JPH0321746U - - Google Patents
Info
- Publication number
- JPH0321746U JPH0321746U JP8153389U JP8153389U JPH0321746U JP H0321746 U JPH0321746 U JP H0321746U JP 8153389 U JP8153389 U JP 8153389U JP 8153389 U JP8153389 U JP 8153389U JP H0321746 U JPH0321746 U JP H0321746U
- Authority
- JP
- Japan
- Prior art keywords
- load cell
- conductor
- thin film
- organic insulating
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 239000010408 film Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009966 trimming Methods 0.000 description 1
Landscapes
- Measurement Of Force In General (AREA)
Description
第１〜８図は本考案の実施例を示すもので、第
１図はロードセルの正面図、第２図は同平面図、
第３図は薄膜回路体付近の拡大平面図、第４図は
該ロードセルに設けられているホイートストンブ
リツジ回路の回路図、第５図はゲージ抵抗部付近
の拡大平面図、第６図は第５図を−線で切断
した中間省略拡大断面図、第７図はトリミング抵
抗部付近の拡大平面図、第８図は第７図を−
線で切断した中間省略拡大断面図である。第９，
１０図は問題点の説明図である。
２……起歪体、１１……薄膜回路体、１７ａ２
，１７ａ３……導体部、２１１〜２１４……ゲー
ジ抵抗部、２３……有機絶縁膜、２８……中間部
。
Figures 1 to 8 show an embodiment of the present invention, where Figure 1 is a front view of the load cell, Figure 2 is a plan view of the same,
FIG. 3 is an enlarged plan view of the vicinity of the thin film circuit body, FIG. 4 is a circuit diagram of the Wheatstone bridge circuit provided in the load cell, FIG. 5 is an enlarged plan view of the vicinity of the gauge resistance section, and FIG. 5 is an enlarged cross-sectional view taken along the - line, FIG. 7 is an enlarged plan view of the vicinity of the trimming resistor, and FIG. 8 is an enlarged cross-sectional view of FIG.
It is an enlarged sectional view cut along a line with the middle omitted. 9th,
FIG. 10 is an explanatory diagram of the problem. 2... Strain body, 11... Thin film circuit body, 17a 2
, 17a 3 ... conductor section, 21 1 to 21 4 ... gauge resistance section, 23 ... organic insulating film, 28 ... intermediate section.
Claims (1)
機絶縁膜上に、少なくとも上記歪検出面の歪に応
じて抵抗値が変化する複数のゲージ抵抗部とそれ
らの抵抗部を接続する導体部とを有して、ホイー
トストーンブリツジ回路を構成する薄膜回路体を
設けてなるロードセルであつて、上記薄膜回路体
におけるゲージ抵抗部と導体部との間に設けた中
間部の幅が、抵抗部側から導体部側に向けて漸次
拡大されていることを特徴とするロードセル。 An organic insulating film is provided on the strain detection surface of the flexure element, and on this organic insulating film, a plurality of gauge resistance sections whose resistance value changes at least according to the strain on the strain detection surface and a conductor connecting these resistance sections are provided. A load cell is provided with a thin film circuit body that constitutes a Wheatstone bridge circuit and has a width of an intermediate portion provided between a gauge resistor part and a conductor part in the thin film circuit body. , a load cell characterized in that the load cell is gradually expanded from the resistor side to the conductor side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8153389U JPH0321746U (en) | 1989-07-10 | 1989-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8153389U JPH0321746U (en) | 1989-07-10 | 1989-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0321746U true JPH0321746U (en) | 1991-03-05 |
Family
ID=31627569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8153389U Pending JPH0321746U (en) | 1989-07-10 | 1989-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0321746U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6225977A (en) * | 1985-06-29 | 1987-02-03 | Agency Of Ind Science & Technol | Novel amylase |
| JPS6337227A (en) * | 1986-07-31 | 1988-02-17 | Teraoka Seiko Co Ltd | Load cell |
| JPS63273029A (en) * | 1987-04-30 | 1988-11-10 | Kyocera Corp | Load cell |
-
1989
- 1989-07-10 JP JP8153389U patent/JPH0321746U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6225977A (en) * | 1985-06-29 | 1987-02-03 | Agency Of Ind Science & Technol | Novel amylase |
| JPS6337227A (en) * | 1986-07-31 | 1988-02-17 | Teraoka Seiko Co Ltd | Load cell |
| JPS63273029A (en) * | 1987-04-30 | 1988-11-10 | Kyocera Corp | Load cell |
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