JPH0322846Y2 - - Google Patents

Info

Publication number

JPH0322846Y2

JPH0322846Y2 JP1985046231U JP4623185U JPH0322846Y2 JP H0322846 Y2 JPH0322846 Y2 JP H0322846Y2 JP 1985046231 U JP1985046231 U JP 1985046231U JP 4623185 U JP4623185 U JP 4623185U JP H0322846 Y2 JPH0322846 Y2 JP H0322846Y2

Authority

JP

Japan

Prior art keywords

sample

sample holder

moving

ring

moving body

Prior art date

1985-03-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
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• 230000003287 optical effect Effects 0.000 claims description 10
• 238000010894 electron beam technology Methods 0.000 claims description 2
• 238000003780 insertion Methods 0.000 claims description 2
• 230000037431 insertion Effects 0.000 claims description 2
• 230000000149 penetrating effect Effects 0.000 claims description 2
• 238000012856 packing Methods 0.000 description 7
• 239000002184 metal Substances 0.000 description 2
• JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
• 239000004809 Teflon Substances 0.000 description 1
• 229920006362 Teflon® Polymers 0.000 description 1
• 230000003749 cleanliness Effects 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 238000001000 micrograph Methods 0.000 description 1
• 238000012986 modification Methods 0.000 description 1
• 230000004048 modification Effects 0.000 description 1