JPH03220405A - Inspecting apparatus of film point of black matrix - Google Patents

Abstract

PURPOSE:To enable application of an apparatus to a hole-shaped black matrix by providing a convergent lens, a main scanning mechanism, a subordinate scanning mechanism, a condenser lens, a light-sensing element, a positional slippage detection processing device, an AO deflector, a film point detection processing device, etc. CONSTITUTION:A convergent lens 3 converges a laser light 16 on the inner surface of a black matrix film 14 so that a beam diameter be a little larger than the diameter of a film point 15. A main scanning mechanism 4 scans the laser light 16 in the main scanning direction 17 being the direction of arrangement of the film points 15, while a subordinate scanning mechanism 5 changes the scanning position to the subordinate scanning direction 18 which is perpendicular to the direction 17. An AO deflector 2 vibrates the laser light 16 minutely in the direction 18 and conducts minute positional correction in the direction 18. A Fresnel lens 13 condenses a light passing the film point 15 and a light-sensing element 7 detects an optical output of the passing light. A positional slippage detection processing device 8 samples and holds an output of the element 7 synchronously with the frequency of minute vibrations, average the output thereof by a filter and detects a positional slippage in the direction 18. A film point detection processing device 9 turns the output of the element 7 into ternary codes by two reference voltages and has a counter circuit which counts the number of output pulses thereof.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention is a black matrix film spot inspection device, particularly for inspecting the hole diameter of a black matrix film spot used in a color cathode ray tube before coating with phosphor. The present invention relates to a black matrix film spot inspection device.

[Conventional technology]

As a conventional technique, for example, there is an apparatus for inspecting the black matrix size of a cathode ray tube using focused laser beam scanning. Conventional cathode ray tube black matrix dimension inspection equipment consists of a laser beam, a converging lens that converges the laser beam onto the surface of the cathode ray tube's black matrix coated with a black material, and a converging lens that converges the laser beam to a beam diameter that is approximately the same as the width of the black guard band. A main scanning mechanism that scans the laser beam in the direction of arrangement of the black matrix of the cathode ray tube, a sub-scanning mechanism that changes the scanning position of the laser beam in a direction perpendicular to this main scanning mechanism, and an output of the transmitted light that has passed through the black matrix of the cathode ray tube. A diffuser plate that equalizes the light intensity, a light receiver that receives the transmitted light output of the diffuser plate, and a light receiver that binarizes the output of this light receiver using a reference voltage and generates a pulse width corresponding to the black matrix opening (hereinafter referred to as a stripe). It is composed of a signal processing section that calculates the stripe size from time, and a pass/fail judgment processing section that judges whether the black matrix of the cathode ray tube is pass/fail based on the output of the signal processing section.

Next, a conventional cathode ray tube black matrix dimension inspection apparatus will be described in detail with reference to the drawings. FIG. 6 is a diagram showing the basic structure of a conventional cathode ray tube black matrix dimension inspection device, which includes a laser 26, a converging lens 27, a scanning mechanism 28 that scans the black matrix 35 with laser light, and a scanning mechanism 28 that scans the transmitted light from the black matrix 35. A diffuser plate 30 for uniformization and a light receiver 3 for receiving transmitted light output
1, a signal processing unit 32 that determines the dimensions and shape of the black matrix 35 based on the output from the light receiver 31, and a pass/fail judgment unit 33 that makes a pass/fail judgment based on the output from the signal processing unit 32.
and a control section 34 that controls the main scanning mechanism 28.

FIG. 7 is a plan view of a striped black matrix, and FIG. 8 is a principle diagram for explaining the inspection method of the black matrix inspection apparatus of FIG. 6. black guard band 3
9 is scanned in the main scanning direction 36 of the black matrix 35 shown in FIG.
The output of 1 is binarized with a reference voltage of 40, and a stripe of 38
The stripe dimension is inspected from the time of the pulse waveform corresponding to .

[Problem to be solved by the invention]

In the conventional cathode ray tube black matrix dimension inspection device described above, since the target black matrix has a striped shape, the laser beam is scanned in the main scanning direction, which is a direction perpendicular to the stripes, and the main scanning direction is used to determine the stripe width. In the sub-scanning direction, which is perpendicular to the sub-scanning direction, only the stability of the scanning position is a problem, but in the case of a black matrix with a chain point shape, it is necessary to scan the laser beam on the chain points, and in the sub-scanning direction Positioning becomes a problem,
A conventional cathode ray tube black matrix dimension inspection device without a positional deviation detection mechanism and a position correction mechanism in the sub-scanning direction has a drawback in that it is difficult to apply to inspecting the hole diameter of a dot-shaped black matrix.

[Means to solve the problem]

The cathode ray tube chain point inspection device of the present invention includes a laser, a converging lens that converges the laser beam from the laser to a beam diameter slightly larger than the chain point diameter on the inner surface of the film of the black matrix, and a main scanning mechanism that scans in the array direction of the main scanning mechanism, a sub-scanning mechanism that changes the scanning position of the laser beam in the sub-scanning direction perpendicular to the scanning direction of the main scanning mechanism, and a wobbling mechanism that makes the laser beam minutely vibrate in the sub-scanning direction. a condensing lens that condenses the passing light that has passed through the chain points of the black matrix; a light receiving element that detects the optical output of the passing light that has been condensed by the condensing lens; A positional deviation detection processing unit that samples and holds the sample in synchronization with the frequency of minute vibrations caused by the mechanism, averages the output of this sample and hold using a filter, and detects positional deviation in the sub-scanning direction of the scanning laser beam, and this positional deviation detection processing. an operation position fine adjustment mechanism that corrects the position of the scanning laser beam in the sub-scanning direction based on the output from the section;
and a chain point detection processing section having a counter for counting the number of pulses converted into values.

