JPH03224657A - Ultrasonic atomizer - Google Patents
Ultrasonic atomizerInfo
- Publication number
- JPH03224657A JPH03224657A JP2269390A JP2269390A JPH03224657A JP H03224657 A JPH03224657 A JP H03224657A JP 2269390 A JP2269390 A JP 2269390A JP 2269390 A JP2269390 A JP 2269390A JP H03224657 A JPH03224657 A JP H03224657A
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- tip
- liquid
- vibrator horn
- horn
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims abstract description 38
- 238000000889 atomisation Methods 0.000 claims description 12
- 238000005507 spraying Methods 0.000 abstract description 3
- 230000010355 oscillation Effects 0.000 abstract 1
- 239000007921 spray Substances 0.000 description 11
- 230000007423 decrease Effects 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000000446 fuel Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000003905 agrochemical Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000000645 desinfectant Substances 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003337 fertilizer Substances 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 238000005469 granulation Methods 0.000 description 1
- 230000003179 granulation Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000575 pesticide Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0623—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers coupled with a vibrating horn
Landscapes
- Pressure-Spray And Ultrasonic-Wave- Spray Burners (AREA)
- Air Humidification (AREA)
- Special Spraying Apparatus (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野コ
本発明は、一般に、供給される液体燃料の如き液体物質
(本明細書では、液体物質とは液体燃料の如き液体は勿
論のこと、懸濁溶液等の液状物をも含むものとして用い
る。)を超音波振動を利用して霧化するための超音波霧
化装置に関し、特に、(イ)自動車、船外機、携帯用動
力装置、民生用ヒートポンプ装置の駆動装置等に用いら
れる内燃機関に適用される超音波霧化装置、 (ロ)ガ
スタービン用燃料噴射ノズル、 (ハ)工業用、営業用
及び家庭用のボイラ、加熱炉、暖房用バーナ、(ニ)工
業用液体噴霧器、例えば食品、医薬品、農薬、肥料等の
液状物の乾煽を目的とする乾燥用噴霧器、調温、調湿用
スプレー 焼粉用噴霧器(セラミック造粒)、噴霧塗装
装置、反応促進器、及び(ホ)工業用以外の液体噴霧器
、例えば、農薬散布器、消毒液散布器等に好適に用いら
れる超音波霧化装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention generally relates to a liquid substance such as a liquid fuel that is supplied (in this specification, liquid substance refers to a liquid such as a liquid fuel, or (Used to include liquid substances such as cloudy solutions.) Using ultrasonic vibration, it is used to atomize ultrasonic atomizers, particularly (a) automobiles, outboard motors, portable power devices, Ultrasonic atomizers applied to internal combustion engines used in the drive devices of consumer heat pump devices, etc.; (b) fuel injection nozzles for gas turbines; (c) boilers and heating furnaces for industrial, commercial and domestic use; Heating burners, (d) Industrial liquid sprayers, such as drying sprayers for the purpose of drying liquid materials such as foods, pharmaceuticals, agricultural chemicals, and fertilizers, temperature control and humidity control sprays, baked powder sprayers (ceramic granulation, etc.) ), a spray coating device, a reaction accelerator, and (e) an ultrasonic atomizer suitable for use in non-industrial liquid sprayers, such as pesticide sprayers, disinfectant sprayers, etc.
[従来の技術]
超音波により液体物質を極めて小さな液滴粒径に霧化す
る超音波霧化装置として、例えば、シリンダ内に振動子
ホーンを配設し、シリンダと振動子ホーンとの間の先端
ノズル部から振動子ホーンの先端霧化面の全周に液を供
給し液体を微粒化する方式のものが知られている。[Prior Art] As an ultrasonic atomizer that uses ultrasonic waves to atomize a liquid substance into extremely small droplet sizes, for example, a vibrator horn is disposed within a cylinder, and a A system is known in which liquid is supplied from a tip nozzle portion to the entire circumference of the atomizing surface at the tip of a vibrator horn to atomize the liquid.
