.
(3)前記空気流出端側の幅から前記空気流入端側の幅
までをテーパー状に研削加工を行うことを特徴とする。(3) Grinding is performed in a tapered shape from the width of the air outflow end to the width of the air inflow end.
次に本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第1図は本発明の一実施例を示す斜視図である。第1図
において、本実施例の磁気ヘッドスライダ1aは2つの
空気軸受面2a、2bと、磁性体、コイル等電磁変換器
11a、llbとを有する素子面7より構成されている
。また、空気軸受面2a及び2bの空気流入端4a、4
b側にはテーパ部3a、3bが形成されている。今、空
気軸受面2a、2bの外側エツジ6a、6bは途中で段
差がついており、これによって、空気流出端5a、5b
側の幅を空気流入端4a、4b側より狭くしている。上
述のような形状に形成するため、本実施例では溝部8a
、8b及び8Cの研削加工工程と同一工程において、研
削砥石を途中で磁気ヘッドスライダ1aから離すことに
よって砥石の曲面形状を残した段差部9a、9bが形成
される。なお、素子面7の電磁変換器11a、llbの
位置が異なる場合、第1図における段差部9a。FIG. 1 is a perspective view showing an embodiment of the present invention. In FIG. 1, the magnetic head slider 1a of this embodiment is composed of an element surface 7 having two air bearing surfaces 2a and 2b and electromagnetic transducers 11a and 11b such as magnetic bodies and coils. Moreover, the air inflow ends 4a and 4 of the air bearing surfaces 2a and 2b
Tapered portions 3a and 3b are formed on the b side. Now, the outer edges 6a, 6b of the air bearing surfaces 2a, 2b have a step in the middle, so that the air outlet ends 5a, 5b
The width of the side is narrower than that of the air inflow ends 4a and 4b. In order to form the shape as described above, in this embodiment, the groove portion 8a is
, 8b and 8C, step portions 9a and 9b are formed by separating the grinding wheel from the magnetic head slider 1a in the middle, leaving the curved shape of the grinding wheel. Note that when the positions of the electromagnetic transducers 11a and llb on the element surface 7 are different, the stepped portion 9a in FIG.
9bを空気軸受面2a、2Cの内側エツジ10a。9b is the inner edge 10a of the air bearing surface 2a, 2C.
10b側に形成できることは勿論である。Of course, it can be formed on the 10b side.
第2図は本発明の他の実施例を示す斜視図である。第2
図において、本実施例のスライダ1bは2つの空気軸受
面2a、2bの空気流入端4a。FIG. 2 is a perspective view showing another embodiment of the invention. Second
In the figure, the slider 1b of this embodiment has two air inflow ends 4a of air bearing surfaces 2a and 2b.
4bから空気流出端5a、5bの幅を連続してテーパー
状にそれぞれ研削加工したものであって、テーパ部12
a、12bが形成されている。The width of the air outlet ends 5a and 5b is continuously ground from 4b into a tapered shape, and the tapered portion 12
a, 12b are formed.
以上説明したように本発明は、空気軸受面の形成を研削
加工によって行うため、他の部分の研削工程の同一工程
で形成でき、スパッタエツチングやイオンミリング等の
ように特殊で、且つ、高価な設備を必要とせずに低浮上
量においても安定した浮上姿勢を保つことができる磁気
ヘッドスライダを簡便に得られる効果がある。As explained above, in the present invention, since the air bearing surface is formed by grinding, it can be formed in the same process as the grinding process for other parts, and it does not require special and expensive processes such as sputter etching or ion milling. This has the effect of easily obtaining a magnetic head slider that can maintain a stable flying posture even at a low flying height without requiring any equipment.
第1図は本発明の実施例を示す斜視図、第2図は本発明
の他の実施例を示す斜視図、第3図は従来例を示す平面
図である。
1・・・スライダ、2a、2b・・・空気軸受面、3a
3b・・・テーパ部、4a、4b・・・空気流入端
、5a、5b・・・空気流出端、6a、6b・・・外側
エツジ、7・・・素子面、8a、8b、8cm溝部、9
a、9b・・・段差部、10a、10b・・・内側エツ
ジ11a、1lb−−・電磁変換器、12a、12b−
テーパ一部。FIG. 1 is a perspective view showing an embodiment of the present invention, FIG. 2 is a perspective view showing another embodiment of the invention, and FIG. 3 is a plan view showing a conventional example. 1...Slider, 2a, 2b...Air bearing surface, 3a
3b... Taper part, 4a, 4b... Air inflow end, 5a, 5b... Air outflow end, 6a, 6b... Outer edge, 7... Element surface, 8a, 8b, 8cm groove part, 9
a, 9b...Stepped portion, 10a, 10b...Inner edge 11a, 1lb--Electromagnetic converter, 12a, 12b-
Part of the taper.
Claims (3)
て、前記磁気記録媒体上を浮上する磁気ヘッドスライダ
の空気軸受面の形成において、研削加工により前記空気
軸受面の空気流出端側の幅を空気流入端側の幅よりも小
さくして形成することを特徴とする磁気ヘッドスライダ
の製造方法。(1) In forming the air bearing surface of the magnetic head slider that flies above the magnetic recording medium using the dynamic pressure generated by the running of the magnetic recording medium, the width of the air outflow end side of the air bearing surface is formed by grinding. A method of manufacturing a magnetic head slider, characterized in that the width of the magnetic head slider is smaller than the width of the air inflow end.
特徴とする請求項(1)に記載の磁気ヘッドスライダの
製造方法。(2) The method for manufacturing a magnetic head slider according to claim (1), wherein the grinding process is performed from the middle of the air bearing surface.
までをテーパー状に研削加工を行うことを特徴とする請
求項(1)に記載の磁気ヘッドスライダの製造方法。(3) The method for manufacturing a magnetic head slider according to claim (1), characterized in that grinding is performed in a tapered shape from the width of the air outflow end to the width of the air inflow end.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2886490A JPH03232173A (en) | 1990-02-07 | 1990-02-07 | Manufacture of magnetic head slider |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2886490A JPH03232173A (en) | 1990-02-07 | 1990-02-07 | Manufacture of magnetic head slider |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03232173A true JPH03232173A (en) | 1991-10-16 |
Family
ID=12260245
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2886490A Pending JPH03232173A (en) | 1990-02-07 | 1990-02-07 | Manufacture of magnetic head slider |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03232173A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6301079B1 (en) | 1998-02-23 | 2001-10-09 | Fujitsu Limited | Flying head slider having a splay formed on a flying surface enabling a lower flying height while avoiding collision with a surface of a recording disk |
-
1990
- 1990-02-07 JP JP2886490A patent/JPH03232173A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6301079B1 (en) | 1998-02-23 | 2001-10-09 | Fujitsu Limited | Flying head slider having a splay formed on a flying surface enabling a lower flying height while avoiding collision with a surface of a recording disk |
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