JPH0322062U - - Google Patents
Info
- Publication number
- JPH0322062U JPH0322062U JP8324289U JP8324289U JPH0322062U JP H0322062 U JPH0322062 U JP H0322062U JP 8324289 U JP8324289 U JP 8324289U JP 8324289 U JP8324289 U JP 8324289U JP H0322062 U JPH0322062 U JP H0322062U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- vacuum chamber
- introduction port
- slit plate
- introducing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004804 winding Methods 0.000 claims description 2
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案を示す一実施態様の図である。
第２図は第１図の効果を示す図である。
１……真空チヤンバー、２……窓ガラス、３…
…スリツト板、４……スリツト孔、５……透明フ
イルム、５……透明フイルム、６……巻き取り機
構、７……汚れ部、Ｒ……レーザ光照射路。
FIG. 1 is a diagram of one embodiment of the present invention.
FIG. 2 is a diagram showing the effect of FIG. 1. 1... Vacuum chamber, 2... Window glass, 3...
... Slit plate, 4... Slit hole, 5... Transparent film, 5... Transparent film, 6... Winding mechanism, 7... Dirty part, R... Laser beam irradiation path.
Claims (1)
光導入口、スリツト孔を有するスリツト板から少
なくとも構成され、真空チヤンバー内にレーザ光
束を導入して真空蒸着する装置において、前記レ
ーザ光導入口とスリツト板との間に、レーザ光照
射路の透明性を維持するための、巻取機構を備え
た透明フイルムを配設したことを特徴とするレー
ザ光導入装置。 In an apparatus for vacuum evaporation by introducing a laser beam into a vacuum chamber, the apparatus comprises at least a laser beam generating means, a laser beam introduction port in a vacuum chamber, and a slit plate having a slit hole, and the laser beam introduction port and the slit plate A laser beam introducing device characterized in that a transparent film equipped with a winding mechanism is disposed between the layers to maintain transparency of a laser beam irradiation path.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8324289U JPH0322062U (en) | 1989-07-14 | 1989-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8324289U JPH0322062U (en) | 1989-07-14 | 1989-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0322062U true JPH0322062U (en) | 1991-03-06 |
Family
ID=31630743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8324289U Pending JPH0322062U (en) | 1989-07-14 | 1989-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322062U (en) |
-
1989
- 1989-07-14 JP JP8324289U patent/JPH0322062U/ja active Pending