前記方式においては、従来、振動子ホーンのノード部に
固定用のフランジを一体に形成し、該フランジをシリン
ダに固定、支持する方法が一般的に行われている。また
、シリンダと振動子ホーンとの間に液体貯留部を形成し
、先端ノズル部から振動子ホーンの霧化面の全周に液を
供給している。Conventionally, in the above method, a fixing flange is formed integrally with the node portion of the vibrator horn, and the flange is fixed and supported on the cylinder. Further, a liquid storage portion is formed between the cylinder and the vibrator horn, and liquid is supplied from the tip nozzle portion to the entire circumference of the atomization surface of the vibrator horn.
[発明が解決しようとする課題]
振動子ホーンのノード部は、理論的には固定してもパワ
ーロスにはならない点が存在する。しかし、実際には、
前記固定用のフランジは点でなく幅を持つために、また
、同一材料でも音速が異なるために、同一寸法で振動子
ホーンを製作してもそれぞれのノード部の位置が異なっ
てくる。その結果、フランジ部に振動が生じその分だけ
振動系のパワーロスが生じるという問題を有している。[Problems to be Solved by the Invention] Theoretically, there is a point where the node portion of the vibrator horn does not cause power loss even if it is fixed. However, in reality,
Since the fixing flange has a width rather than a point, and also because the speed of sound differs even if the material is the same, the positions of the respective node portions will differ even if vibrator horns are manufactured with the same dimensions. As a result, there is a problem in that vibration occurs in the flange portion, resulting in a corresponding power loss in the vibration system.
また、フランツの切削加工に精度が要求されるためコス
ト高になると共に、フランジの締め付けを均一に行う必
要性があるため組立性が劣るという問題を有している。Further, there are problems in that the cutting process of the flange requires high precision, which increases the cost, and the flange needs to be tightened uniformly, resulting in poor assembly performance.
さらに、シリンダと振動子ホーンとの間に液体貯留部を
形成しているために、シリンダと振動子ホーンとの間の
先端ノズル部のクリアランスを太き(すると、噴mfA
の安定性は良くなるが霧化面への液供給分布の均一性が
低下し、逆に、先端ノズル部のクリアランスを小さくす
ると、霧化部への液供給分布の均一性は良くなるが噴霧
量の安定性が低下するという問題を有している。先端ノ
ズル部のクリアランスを小さくすると、噴霧量の安定性
が低下する理由は、振動子ホーンの超音波振動により液
体貯留部内で気泡が発生し、この気泡が先端ノズル部か
ら噴出することに起因する。Furthermore, since a liquid reservoir is formed between the cylinder and the vibrator horn, the clearance of the tip nozzle between the cylinder and the vibrator horn is increased (then the jet mfA
The stability of the liquid will improve, but the uniformity of the liquid supply distribution to the atomizing surface will decrease. Conversely, if the clearance at the tip nozzle is made smaller, the uniformity of the liquid supply distribution to the atomizing part will improve, but the atomization will decrease. There is a problem that the stability of the amount decreases. The reason why the stability of the spray amount decreases when the clearance of the tip nozzle is reduced is that air bubbles are generated in the liquid reservoir due to the ultrasonic vibration of the vibrator horn, and these bubbles are ejected from the tip nozzle. .
本発明の目的は、上記問題を解決するものであって、振
動系のパワーロスを軽減させると共に製作および組立を
容易に行うことができる超音波霧化装置を提供すること
である。SUMMARY OF THE INVENTION An object of the present invention is to provide an ultrasonic atomization device that solves the above problems and can reduce power loss in the vibration system and can be easily manufactured and assembled.