〔Example〕

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a block diagram showing one embodiment of the present invention, and FIG. 2 is a perspective view showing a specific example of the structure of FIG. 1. The configuration of FIG. 1 will be explained with reference to FIG. 2. In FIG. 1, the laser 1 and the laser beam 16 are converged to a beam diameter slightly larger than the chain point diameter on the inner surface of the film of the black matrix 14. A main scanning mechanism 4 includes a converging lens 3, a mirror driver 12 that scans the converging laser beam 16 in a main scanning direction 17, which is the direction in which the chain points 15 of the black matrix 14 are arranged, and a main scanning mechanism 4 that is perpendicular to the main scanning direction 17. A sub-scanning mechanism 5 including a motor 11 that changes the scanning position of the laser beam 16 in a certain sub-scanning direction 18
and an AO deflector 2 that makes the laser beam 16 minutely vibrate in the sub-scanning direction 18 (hereinafter referred to as wobbling) and performs minute position correction in the sub-scanning direction 18, and the passing light that has passed through the chain points 15 of the black matrix 14. A Fresnel lens 13 that collects light, a light receiving element 7 that detects the optical output of the focused passing light, a sample hold circuit that samples and holds the output of the light receiving element 7 in synchronization with the wobbling frequency of the AO deflector 2, and A sub-scanning direction 18 of the laser beam 16 having a filter that averages the output of the sample and hold circuit.
and an adult fish detection processing section 9 having a counter circuit that converts the output of the light receiving element 7 into three values using two reference voltages and counts the number of output pulses.

Next, to proceed with the explanation of the operations shown in FIGS. 1 and 2, FIGS. 3(a), (b), and (c) show the scanning trajectory of the converged laser beam 16 with respect to the chain point 15. In FIG. 3(a), the laser beam 16 is directed to the center of the chain point 15.
If the center scanning positions 19a of
) is when the center scanning position 19b is shifted upward by ΔY with respect to the center of the chain point 15, and FIG. 3(C) is the center scanning position 1.
The case where 9c is shifted downward by ΔY with respect to the center of chain point 15 is shown. Also, FIG. 4(a).

(b) and (c) are shown in Figure 3 (a), (b) and (C).
) are the transmitted light outputs corresponding to each of them. The wobbling period is set at the chain point 15 in the main scanning direction 17.
When sample-holding is performed at times Ta and Tb in synchronization with the wobbling frequency as shown in FIG. On the other hand, if it shifts downward, it becomes smaller like P3. Therefore, the passing output is detected, the average positional deviation per scan in the main scanning direction 17 is determined through a filter, and the amount of offset and deviation of the drive voltage of the AO deflector 2 is adjusted based on the detected amount of positional deviation.
While performing position correction in the sub-scanning direction 18,
The laser beam 16 can be scanned stably. FIGS. 5(a) and 5(b) are diagrams showing the transmitted light output in FIG. 4(a) and the pulse output waveform obtained by converting this output into three values using two reference values P4 and P5, respectively. Since the transmitted light output corresponding to each chain point 15 changes depending on the size and shape, only the chain points 15 that fall within the allowable dimensional tolerance can be counted.

〔Effect of the invention〕

The black matrix adult fish inspection device of the present invention does not have the positional deviation detection means in the sub-scanning direction perpendicular to the main scanning direction and the positional deviation correction means, which the conventional striped black matrix size inspection device using laser beam scanning does not have. On the other hand, by performing minute vibrations in the sub-scanning direction to detect and correct positional deviations in the sub-scanning direction, there is an effect that it can be applied to hole-shaped black matrices.

[Brief explanation of drawings]

FIG. 1 is a block diagram of one embodiment of the present invention, and FIG. 2 is a block diagram of an embodiment of the present invention.
FIG. 3, FIG. 4, and FIG. 5 are diagrams for explaining the operation of FIG. 1. FIG. 6 is a diagram of the configuration principle of a conventional black matrix dimension inspection device. ,
7 and 8 are diagrams for explaining the operation of FIG. 6. 1.26... Laser, 2... AO deflector, 3.27
... Converging lens, 4... Main scanning mechanism, 5... Sub-scanning mechanism, 6... Condensing lens, 7... Light receiver, 8...
・Positional deviation detection processing section, 9...Adult fish detection processing section, 10
．． 41... Light shielding plate, 11... Motor, 12... Mirror driver, 13... Fresnel lens, 1 4... Black matrix, 5... Adult fish, 6... Laser light.

Claims (1)

[Claims] A laser, a converging lens that converges the laser light from the laser onto the inner surface of the black matrix film to a beam diameter slightly larger than the film dot diameter, and a main scanning mechanism that scans the laser light in the direction in which the film dots of the black matrix are arranged. , a sub-scanning mechanism that changes the scanning position of the laser beam in the sub-scanning direction perpendicular to the scanning direction by this main-scanning mechanism, a wobbling mechanism that makes the laser beam minutely vibrate in the sub-scanning direction, and a laser beam that passes through the film points of the black matrix. A condensing lens that condenses the passing light, a light receiving element that detects the optical output of the passing light condensed by the condensing lens, and a light receiving element that synchronizes the output of the light receiving element with the frequency of the minute vibration caused by the wobbling mechanism. A positional deviation detection processing section that samples and holds and averages the output of this sample and hold using a filter to detect the positional deviation of the scanning laser beam in the sub-scanning direction. It is characterized by including an operation position fine adjustment mechanism that performs position correction of the laser beam, and a film point detection processing unit that has a counter that counts the number of pulses obtained by converting the output of the light receiving element into three values using two reference values. Black matrix film spot inspection device.