JPH0322062U - - Google Patents
Info
- Publication number
- JPH0322062U JPH0322062U JP8324289U JP8324289U JPH0322062U JP H0322062 U JPH0322062 U JP H0322062U JP 8324289 U JP8324289 U JP 8324289U JP 8324289 U JP8324289 U JP 8324289U JP H0322062 U JPH0322062 U JP H0322062U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- vacuum chamber
- introduction port
- slit plate
- introducing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004804 winding Methods 0.000 claims description 2
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8324289U JPH0322062U (de) | 1989-07-14 | 1989-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8324289U JPH0322062U (de) | 1989-07-14 | 1989-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0322062U true JPH0322062U (de) | 1991-03-06 |
Family
ID=31630743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8324289U Pending JPH0322062U (de) | 1989-07-14 | 1989-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322062U (de) |
-
1989
- 1989-07-14 JP JP8324289U patent/JPH0322062U/ja active Pending