本発明の他の目的は、先端ノズル部のクリアランスを小
さくすると共に、先端形状を改善することにより霧化面
への液供給分布の均一性および噴霧量の安定性を図るこ
とができる超音波霧化装置を提供することである。Another object of the present invention is to reduce the clearance of the tip nozzle part and improve the shape of the tip, thereby making it possible to achieve uniformity in liquid supply distribution to the atomization surface and stability of the spray amount. The objective is to provide a device for converting
[課題を解決するための手段]
そのために本発明の超音波霧化装置は、シリンダ2と、
該シリンダ内に固定される振動子ホー73と、該振動子
ホーンに超音波振動を付与せしめる電気・音響変換素子
4と、シリンダ2の外周に螺合されシリンダ2との間に
液供給路7を形成するスリーブ部材6と、前記振動子ホ
ーンの先端に形成される霧化部3aと、該霧化部に液体
を供給するノズル部7aと、前記振動子ホーンの2箇所
の7一ド部9a19bと前記シリンダとの間に設けられ
る2個の弾性体10.11とを有し、該弾性体により振
動子ホーンをシリンダに固定、支持してなり、前記ノズ
ル部の先端形状を軸方向に垂直な面で切断する形状とす
ることを特徴とする。[Means for solving the problem] For this purpose, the ultrasonic atomization device of the present invention includes a cylinder 2,
A vibrator horn 73 fixed in the cylinder, an electric/acoustic transducer 4 that applies ultrasonic vibration to the vibrator horn, and a liquid supply path 7 screwed onto the outer periphery of the cylinder 2 and connected to the cylinder 2. a sleeve member 6 forming a oscillator horn, an atomizing part 3a formed at the tip of the vibrator horn, a nozzle part 7a for supplying liquid to the atomizing part, and two 7-dot parts of the vibrator horn. 9a19b and two elastic bodies 10.11 provided between the cylinder, the vibrator horn is fixed and supported on the cylinder by the elastic bodies, and the shape of the tip of the nozzle part is adjusted in the axial direction. It is characterized by having a shape that is cut in a vertical plane.
なお、上記構成に付加した番号は図面と対比させるため
のものであり、これにより本発明の構成が何ら限定され
るものではない。Note that the numbers added to the above configurations are for comparison with the drawings, and the configurations of the present invention are not limited thereby.
[作用コ
本発明においては、振動子ホーンが2箇所のノード部で
弾性体で固定されるため、振動子ホーンをシリンダに柔
軟性を持たせて固定、支持させることができ、振動子ホ
ーンとシリンダおよびスリーブ部材の同志性が容易に出
せる。また、液供給路がシリンダとスリーブ部材との間
に形成され、振動子ホーンの振動による影響がないため
、そのクリアランスを極めて小さくしても従来のように
噴霧量が不安定となることがない。[Function] In the present invention, since the vibrator horn is fixed with elastic bodies at two node portions, the vibrator horn can be fixed and supported by the cylinder with flexibility, and the vibrator horn and Comradeship between the cylinder and sleeve members can be easily established. In addition, the liquid supply path is formed between the cylinder and the sleeve member and is not affected by the vibration of the vibrator horn, so even if the clearance is extremely small, the spray amount will not become unstable like in the past. .
[実施例コ 以下、本発明の実施例を図面を参照しつつ説明する。[Example code] Embodiments of the present invention will be described below with reference to the drawings.
第1図は本発明の超音波霧化装置の1実施例を示す一部
断面図、第2図は第1図の■−■線に沿う断面図である
。FIG. 1 is a partial cross-sectional view showing one embodiment of the ultrasonic atomization device of the present invention, and FIG. 2 is a cross-sectional view taken along the line ■-■ in FIG.
超音波霧化装置1は、シリンダ2と、シリンダ2内に固
定、支持される振動子ホーン3と、振動子ホーン3に超
音波振動を付与せしめる電気・音響変換素子4と、シリ
ンダ2の外周に螺合部5で螺合されるスリーブ部材6か
ら構成される。シリンダ2とスリーブ部材6との間には
、環状の液供給路7が形成され、該液供給路7に液供給
管8がら液体が供給される。The ultrasonic atomizer 1 includes a cylinder 2, a vibrator horn 3 fixed and supported within the cylinder 2, an electric/acoustic transducer 4 that applies ultrasonic vibration to the vibrator horn 3, and an outer circumference of the cylinder 2. It is composed of a sleeve member 6 which is screwed into the sleeve member 6 through a screw portion 5. An annular liquid supply path 7 is formed between the cylinder 2 and the sleeve member 6, and liquid is supplied to the liquid supply path 7 from a liquid supply pipe 8.
振動子ホーン3の先端には霧化部3aが形成される。こ
の霧化部3aの形状は、図に示す半球膨軟の他、拡径形
状、バット形状が採用される。また、シリンダ2とスリ
ーブ部材6との間には環状のノズル部7aが形成され、
該ノズル部7aから液体が霧化部3aに供給され超音波
振動により微細液滴に霧化される。このように、液供給
路7がシリンダ2とスリーブ部材6との間に形成され、
振動子ホーン3の振動による影響がないため、そのクリ
アランスを極めて小さくしても従来のように噴霧量が不
安定となることがない。An atomizing section 3a is formed at the tip of the vibrator horn 3. The shape of the atomizing portion 3a may be a hemispherical expanding/flexing shape shown in the figure, an expanded diameter shape, or a butt shape. Further, an annular nozzle portion 7a is formed between the cylinder 2 and the sleeve member 6,
The liquid is supplied from the nozzle section 7a to the atomizing section 3a and is atomized into fine droplets by ultrasonic vibration. In this way, the liquid supply path 7 is formed between the cylinder 2 and the sleeve member 6,
Since there is no influence from the vibration of the vibrator horn 3, even if the clearance is made extremely small, the amount of spray does not become unstable as in the conventional case.
振動子ホーン3には、振動しない部分すなわち2箇所の
ノード部9at9bがあり、シリンダ2の内周面には、
該ノード部9a、9bに対向して溝が形成され、該溝内
にOリングからなる弾性体10.11が嵌合されている
。従って、振動子ホーン3をシリンダ2内に挿入したと
き、振動子ホーン3が弾性体10.11により固定支持
されると共に、振動子ホーン3とシリンダ2およびスリ
ーブ部材6の同君性が容易に出せることになる。The vibrator horn 3 has a non-vibrating portion, that is, two node portions 9at9b, and the inner circumferential surface of the cylinder 2 has two node portions 9at9b.
Grooves are formed facing the node portions 9a, 9b, and elastic bodies 10.11 made of O-rings are fitted into the grooves. Therefore, when the vibrator horn 3 is inserted into the cylinder 2, the vibrator horn 3 is fixedly supported by the elastic body 10.11, and the coherence of the vibrator horn 3, the cylinder 2, and the sleeve member 6 can be easily maintained. I will be able to put it out.
第3図は振動子ホーン3、シリンダ2およびスリーブ部
材6の先端形状を示す拡大断面図である。FIG. 3 is an enlarged sectional view showing the tip shapes of the vibrator horn 3, cylinder 2, and sleeve member 6.
本発明においては、シリンダ2およびスリーブ部材6の
先端形状を、シャープなエツジで形成するのではなく、
軸方向に垂直な面で切断する形状を採用している。これ
により、シリンダ2およびスリーブ部材6の内径および
全長における寸法精度が出し易くなる。また、スリーブ
部材6の先端内径を振動子ホーン3の径よりも0. 2
〜0. 5II11程度太き(するようにしている。従
来は、スリーブ部材6の先端内径を振動子ホーン3の径
よりも0. 1〜0.2冒■程度大きくするようにして
いるだめに、僅かな芯の狂いに対しても噴霧の分布が悪
くなり、また、僅かなキャビテーシヨンが発生しても噴
霧の安定性に影響したが、スリーブ部材6の先端内径を
振動子ホーン3の径よりも0゜2〜0.5.、程度大き
くすることにより、噴霧の周方向分布および噴霧の安定
性が向上されることになった。In the present invention, the tip shapes of the cylinder 2 and sleeve member 6 are not formed with sharp edges.
It has a shape that cuts in a plane perpendicular to the axial direction. This facilitates achieving dimensional accuracy in the inner diameter and overall length of the cylinder 2 and sleeve member 6. Also, the inner diameter of the tip of the sleeve member 6 is set to be 0.0 mm smaller than the diameter of the vibrator horn 3. 2
~0. Conventionally, the inner diameter of the tip of the sleeve member 6 was made larger than the diameter of the vibrator horn 3 by about 0.1 to 0.2 mm. Misalignment of the core also affected the distribution of the spray, and slight cavitation affected the stability of the spray, but the inner diameter of the tip of the sleeve member 6 was set to 0. By increasing the temperature by approximately 2 to 0.5, the circumferential distribution of the spray and the stability of the spray were improved.
[発明の効果]
以上のように本発明によれば、振動子ホーンが2箇所の
ノード部で弾性体で固定されるため、振動子ホーンをシ
リンダに柔軟性を持たせて固定、支持させることができ
、従来のようにフランジによりリジッドに固定する場合
と比較して、振動子ホーンとシリンダおよびスリーブ部
材の同君性が容易に出せるので、振動子ホーンの切削加
工および組立を容易に行うことができると共に、振動系
のパワーロスを半分程度に軽減させることができる。[Effects of the Invention] As described above, according to the present invention, since the vibrator horn is fixed by elastic bodies at two node portions, the vibrator horn can be fixed and supported by the cylinder with flexibility. This makes it easier to cut and assemble the vibrator horn, since the sameness of the vibrator horn, cylinder, and sleeve members can be easily achieved compared to the conventional case of rigidly fixing the vibrator horn with a flange. At the same time, power loss in the vibration system can be reduced by about half.
また、液供給路がシリンダとスリーブ部材との間に形成
され、振動子ホーンの振動による影響がないため、その
クリアランスを極めて小さくしても従来のように噴霧m
が不安定となることがない。In addition, since the liquid supply path is formed between the cylinder and the sleeve member and is not affected by the vibration of the vibrator horn, even if the clearance is extremely small, the spray m
never becomes unstable.
また、先端ノズル部の形状を改善することにより、霧化
面への液供給分布の均一性および噴霧量の安定性を図る
ことができる。Furthermore, by improving the shape of the tip nozzle part, it is possible to improve the uniformity of the liquid supply distribution to the atomization surface and the stability of the spray amount.
第1図は本発明の超音波霧化装置の1実施例を示す一部
断面図、第2図は第1図の■−■線に沿う断面図、第3
図は振動子ホーン、シリンダおよびスリーブ部材の先端
形状を示す拡大断面図である。
1・・・超音波霧化装置、2・・・シリンダ、3・・・
振動子ホーン、3a・・・霧化部、4・・・電気・音響
変換素子、6・・・スリーブ部材、7・・・液供給路、
7a・・・ノズル部、9as9b・・・ノード部、 1
0、11・・・弾性体、 12・・・シール材。
出 願 人 東燃株式会社FIG. 1 is a partial sectional view showing one embodiment of the ultrasonic atomization device of the present invention, FIG. 2 is a sectional view taken along the line ■-■ in FIG. 1, and FIG.
The figure is an enlarged sectional view showing the tip shapes of the vibrator horn, cylinder, and sleeve member. 1... Ultrasonic atomization device, 2... Cylinder, 3...
Vibrator horn, 3a... Atomization section, 4... Electric/acoustic conversion element, 6... Sleeve member, 7... Liquid supply path,
7a... Nozzle part, 9as9b... Node part, 1
0, 11... Elastic body, 12... Sealing material. Applicant: Tonen Corporation
Claims (2)
ーンと、該振動子ホーンに超音波振動を付与せしめる電
気、音響変換素子と、前記シリンダの外周に螺合されシ
リンダとの間に液供給路を形成するスリーブ部材と、前
記振動子ホーンの先端に形成される霧化部と、該霧化部
に液体を供給するノズル部と、前記振動子ホーンの2箇
所のノード部と前記シリンダとの間に設けられる2個の
弾性体とを有し、該弾性体により振動子ホーンをシリン
ダに固定、支持してなり、前記ノズル部の先端形状を軸
方向に垂直な面で切断する形状とすることを特徴とする
超音波霧化装置。(1) A cylinder, a vibrator horn fixed in the cylinder, an electric/acoustic transducer that applies ultrasonic vibration to the vibrator horn, and a liquid that is screwed onto the outer periphery of the cylinder and is connected to the cylinder. A sleeve member forming a supply path, an atomizing section formed at the tip of the vibrator horn, a nozzle section that supplies liquid to the atomizing section, two node sections of the vibrator horn, and the cylinder. and two elastic bodies provided between the two elastic bodies, the vibrator horn is fixed and supported on the cylinder by the elastic bodies, and the tip shape of the nozzle part is cut in a plane perpendicular to the axial direction. An ultrasonic atomization device characterized by:
径よりも0.2〜0.5mm程度大きくすることを特徴
とする請求項1に記載の超音波霧化装置。(2) The ultrasonic atomization device according to claim 1, wherein the inner diameter of the tip of the sleeve member is approximately 0.2 to 0.5 mm larger than the diameter of the vibrator horn 3.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2269390A JPH03224657A (en) | 1990-01-31 | 1990-01-31 | Ultrasonic atomizer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2269390A JPH03224657A (en) | 1990-01-31 | 1990-01-31 | Ultrasonic atomizer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03224657A true JPH03224657A (en) | 1991-10-03 |
Family
ID=12089955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2269390A Pending JPH03224657A (en) | 1990-01-31 | 1990-01-31 | Ultrasonic atomizer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03224657A (en) |
-
1990
- 1990-01-31 JP JP2269390A patent/JPH03224657A/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4019683A (en) | Liquid atomizing apparatus utilizing ultrasonic wave | |
JPS61259781A (en) | Vibrator for ultrasonic pulverization having curved multistage edge part | |
US4726524A (en) | Ultrasonic atomizing vibratory element having a multi-stepped edged portion | |
JPS61138559A (en) | Oscillator for ultrasonic wave injection nozzle | |
JPH04110057A (en) | Ultrasonic wave atomizer | |
JPH03224657A (en) | Ultrasonic atomizer | |
JPH03224658A (en) | Ultrasonic atomizer | |
JPH03224654A (en) | Ultrasonic atomizer | |
JPH03224655A (en) | Ultrasonic atomizer | |
JPH03224656A (en) | Ultrasonic atomizer | |
JPH06190319A (en) | Ultrasonic atomizing apparatus | |
JPH06190318A (en) | Ultrasonic atomizing apparatus | |
JPH06190320A (en) | Ultrasonic atomizing apparatus | |
JPH0418954A (en) | Ultrasonic atomizing device | |
JPH034954A (en) | Ultrasonic atomizing apparatus | |
JPH04118071A (en) | Ultrasonic atomizer | |
JPH04118072A (en) | Ultrasonic atomizer | |
JPH04118069A (en) | Ultrasonic atomizer | |
JP2735325B2 (en) | Ultrasonic atomizer | |
JPH0365263A (en) | Supersonic spraying device | |
JPH04118070A (en) | Ultrasonic atomizer | |
JPH0332764A (en) | Ultrasonic atomizing device | |
JPH03249968A (en) | Method for controlling ultrasonic atomizer | |
JPH034956A (en) | Ultrasonic atomizing apparatus | |
JPH0411965A (en) | Controlling method for ultrasonic wave atomizer |